Griffin & Szipl, P.C.
Flow rate range variable type flow rate control apparatus
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
Tokyo Electron Ltd. National University Corporation Tohoku University Fujikin Incorporated
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Masaaki Ryousuke Kazuyuki Takashi Katsuyuki Tsuyoshi Kaoru Tsutomu Hisashi Masahito Kouji Nobukazu Tadahiro Toshihide Shoichi Tomokazu
Nagase Dohi Miura Hirose Sugita Shimazu Hirata Shinohara Tanaka Saito Nishino Ikeda Ohmi Yoshida Hino Imai