Trexler, Bushnell, Giangiorgi & Blackstone, LTD
Integrated process tool monitoring system for semiconductor fabrication
An integrated process tool monitoring system for semiconductor fabrication. Specifically, a process tool parameter auditing system, where a process tool user need not run a different verification system for each process tool type used and need not download parameters every time before a semiconductor device or material is to be processed by the process tool.
LSI Logic Corporation
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Paul Russell Bruce Hiroshi Attila Steven
Szasz Whaley Whitefield Mizuno Balazs Reder