Thomas, Kayden, Horstemeyer & Risley
Fault detection and classification (FDC) specification management apparatus and method thereof
An apparatus for fault detection and classification (FDC) specification management including a storage device and a process module. The storage device stores a specification management record and a chart profile record. The specification management record stores statistical algorithm settings of a parameter and the chart profile record stores chart frame and alarm condition information. The process module, which resides in a memory, receives a manipulation message corresponding to the specification management record, and accordingly manipulates the chart profile record.
Taiwan Semiconductor Manufacturing Co., Ltd.
G G G G Y G
G05B G05B G05B G05B Y02P G05B
inventional additional additional inventional additional inventional
Ie-Fun Wen-Sheng Yi-Yu Chon-Hwa Mu-Tsang Jian-Hong Chia-Hung
Lai Chien Wu Chu Lin Chen Chung