Knobbe Martens Olson & Bear, LLP
Method of manufacturing organic light-emitting display device
A method of manufacturing an organic light-emitting display device includes forming a silicon layer and a gate insulating film over a substrate having a transistor region and a capacitor region; forming a halftone photoresist over the substrate; patterning the silicon layer and the gate insulating film; forming a residual photoresist by subjecting the halftone photoresist to an ashing process to leave part of the halftone photoresist over the transistor region; and doping at least a portion of the silicon layer with impurities by applying the impurities over an entire region of the substrate.
Samsung Display Co., Ltd.
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Sun Chun-Gi Yul-Kyu Jong-Hyun Sang-Ho
Park You Lee Park Moon