Trench-embedded mirror structure for double substrate spatial light modulator
A double substrate spatial light modulator with an enlarged tilt angle is achieved. The device comprises a mirror attached on one end to a hinge wherein the hinge is attached to support posts adjacent to the mirror and attached to an underlying glass substrate, a trench within the glass substrate adjacent to the support posts wherein the mirror tilts upward from the glass substrate and downward into the trench, and an overlying glass substrate. The trench provides an enlarged tilt angle of mirror motion. This improves optical performance of the mirror projector including contrast ratio and gray scale.
Taiwan Semiconductor Manufacturing Co., Ltd.
G
G02B
inventional
Jiun Nan Jiann Tyng Yuh-Hwa
Chen Tzeng Chang