Kratz, Quintos & Hanson, LLP
Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method
An organic thin film deposition device that is compact and high in processing capability is provided. Inside a vacuum chamber, first and second substrate arrangement devices that can be in a horizontal posture and a standing posture are provided; and when in the standing posture, substrates held by the respective substrate arrangement devices and first and second organic vapor discharging devices face each other. When one of the substrate arrangement devices is in the horizontal posture, masks and the substrates are lifted up by alignment pins and transfer pins and are replaced with a substrate not yet film formed, for position adjustment. With one organic thin film deposition device, two substrates can be processed at the same time.
Ulvac, Inc.
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C23C H01L H01L H01L H01L H01L C23C C23C
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Hiroshi Yoshio Masato
Kikuchi Sunaga Fukao