Oblon, McClelland, Maier & Neustadt, L.L.P.
Arrangement, system, and method for processing multilayer bodies
The invention relates to a multilayer body arrangement, which comprises at least two multilayer bodies each having at least one surface to be processed as well as at least one device for positioning the multilayer bodies, wherein the device is configured such that the respective surfaces to be processed are opposite each other and thus form a quasi-closed processing space disposed between the surfaces, in which the processing occurs. It further relates to a system for processing multilayer bodies with such a multilayer body arrangement, as well as a method for processing multilayer bodies, wherein the multilayer bodies are disposed such that the respective surfaces to be processed are opposite each other and thus form a quasi-closed processing space disposed between the surfaces, in which the processing occurs.
Saint-Gobain Glass France
Y H H H C H H Y H
Y02E H01L H01L H01L C23C H01L H01L Y02P H01L
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Martin Stefan Joerg
Fuerfanger Jost Palm