WPAT, PC
Automatic detecting method and automatic detecting apparatus using the same
An automatic detecting method and an automatic detecting apparatus using the same are provided. The automatic detecting apparatus includes an inputting unit, a dividing unit, a contouring unit, a range analyzing unit, a boundary analyzing unit, an edge detecting unit, an expanding unit and an overlapping unit. The dividing unit is used for dividing an overlooking image into four clusters via a clustering algorithm. The contouring unit is used for obtaining a contour. The range analyzing unit is used for obtaining a detecting range. The boundary analyzing unit is used for obtaining a circular boundary in the detecting range. The edge detecting unit is used for obtaining a plurality of edges in the circular boundary. The expanding unit is used for expanding the edges to obtain a plurality of expanded edges. The overlapping unit is used for overlapping the expanded edges and the contour to obtain a defect pattern.
UNITED MICROELECTRONICS CORP.
G G H H H H G G H G G G H
G06T G06T H01L H01J H01L H01L G01N G06T H01J G06T G06T G06T H01J
additional inventional additional additional additional inventional additional inventional additional inventional inventional inventional additional
Chia-Chi Chen-Hui Tzu-Ping Ju-Te Cheng-Hsien Ching-Hsing
Chang Huang Kao Chen Chen Hsieh