Schwegman, Lundberg, Woessner & Kluth, P.A.
Sequential pulse deposition
A method for growing films on substrates using sequentially pulsed precursors and reactants, system and devices for performing the method, semiconductor devices so produced, and machine readable media containing the method.
Micron Technology, Inc.
C C C H C
C23C C23C C23C H01L C23C
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Weimin
Li