Kenyon & Kenyon LLP
System having a plurality of scanning units of a position measuring device
In a system for detecting the position of an object in relation to a reference system, the object is arranged so as to be movable in relation to the reference system along at least two orthogonal first and second main movement axes. To record the position of the object in relation to the reference system, a position measuring device includes at least two two-dimensional measuring standards situated along the first main movement axis, and four scanning units for an optical scanning of these measuring standards. In addition, at least four additional supplementary scanning units are provided, which are situated between the four scanning units along the first main movement axis.
Johannes Heidenhain GmbH
G G G H H G
G01D G03F G01D H01L H01L G01B
additional inventional additional inventional inventional inventional
Markus Joerg Wolfgang Thomas Ralph Bernhard
Meissner Drescher Holzapfel Kaelberer Joerger Musch