Pearne & Gordon LLP
Probe apparatus and substrate transfer method
A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
Tokyo Electron Limited
G
G01R
inventional
Tadashi Hiroshi Masaru Kazuya Yasuhito
Obikane Yamada Suzuki Yano Yamamoto