Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Mold, method of producing mold, production apparratus, and method of manufacturing semiconductor device
A edge electrode mold according to an embodiment includes a base having a first main surface and one or more protruding structures disposed on the first main surface. The protruding structures include a protrusion projecting from the first main surface of the base, an edge electrode disposed at the protrusion, and an electrolytic hydrophobic film having electrolytic property and hydrophobicity disposed on the upper end surface of a protruding shape including the protrusion and the edge electrode.
The University of Tokyo Kabushiki Kaisha Toshiba
G H G
G03F H01L G03F
inventional inventional inventional
Yongfang Hiroyuki
Li Fujita