Stanzione & Kim, LLP
Apparatus to manufacture semiconductor
An apparatus to manufacture a semiconductor includes a plasma-limiting device to limit a plasma region in a reaction chamber. The plasma-limiting device includes a first limiting device to limit the plasma region in the reaction chamber to a first plasma region, a second limiting device to limit the plasma region in the reaction chamber to a second plasma region having an area larger than an area of the first plasma region, and a driving device to simultaneously move the first and second limiting devices to vary the plasma region.
Samsung Electronics Co., Ltd.
H H H
H01L H01J H01J
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Jung Wook Tae Yong
Kim Kwon