Tung & Associates
Automated processing liquid drain system
 The present invention discloses an automated processing liquid drain system that utilizes a series of processing liquid drain tanks and at least two waste collection tanks that are in fluid communication with the processing liquid drain tanks such that when a high liquid level sensor mounted on the drain tank is activated, the spent processing liquid collected from processing machines can be transferred to one of the waste collection tanks and thus preventing overflow in the processing liquid drain tanks. 
Vanguard International Semiconductor Corporation
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Yung-Cheng Jyh-Yeong
Chen Tsay