Maschoff Brennan
Automatic calibration optical interferometer and automatic calibration method of optical interferometer
An automatic calibration optical interferometer comprises: a light source; an optical interference assembly, which divides a low coherent light into a first and a second incident light; an optical sampling assembly, with a first end receiving the first incident light and a partially reflective window at the second end being configured to divide the first incident light into a first reflected light and a first penetrating light configured to be emitted to the test sample; an optical reference assembly, with a reference mirror and an actuator, wherein the optical sampling assembly emits the second incident light to the reference mirror to generate a second reflected light, and the actuator moves the reference mirror; a polychromator, which outputs a displacement signal according to an optical path difference variation between the first and second reflected lights; and a displacement controller, which controls the actuator according to the displacement signal.
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
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G01B G01B G01B G01B G01B
inventional inventional inventional additional inventional
Ting Wei Cheng Yi Chi Shen Hung Chih
Chang Chang Chang Chiang