Sterne, Kessler, Goldstein & Fox P.L.L.C.
Chemical replacement system
Embodiments of the present disclosure describe a chemical replacement system and a method to automatically replace PR bottles. The chemical replacement system includes a computer system and a transfer module. The computer system can receive a request signal to replace one or more chemical containers and transmit a command to the transfer module. The transfer module, being controlled by the computer system, can include a holder configured to hold the one or more chemical containers (e.g., PR bottles); a door unit configured to open in response to the command; and a transfer unit configured to eject the holder in response to the command for replacement. The chemical replacement system can further include an automated vehicle configured to replace the one or more chemical containers in the ejected holder.
Taiwan Semiconductor Manufacturing Co., Ltd.
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H01L B25J G03F H01L H01L G03F G03F G06K B25J H01L B25J
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Li-Jen Ko-Bin Su-Yu Forster Shi-Ming Yu Kai Oliver
Wu Kao Yeh Yuan Wang Chen Yu