Westerman, Hattori, Daniels & Adrian, LLP
Semiconductor device having metal wirings of laminated structure
A semiconductor device that includes a metal wiring formed on the insulating film and having a main wiring portion laminated with a plurality of metal films and a metal protection film formed at least on the upper surfaces of the main wiring portion and made of a precious metal material.
Fujitsu Semiconductor Limited
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Kouichi Jirou Hideaki
Nagai Miura Kikuchi