Antonelli, Terry, Stout & Kraus, LLP
Electrostatic chuck
An electrostatic chuck for holding a substrate, including an electrode block which serves as an electrode for electrostatic attraction and a plurality of electrostatic attraction arranged on a surface of the electrode block. The electrostatic attraction members are disposed so as to attract the substrate electrostatically and to come in contact with the substrate. An insulating material covers the surface of the electrode block other than attraction surfaces of the electrostatic attraction members. Grooves made by the insulating material are provided between the individual electrostatic attraction members.
Hitachi, Ltd.
H
H01L
inventional
Seiichiro Saburo Kazue Youichi
Kanno Kanai Takahasi Itou