Antonelli, Terry, Stout & Kraus, LLP.
Semiconductor device including a TFT having large-grain polycrystalline active layer, LCD employing the same and method of fabricating them
A display device includes a pixel region having a plurality of pixels and a peripheral circuit region disposed at a periphery of the pixel region for driving the pixels. The peripheral circuit region includes transistors fabricated from polycrystalline semiconductor and having a semiconductor crystalline grain of a first kind in a channel region thereof, wherein a grain size of the semiconductor crystalline grain of the first kind is at least 3 μm. The pixel region includes transistors fabricated from polycrystalline semiconductor and having a semiconductor crystalline grain of a second kind in a channel region thereof, wherein a grain size of the semiconductor crystalline grain of the second kind is at least 0.05 μm.
Hitachi, Ltd.
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Masanobu Masakazu Kenkichi Toshio Tetsuya Michiko
Miyano Saito Suzuki Ogino Nagata Takahashi