Kenyon & Kenyon LLP
System and method for positioning a processing tool in relation to a workpiece
In a system and a method for positioning a processing tool in relation to a workpiece, an object alignment mark and the workpiece are situated on a first object. In addition, a workpiece alignment mark is situated on the workpiece. The processing tool via which the object alignment mark is detectable is situated on a second object, which is disposed so as to be displaceable along at least one movement direction in relation to the first object. Furthermore, an alignment sensor is disposed thereon, with whose aid the object alignment mark and the workpiece alignment mark are detectable. In addition, a scannable measuring standard, which extends along the at least one movement direction, is disposed on the second object. At least two scanning units for scanning the measuring standard are situated on the first object in order to thereby determine the relative position between the first and the second object along the movement direction, the two scanning units having a defined offset.
DR. JOHANNES HEIDENHAIN GMBH
H Y H H H G Y G H
H01L Y10T H01L H01L H01L G01B Y10T G01B H01L
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Wolfgang Joerg Markus Ralph Thomas Bernhard
Holzapfel Drescher Meissner Joerger Kaelberer Musch