Haynes and Boone, LLP
Translation engine of defect pattern recognition
The present disclosure provides a system and method for recognizing a defect image associated with a semiconductor substrate. In one example, the method includes collecting defect data of the defect image by testing and measuring the semiconductor substrate, extracting a pattern from the defect data, normalizing a location, orientation, and size of the pattern, and identifying the pattern after the pattern is normalized.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G
G01N G01N
inventional inventional
Chia-Hua Chih-Hung Chih-Cheng Chen-Ting
Chang Wu Chou Lin