Blakely, Sokoloff, Taylor & Zafman LLP
Dual resistance heater for phase change devices and manufacturing method thereof
A dual resistance heater for a phase change material region is formed by depositing a resistive material. The heater material is then exposed to an implantation or plasma which increases the resistance of the surface of the heater material relative to the remainder of the heater material. As a result, the portion of the heater material approximate to the phase change material region is a highly effective heater because of its high resistance, but the bulk of the heater material is not as resistive and, thus, does not increase the voltage drop and the current usage of the device.
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Greg Charles C. Yudong Maria Santina Ilya V. Tyler
Atwood Kuo Kim Marangon Karpov Lowrey