Method of forming thin-film structure by oblique-angle deposition
A method of forming thin-film structure by oblique-angle deposition is provided. The method includes the steps of: evaporating target source in a chamber by an electron beam evaporation system, and introducing process gas into the chamber and adjusting tilt angle of the evaporation substrate and controlling temperature in the chamber during evaporation to form thin-film on a evaporation substrate by oblique-angle deposition, and then annealing the evaporation substrate to form a thin-film having porous nanorod microstructure.
National Chiao Tung University
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Y10T H01L H01L Y02E C23C H01L C23C Y10T H01L
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Chin-Sheng Pei-Chen Hao-Chung Chia-Hua Ching-Hua
Yang Yu Kuo Chang Chiu