Lumen Patent Firm
Implementation of rigorous coupled wave analysis having improved efficiency for characterization
Improved optical characterization is provided by organizing the optical modeling calculations such that incident radiation parameters (e.g., wavelength) are varied in the outermost loop of any modeling run. By completing calculations for all combinations of structure parameters at one wavelength before moving to the next wavelength, calculation efficiency can be greatly improved. In particular, with this approach it is not necessary to cache (or re-compute) intermediate results pertaining to different wavelengths, in contrast to conventional approaches. Further improvements in efficiency can be obtained by organizing reflectance calculations such that for any layer Ll, stored intermediate results pertaining to layers below Ll can be used to calculate optical response as parameters for Ll and layers above Ll are varied. Similarly, transmittance calculations can be organized such that for any layer Ll, stored intermediate results pertaining to layers above Ll can be used to calculate optical response as parameters for Ll and layers below Ll are varied.
n&k Technology, Inc.
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inventional inventional inventional
Guoguang
Li