Michael Best & Friedrich LLP
Electrode structure for silicon photonics modulator
The purpose of the present invention is to allow a silicon photonics modulator to be operated at high speed with high frequency by providing an electrode structure for the small multichannel high-density silicon photonics modulator. This electrode structure for a silicon photonics modulator includes, on the planar surface of a silicon substrate, a first layer for forming a plurality of bias electrical wirings, and a second layer formed by aligning each of a plurality of ground electrode portions and each electrical wiring in the first layer.
PHOTONICS ELECTRONICS TECHNOLOGY RESEARCH ASSOCIATION
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Yasuyuki Kenichiro
Suzuki Yashiki