Keating & Bennett, LLP
Piezoelectric filter and electronic component including the same
A piezoelectric filter includes a piezoelectric thin film disposed on a silicon substrate, and a plurality of piezoelectric resonators each having electrodes facing each other with the piezoelectric thin film sandwiched therebetween, and each of the plurality of piezoelectric resonators has a filtering function. The electrode material of one of the piezoelectric resonators is different from the electrode material of the other piezoelectric resonators. For example, the former electrode material has a higher stiffness than the latter electrode material. The piezoelectric filter achieves high-Q resonance and improves the attenuation characteristic.
Murata Manufacturing Co., Ltd.
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inventional inventional inventional
Masaki Daisuke Hajime Hideki
Takeuchi Nakamura Yamada Kawamura