Sherr & Jiang, PLLC
Rigid dual-servo nano stage
The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.
Korea Institute of Industrial Technology
H H B F
H02N H02N B28D F16H
inventional inventional inventional additional
Sang Moo Kyung Tae Eun Goo Sang Hoon Seok Woo Young Jae
Lee Nam Kang Ji Lee Choi