Adams & Wilks
Processing apparatus using focused charged particle beam
A processing apparatus uses a focused charged particle beam to process a micro sample that is supported on a micro mount part. The micro mount part is supported on a micro sample stage and locally cooled by a cooling unit. The micro mount part is thermally independent of the micro sample stage and, due to its small size, can be cooled rapidly by the cooling unit.
SII NanoTechnology Inc.
G
G01N
inventional
Yo Toshiaki Haruo
Yamamoto Fujii Takahashi