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Manufacturable CMP assisted liftoff process to fabricate write pole for perpendicular recording heads
This invention describes a manufacturable method, including a CMP liftoff process, for removing masking materials after ion milling for fabricating the write pole of a magnetic head. Significant parameters for the CMP assisted liftoff process include the thickness of the remaining mask materials after the write pole ion milling for effective CMP assisted liftoff, the thickness of the dielectric fill material deposited to protect the write pole during the CMP liftoff step, and the type of CMP slurry, polishing pad and the polishing conditions that are required to yield satisfactory results.
Hitachi Global Storage Technologies Netherlands, B.V.
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Quang Jui-Lung
Le Li