Lee & Morse, P.C.
β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same
The β-ketoimine ligand is represented by the following formula 1:wherein R1 and R2 are each independently a C1-C5 alkyl group. A metal complex compound includes the β-ketoimine ligand. A method of forming the β-ketoimine ligand and a method of forming a thin film using the metal complex compound including β-ketoimine ligand are provided.
ADEKA CORPORATION SAMSUNG ELECTRONICS CO., LTD.
C C C C
C07C C07C C07F C23C
inventional inventional inventional inventional
Atsushi Masako Youn-Joung Tomoharu Kyoo-Chul Jung-Sik Junji Jin-Seo Haruyoshi Atsuya Senji
Sakurai Shimizu Cho Yoshino Cho Choi Ueyama Lee Sato Yoshinaka Wada