Luedeka, Neely & Graham, P.C.
Image intensification for low light inspection
An optical inspection system for inspecting a substrate. A beam source produces a light beam and directs it toward a surface of the substrate, thereby producing a reflected light beam that is received by an intensifier module. A photocathode receives the reflected light beam at a first surface and producing a shower of photoelectrons at a second opposing surface. An electrical field receives the shower of photoelectrons and accelerates the photoelectrons away from the second surface of the photocathode, thereby producing an enhanced output. A sensor receives the enhanced output from the intensifier module and produces electrical signals in response to the enhanced output. A controller receives the electrical signals and produces images of the substrate, based at least in part on the electrical signals. The controller also controls and coordinates the operation of the beam source, the intensifier module, and the sensor.
KLA-Tencor Corporation
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H01J H01J G01N G01N
inventional inventional additional inventional
Stuart L. Wei
Friedman Zhao