Adams & Wilks
Sample processing evaluation apparatus
A sample processing evaluation apparatus includes a charged particle beam column that irradiates a sample with charged particle beam, a sample holder that holds both ends of the sample, and a sample stage on which the sample holder is placed, in which the sample holder is configured to rotate the sample about a rotation axis between the sample stage and the charged particle beam column.
HITACHI HIGH-TECH SCIENCE CORPORATION
H H H H H H H H H H H
H01J H01J H01J H01J H01J H01J H01J H01J H01J H01J H01J
inventional inventional additional inventional additional additional additional additional additional additional inventional
Toshiaki Hiroyuki
Fujii Suzuki