JCIPRNET
Mask structure and manufacturing method thereof
A mask structure and a manufacturing method of the mask structure are provided. The mask structure includes a transparent substrate, a patterned metal layer, and a plurality of microlens structures. The patterned metal layer is disposed on the transparent substrate and exposing a portion of the transparent substrate. The microlens structures are disposed on the transparent substrate exposed by a portion of the patterned metal layer and being in contact with the portion of the patterned metal layer.
Unimicron Technology Corp.
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H05K Y10T H05K G03F H05K G01K G01K H05K H05K G03F G03F Y10T H05K H05K
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Cheng-Ta Shih-Lian Wei-Tse Pu-Ju Yu-Hua Jui-Jung
Ko Cheng Ho Lin Chen Chien