Semiconductor device and method of manufacturing a semiconductor device
A semiconductor device includes a memory region, a plurality of bit lines in the memory region, a first low-k dielectric layer on each sidewall of each bit line, a plurality of storage node regions between the bit lines, and a second low-k dielectric layer surrounding each storage node region.
Fujian Jinhua Integrated Circuit Co., Ltd. UNITED MICROELECTRONICS CORP.
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Chien-Ting Chun-Yuan Ying-Chiao Tsung-Ying Li-Wei Shih-Fang Yu-Chieh
Ho Wu Wang Tsai Feng Tzou Lin