Optical proximity correction verification system and verification method thereof
The optical proximity correction verification method includes loading a layout data to be verified to a processor, loading a reference layout data to the processor. The processor performs a first stage Boolean operation on the layout data to be verified to generate a first verified data. The processor performs a layout versus layout verification on the first verified data by using a user-defined verification tool of optical proximity correction data in a database to generate second verified data according to the reference layout data. The processor performs a second stage Boolean operation on the second verified data to generate a third verified data if the layout versus layout verification is successfully performed. The processor performs a Boolean check on the third verified data to generate fourth verified data using the reference layout data.
UNITED MICROELECTRONICS CORP.
G G
G03F G03F
inventional inventional
Kuo-Hsun Chao-Yao Chung-Chih
Huang Chiang Chang