Harness, Dickey & Pierce, P.L.C.
Nozzle assembly, substrate treatment apparatus including the nozzle assembly, and method of treating substrate using the assembly
Provided is a substrate treatment apparatus. The apparatus includes a chuck supporting a substrate and being rotatable, a container surrounding the chuck and collecting chemicals scattered due to rotations of the substrate, and a first spray nozzle spraying the chemicals to the substrate.
Semes Co., Ltd.
H H H
H01L H01L H01L
inventional inventional inventional
Jae Yong Se Won Yong Hee
Kim Lee Lee