Workman Nydegger
Piezoelectric element, actuator device, liquid ejecting head and liquid ejecting apparatus
A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer 70 disposed on the lower electrode film, a upper electrode film 80 disposed on the piezoelectric layer 70, wherein the piezoelectric layer 70 is formed of a plurality of columnar grains 70a, and the upper electrode film 80 conforms to the surface shape of each of the grains 70a of the piezoelectric layer 70. 
Seiko Epson Corporation
H H H H B B B H B B H
H01L H01L H01L H01L B41J B41J B41J H01L B41J B41J H01L
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Masato Xin-Shan
Shimada Li