Hauptman Ham, LLP
Drippage prevention system and method of operating same
A drippage prevention system including: a first automatic control valve (ACV), an input of the first ACV fluidically connected to a source of fluid to be dispensed, the first ACV having a position ranging from fully closed to fully open; a second ACV, an input of the second ACV being fluidically connected to the output of the first ACV, and an output of the second ACV being fluidically connected to a nozzle, the second ACV having positions ranging from fully closed to fully open; a proxy sensor configured to generate a proxy signal representing an indirect measure of a position of the first ACV; and a controller electrically connected to the first and second ACVs and the proxy sensor, the controller being configured to cause the second ACV to close based on the proxy signal and thereby stop flow of the liquid to the nozzle.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H F B G B F F H G B F
H01L F16K B05C G03F B05C F16K F16K H01L G03F B05C F16K
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Chien-Hung Yung-Yao Chi-Hung Chun-Chih Wei Chang
Wang Lee Liao Lin Cheng