Lee & Morse, P.C.
Voltage generator, voltage waveform generator, semiconductor device manufacturing apparatus, voltage waveform generation method, and semiconductor device manufacturing method
A voltage generator includes a pulse circuit and a slope circuit. The pulse circuit is to apply voltages of three different levels to an output terminal and the slope circuit is to apply a slope voltage to the output terminal. The slope circuit includes an inductor to take current out of a capacitive load connected to the output terminal.
SAMSUNG ELECTRONICS CO., LTD.
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Chan-hee Ju-hyun Hyun-bae Hye-jin Ji-hwan Young-hwan
Park Kim Kim Kim Kim Choi