Jordan and Hamburg
Polishing system for polishing wafer
 In the polishing system of the present invention, a adhering unit adheres a wafer on a carrying plate using liquid. A polishing unit polishes the wafer using a polishing plate. A feeding unit conveys the carrying plate from the adhering unit to the polishing unit. A dismounting unit removes the wafer from the carrying plate. A first discharging unit conveys the carrying plate from the polishing unit to the dismounting unit. A cleaning unit cleans the vacant carrying plate. A second discharging unit conveys the carrying plate from the dismounting unit to the cleaning unit. A third discharging unit conveys the carrying plate from the cleaning unit to the adhering unit. The units are formed into a loop lines so that the carrying plate is circulated in the loop line and the wafers are polished therein. 
Fujikoshi Kikai Kogyo Kabushiki Kaisha
B B
B23Q B24B
inventional inventional
Masanori Yasuhide Makoto Toshihisa Masahiro Toshiaki Mitsue Yoshio Satoru
Fukushima Denda Nakajima Yanagisawa Takeuchi Seki Ogawa Nakamura Arakawa