Scully, Scott, Murphy & Presser
Nitride pedestal for raised extrinsic base HBT process
A method of fabricating a high-performance, raised extrinsic base HBT having a narrow emitter width is provided. In accordance with the method, a patterned nitride pedestal region and inner spacers are employed to reduce the width of an emitter opening. The reduced width is achieved without the need of using advanced lithographic tools and/or advanced photomasks.
International Business Machines Corporation
H H
H01L H01L
inventional inventional
Seshadri David Huajie
Subbanna Angell Chen