JCIPRNET
Semiconductor structure and manufacturing method thereof
A semiconductor structure and a manufacturing method thereof are provided. The semiconductor structure includes a substrate, a dielectric layer disposed on the substrate, bit lines disposed on the dielectric layer, spacers and a contact. The substrate has active areas arranged in parallel with each other. The bit lines are arranged in parallel with each other. Each bit line is partially overlapped with the corresponding active area. Each bit line has first portions and second portions arranged alternately in an extending direction thereof, and a width of the first portions is smaller than that of the second portions. The spacers are disposed on the sidewalls of each bit line. The contact is disposed between the adjacent bit lines and adjacent to the corresponding first portion of at least one of the adjacent bit lines, penetrates through the dielectric layer, and is in contact with the corresponding active area.
Winbond Electronics Corp.
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inventional inventional inventional
Huang-Nan Yi-Hao Ming-Chih
Chen Chien Hsu