Birch, Stewart, Kolasch & Birch, LLP
Method for making n-type semiconductor diamond
 A method for making n-type semiconducting diamond by use of CVD in which n-type impurities are doped simultaneously with the deposition of diamond. As the n-type impurities, an Li compound and a B compound, both, are used at once. After doping, a diamond film thus obtained is etched to peel off its surface. The n-type semiconducting diamond is superior in specific resistivity, 10.sup.-2 .OMEGA.cm or less. 
Korea Advanced Institute of Science and Technology
H H C C
H01L H01L C30B C30B
inventional inventional inventional inventional
Jin Jung Keun Woong Sun
Yu Kim Lee