JCIPRNET
Integrated fan-out package and method of fabricating the same
An integrated fan-out package including an integrated circuit, an insulating encapsulation, a plurality of conductive through vias, and a redistribution circuit structure is provided. The integrated circuit includes a plurality of conductive terminals. The insulating encapsulation encapsulates sidewalls of the integrated circuit. The conductive through vias penetrate in the insulating encapsulation. The redistribution circuit structure is disposed on the integrated circuit, the conductive through vias and the insulating encapsulation. The redistribution conductive layer is electrically connected to the conductive terminals and the conductive through vias. A plurality of first contact surfaces of the conductive terminals and a plurality of second contact surfaces of the conductive through vias are in contact with the redistribution circuit structure, and a roughness of the first contact surfaces and the second contact surfaces ranges from 100 angstroms to 500 angstroms. Methods of fabricating the integrated fan-out package are also provided.
Taiwan Semiconductor Manufacturing Co., Ltd.
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inventional inventional inventional inventional inventional inventional additional additional additional inventional additional additional inventional additional additional inventional additional additional additional inventional inventional additional inventional additional additional additional additional additional inventional additional additional inventional additional additional additional additional additional additional additional additional additional additional additional additional additional additional inventional inventional additional inventional additional additional additional additional
Hsin-Chieh Ming-Yen Ching-Fu
Huang Chiu Chang