Birch, Stewart, Kolasch & Birch, LLP
Micro device and manufacturing method thereof
A micro device and manufacturing method thereof. The micro device includes a substrate, an insulation layer, and a solution. The insulation layer is disposed on the substrate to define a channel portion and an extension portion communicated with the channel portion. The solution is location in the channel portion. Part of the solution flows to the extension portion by capillary force between the channel portion and the extension portion.
Industrial Technology Research Institute
H H B H H
H01L H01L B82Y H01L H01L
inventional inventional inventional additional inventional
Kevin Je-Ping Jane Jinn-Cherng Yuh-Zheng Chao-Feng
Cheng Hu Chang Yang Lee Sung