McClure, Qualey & Rodack, LLP
Photomask transportation stage in semiconductor fabrication and method for using the same
A transportation stage for transporting a photomask is provided. The transportation stage includes a vacuum source and a supporting plate. The supporting plate has a number of passages connected to the vacuum source. The transportation stage further includes a membrane positioned on the supporting plate. A number of through holes are formed on a middle region of the membrane and communicating with the passages. The transportation stage also includes an acoustic wave transducer positioned on the membrane and is configured generate an acoustic wave along the membrane.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
G H
G01L H01L
inventional inventional
Yu-Ching Yu-Piao Yu-Wei
Lee Fang Liao