Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Probe card inclination adjusting method, inclination detecting method and storage medium storing a program for performing the inclination detecting method
An inclination adjusting method adjusts an inclination of a probe card installed at a probe apparatus to make the probe card be in parallel with a mounting surface of a movable mounting table for mounting thereon an object to be inspected. The method includes: detecting an average tip height of multiple probes disposed at each of plural locations of the probe card by using a tip position detecting device; obtaining an inclination of the probe card with respect to the mounting table based on differences in the average tip heights detected from the plural locations of the probe card; and adjusting the inclination of the probe card based on the obtained inclination.
Tokyo Electron Limited
G
G01R
inventional
Tetsuji Takeshi Hiroshi
Watanabe Kawaji Yamada