The Dobrusin Law Firm, PC
Vertical structure nonpolar LED chip on lithium gallate substrate and preparation method therefor
The present invention discloses a vertical structure nonpolar LED chip on a lithium gallate substrate and a preparation method therefor. According to the method, LED epitaxial wafers are grown on a lithium gallate substrate, wherein the LED epitaxial wafers comprise a GaN buffer layer grown on the lithium gallate substrate, a non-doped GaN layer on the GaN buffer layer, an n-type doped GaN thin film on the non-doped GaN layer, an InGaN/GaN quantum well on the n-type doped GaN thin film and a p-type doped GaN thin film on the InGaN/GaN quantum well. Then, electrode patterns are prepared on the surfaces of the LED epitaxial wafers by the steps of spin coating, photoetching, developing and cleaning, and an electrode metal is sequentially deposited on the upper surfaces of the epitaxial wafers. Then, the LED epitaxial wafers are transferred to a copper substrate. Then, the original lithium gallate substrate is lifted off by an HCl solution, a silicon dioxide protective layer is prepared, and the corresponding part of an electrode is exposed. Then, SiO2 on the electrode is etched away, and a complete vertical structure LED chip is formed.
South China University of Technology
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Wenliang Zichen Guoqiang
Wang Zhang Li