Oliff & Berridge, PLC
Method of making iron silicide and method of making photoelectric transducer
A solar cell comprises a substrate, and a metal electrode layer, a p-i-n junction, and a transparent electrode layer which are successively laminated on the substrate. The p-i-n junction comprises an n layer, an i layer, and a p layer which are laminated in this order. The i layer is made of an amorphous iron silicide film containing hydrogen in accordance with the present invention, and is formed on the n layer by supplying an iron vapor into a plasma of a material gas in which a silane type gas and a hydrogen gas are mixed. In the i layer, dangling bonds of silicon atoms and/or iron atoms are terminated with hydrogen, whereby a number of trap levels which may occur in the amorphous iron silicide film are eliminated.
TDK Corporation Semiconductor Energy Laboratory Co., Ltd.
Y C H C
Y02E C23C H01L C23C
additional inventional inventional inventional
Hiroshi Kazuo Hisao
Yamada Nishi Morooka