Cantor Colburn LLP
Vertical FET with strained channel
Provided is a method for forming a semiconductor structure. In embodiments of the invention, the method includes depositing a strain relaxed buffer (SRB) layer over a substrate; recessing the SRB layer on a first region of the structure; and forming a first semiconductor layer on the first region of the structure and depositing one or more mandrels over the first semiconductor layer of the first region of the structure. The method further includes depositing a spacer layer over the one or more mandrels, the spacer layer including vertical portions and horizontal portions; and removing the one or more mandrels and the horizontal portions of the spacer layer. The method further includes performing a reactive ion etch to remove material unprotected by the spacer to form a first channel for a p-type vertical field effect transistor from the first semiconductor layer. The first channel has a compressive strain.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Shogo Choonghyun Kangguo Juntao
Mochizuki Lee Cheng Li