Slater Matsil, LLP
Photonic semiconductor device and method
A method includes forming multiple photonic devices in a semiconductor wafer, forming a v-shaped groove in a first side of the semiconductor wafer, forming an opening extending through the semiconductor wafer, forming multiple conductive features within the opening, wherein the conductive features extend from the first side of the semiconductor wafer to a second side of the semiconductor wafer, forming a polymer material over the v-shaped groove, depositing a molding material within the opening, wherein the multiple conductive features are separated by the molding material, after depositing the molding material, removing the polymer material to expose the v-shaped groove, and placing an optical fiber within the v-shaped groove.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chen-Hua Chih-Chieh Chung-Hao Hsing-Kuo Chuei-Tang
Yu Chang Tsai Hsia Wang