Thomas, Kayden, Horstemeyer & Risley
Wafer-based planning methods and systems for batch-based processing tools
Computer-implemented wafer-based planning methods for batch-based processing tools. Tool groups are appended in a tool group level of planning data provided by a MES for converting planning data from batch-based to wafer-based data. The planning data with appended tool group is applied to dispatch processing tools.
Taiwan Semiconductor Manufacturing Co., Ltd.
G
G06Q
inventional
Ming-Feng Oliver Chao-Fan Gwo-Chiang Ju-Kau
Ou Wu Chang Fang Chen