Fitzpatrick, Cella, Harper & Scinto
Method of producing zinc oxide thin film, method of producing photovoltaic device and method of producing semiconductor device
The present invention provides a method of producing a zinc oxide thin film in which a current is passed between a conductive substrate immersed in an aqueous solution containing at least zinc ions, ammonium ions and zinc ammonia complex ions, and an electrode as an anode immersed in the aqueous solution to form a zinc oxide thin film on the conductive substrate. This method stabilizes formation of the zinc oxide thin film and improves adhesion between the thin film and the substrate.
Canon Kabushiki Kaisha
H H Y H C
H01L H01L Y02E H01L C25D
inventional inventional additional inventional inventional
Masafumi Yuichi
Sano Sonoda