Nixon Peabody LLP
Multiple frequency plasma chamber, switchable RF system, and processes using same
An RF power supplier is provided, that enables multiple-frequency RF power. The system uses N RF signal generators, combines the RF signals, amplify the combined signals, and then separates the amplified signal. The output of the system is then a multiple-frequency RF power. Optionally, the frequencies are switchable, so that one may select which frequencies the system outputs.
Advanced Micro-Fabrication Equipment, Inc. Asia
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Gerald Tuqiang Xueyu Hiroshi Jinyuan
Yin Ni Qian Iizuka Chen