Slater Matsil, LLP
Compact vertical inductors extending in vertical planes
A device includes a substrate, and a vertical inductor over the substrate. The vertical inductor includes a plurality of parts formed of metal, wherein each of the parts extends in one of a plurality of planes perpendicular to a major surface of the substrate. Metal lines interconnect neighboring ones of the plurality of parts of the vertical inductor.
Taiwan Semiconductor Manufacturing Company, Ltd.
H H H H H H H
H01F H01F H01L H01F H01L H01F H01F
inventional inventional inventional additional additional additional additional
Yu-Ling Ho-Hsiang Min-Chie Chin-Wei Mei-Show Huan-Neng Hsiao-Tsung
Lin Chen Jeng Kuo Chen Chen Yen