Lee & Morse, P.C.
Laser patterning examining apparatus
A laser patterning examining apparatus includes a fixing plate, a rotating plate configured to move vertically with respect to the fixing plate and to rotate, a housing connected to the rotating plate, a laser emission unit over the fixing plate and emits a laser beam, a prism unit on the housing and refracts a first portion of the laser beam received from the laser emission unit and transmits a second portion of the laser beam, and a beam profiler on the housing and analyzes the pattern of the first portion refracted by the prism unit.
SAMSUNG DISPLAY CO., LTD.
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Jin-Hong Seok-Joo
Jeun Lee