Fitzpatrick, Cella, Harper & Scinto
Vacuum processing apparatus and vacuum processing method
 An object of the present invention is to provide a vacuum processing apparatus and a vacuum processing method capable of effectively preventing film peeling generated in a reaction vessel to provide a deposited film of excellent quality with reduced spherical projections. The present invention provides a vacuum processing apparatus or method utilizing a vessel, means for supplying a gas into the vessel and means for supplying an electric power and in which the gas is decomposed by the electric power to generate a discharge, wherein the surface of a member confronted with the discharge satisfies the conditions of (1) the ten-point mean roughness Rz with respect to a reference length of 2.5 mm according to the JIS standard being in a range of not smaller than 5 .mu.m and not larger than 200 .mu.m, and (2) the mean spacing S of adjacent local peaks according to the JIS standard being in a range of not smaller than 5 .mu.m and not larger than 100 .mu.m. 
Canon Kabushiki Kaisha
H C C
H01J C23C C23C
inventional inventional inventional
Daisuke Toshiyasu Kazuto Kazuyoshi Tatsuyuki Hitoshi Takashi
Tazawa Shirasuna Hosoi Akiyama Aoike Murayama Otsuka