Chen Yoshimura LLP
Piezoelectric thin film resonator and filter
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode located to sandwich the piezoelectric film; a load film formed from patterns in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, wherein the patterns are formed so as to surround a center of the resonance region and intersect with a pathway extending from the center to an outer periphery of the resonance region.
TAIYO YUDEN CO., LTD.
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Masanori Tokihiro Shinji Jiansong Kenya
Ueda Nishihara Taniguchi Liu Hashimoto