F. Chau & Associates, LLC
Wafer test equipment and method of aligning test equipment
Wafer test equipment includes a probe station having a wafer chuck for supporting a wafer, a test head disposed on the probe station, a manipulator for moving the test head to and from an upper surface of the probe station, and an alignment monitoring member for monitoring an alignment of the test head docked to the probe station.
Samsung Electronics Co., Ltd.
G
G01R
inventional
Young-Jong Jung-Nam
Kim Kim