Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
Microprobe, recording apparatus, and method of manufacturing microprobe
According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.
Kabushiki Kaisha Toshiba The University of Tokyo
G Y G G G
G01R Y10T G01R G11B G01R
inventional additional additional inventional additional
Yongfang Yasushi Gen Masakazu Akihiro
Li Tomizawa Hashiguchi Sugiyama Koga