Ladas & Parry LLP
Apparatus for generating extreme ultra-violet beam using multi-gas cell modules
Provided is an extreme ultra-violet (EUV) beam generation apparatus using multi-gas cell modules in which a gas is prevented from directly flowing into a vacuum chamber by adding an auxiliary gas cell serving as a buffer chamber to a main gas cell, a diffusion rate of the gas is decreased, a high vacuum state is maintained, and a higher power EUV beam is continuously generated.
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
H H
H05G H05G
inventional inventional
Yong Soo Jae Hun Joon Mo Young Tae Min Ah Seok Deok Ha Chul Ki Young Min Min Chul
Kim Kim Ahn Byun Seo Lee Woo Kim Jhon Park