Muir Patent Law, PLLC
Probe card inspection apparatus
Provided is a probe card inspection apparatus including: a substrate; a first insulating layer which covers the substrate; and a first detection unit which is formed on the first insulating layer and detects physical defects of a probe of a probe card. The first detection unit includes: a ground detection unit including a first conductive pattern which defines a plurality of openings which expose a portion of the first insulating layer and detect defects of a ground probe of the probe card and; and a signal and power detection unit including a second conductive pattern which defines a plurality of openings which expose another portion of the first insulating layer and detect defects of a signal and power supply probe of the probe card.
SAMSUNG ELECTRONICS CO., LTD.
G G
G01R G01R
inventional inventional
Jung-woo Joon-su Shin-ho
Kim Ji Kang