Westman, Champlin & Koehler, P.A.
Detection device and detection method
The embodiments of the present application provide a detection method and a detection device. The detection device includes: a capacitance generation circuit comprising a first capacitance electrode and a second capacitance electrode disposed opposite to each other, and a power source coupled to the first and the second capacitance electrode, the first capacitance electrode is an electrode plate, and the second capacitance electrode comprises n sub-electrodes which are provided to be insulated from each other; at least one capacitance detection circuit coupled to the electrode plate and the sub-electrodes, and configured to detect a capacitance value between the electrode plate and the sub-electrodes in response to a substrate to be tested being placed on one side of the electrode plate; and a controller configured to determine, according to the detected capacitance value, whether a foreign object exists in a region on the substrate to be tested or not.
ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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inventional inventional additional inventional additional
Zhao Haiyan Wenlong Le Dong Hyunjin Lei Huan
Wang Xu Zhao Sun Wang Kim Zhang Tang