Lowe Hauptman & Ham, LLP
Adaptive and automatic determination of system parameters
A MIMO optimizer is used to identify tunable process parameters for processing equipment.
Taiwan Semiconductor Manufacturing Company, Ltd.
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G05B G05B G05B G05B G05B Y02P Y02P
additional inventional inventional additional additional additional additional
Jo Fei Jong-I Sunny Chia-Tong Po-Feng
Wang Mou Wu Ho Tsai