Fitzpatrick, Cella, Harper & Scinto
Field-effect transistor
Provided is a field-effect transistor including an active layer and a gate insulating film, wherein the active layer includes an amorphous oxide layer containing an amorphous region and a crystalline region, and the crystalline region is in the vicinity of or in contact with an interface between the amorphous oxide layer and the gate insulating film.
Canon Kabushiki Kaisha
H H H
H01L H01L H01L
inventional inventional inventional
Nobuyuki Toshiaki Masafumi
Kaji Aiba Sano