JCIPRNET
Method of fabricating packaging substrate
A method of fabricating a packaging substrate includes following steps: providing a carrier board having two opposite surfaces, forming on each of the surfaces a plurality of first metal bumps; covering the carrier board and the first metal bumps with a first dielectric layer that has a plurality of first intaglios which exposes a top surface and side surface of the first metal bumps; forming a conductive seedlayer on the first dielectric layer and the first metal bumps; forming a metal layer on the conductive seedlayer; removing a portion of the metal layer and the conductive seedlayer that is higher than the top surface of the first dielectric layer, and forming a first circuit layer in the first intaglios; forming a built-up structure on the first circuit layer and the first dielectric layer, forming a pair of upper and lower entire packaging substrates.
Unimicron Technology Corp.
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Tzyy-Jang Chung-W.
Tseng Ho