McClure, Qualey & Rodack, LLP
Light source system and polarization angle adjusting method
A light source system is provided. The light source system is capable of measuring a polarization angle and includes a light source configured to emit an original light beam, and the original light beam has an original polarization angle. The light source system further includes an amplifying module configured to amplify the original light beam and generate a forward beam for hitting a target, and the forward beam has a forward polarization angle that is equal to the original polarization angle. The light source system further includes a polarization measurement unit, and the polarization measurement unit includes a first polarization measurement module configured to receive a first return beam and measure a first polarization angle of the first return beam. The first return beam is reflected from the target.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Han-Lung Po-Chung Jen-Hao Chun-Lin Li-Jui
Chang Cheng Yeh Chang Chen