Slater Matsil, LLP
Semiconductor device and method for manufacturing same
A semiconductor device includes an n+ type silicon carbide substrate, an n− type layer, an n type layer, a plurality of trenches, a p type region, an n+ type region, a gate insulating film, a gate electrode, a source electrode, a drain electrode, and a channel. The plurality of trenches is disposed in a planar matrix shape. The n+ type region is disposed in a planar mesh type with openings, surrounds each of the trenches, and is in contact with the source electrode between the trenches adjacent to each other in a planar diagonal direction. The p type region is disposed in the opening of the n+ type region in a planar mesh type.
Hyundai Motor Company
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Junghee NackYong Dae Hwan JongSeok Youngkyun
Park Joo Chun Lee Jung