Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Inspection apparatus and method
An inspection apparatus for inspecting electrical characteristics of an inspection target object includes a movable mounting table for mounting the inspection target object thereon, a probe card disposed above the mounting table, and one or more displacement sensors, provided at one or more location of the mounting table, each of the sensors measuring a distance between the mounting table and the probe card or a vicinity thereof. The inspection target object is brought into electrical contact with the probe card by overdriving the mounting table.
Tokyo Electron Limited
G
G01R
inventional
Hiroshi
Yamada