Harness, Dickey & Pierce, P.L.C.
Wavelength variable interference filter having substrate hydroxyl group concentration, electronic component, manufacturing method of electronic component, and electronic apparatus
A wavelength variable interference filter includes a fixed substrate, a movable substrate that faces the first substrate, a fixed reflective film that is disposed between the fixed substrate and the movable substrate, and a movable reflective film that is disposed between the fixed reflective film and the movable substrate, in which the fixed substrate transmits light, the fixed reflective film includes silver, and a concentration of a hydroxyl group that the fixed substrate includes is 500 ppm or less or 1000 ppm or more.
Seiko Epson Corporation
G G G
G02B G02B G02B
inventional inventional inventional
Susumu Katsuji
Shinto Arakawa