Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Method for treating waste gas containing fluorochemical
A method for decomposing a fluorine-containing compound by contacting an exhaust gas 1 containing a fluorine-containing compound, such as C2F6, with aluminum oxide 3, such as &ggr;-alumina, which has been heated to a high temperature of, for example, 800&deg; C. to 900&deg; C. There may be such a necessary or larger number of moles of H2 that the fluorine atoms in the fluorine-containing compound become HF. The method has a high decomposition rate of a fluorine-containing compound, a long life, and involves minimal occurrence of CO.
Ebara Corporation
B Y B
B01J Y02C B01D
inventional additional inventional
Yoichi
Mori