Kenyon & Kenyon LLP
Optoelectronic harmonically filtered detector system for a scanning unit
An optoelectronic detector system is for generating a plurality of periodic, phase-shifted scanning signals from the scanning of a periodic fringe pattern. The fringe pattern extends in a detection plane with fringe-pattern period P in a fringe-displacement direction. The detector system is made up of a plurality of detector elements, the geometrical shape of the detector elements being selected such that a defined filtering of unwanted harmonics from the scanning signals thereby results. Within one fringe-pattern period P, a total of N detector elements of the same geometrical shape are arranged one immediately after the other in measuring direction x.
Dr. Johannes Heidenhain GmbH
G G G
G01D G01D G01D
inventional inventional inventional
Wolfgang
Holzapfel