Duane Morris LLP
Grating couplers and methods of making same
Disclosed are grating couplers having a high coupling efficiency for optical communications. In one embodiment, an apparatus for optical coupling is disclosed. The apparatus includes: a substrate; a grating coupler comprising a plurality of coupling gratings over the substrate, wherein each of the plurality of coupling gratings extends in a first lateral direction and has a cross-section having a middle-raised shape in a second lateral direction, wherein the first and second lateral directions are parallel to a surface of the substrate and perpendicular to each other in a grating plane; and a cladding layer comprising an optical medium, wherein the cladding layer is filled in over the grating coupler.
Taiwan Semiconductor Manufacturing Co., Ltd.
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Lan-Chou Huan-Neng Chewn-Pu Wen-Shiang Feng-Wei
Cho Chen Jou Liao Kuo