Sughrue, Mion, Zinn, Macpeak & Seas
Surface potential electrometer
 An electrometer having small width size and stable characteristics includes a chopper portion for chopping electric line of force emitted from an object to be measured. The chopper portion is constituted with a tuning fork type bending vibrator including a first metal plate as a detection electrode portion for receiving electric line of force, a second metal plate and an insulating plate for connecting the first and second metal plates in a plane. The bending vibrator is arranged such that its vibrating direction is coincident with direction of electric line of force, so that the width size of the electrometer can be reduced and the characteristics thereof can be stabilized. 
NEC Corporation
G G
G01R G01R
inventional inventional
Hiroaki
Yamada