Whyte Hirschboeck Dudek SC
Method of eliminating residual carbon from flowable oxide fill
Methods of forming an oxide layer such as high aspect ratio trench isolations, and treating the oxide substrate to remove carbon, structures formed by the method, and devices and systems incorporating the oxide material are provided.
Micron Technology, Inc.
H H H C H H C H H H H H C
H01L H01L H01L C23C H01L H01L C23C H01L H01L H01L H01L H01L C23C
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Li Weimin
Li Li