Slater Matsil, LLP
Capacitor having a graphene structure, semiconductor device including the capacitor and method of forming the same
A capacitor includes a first graphene structure having a first plurality of graphene layers. The capacitor further includes a dielectric layer over the first graphene structure. The capacitor further includes a second graphene structure over the dielectric layer, wherein the second graphene structure has a second plurality of graphene layers.
Taiwan Semiconductor Manufacturing Company, Ltd.
H H H H C H H H H H H H C H H
H01L H01G H01L H01L C01B H01L H01L H01L H01G H01L H01L H01L C01B H01L H01L
additional inventional inventional inventional additional additional additional additional inventional additional additional additional additional inventional inventional
Chun-Chieh Clement Hsingjen Chih-Hsin Po-Wen Chewn-Pu Chi-Feng Fu-Lung Huan-Neng Chao-Ching
Lu Wann Ko Chiu Jou Huang Hsueh Chen Cheng