Integrated circuit containing standard logic cells and ilbrary-compatible, NCEM-enabled fill cells, including at least via-open-configured, gate-short-configured, TS-short-configured, and AA-short-conigured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATE-short-related failure mode, one TS-short-related failure mode, and one AA-short-related failure mode.
PDF Solutions, Inc.
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Carl Andrzej Simone Conor Tomasz Vyacheslav John Timothy Markus Kelvin Marcin Christopher Rakesh Stephen Nobuharu Sheng-Che Hideki Dennis Jeremy Sherry Indranil Larg Kimon Jonathan Hans Marci
Taylor Strojwas Comensoli O'Sullivan Brozek Rovner Kibarian Fiscus Rauscher Doong Strojwas Hess Vallishayee Lam Yokoyama Lin Matsuhashi Ciplickas Cheng Lee De Weiland Michaels Haigh Eisenmann Liao