Optoelectronic devices having electrode films and methods and system for manufacturing the same
A method and system for DC magnetron sputtering deposition of films on plastic substrates. The method includes using a shield to block deposition in a spatial region corresponding to a plasma region formed during magnetron sputtering. An optoelectronic device including an amorphous electrode film is also disclosed.
General Electric Company
C C C
C23C C23C C23C
inventional inventional inventional
Ahmet Gun Jie Min
Erlat Liu Yan