McDermott Will & Emery LLP
Droplet generator and method of servicing a photolithographic tool
A photolithographic apparatus includes a droplet generator, a droplet generator maintenance system, and a controller communicating with the droplet generator maintenance system. The droplet generator maintenance system operatively communicates with the droplet generator, a coolant distribution unit, a gas supply unit, and a supporting member. The gas supply unit includes a heat exchange assembly and an air heating assembly. The coolant distribution unit is configured to control the temperature of the droplet generator within the acceptable droplet generator range.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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H05G G03F H05G H05G
additional inventional inventional inventional
Shang-Chieh Yu-Huan Cheng-Hsuan Ming-Hsun Li-Jui
Chien Chen Wu Tsai Chen