Flexible micro bumps operably coupled to an array of nano-piezoelectric sensors
Implementations and techniques for manufacturing flexible micro bumps operably coupled to an array of nano-piezoelectric sensors are generally disclosed. The micro bumps and coupled nano-piezoelectric device have use at least as tactile sensors. A wide variety of configurations of the micro bumps and the nano-piezoelectric device are anticipated.
Xi'an Jiaotong University
H H Y H
H01L H01L Y10T H01L
inventional inventional additional inventional
Weihua Hongzhong Xin
Liu Liu Li