CKC & Partners Co., Ltd.
Method of fabricating transition metal dichalcogenide
A method of fabricating transition metal dichalcogenides includes a preparing step, a steaming step and a depositing step. The preparing step is performed for providing a transition metal substrate, a reactive gas and a solid chalcogenide. The steaming step is performed for heating the solid chalcogenide to generate a chalcogenide gas in a steaming space. The depositing step is performed for introducing the reactive gas into the chalcogenide gas to ionize the chalcogenide gas so as to generate a chalcogenide plasma in a depositing space. The depositing step is performed under a process vacuum pressure from low vacuum pressure to atmospheric pressure. The reactive gas and the chalcogenide gas are flowed from top to bottom through a top of the transition metal substrate. The loading substrate is heated at a loading substrate temperature, and the steaming space is different from the depositing space.
NATIONAL TSING HUA UNIVERSITY
H C C C H H C C
H01L C23C C23C C23C H01L H01L C23C C23C
inventional inventional inventional inventional inventional inventional inventional inventional
Henry Teng-Yu Jian-Guang Yu-Lun Yu-Ze
Medina Su Li Chueh Chen