Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
A semiconductor wafer has a bevel contour formed along the periphery thereof, products formed on the wafer, and an ID mark formed on the bevel contour. The ID mark shows at least the properties, manufacturing conditions, and test results of the products.
Kabushikia Kaisha Toshiba
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H01L H01L H01L H01L H01L H01L Y10S
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Masao Katsuya Katsujiro Shinichi Yukihiro Tsunetoshi Junji Norihiko Hiroshi Yuso Hajime Hiroaki Moriya Soichi
Iwase Okumura Tanzawa Nitta Ushiku Arikado Sugamoto Tsuchiya Matsushita Udo Nagano Yamada Miyashita Nadahara