Sughrue, Mion, Zinn, Macpeak & Seas, PLLC
Piezoelectric thin-film device process for manufacturing the same, and ink-jet recording head using the same
 A piezoelectric thin-film device includes: a substrate and a piezoelectric thin film formed on the substrate, wherein a thickness of the piezoelectric thin film is 1 to 10 .mu.m, a crystal grain size of the piezoelectric thin film is 0.05 to 1 .mu.m, and a surface roughness (Rmax) of the piezoelectric thin film is no more than 1 .mu.m. 
Seiko Epson Corporation
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Masami Tsutomu Kouji Masato
Murai Nishiwaki Sumi Shimada