Birch, Stewart, Kolasch & Birch, LLP
Contact structure and the method of forming the same
A semiconductor device and method of forming the same that includes forming a dielectric layer over a substrate and patterning a contact region in the dielectric layer, the contact region having side portions and a bottom portion that exposes the substrate. The method can also include forming a dielectric barrier layer in the contact region to cover the side portions and the bottom portion, and etching the dielectric barrier layer to expose the substrate. Subsequently, a conductive layer can be formed to cover the side portions and the bottom portion of the contact region and the conductive layer can be annealed to form a silicide region in the substrate beneath the bottom portion of the contact region, and the conductive layer can then be selectively removed on the side portions of the contact region. Finally, a surface treatment can be performed in the contact region to form N-rich areas in the dielectric layer and a nitridation region in the substrate, and an adhesion layer can formed in the contact region to cover the side portions and the bottom portion of the contact region.
Taiwan Semiconductor Manufacturing Co., Ltd.
H H H H H H H H H H H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional inventional inventional inventional inventional inventional inventional additional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional additional inventional additional inventional
Wei-Yip Ken-Yu Chun-I Sheng-Hsuan Ming-Hsing Yu-Wen Hong-Mao Chih-Wei Wei-Jung Yu-Hsiang
Loh Chang Tsai Lin Tsai Cheng Lee Chang Lin Liao