Muncy, Geissler, Olds & Lowe, P.C.
Methods of fabricating solid-state imaging devices having flat microlenses
Methods of fabricating solid-state imaging devices having a flat microlens array are provided. The method includes providing a semiconductor substrate having a plurality of photoelectric conversion elements. A color filter layer is formed above the semiconductor substrate. A lens material layer is formed on the color filter layer. A hard mask having a lens-shaped pattern is formed on the lens material layer. The method further includes etching both the hard mask and the lens material layer to form a microlens with a flat top surface that is formed from the lens material layer, and to leave a portion of the hard mask on the flat top surface of the microlens. The method also includes removing the portion of the hard mask that remains on the microlens.
VISERA TECHNOLOGIES COMPANY LIMITED
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Huang-Jen Ji-Hong Tzu-Wei
Chen Lin Huang