Brooks Kushman P.C.
Machine table
The present disclosure provides a machine table for supporting a substrate. The machine table includes a body; pin holes each penetrating through the body in a thickness direction; and support pins each received in the pin hole and movable up and down in the thickness direction, each support pin including a built-in cavity from which an antistatic liquid is sprayed onto an upper surface of the body.
HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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Wen Hongkang Haitao
Wang Jia Wang