Rader, Fishman & Grauer
Quartz glass single hole nozzle for feeding fluid and quartz glass multi-hole burner head for feeding fluid
The present invention provides a quartz glass single hole nozzle for feeding fluid capable of performing high-precision control of a flow rate, a burner for heat processing equipped with the quartz glass single hole nozzle, a quartz glass multihole burner head for feeding fluid preferably used in flame processing or the like, and a quartz glass burner for heat processing equipped with the multihole burner. By using the nozzle, even if a distal end portion of the quartz glass burner, namely the nozzle is broken by contact with a workpiece or the like, it is enough to only replace the broken nozzle with a new one without a necessity for replacing the entire expensive quartz glass burner. When applying the nozzle to a metal burner, there can be given usefulness of the quartz glass such as heat resistance and contamination resistance or the like. The quartz glass single hole nozzle for feeding fluid according to the present invention comprises: a nozzle body portion made of a quartz glass material; and an attaching portion provided at the proximal end of the nozzle body portion, wherein a fluid feed path is bored in the interior of the nozzle body portion and the attaching portion of the nozzle body portion is detachably attachable to the distal end of a burner body for heat processing.
Atock Co., Ltd. Shin-Etsu Quartz Products Co., Ltd.
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Hyung-Bae Hirokazu Toru Ichiro
Kim Mizuno Mizuno Yanase