Pentachlorodisilane
Disclosed is a Silicon Precursor Compound for deposition, the Silicon Precursor Compound comprising pentachlorodisilane; a composition for film forming, the composition comprising the Silicon Precursor Compound and at least one of an inert gas, molecular hydrogen, a carbon precursor, nitrogen precursor, and oxygen precursor; a method of forming a silicon-containing film on a substrate using the Silicon Precursor Compound, and the silicon-containing film formed thereby.
Dow Silicones Corporation
H H H C H H C H H C C C H C
H01L H01L H01L C23C H01L H01L C23C H01L H01L C23C C23C C23C H01L C23C
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Xiaobing
Zhou