Eschweiler & Potashnik, LLC
Pad structure for front side illuminated image sensor
The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a plurality of interconnect layers within a dielectric structure over an upper surface of a substrate. A passivation structure is formed over the dielectric structure. The passivation structure has sidewalls and a horizontally extending surface defining has a recess within an upper surface of the passivation structure. A bond pad is formed having a lower surface overlying the horizontally extending surface and one or more protrusions extending outward from the lower surface. The one or more protrusions extend through one or more openings within the horizontally extending surface to contact a first one of the plurality of interconnect layers. An upper passivation layer is deposited on sidewalls and an upper surface of the bond pad and on sidewalls and the upper surface of the passivation structure.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Kai-Chun Ching-Chun Jeng-Shyan Shyh-Fann Dun-Nian
Hsu Wang Lin Ting Yaung