Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, TS-short-configured, and metal-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one TS-short-related failure mode, and one metal-short-related failure mode.
PDF Solutions, Inc.
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Hideki Kelvin Stephen Timothy Hans Vyacheslav Simone Nobuharu Indranil John Carl Rakesh Jonathan Kimon Sheng-Che Larg Andrzej Markus Conor Tomasz Sherry Dennis Marci Christopher Marcin Jeremy
Matsuhashi Doong Lam Fiscus Eisenmann Rovner Comensoli Yokoyama De Kibarian Taylor Vallishayee Haigh Michaels Lin Weiland Strojwas Rauscher O'Sullivan Brozek Lee Ciplickas Liao Hess Strojwas Cheng