Stanzione & Kim, LLP
Method of compensating sensor data and evaluating an interlock of an interlock system
A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.
Samsung Electronics Co., Ltd.
G G
G01L G01L
inventional inventional
Seung-jun Yoo-seok Chang-hun Seung-Yong Hak-yong
Lee Jang Park Doh Kim