Maschoff Brennan
Developing method
A developing method is provided. The developing method includes rotating a wafer. The developing method also includes dispensing, through a first nozzle, a developer solution onto the rotated wafer through a first nozzle at a first rotating speed. The developing method further includes dispensing, through a second nozzle, a rinse solution onto the rotated wafer through a second nozzle at a second rotating speed. The second rotating speed is less than the first rotating speed. In addition, the developing method includes simultaneously moving the first nozzle and the second nozzle during either the dispensing of the developer solution or the dispensing of the rinse solution.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H G H
H01L G03F H01L
inventional inventional inventional
Chung-Hao Li-Kong Ming-Shane Fei-Gwo Yi-Rem Jui-Ping
Chang Turn Lu Tsai Chen Chuang