Oblon, Spivak, McClelland, Maier & Neustadt
Process for treating waste gases containing ClF.sub.3
 Waste gases containing ClF.sub.3 are treated by bringing them into contact with iron oxide substantially composed of a ferric oxide (Fe.sub.2 O.sub.3) at a linear velocity of about 10-200 cm/min at ordinary temperatures, or further into contact with an alkali agent at the same linear velocity and temperatures as the above, whereby the content of ClF.sub.3 can be reduced below the permissible level despite simultaneous emission of acidic gases, and yet which is capable of removing the concomitant acidic gases in an effective manner. 
Ebara Research Co., Ltd. Ebara Corporation
B
B01D
inventional
Yoichi
Mori