The Webb Law Firm
Scanning electron microscope and method for determining crystal orientations
A charged particle beam device includes: a plurality of detecting units which detect charged particles diffracted by a specimen; and an intensity pattern information generating unit which generates, based on intensities of a plurality of detection signals output from the plurality of detecting units, intensity pattern information that represents the intensities of the plurality of detection signals as a pattern.
JEOL Ltd.
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Kenichi Takeshi
Yamashita Otsuka