Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
Coating compositions suitable for use with an overcoated photoresist
Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.
GlobalFoundries Inc.
G C G C C G C
G03F C08L G03F C08L C08L G03F C08L
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Libor Wenjie Irene Y. Pushkara R. Wu-Song S. John P. Jin Wuk Greogory P. David A. James F.
Vyklicky Li Popova Varanasi Huang Amara Sung Prokopowicz Valeri Cameron