F. Chau & Associates, LLC
Laser annealing apparatus and a method for manufacturing a display apparatus using the laser annealing apparatus
A method of manufacturing a display apparatus includes forming an amorphous silicon layer on a substrate, splitting a first laser beam emitted from a first laser source into a first master beam in a first polarization state and a second master beam in a second polarization state, changing the first polarization state of the first master beam to the second polarization state to output a third master beam having the second polarization state and corresponding to the first master beam having the second polarization state, combining the second master beam with the third master beam to output a merged laser beam, and irradiating the amorphous silicon layer with the merged laser beam to form a polysilicon layer.
SAMSUNG DISPLAY CO., LTD.
H B B H B G G B
H01L B23K B23K H01L B23K G02B G02B B23K
inventional additional inventional inventional inventional inventional inventional inventional
Oleg Jeongkyun Byoungho Hyunjin Seung Hwan Joowoan Sanghoon Byoungkwon
Prudnikov Na Cheong Cho Lee Cho Ahn Choo