Robinson Intellectual Property Law Office, P.C.
Semiconductor device
A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit.
Semicondcutor Energy Laboratory Co., Ltd.
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Kiyoshi Toshihiko
Kato Saito