Patterson + Sheridan, LLP
Wafer carrier
A wafer carrier comprises a supporting body having an opening therein, wherein said opening in said supporting body has a concave sidewall and a bottom surface in said supporting body which is curved in cross section; a plurality of vertical supporting rods configured to support and contact a wafer received in said opening and to displace said wafer from the bottom surface of the opening in said supporting body; wherein one of said supporting rods has an end for contacting and supporting said wafer; and wherein when viewing from a top view of the wafer carrier, one of said supporting rods has a base lining on the concave sidewall of said opening in said supporting body, a first concave side opposite to the base and two second concave sides connecting the base and the first concave side.
EPISTAR CORPORATION
H C H H
H01L C23C H01L H01L
inventional inventional additional inventional
Chung-Ying Ying-Chan Chi Yun-Ming
Chang Tseng Shen Lo