Ditthavong & Steiner, P.C.
Optoelectronic device and method for manufacturing the same
A method of fabricating an optoelectronic device, comprising: providing a substrate, wherein the substrate comprises a first major surface and a second major surface opposite to the first major surface; forming a light emitting stack on the second major surface of the substrate; forming a supporting layer covering the light emitting stack; forming a plurality of first modified regions in the substrate by employing a first energy into the substrate, wherein the supporting layer is formed before forming the plurality of first modified regions; forming an oxide layer on the first major surface of the substrate; and cleaving the substrate along the plurality of first modified regions.
Epistar Corporation
H B H B B H H H H H H B H H
H01L B23K H01L B23K B23K H01L H01L H01L H01L H01L H01L B23K H01L H01L
additional additional inventional inventional inventional additional additional inventional additional additional inventional additional inventional inventional
Chun Chang Biau-Dar Liang Sheng Cheng Hsiang Pei Shan
Chen Chen Chi Ho Fang