Ladas & Parry LLP
Mask plate and manufacturing method thereof
The present invention discloses a mask plate and manufacturing method thereof. The mask plate comprises a substrate formed with a transparent region, a non-transparent region and a semi-transparent region. The semi-transparent region comprises a semi-transparent film, and a middle portion of the semi-transparent region is formed so that the intensity of the light transmitted therethrough is reduced in a larger extent than that in which the intensity of the light transmitted through the portion other than the middle portion in the semi-transparent region is reduced, whereby the light transmitted through the semi-transparent region is uniform.
Beijing Boe Optoelectronics Technology Co., Ltd.
G G
G03F G03F
additional inventional
Chunbae Wei Yunfeng Wei
Park Qin Piao Wang