Myers, Bigel, Sibley & Sajovec, P.A.
Metal-insulator-metal capacitors including transition metal silicide films on doped polysilicon contact plugs
A MIM capacitor can include a doped polysilicon contact plug in an interlayer insulating film. A lower electrode of the MIM capacitor includes a transition metal nitride film is on the doped polysilicon contact plug. A transition metal silicide film is between the doped polysilicon contact plug and the transition metal nitride film.
Samsung Electronics Co., Ltd.
H
H01L
inventional
Jae-hyoung Cha-young Se-hoon Jung-hee Nam-myun Jeong-sik Dong-kyun
Choi Yoo Oh Chung Cho Choi Park