Rosenberg, Klein & Lee
Microprobe array structure and method for manufacturing the same
A microprobe array structure with self-stabilization capability and a method for manufacturing the same are proposed. The microprobe array structure is used to sense various biopotential signals, and is characterized in that the etching parameters are controlled during etching to manufacture a microprobe structure with a reduced bottom cross section so that the microprobe can be firmly stabilized in the skin tissue. Moreover, a conducting layer is formed on the microprobe to sense signals. A design of electric isolation between microprobes is also proposed. The microprobe array can therefore be used for the measurement of various biopotential signals, and can also be used as a stimulus.
National Chiao Tung University
A A A A
A61B A61B A61B A61B
inventional additional inventional additional
Jin-Chern Chen-Chun Chih-Wei
Chiou Hung Chang