Method for fabricating a read sensor for a read transducer
A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
Western Digital (Fremont), LLC
G Y G Y Y Y G Y
G11B Y10T G01R Y10T Y10T Y10T G11B Y10T
inventional additional inventional additional additional additional inventional additional
Guanxiong Chih-Ching Ming Anup G. Miao Wei Guanghong Zhihong
Li Hu Mao Roy Wang Gao Luo Zhang