Developing method
A developing method comprises steps as follows. A wafer is rotated. A developer solution is dispensed onto the rotated wafer through a first nozzle. The first nozzle is moved back and forth between a first position and a second position, in which moving the first nozzle back and forth is performed such that the first nozzle moving forward to the second position is reversed at the second position and that the first nozzle moving forward to the first position is reversed at the first position, and the first position and the second position are directly over the wafer, and the developer solution is dispensed through the first nozzle when moving the first nozzle back and forth between the first position and the second position.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
G H H
G03F H01L H01L
inventional inventional inventional
Chung-Hao Fei-Gwo Jui-Ping Ming-Shane Yi-Rem Li-Kong
Chang Tsai Chuang Lu Chen Turn