Baker & Hostetler LLP
Vacuum pump with abatement function
A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The abatement part is selected from a plurality of abatement parts having different treatment types of exhaust gas and/or different treatment amounts of exhaust gas and/or different treatment performances of exhaust gas.
EBARA CORPORATION
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Kohtaro Hideo Keiichi Seiji Toyoji Toshiharu Takashi Tetsuro Yasuhiko
Kawamura Arai Ishikawa Kashiwagi Shinohara Nakazawa Kyotani Sugiura Suzuki