Central California IP Group, P.C.
Plasma generation apparatus
A plasma generation apparatus includes a plasma generation unit. The plasma generation unit has a spherical or elliptical cavity. The plasma generation unit receives radio-frequency (RF) power in such a manner that bounce resonance of electrons is performed to generate plasma in the cavity. The cavity has a plasma extraction hole to communicate with an external space.
Korea Research Institute of Standards and Science
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Jung-Hyung Hyo Chang Dae-Jin
Kim Lee Seong