Oblon, McClelland, Maier & Neustadt, L.L.P.
Plasma processing apparatus and method
A plasma processing method includes executing an etching process that includes supplying an etching gas into a process container in which a target substrate is supported on a second electrode serving as a lower electrode, and applying an RF power for plasma generation and an RF power for ion attraction to turn the etching gas into plasma and to subject the target substrate to etching. The etching process includes applying a negative DC voltage to a first electrode serving as an upper electrode during the etching to increase an absolute value of self-bias on the first electrode. The etching process includes releasing DC electron current generated by the negative DC voltage to ground through plasma and a conductive member disposed as a ring around the first electrode, by using a first state where the conductive member is connected to a ground potential portion.
TOKYO ELECTRON LIMITED
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Hiroki Naoki Chishio Manabu Noriyuki Toshihiro Yoshinobu Kazuo Akira Daisuke Manabu Masaru Yohei Kunihiko Masashi Ryuji Hidetoshi
Yamazaki Matsumoto Koshimizu Sato Kobayashi Hayami Ohya Kibi Koshiishi Yano Iwata Sugimoto Yamazawa Hinata Saito Ohtani Hanaoka