Rosenman & Colin, LLP
Process for preparing a limo2 type heterometallic oxide film
An organometallic compound of formula LiOR&#8242;.(R&#8242;O)MR2 is vaporized at a low temperature and employed in a CVD process of a heterometallic oxide film of the LiMO2 type, wherein M is a Group 13 element such as Al or Ga; R is a C1-10 alkyl group; and R&#8242; is a C2-10 alkyl group.
Korea Research Institute of Chemical Technology
C
C23C
inventional
Su-Jin Won-Yong Yun-Soo
Ku Koh Kim