Silicon structure and method of manufacturing the same
A silicon structure includes a silicon substrate; and an on-substrate structure including a silicon compound film and formed on said silicon substrate. At least one removal section removed through anisotropic etching and at least one supporting column left through the anisotropic etching to support said on-substrate structure are provided for a direct lower portion of said silicon substrate directly beneath said on-substrate structure.
G B B
G02B B81B B81C
inventional inventional inventional
Shinya
Watanabe