Birch, Stewart, Kolasch & Birch, LLP
Semiconductor substrate structures, semiconductor devices and methods for forming the same
A semiconductor substrate structure includes a substrate having a first conductivity type, an oxide layer disposed on the substrate, and a semiconductor layer disposed on the oxide layer. The semiconductor substrate structure also includes a first buried layer disposed in the semiconductor layer, having a second conductivity type opposite to the first conductivity type. The semiconductor substrate structure further includes a second buried layer disposed in the semiconductor layer and above the first buried layer, having the first conductivity type, wherein the first buried layer and the second buried layer are separated by a distance.
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
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Chia-Hao Manoj Pei-Heng
Lee Kumar Hung