Chen Yoshimura LLP
Piezoelectric thin film resonator with insertion film, filter, and multiplexer
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; and an insertion film that is inserted between the lower electrode and the upper electrode, is located in an outer peripheral region within a resonance region where the lower electrode and the upper electrode face each other across the piezoelectric film, is located in a region that is located outside the resonance region and surrounds the resonance region, is not located in a center region of the resonance region, and includes a first part, which is located in the resonance region and has a first film thickness, and a second part, which is located outside the resonance region and has a second film thickness, the first film thickness being less than the second film thickness.
TAIYO YUDEN CO., LTD.
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Tokihiro Tsuyoshi Taisei Jiansong Shinji
Nishihara Yokoyama Irieda Liu Taniguchi