Integrated circuit system with carbon and non-carbon silicon
An integrated circuit system includes a substrate, a carbon-containing silicon region over the substrate, a non-carbon-containing silicon region over the substrate, and a silicon-carbon region, including the non-carbon-containing silicon region and the carbon-containing silicon region.
GLOBALFOUNDRIES Singapore Pte. Ltd. International Business Machines Corporation
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Ashima B. Anita Richard J. Jin Ping
Chakravarti Madan Murphy Liu