Tung & Associates
Method and apparatus for measuring a gap
 A method and apparatus for measuring a gap between two opposing surfaces by utilizing a dial gauge instead of feeler gauges is disclosed. The apparatus includes a mounting block, an extension arm and a dial gauge which may be used to measure any gap distance between about 0.01 mm and about 10 mm. The method is carried out by first zeroing the dial gauge by utilizing a calibration block which has the same thickness as the gap distance to be measured. The novel method and apparatus can be used to replace a conventional feeler gauge method and achieve the benefits of greatly improved precision in measurement, a short measurement time required and completely eliminating human error due to operator dependency. 
Taiwan Semiconductor Manufacturing Company, Ltd
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H01L G01B G01B G01B
additional inventional inventional inventional
Yung-Dar Shiuh-Shzng Jung-Hao
Chen Chang Hsiue