Jones Day
Systems and methods for monitoring and controlling particle sizes in slurries
Systems and methods are provided for preparing a plurality of slurry particles. The system includes: a tank configured to contain and provide the slurry particles, a sampling module configured to sample at least one slurry particle within the tank and obtain at least one parameter related to a particle size, and a controller coupled to the tank and the sampling module, configured to vibrate the slurry particles within the tank based on the at least one parameter.
Taiwan Semiconductor Manufacturing Company Limited
B H B B B H B H B H B B B B B B H B
B01F H01L B24B B01F B01F H01L B01F H01L B01F H01L B01F B01F B01F B01F B01F B01F H01L B01F
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional inventional inventional inventional additional
Chih-Chiang I-Chen Chi-Chan Yung-Long
Tseng Chiang Yin Chen