Aperture control and apodization in a micro-machined ultrasonic transducer
A micro-machined ultrasonic transducer (MUT) having aperture, elevation and apodization controlled by apparatus located on the same substrate as the transducer, or by bias voltage control applied to MUT elements, allows for an efficient and compact ultrasonic probe. The control apparatus may take the form of field effect transistors (FET's), micro-machined relays, or doped regions on the substrate, or any other apparatus that may be located on the same substrate as that of the transducer, or by bias voltage sources connected to the MUT elements.
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G01H B06B G10K G10K
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Turuvekere R Jie Bernard J Michael P Stephen M William J
Gururaja Chen Savord Anthony Grenon Ossmann