Gas distributor used in wafer carriers
The present invention relates to gas distributors used in wafer carriers. The gas distributors comprise a body having an interior space, a separator configured at the front side of the body in the interior space, and an air inlet connected with the body. One edge of the separator and the front side of the body together form a passage. The configuration of the passage in the gas distributors enables the gas distributors to evenly distribute gases.
GUDENG PRECISION INDUSTRIAL CO., LTD.
Y H
Y10T H01L
additional inventional
Ming-Chien Chen-Hao Jui-Ken Chin-Ming
Chiu Chang Kao Lin