Westman, Champlin & Koehler, P.A.
Substrate fixing carrier, evaporation device and evaporation method
A substrate fixing carrier includes a supporting frame and a cooling plate. The supporting frame defines a hollow region and a supporting portion at an inner wall of the supporting frame. The cooling plate and the supporting frame are movable towards each other until the cooling plate is in the hollow region with edges of the cooling plate aligning with the supporting portion. When a rectangular to-be-evaporated substrate is placed in the hollow region with edges of the rectangular to-be-evaporated substrate between the supporting portion and the cooling plate, a distance between each edge of the cooling plate corresponding to each long side of the to-be-evaporated substrate and the supporting portion is greater than or equal to a thickness of the to-be-evaporated substrate, and a distance between each edge of the cooling plate corresponding to each short side of the to-be-evaporated substrate and the supporting portion is less than the thickness of the to-be-evaporated substrate.
ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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C23C C23C H01L C23C C23C
inventional inventional additional inventional inventional
Le Jindong Chaolong Xiaocui
Liu Liu Fan Yang