Ryan, Mason & Lewis, LLP
Staircase surface-enhanced raman scattering substrate
A method for fabricating a surface enhancement of Raman scattering substrate is disclosed. The method further includes patterning a hardmask on a portion of a substrate. The method further includes directionally etching a portion of an exposed portion of the substrate to form a first stepped portion. The method further includes trimming the hardmask laterally to a first predetermined width. The method further includes directionally etching a portion of exposed horizontal portions of the substrate to form a second stepped portion.
International Business Machines Corporation
B G H B
B82Y G01N H01L B82Y
inventional inventional inventional additional
Juntao Ruilong Kangguo Chanro
Li Xie Cheng Park