JCIPRNET
Focalized microwave plasma reactor
Provided is a focalized microwave plasma reactor. The reactor utilizes a cylindrical microwave resonant cavity of the quasi-TM011 mode to focalize microwave power and to excite focalized microwave plasma for the processes of microwave plasma enhanced chemical vapour depositions.
Industrial Technology Research Institute
H H H
H01J H01J H01J
inventional inventional inventional
Yu-Wen Chih-Chen Kun-Ping
Chi Chang Huang