The Webb Law Firm
Large-area shower electron beam irradiator with field emitters as an electron source
An electron beam irradiator capable of performing electron beam irradiation in a wide area at a high current density with a field emitter tip. The electron beam irradiator comprises: a vacuum chamber having a beam irradiation window formed longitudinally in an outer periphery of the vacuum chamber; a cathode placed centrally and longitudinally inside the vacuum chamber, and having a field emitter tip formed on the cathode, corresponding to the beam irradiation window; and a high voltage supply placed at one end of the vacuum chamber, and adapted to apply high voltage toward the cathode. The electron beam irradiation can be made in a wide area without using an electromagnet as well as in a high current density without using a heater such as a filament or an additional power supply, thereby to ensure a simplified structure as well as a reduced size.
Korea Atomic Energy Research Institute
H A G A G B
H01J A61L G21K A61L G21K B82Y
inventional inventional inventional additional inventional inventional
Seong-Hee Young-Kyung Young-Hwan Young-Uk Tae-Jae Cheol-Jin Byung-Cheol
Park Lim Han Jung Lee Lee Lee