McDonald Hopkins LLC
Semiconductor super-junction power device and manufacturing method therefor
The present disclosure relates to the technical field of semiconductor power devices, and in particular relates to a semiconductor super-junction power device and a manufacturing method therefor. The super-junction power device of the present disclosure includes a termination region and a cell region; the cell region includes a substrate epitaxial layer and a drain region at a bottom of the substrate epitaxial layer, the substrate epitaxial layer has a plurality of pillar epitaxial doped regions and a plurality of JFET regions, a body region is arranged at a top of each of the plurality of pillar epitaxial doped regions; the body regions have at least two unequal widths; two source regions are arranged in each of the body regions; a gate oxide layer is arranged on the body regions and the JFET regions; and a gate is arranged on the gate oxide layer.
SUZHOU ORIENTAL SEMICONDUCTOR CO., LTD.
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Yuanlin Yi Wei Lei Pengfei
Yuan Gong Liu Liu Wang