Brinks Hofer Gilson & Lione
Tunneling magnetic sensing element with insertion magnetic layer inspired into soft magnetic layer
A tunneling magnetic sensing element includes a laminate in which a pinned magnetic layer having a magnetization direction pinned, an insulating barrier layer, and a free magnetic layer having a magnetization direction variable with an external magnetic field are laminated in order from below. The insulating barrier layer is made of Mg—O. The free magnetic layer has a soft magnetic layer and an enhanced layer disposed between the soft magnetic layer and the insulating barrier layer to have a spin polarization ratio higher than the soft magnetic layer. An insertion magnetic layer made of one selected from Co—Fe—B, Co—B, Fe—B, and Co—Fe is inserted into the soft magnetic layer in a direction parallel to the interface of each layer constituting the laminate, and the soft magnetic layer is divided into multiple layers in a thickness direction through the insertion magnetic layer.
Alps Electric Co., Ltd.
H Y B G G H B H G G G
H01F Y10T B82Y G11B G01R H01L B82Y H01F G01R G11C G11B
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Yosuke Kazumasa Ryo Naoya Akio Hidekazu Yoshihiro Masamichi
Ide Nishimura Nakabayashi Hasegawa Hanada Kobayashi Nishiyama Saito