Greenblum & Bernstein, P.L.C.
Piezoelectric thin film device and piezoelectric thin film device manufacturing method, and inkjet head and inkjet recording apparatus
One objective of the invention is to provide a highly-efficient and reliable piezoelectric thin film device by improving the piezoelectric function of a piezoelectric thin film and obtaining a crystal structure wherein the dependency of a piezoelectric constant, relative to a voltage, is superior, and to also provide a method for manufacturing this piezoelectric thin film device. Another objective of the invention is to provide an inkjet head that satisfactorily exhibits the piezoelectric performance of the piezoelectric thin film device and that has a superior withstand voltage function and driving reliability, and to provide a high quality inkjet recording apparatus on which this inkjet head can be mounted. A piezoelectric thin film device includes: crystal grains that form piezoelectric thin film and grain boundaries that encircle the crystal grains, wherein the same crystal orientation is established for the grain boundaries and the crystal grains.
PANASONIC Corporation
B C B C H B B B H B H H B Y B B
B41J C23C B41J C23C H01L B41J B41J B41J H01L B41J H01L H01L B41J Y10T B41J B41J
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Osamu Yuuji Shintarou Eiji Kazumi
Watanabe Toyomura Hara Fujii Sadamatsu