Brooks Kushman P.C.
Mask plate and process for manufacturing the same
The present disclosure provides a mask plate and a method for manufacturing the same. The mask plate comprises a body provided with a plurality of openings, in which a first surface of the body is provided with cofferdams each surrounding a corresponding opening, and each cofferdam is configured to confine a diffusion range of a material deposited on a substrate through the opening. In the present disclosure, by providing, on a surface of the body of the mask plate, cofferdams each surrounding edges of each corresponding opening, the cofferdams can effectively prevent the deposition material from depositing into an invalid region, thus CVD shadow can be reduced and the packaging effect can be improved in the process of film deposition or evaporation by chemical vapor deposition (CVD).
BOE TECHNOLOGY GROUP CO., LTD.
H C H C B H
H01L C23C H01L C23C B05C H01L
inventional inventional additional inventional inventional inventional
Haibin Jinxiang Zhongyuan Wenqi
Zhu Xue Sun Liu