Nath, Goldberg & Meyer
Wafer inspection device and wafer inspection method
The present disclosure provides a wafer inspection device that can perform accurate inspection. The wafer inspection device includes a probe card having a plurality of contact probes formed to protrude toward a wafer W, a chuck top on which the wafer W is mounted and configured to move toward the probe card, and an aligner configured to adjust inclination of the chuck top relative to the probe card.
TOKYO ELECTRON LIMITED
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inventional inventional inventional
Hiroshi
Yamada