McDermott, Will & Emery
Semiconductor device having a mark section and a dummy pattern
A semiconductor device includes a plurality of real chip regions and dicing lines to separate the real chip regions on a semiconductor substrate. A dicing line includes a mark section and a mark forbidden region around the mark section. A dummy wiring pattern is formed to fill the dicing line or a portion of the real chip region to surround the mark section and the mark forbidden region. A dummy wiring pattern may be a single continuous wiring pattern or the single wiring pattern may be divided into segments. Alternatively, a dummy wiring pattern may be composed of a plurality of square portions arranged in a matrix fashion.
Mitsubishi Denki Kabushiki Kaisha
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Masahiko
Takeuchi