Shapiro and Shapiro
Fine positioning device, as for the stage of a scanning tunneling microscope
 A fine positioning device such as a stage device for placing a probe or a sample thereon in a scanning tunneling microscope comprises a fixed member, a first structure spring stage having a first base member integral with the fixed member, a first moving member and a first resilient member for resiliently coupling the first base member and the first moving member such that they are displaceable relative to each other in a predetermined direction, a first actuator for displacing the first moving member relative to the base member in the predetermined direction, a second structure spring stage having a second base member integral with the first moving member, a second moving member and a second resilient member for resilient coupling the second base member and the second moving member such that they are displaceable relative to each other in a direction parallel to the predetermined direction, and a second actuator for displacing the second moving member relative to the second base member in the parallel direction. 
Toshiba Corporation Nikon Corporation Japan Ministry of International Trade and Industry
H G G Y G
H01J G01Q G01B Y10S G02B
inventional inventional inventional additional additional
Nobuhiro Masayuki Hirofumi Fumihiko
Tsuda Miyashita Yamada Ishida