Haynes Boone, LLP
Method and apparatus for preventing baking chamber exhaust line clog
A method and apparatus involve providing a supply of nitrogen gas, heating the supply of nitrogen gas to a temperature, and ejecting the heated nitrogen gas through the exhaust line of the baking chamber on a periodic basis. The temperature is between a temperature of the hot plate and a temperature that is less than a glass transition temperature of a film being treated.
Taiwan Semiconductor Manufacturing Company
H H F
H01L H01L F27B
inventional inventional inventional
Chia-Tung
Chang