J.C. Patents
Semiconductor device and manufacturing method thereof
A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a substrate, a plurality of active areas, and an isolation structure. The substrate has a device region and a peripheral region surrounding the device region. The active areas are located in the substrate in the device region. When viewed from above, the edges of the ends of the active areas adjacent to the boundary of the device region are aligned with each other, and the width of the ends of the active areas adjacent to the boundary of the device region is greater than the width of the other portions of the active areas. The isolation structure is disposed in the substrate and surrounds the active areas and is located in the peripheral region.
United Microelectronics Corp. Fujian Jinhua Integrated Circuit Co., Ltd.
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inventional inventional inventional inventional
Le-Tien Shih-Fang Ying-Chiao Chien-Ting Harn-Jiunn Chin-Lung
Jung Tzou Wang Ho Wang Lin