McClure, Qualey & Rodack, LLP
Mechanisms for cleaning load ports of semiconductor process tools
Embodiments of mechanisms for cleaning load ports of semiconductor process tools are provided. The automatic system includes a vacuum cleaner, a rail, and a transport mechanism. The transport mechanism is moveably disposed on the rail and transfers the vacuum cleaner along the rail. The automatic system also includes a system controller. The system controller is connected to the semiconductor process tools and the transport mechanism to detect which load port is unoccupied, such that the system controller controls the transport mechanism to transfer the vacuum cleaner to the unoccupied load port to perform a cleaning process.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
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H01L H01L H01L H01L
inventional inventional inventional inventional
Mei-Wei Ching-Fa Hung-Wen
Wu Chen Chen