Schwabe, Williamson & Wyatt, P.C.
Multi-device flexible electronics system on a chip (SOC) process integration
Embodiments of the present disclosure describe multi-device flexible systems on a chip (SOCs) and methods for making such SOCs. A multi-material stack may be processed sequentially to form multiple integrated circuit (IC) devices in a single flexible SOC. By forming the IC devices from a single stack, it is possible to form contacts for multiple devices through a single metallization process and for those contacts to be located in a common back-plane of the SOC. Stack layers may be ordered and processed according to processing temperature, such that higher temperature processes are performed earlier. In this manner, intervening layers of the stack may shield some stack layers from elevated processing temperatures associated with processing upper layers of the stack. Other embodiments may be described and/or claimed.
Intel Corporation
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Ravi Marko Brian S. Han Wui Niloy Sansaptak
Pillarisetty Radosavljevic Doyle Then Mukherjee Dasgupta