Greenblum & Bernstein, P.L.C.
Method for inspecting solution discharge apparatus and method for producing device
A inspection method for a solution discharge device includes a discharge step, a imaging step, an acquisition step, and a judgement step of identifying a main drop among deposits found to have a deposit surface area falling within a deposit surface area standard for each imaging area. An upper bound and a lower bound of the deposit surface area standard are determined according to timing of imaging in the imaging step, such that the values applied to deposits in an imaging area imaged at a second imaging time that is later than a first imaging time are smaller than those applied to deposits in an imaging area imaged at the first imaging time.
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
G B H
G06T B41J H01L
inventional inventional inventional
Takayuki
Miyoshi