Anova Law Group, PLLC
Junction-less transistors and fabrication method thereof
A method is provided for fabricating a junction-less transistor. The method includes providing a semiconductor substrate having a dielectric layer; and forming a semiconductor layer including a first heavily doped layer formed on the dielectric layer, a lightly doped layer formed on the first heavily doped layer and a second heavily doped layer formed on the lightly doped layer. The method also includes etching the semiconductor layer and the dielectric layer to form trenches to expose side surfaces of a portion of the semiconductor layer and a portion of the dielectric layer; and removing the portion of the dielectric layer between the adjacent trenches to form a chamber. Further, the method includes forming a gate structure around the portion of the semiconductor layer between the adjacent trenches; and forming a source region and a drain region in the semiconductor layer at both sides of the gate structure.
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
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Jinhua
Liu