Ladas & Parry LLP
TFT-LCD array substrate and manufacturing method thereof
A liquid crystal display (LCD) array substrate and a manufacturing method thereof are provided. The manufacturing method comprises depositing a semiconductor layer, a doped semiconductor layer and a metal film for source and drain electrodes sequentially on a base substrate and then forming a data line, a source electrode, a drain electrode and a thin film transistor (TFT) channel region by a first patterning process; depositing a first insulating film and a gate metal film sequentially and then forming a gate line and a gate electrode by a second patterning process and forming an insulating layer via hole in the first insulating layer above the drain electrode; depositing a transparent conductive film and then forming a pixel electrode by a third patterning process; and forming a second insulating layer.
Beijing Boe Optoelectronics Technology Co., Ltd.
H G
H01L G02F
inventional inventional
Wei Jae Yun Yunyou Hongxi Zhi
Li Jung Zheng Xiao Hou