Felfe & Lynch
Positive resist material
 The invention relates to positive resist materials of thermally crosslinkable methacrylic polymers soluble in organic solvents, which are characterized in that the methacrylic polymers are copolymers of 80 to 98 mol-% of fluoroalkylmethacrylate and 20 to 2 mol-% of methacrylic acid chloride or chloroalkylmethacrylate. The resists of the invention are very well suited for the transfer of microstructures, for example in semiconductor technology. They have, in addition to a high sensitivity, a very good mechanical stability and strength of adhesion. 
Max-Planck-Gesellshaft zur Forderung der Wissenschaften e.V.
Y Y G
Y10S Y10S G03F
additional additional inventional
Jiang-Tsun Frithjof Wolfram Hideto
Chen Asmussen Schnabel Sotobayashi