Sughrue Mion, PLLC
Chip, device using the chip, and method of using the same
A channel formed on a chip is opened without contaminating contents of the channel. Channels (107a) and (107b) provided on a substrate (103) are covered by pressing a lid (113) composed of a resin layer (102) and a plate-like lid (101) to a surface of the substrate (103). A fixing device has a retainer plate (104), which retains the plate-like lid (101) of a chip (112), a board (108) on which the substrate (103) is placed, and a screw (106). When covering the channels (107a) and (107b), the screw (106) is fastened and the lid (113) is pressed to the substrate (103) to be fixed. And, when opening an upper portion of the channels (107a) and (107b), the screw (106) is turned upward and a pressure is released, and the lid (113) is removed from the upper potion of the substrate (103).
NEC Corporation
B B B B B B B B G B
B01L B82Y B82Y B01L B01L B01L B01L B01L G01N B01L
inventional additional additional additional additional inventional additional inventional inventional additional
Hisao Machiko Noriyuki Kazuhiro Toru Masakazu Wataru
Kawaura Fujita Iguchi Iida Sano Baba Hattori