Seyfarth Shaw LLP
Compound semiconductor field effect transistor gate length scaling
A compound semiconductor transistor may include a channel layer. The compound semiconductor transistor may also include a dielectric layer on the channel layer. The compound semiconductor transistor may further include a gate. The gate may include a vertical base portion through the dielectric layer and electrically contacting the channel layer. The gate may also include a head portion on the dielectric layer and electrically coupled to the vertical base portion of the gate.
QUALCOMM Incorporated
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Gengming Xia Periannan Bin
Tao Li Chidambaram Yang