Brinks Hofer Gilson & Lione
Apparatus for working and observing samples and method of working and observing cross sections
The apparatus for working and observing samples comprises a sample plate on which a sample is to be placed; a first ion beam lens barrel capable of irradiating a first ion beam over a whole predetermined irradiation range at one time; a mask that can be arranged between the sample plate and the first ion beam lens barrel, and shields part of the first ion beam; mask-moving means capable of moving the mask; a charged particle beam lens barrel capable of scanning a focused beam of charged particles in the range irradiated with the first ion beam; and detection means capable of detecting a secondarily generated substance.
SII Nano Technology Inc.
G H H
G01N H01J H01J
additional additional inventional
Toshiaki Junichi Haruo
Fujii Tashiro Takahashi