Slater and Matsil, L.L.P.
Semiconductor devices, methods of manufacture thereof, and methods of forming resistors
Semiconductor devices, methods of manufacture thereof, and methods of forming resistors are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes forming a first insulating material over a workpiece, and forming a conductive chemical compound material over the first insulating material. The conductive chemical compound material is patterned to form a resistor. A second insulating material is formed over the resistor, and the second insulating material is patterned. The patterned second insulating material is filled with a conductive material to form a first contact coupled to a first end of the resistor and to form a second contact coupled to a second end of the resistor.
Taiwan Semiconductor Manufacturing Company, Ltd.
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inventional inventional additional inventional inventional inventional inventional inventional inventional
Kuo-Feng Chin-Shan Chih-Hung Tung-Heng Chia-Yu Jian-Hao Shyue-Shyh
Yu Hou Wang Hsieh Lu Chen Lin