Seyfarth Shaw LLP
Compound semiconductor transistor integration with high density capacitor
A metal-insulator-metal (MIM) capacitor includes a compound semiconductor substrate. The MIM capacitor includes a collector contact layer on the compound semiconductor substrate, a first dielectric layer on the collector contact layer, a conductive electrode layer on the first dielectric layer, and a second dielectric layer on the conductive electrode layer. The MIM capacitor includes a first conductive interconnect on the second dielectric layer, a third dielectric layer on the first conductive interconnect, and a second conductive interconnect on the third dielectric layer. A first capacitive component includes the collector contact layer, the conductive electrode layer, and the first dielectric layer. A second capacitive component includes the first conductive interconnect, the conductive electrode layer and the second dielectric layer. A third capacitive component includes the second conductive interconnect, the first conductive interconnect, and the third dielectric layer. The first, second, and third capacitive components are arranged in parallel with each other.
QUALCOMM Incorporated
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Bin Gengming Xia
Yang Tao Li