Kenyon & Kenyon
Scanning head comprising a semiconductor substrate with a blind hole containing a light source
A scanning head is described, having on a side facing a scale at least one patterned photodetector, which is realized in a semiconductor substrate. The semiconductor substrate has an anisotropic blind hole that is symmetrical to the several photodetectors, and a light source arranged on a base plate in the blind hole. The transmitting grating for the light source is formed either in a metallization layer on the semiconductor substrate or, in the form of bars of the semiconductor substrate that have not been etched away. The distance between the scale and the transmitting grating as well as the distances between the scale and the patterned photodetector are essentially the same.
Johannes Heidenhain GmbH
H G
H01L G01D
additional inventional
Elmar Wolfgang
Mayer Holzapfel