Ryan, Mason & Lewis, LLP
Nitridization for semiconductor structures
A method for fabricating a semiconductor structure includes the following steps. A substrate including a dielectric material is formed. A surface of the substrate is molecularly modified to convert the surface of the substrate to a nitrogen-enriched surface. A metal layer is deposited on the molecularly modified surface of the substrate interacting with the molecularly modified surface to form a nitridized metal layer.
International Business Machines Corporation
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Chi-Chao Hosadurga K. Lawrence A. Wei Roger A. Terry A.
Yang Shobha Clevenger Wang Quon Spooner