Dickstein Shapiro Morin & Oshinsky LLP
Method and scanning electron microscope for measuring dimension of material on sample
A width-measurement method of reducing or eliminating an error in measurement of a width of an object on a sample resulting from the dimension of the beam diameter, wherein a width-measured value of the object to be width-measured which has been obtained on the basis of a secondary signal obtained from secondary particles emitted from the sample having thereon the object to be width-measured is corrected with a value with respect to a dimension value of a beam diameter.
Hitachi High-Technologies Corporation
H H
H01J H01J
additional inventional
Masanori Mitsugu Masahiro Tadanori Hideo Terumichi Goroku Tadashi Shunichi
Gunji Sato Kawawa Takahashi Todokoro Nishino Shimoma Otaka Watanabe