Harness, Dickey & Pierce, P.L.C.
Method of manufacturing TFT and array TFT
A method of manufacturing a thin film transistor includes sequentially forming a gate and at least one insulation layer on a substrate, forming a source electrode and a drain electrode on the at least one insulation layer, and forming a channel layer formed of a semiconductor on a part of the source electrode and the drain electrode, wherein the gate, the source electrode, and the drain electrode are formed by using a hybrid inkjet printing apparatus.
Samsung Electronics Co., Ltd.
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inventional inventional inventional
Jae-woo Joong-hyuk Seung-ho Sung-gyu Young-ki
Chung Kim Lee Kang Hong