Fitzpatrick, Cella, Harper & Scinto
Method for forming deposition film
 A method for forming a deposition film by introducing a starting gas for formation of a deposition film into a reaction chamber housing a substrate therein and forming a deposition film on the substrate by irradiation with light comprises performing deposition by using a monochromatic light and a continuous polychromatic light in combination and projecting the lights on the substrate on which the deposition film is to be formed. 
Canon Kabushiki Kaisha
C H H H C H
C23C H01L H01L H01L C23C H01L
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Hiroshi Katsuji Hisanori Masafumi Yutaka
Echizen Takasu Tsuda Sano Hirai