Miles & Stockbridge P.C.
Processing apparatus and method using a scanning electron microscope
The present invention provides a processing apparatus using a scanning electron microscope, which includes the scanning electron microscope having an electron optical system radiating and scanning a focused electron beam on a sample placed on a stage to image the sample, and an image processing/control section which controls the scanning electron microscope and processes the image obtained by imaging with the scanning electron microscope. The electron optical system of the scanning electron microscope has image shift electrodes comprised of electrostatic electrodes, the image shift electrodes moving a position at which to apply the focused electron beam onto the sample with the stage stopped to thereby shift a region in which the sample is to be imaged.
Hitachi High-Technologies Corporation
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inventional inventional inventional additional additional additional
Ryo Hiroyuki Wen Hajime
Kadoi Takahashi Li Kawano