Birch, Stewart, Kolasch & Birch, LLP
Semiconductor device and method for manufacturing the same
A semiconductor device includes an n-channel, a p-channel, a first gate dielectric layer, a second gate dielectric layer, a second dielectric sheath layer, and a metal gate. The first gate dielectric layer is around the n-channel. The first dielectric sheath layer is around the first gate dielectric layer. The second gate dielectric layer is around the p-channel. The second dielectric sheath layer is around the second gate dielectric layer, in which the first dielectric sheath layer and the second dielectric sheath layer comprise different materials. The metal gate electrode is around the first dielectric sheath layer and the second dielectric sheath layer.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chih-Sheng Cheng-Hsien Tzu-Chiang Chih-Chieh I-Sheng
Chang Wu Chen Yeh Chen