Dummy patterns and method for generating dummy patterns
A method for generating dummy patterns includes providing a layout region having a layout pattern with a first density, inserting a plurality of first dummy patterns with a second density corresponding to the first density in the layout pattern, dividing the layout region into a plurality of sub-regions with a third density, adjusting a size of the first dummy pattern according to a difference between the second density and the third density, and outputting the layout pattern and the first dummy patterns on a photomask.
United Microelectronics Corp.
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Chen-Hua Heng-Kun Jian-Cheng Chin-Yueh Hsiang Yao-Jen
Tsai Chen Chen Tsai Yang Fan