Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Flow channel structure
A flow channel structure that includes a first inlet path for a first fluid, a second inlet path for a second fluid, a merging portion that merges, in the thickness direction of a substrate, the first fluid and the second fluid, a first merged fluid channel in which both fluids merged in the merging portion flow along a top surface of the substrate, a flow direction altering portion that causes the flow direction of the fluid flowing through the first merged fluid channel to change from the top surface side of the substrate towards the back surface side thereof, and a second merged fluid channel for changing the flow direction of this fluid to flow to the downstream side so that the fluid flowing from the first merged fluid channel through the flow direction altering portion flows along the back surface of the substrate.
Kobe Steel, Ltd.
B Y B
B01F Y10T B01F
inventional additional inventional
Makoto Daisuke Koji Takeshi
Nishimura Nishikawa Noishiki Yamashita