Kenyon & Kenyon
Energy filter and electron microscope equipped with the energy filter
 An energy filter has a plurality of deflection means and is constructed by using the plural deflection means so that an average track of an electron beam is symmetric and the normal line to a symmetric plane is inclined against an incident direction of the electron beam. 
Hitachi, Ltd.
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inventional additional inventional additional
Shigeto Shunroku Yoshifumi Tomoko Koji Masakazu Takashi
Isakozawa Taya Taniguchi Sekiguchi Kimoto Saito Aoyama