Ditthavong & Steiner, P.C.
Sandwich damascene resistor
A method is provided for forming sandwich damascene resistors in MOL processes and the resulting devices. Embodiments include forming on a substrate a film stack including an interlayer dielectric (ILD), a first dielectric layer, and a sacrifice layer (SL); removing a portion of the SL and the first dielectric layer, forming a first cavity; conformally forming a layer of resistive material in the first cavity and over the SL; depositing a second dielectric layer over the layer of resistive material and filling the first cavity; and removing the second dielectric layer, the layer of resistive material not in the first cavity, and at least a partial depth of the SL
GLOBALFOUNDRIES SINGAPORE PTE.LTD.
H H H H H H
H01L H01L H01L H01L H01L H01L
inventional inventional inventional inventional additional inventional
Roderick Chang Yong Jie
Miller Xiao Chen