Sterne, Kessler, Goldstein & Fox P.L.L.C.
Method of forming oxide-ceramics film
A process for the formation of an oxide ceramic thin film, which permits the control of film oxygen content and can give a film reduced in oxygen deficiency. The process is characterized in that the step of forming an amorphous thin film, the step of heating the thin film to crystallize it or the step of heat-treating the crystallized film is conducted in a moisture-containing atmosphere.
Seiko Epson Corporation
H C C H H H H H C H
H01L C23C C23C H01L H01L H01L H01L H01L C23C H01L
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Tsutomu Kazumasa Kouji Hong Masato
Nishiwaki Hasegawa Sumi Qiu Shimada