WPAT, P.C.
Automating storage, retrieval, and routine for process flow
In some embodiments, an automated storage and retrieval system (ASRS) for storing workpieces includes a main body, a robotic arm mechanism and at least one first station. The workpiece comprises a first container configured to hold at least one article. The main body includes at least one side wall configured to confine a storage space for the workpieces in at least one first direction parallel to a floor. The robotic arm mechanism is configured to reach the storage space, the storage space being further confined by the robotic arm mechanism in at least one second direction opposite to the at least one first direction. The at least one first station is configured with at least one first accessing port located within the storage space, and configured for the ASRS to perform a routine for a process flow.
Taiwan Semiconductor Manufacturing Company Ltd.
H
H01L
inventional
Chun-Jung Yung-Ho
Huang Chen