Husch Blackwell LLP
Element substrate, inspecting method, and manufacturing method of semiconductor device
A substrate including a semiconductor layer, where characteristics of an element can be evaluated with high reliability, and an evaluating method thereof are provided. A substrate including a semiconductor layer of the invention has a closed-loop circuit in which an antenna coil and a semiconductor element are connected in series, and a surface of an area over which the circuit is formed is covered with an insulating film. By using such a circuit, a contactless inspection can be carried out. Further, a ring oscillator can be substituted for the closed-loop circuit.
Semiconductor Energy Laboratory Co., Ltd.
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G01R H01L G01R G01R
inventional additional additional inventional
Koichiro Konami Masahiko Kiyoshi
Kamata Izumi Hayakawa Kato