Tutunjian & Bitetto, P.C.
Fabrication of vertical fuses from vertical fins
A vertical fuse element, including, a conductive silicide base on a surface of a substrate, and a conductive silicide pillar extending in a direction perpendicular to the surface of the substrate, where the conductive silicide pillar is on the conductive silicide base, and wherein the conductive silicide pillar includes an upper portion having a width, W5, a base having a width, W6, and a neck region having a width, W7, where W7<W5, and W7≤W6.
International Business Machines Corporation
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inventional inventional additional inventional inventional
James J. Kangguo Juntao
Demarest Cheng Li