Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
Agere Systems Inc. Lucent Technologies Inc.
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Jungsang Ainissa Flavio Vladimir A. Sungho Hareesh
Kim Ramirez Pardo Aksyuk Jin Mavoori