Sughrue Mion, PLLC
Film forming apparatus and film forming method
A film forming apparatus is provided which includes a device A that generates liquid fine particles having controlled particle diameters; a device B including a via for guiding the generated liquid fine particles while controlling a temperature thereof; a device C that sprays the guided liquid fine particles; and a device D including a space for forming a transparent conductive film by coating the sprayed liquid fine particles onto a subject to be processed.
Fujikura Ltd.
H C Y C C C C C C C C C
H01L C03C Y02E C23C C03C C03C C03C C03C C03C C03C C23C C23C
inventional inventional additional inventional inventional additional additional inventional inventional additional inventional inventional
Kenji Nobuo Yasuo Takuya
Goto Tanabe Suzuki Kawashima