McDermott Will & Emery LLP
Foreign matter inspection method and foreign matter inspection apparatus
In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.
Hitachi High-Technologies Corporation
G G G
G01N G01N G01N
inventional inventional additional
Hiroyuki Yoshio Koichi Eiji Hideki Mamoru
Yamashita Morishige Nagoya Imai Fukushima Kobayashi