Blakely, Sokoloff, Taylor & Zafman
Radio frequency device using micro-electronic-mechanical system technology
Provided is a radio frequency device using a micro-electronic-mechanical system (MEMS) technology that can be applied to a mobile communication area by reducing the operating voltage, while increasing the operating speed. The RF device of the present research includes: a substrate; a first electrode which is mounted on the substrate and forms an actuator, part of the first electrode not contacting the substrate; and a second electrode which is apart in a regular space from the substrate and forms an actuator, part of the second electrode being overlapped with the first electrode, wherein the first electrode and the second electrode contact each other at a contact point by an electrostatic attractive force generated between the two electrodes.
Electronics and Telecommunications Research Institute
H
H01P
inventional
Yun Tae Sung Weon Woo Seok Sung Hae
Kim Kang Yang Jung