Cantor Colburn LLP
Exposure mask and method of fabricating display panel using the same
An exposure mask for forming a pattern in a photosensitive material includes a mask substrate which is disposed facing the photosensitive material; a body portion on the mask substrate and corresponding to a shape of the pattern at a distance furthest from the exposure mask; and a plurality of branch portions on the mask substrate and each extending outward from an outer edge of the body portion, in a plan view. The pattern comprises a contact hole of a display device.
SAMSUNG DISPLAY CO., LTD.
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G03F G03F G03F
inventional inventional inventional
Jin-Su Jungi Taegyun
Byun Kim Kim