Slater & Matsil, L.L.P.
Auto device skew manufacturing
A system and method for manufacturing semiconductor devices is disclosed. An embodiment comprises using desired device parameters to choose an initial manufacturing recipe. Once chosen, the initial manufacturing recipe may be modified by determining and applying an offset adjustment based on previous manufacturing to tune the recipes for the particular equipment to be utilized in the manufacturing process.
Taiwan Semiconductor Manufacturing Company, Ltd.
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G06F Y02P G05B G05B
inventional additional inventional additional
Hui-Yun Chia-Tong Jui-Long
Chao Ho Chen