Rankin, Hill & Clark LLP
Semiconductor device and manufacturing method thereof
A semiconductor chip 11 comprising an element formation layer which is formed on a first main surface 35A of a semiconductor substrate 35 and has a semiconductor element, through electrodes 15, 16 which are electrically connected to the semiconductor element and extend through the semiconductor chip 11, and a patch antenna 33 formed on the side of a second main surface 35B of the semiconductor substrate 35 are disposed, and the patch antenna 33 is electrically connected to the through electrode 15 electrically connected to a line for power feeding of the semiconductor element.
Shinko Electric Industries Co., Ltd.
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Tomoharu
Fujii