Keating & Bennett, LLP
Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter
A piezoelectric thin-film resonator includes a supporting substrate. A piezoelectric thin-film is formed on the supporting substrate. A lower electrode and an upper electrode are formed with the piezoelectric thin-film therebetween. The stiffness of at least one of the lower and upper electrodes is higher than that of the piezoelectric thin-film.
Murata Manufacturing Co., Ltd.
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Daisuke Yukio Masaki Seiichi Hideki Hajime Yoshihiko
Nakamura Yoshino Takeuchi Arai Kawamura Yamada Gotoh