Oliff & Berridge, PLC
Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted
An exposure/imaging apparatus and method effects projection exposure while moving a first object and a second object in a predetermined moving direction, effecting projection exposure of an image of the first object onto the second object. An adjusting member is used to adjust imaging characteristics of a projection optical system that is used to perform the projection exposure.
Nikon Corporation
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Masato Kinya Masaki Hiroshi Hiroshi Masashi
Kumazawa Kato Kato Shirasu Chiba Tanaka