Oblon, McClelland, Maier & Neustadt, L.L.P.
Microstructure device and method for manufacturing the same
A microstructure body according to an embodiment includes a stacked body. The stacked body includes a plurality of unit structure bodies stacked periodically along a first direction. A configuration of an end portion of the stacked body in a second direction is a stairstep configuration including terraces formed every unit structure body. The second direction intersects the first direction. A first distance in a third direction between end edges of two of the unit structure bodies facing the third direction is shorter than a second distance in the second direction between end edges of the two of the unit structure bodies facing the second direction. The third direction intersects both the first direction and the second direction.
Kabushiki Kaisha Toshiba
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H01L H01L H01L
inventional inventional inventional
Toshiya Yuko Takaki Yuji Chikaaki
Kotani Kono Hashimoto Setta Kodama