Harness, Dickey & Pierce, P.L.C.
Device manufacturing apparatus, device manufacturing method, and electronic equipment
A device manufacturing apparatus includes a discharge head discharging a droplet containing a functional material, a stage supporting a substrate on which the droplet is discharged, and which is capable of moving relative to the discharge head, a carrier carrying the substrate, a detector detecting a discharge condition of the droplet which is discharged from a discharge nozzle formed in the discharge head, and a controller executing a detection operation by the discharge device during a carrying operation of the substrate.
Seiko Epson Corporation
H B B B H
H01L B41J B41J B41J H01L
inventional additional inventional inventional inventional
Nobuaki Hayato
Kamiyama Takahashi