Blakely, Sokoloff, Taylor & Zafman LLP
Faceted catalytic dots for directed nanotube growth
Faceted catalytic dots are used for directing the growth of carbon nanotubes. In one example, a faceted dot is formed on a substrate for a microelectronic device. A growth promoting dopant is applied to a facet of the dot using an angled implant, and a carbon nanotube is grown on the doped facet of the dot.
Intel Corporation
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Been-Yih Brian S. Marko Robert S.
Jin Doyle Radosavljevic Chau