Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Apparatus for emitting a beam to a sample used for manufacturing a semiconducor device
 An apparatus for emitting a beam to a sample used for manufacturing a semiconductor device in order to process the sample, includes a chamber having an opening, a moving mechanism provided in the chamber, for moving the sample in X-, Y- and Z-axis directions, and a beam emitting system associated with the opening of the chamber, for emitting a beam to the sample in the chamber. The apparatus further includes an optical position detector for guiding a coherent light beam into the chamber and detecting a light beam output from the chamber. The optical position detector has light beam generating unit for generating a coherent light beam to be emitted to the sample, light-receiving unit for receiving a light beam from a surface of the sample, and converting unit for converting a signal output from the light-receiving unit into signals in the X-, Y- and Z-axis directions. 
Topcon Corporation Kabushiki Kaisha Toshiba
G
G03F
inventional
Ryoichi Kazuo Shinya Susumu Toru Hitoshi
Hirano Abe Watanabe Saito Tojo Suzuki