Lewis Roca Rothgerber Christie LLP
Multilayer metal stack heater
A silicon photonic integrated circuit with a heater. In some embodiments, the silicon photonic integrated circuit includes a first waveguide, on a top surface of the silicon integrated circuit, and a heater element, on the first waveguide. The heater element may include a first metal layer, on the first waveguide, and a second metal layer, on the first metal layer, the second metal layer having a different composition than the first metal layer, the second layer having a thickness of less than 300 nm.
Rockley Photonics Limited
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G02F G02F
inventional inventional
Chia-Te Sanna Leena Yi
Chou Mäkelä Zhang