Sughrue Mion, PLLC
Vertical comb actuator radio frequency micro-electro-mechanical system switch
A vertical comb actuator radio frequency (RF) micro-electro-mechanical system (MEMS) switch. The RF MEMS switch includes a substrate; first and second signal lines spaced at a predetermined interval from each other and deposited on an upper surface of the substrate; an actuator positioned over the first and second signal lines when viewed from the upper surface of the substrate and spaced at a predetermined interval from the first and second signal lines; and a fixing portion positioned over the actuator when viewed from the upper surface of the substrate, wherein the fixing portion permits the actuator to come in contact with the first and second signal lines when a predetermined driving voltage is applied. Thus, it is possible to prevent the actuator from sticking to the substrate. In addition, the RF MEMS switch can be operated with a low voltage and insertion loss and power loss can be reduced.
Samsung Electronics Co., Ltd.
H
H01H
inventional
Jun-o Hee-moon Che-heung Sang-wook Young-tack Jong-seok Seok-mo In-sang Seok-chul Sang-hun
Kim Jeong Kim Kwon Hong Kim Chang Song Yun Lee