Myers Bigel, P.A.
Active pattern structure and semiconductor device including the same
An active pattern structure includes a lower active pattern protruding from an upper surface of a substrate in a vertical direction substantially perpendicular to an upper surface of the substrate, a buffer structure on the lower active pattern, at least a portion of which may include aluminum silicon oxide, and an upper active pattern on the buffer structure.
Samsung Electronics Co., Ltd.
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Sangmoon Kyungin Seunghun
Lee Choi Lee