Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including side-to-side short configured fill cells, and the second DOE including tip-to-side short configured fill cells
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of side-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of tip-to-side shorts.
PDF Solutions, Inc.
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Hans Marcin Markus Dennis Sheng-Che Kelvin Carl Conor Kimon Stephen Sherry Timothy Tomasz Rakesh John Vyacheslav Simone Nobuharu Hideki Jonathan Andrzej Marci Christopher Larg Indranil Jeremy
Eisenmann Strojwas Rauscher Ciplickas Lin Doong Taylor O'Sullivan Michaels Lam Lee Fiscus Brozek Vallishayee Kibarian Rovner Comensoli Yokoyama Matsuhashi Haigh Strojwas Liao Hess Weiland De Cheng