Patterson + Sheridan, LLP
Sidewall spacer with controlled geometry
Embodiments herein describe techniques for forming sidewalls on vertical structures on a semiconductor substrate. In one embodiment, the semiconductor substrate includes a first layer (e.g., a conductive layer such as an electrode) on which a second layer (e.g., an insulator) is disposed. An undercut etch is performed which selectively etches the sides of the material in the first layer but not the material in the second layer. A conformal deposition process is used to deposit the material of the sidewall into the undercut regions. Further etches can be performed to shape the sidewalls disposed on the sides of the material in the first layer.
International Business Machines Corporation
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Devendra K. Yun Seog Joel P.
Sadana Lee De Souza