Fitzpatrick, Cella, Harper & Scinto
Micro-structure fabrication method
A micro-structure fabrication method fabricates a micro-structure including an inclined part inclined to a principal plane of a substrate by plastically deforming a work piece having the substrate with the principal plane. The structure fabrication method includes the steps of providing in the work piece a projection configured to protrude from a first surface and away from the principal plane of the substrate, and bending the work piece toward a second surface opposite to the first surface. The bending is accomplished by applying a force on a block including an inclined pressure plane that is abutted on the projection for plastically deforming the work piece, in which in bending the work piece, the direction of a first force applied on the work piece intersects with the direction of a second force of the inclined pressure plane pushing the projection.
Canon Kabushiki Kaisha
Y Y B Y B Y
Y10T Y10T B81C Y10T B81B Y10T
additional additional inventional additional additional additional
Yoshitaka Chienliu Masao
Zaitsu Chang Majima