Burns, Doane, Swecker & Mathis, LLP
Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a boron nitride/yttria composite containing surface and process for manufacture thereof.
Lam Research Corporation
H C
H01J C23C
inventional inventional
John E. Christopher C. Robert J.
Daugherty Chang O'Donnell