Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Plasma processing apparatus and method
An apparatus includes an upper electrode and a lower electrode for supporting a wafer disposed opposite each other within a process chamber. A first RF power supply configured to apply a first RF power having a relatively higher frequency is connected to the upper electrode. A second RF power supply configured to apply a second RF power having a relatively lower frequency is connected to the lower electrode. A variable DC power supply is connected to the upper electrode. A process gas is supplied into the process chamber while any one of application voltage, application current, and application power from the variable DC power supply to the upper electrode is controlled, to generate plasma of the process gas so as to perform plasma etching.
Tokyo Electron Limited
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Chishio Masashi Manabu Kazuo Akira Daisuke Masaru Naoki Ryuji Yohei Kunihiko Noriyuki
Koshimizu Saito Iwata Kibi Koshiishi Yano Sugimoto Matsumoto Ohtani Yamazawa Hinata Kobayashi