Schwartz, Jeffery, Schwaab, Mack, Blumenthal & Koch
Pressure sensor
 A pair of semiconductor diaphragm blocks, each having a diaphragm on a front surface of which a diffused resistor is formed as a pressure-sensitive element, and a circumferential support integral therewith, are confined within a sealed hollow package and bonded at their circumferential supports to opposite inside surfaces of the package such that the front surfaces of the diaphragms are positioned within a vacuum space within the package. This package is provided with through holes through which fluid pressures subject to measurement are introduced so as to arrive at the back surfaces of the diaphragms. 
Nissan Motor Company, Limited
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G01L G01L G01L
inventional inventional inventional
Masami Tamotsu Takeshi Teruyoshi
Takeuchi Tominaga Oguro Mihara