Sherman & Shalloway
Discharge exciting excimer laser device
 A discharge exciting excimer laser device comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode. The dielectric is in a cylindrical form and has a side opposed to one of the main discharge electrodes, which side is formed into a flat plate-like portion. The auxiliary electrode is embraced within the dielectric leaving a space and is opposed to one of the main discharge electrodes with the flat plate-like portion of the dielectric sandwiched therebetween. Such a construction increases laser output and improves insulating performance. 
Mitsui Petrochemical Industries, Ltd.
H
H01S
inventional
Yasuo Mitsugu Yuichiro Hideaki Shuntaro Ken Michito
Oeda Terada Terashi Shibata Watanabe Ohmata Uehara