McDermott Will & Emery LLP
Integrated circuit and manufacturing method thereof
An integrated circuit includes a stacked MIM capacitor and a thin film resistor and methods of fabricating the same are disclosed. A capacitor bottom metal in one capacitor of the stacked MIM capacitor and the thin film resistor are substantially at the same layer of the integrated circuit, and the capacitor bottom metal and the thin film resistor are also made of substantially the same materials. The integrated circuit with both of a stacked MIM capacitor and a thin film resistor can be made in a cost benefit way accordingly, so as to overcome disadvantages mentioned above.
Taiwan Semiconductor Manufacturing Co., Ltd.
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inventional additional inventional inventional inventional inventional
Cheng-Chang Wei-Kung Shao-Yu Hsiang-Chi Chung-Long Chun-Hung Yi-Sin Kuan-Chi Ching-Chung Chih-Ping
Hsu Tsai Chen Chen Chang Chen Wang Tsai Hsu Chao