McDermott Will & Emery LLP
Semiconductor device having low impedance and method of manufacturing the same
The present inventive concept relates to a semiconductor device, and more particularly to a semiconductor device that can increase the amount of current by reducing impedance, and a method of manufacturing the semiconductor device.A semiconductor device comprises an n− type epitaxial layer disposed on a first surface of an n+ type silicon carbide substrate; an n+ region disposed on the n− type epitaxial layer; first and second trenches disposed in the n− type epitaxial layer and the n+ region; first and second gate insulating layers disposed inside the first and second trenches, respectively; first and second gate electrodes disposed on the first and second gate insulating layers, respectively; a p-type region disposed on two sides of one of the first and second trenches; an oxidation film disposed on the first and second gate electrodes; a source electrode disposed on the n+ region and the oxidation film; and a drain electrode disposed on a second surface of the n+ type silicon carbide substrate, wherein a first channel is disposed on two sides of the first trench and a second channel is disposed on two sides of the second trench.
HYUNDAI MOTOR COMPANY
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Youngkyun Dae Hwan Junghee Jong Seok Kyoung-Kook
Jung Chun Park Lee Hong