Sterne, Kessler, Goldstein & Fox, P.L.L.C.
Piezoelectric thin film element fabrication method
 A piezoelectric thin film element is provided that functions well as an actuator, that yields the desired composition, and that exhibits good piezoelectric thin film distortion characteristics. A lower electrode is formed on a substrate, a piezoelectric thin film precursor thin film layer is formed on the lower electrode, this is subjected to patterning, and a heating solution is applied to the substrate to implement hydrothermal processing, thereby selectively crystallizing the precursor thin film layer and yielding a piezoelectric thin film layer. 
Seiko Epson Corporation
H H
H01L H01L
additional inventional
Makoto Akira Hiroyuki Masato Tsutomu
Matsuzaki Matsuzawa Kamei Shimada Nishiwaki