Lee & Morse, P.C.
Vertical-type semiconductor device and method of manufacturing the same
A vertical-type semiconductor device includes a semiconductor substrate having a cell region and a peripheral circuit region, a wordline structure on the cell region of the semiconductor substrate, the wordline structure including a plurality of wordlines stacked on top of each other, a semiconductor structure through the wordline structure, a gate dielectric between the wordline structure and the semiconductor structure, and a dummy wordline structure on the peripheral circuit region, the dummy wordline structure having a vertical structure and including same components as the wordline structure.
Samsung Electronics Co., Ltd.
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Seung-Jun Woonkyung
Lee Lee