Mattingly & Malur, PC
Charged particle beam apparatus, specimen observation system and operation program
For a novice user to easily recognize a difference between imaging results caused by a difference between observation conditions, a computer has an operation screen display observation target setting buttons for changing an observation condition for a specimen including a combination of parameter setting values of a charged particle beam apparatus. The processing unit has the operation screen display a radar chart including a characteristic, indicated by three or more incompatible items, of an observation condition for each of the observation target setting buttons. The radar chart indicates at least items of high resolution, emphasis on surface structure and emphasis on material difference.
Hitachi High-Technologies Corporation
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additional inventional inventional inventional
Yayoi Masaki Masako Mami Shunya Shotaro Mitsugu
Konishi Takano Nishimura Konomi Watanabe Tamayama Sato