Sughrue Mion, PLLC
Refractive optical imaging system, in particular projection objective for microlithography
A refractive optical imaging system for imaging an object field arranged in an object surface of the imaging system into an image field arranged in an image surface of the imaging system on a demagnifying imaging scale has a multiplicity of optical elements which are configured and arranged such that a defined finite field curvature of the imaging system is set such that an object surface concavely curved relative to the imaging system is imaged into a flat image surface.
Carl Zeiss SMT AG
G G G
G02B G02B G03F
inventional inventional inventional
Dieter David Wilhelm Alexander
Bader Shafer Ulrich Epple