Stites & Harbison PLLC
Reflective mask
A reflective mask includes a substrate, a first reflective multi-layer, a second reflective multi-layer, a first patterned absorber layer and a second patterned absorber layer. The substrate includes a first surface and a second surface opposite to the first surface. The first reflective multi-layer is formed on the first surface of the substrate. The second reflective multi-layer is formed on the second surface of the substrate. The first patterned absorber layer is formed on the first reflective multi-layer. The second patterned absorber layer is formed on the second reflective multi-layer.
Nanya Technology Corporation
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Chai Ming
Chang