Muncy, Geissler, Olds & Lowe, P.C.
Substrate with crystallized silicon film and manufacturing method thereof
The present invention relates to a substrate with a crystallized silicon film and manufacturing method thereof, wherein the substrate with the crystallized silicon film comprises: a substrate, which is a polymer substrate; and a crystallized silicon film, which is formed on at least one surface of the substrate, wherein the crystallized silicon film comprises a plurality of silicon crystals with column structures, and the crystallinity of the crystallized silicon film is higher than 90%.
NATIONAL TSING HUA UNIVERSITY
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Ping-Yen Nyan-Hwa Chi-Young
Hsieh Tai Lee