Haynes and Boone, LLP
Integrated circuit manufacturing tool condition monitoring system and method
A system and method for monitoring a process tool of an integrated circuit manufacturing system are disclosed. An exemplary method includes defining zones of an integrated circuit manufacturing process tool; grouping parameters of the integrated circuit manufacturing process tool based on the defined zones; and evaluating a condition of the integrated circuit manufacturing process tool based on the grouped parameters.
Taiwan Semiconductor Manufacturing Company, Ltd.
H H
H01L H01L
additional inventional
Jo Fei Sunny Chia-Tong Jong-I Chin-Hsiang Po-Feng
Wang Wu Ho Mou Lin Tsai