Studebaker & Brackett PC
Angular velocity sensor and manufacturing method therefor
One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part is defined as M milligrams, a circumference of the diaphragm part is defined as r meters, a stress applied to a piezoelectric layer is defined as σp pascals, a thickness thereof is defined as tp meters, a stress applied to an n-th layer from the weight part in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers is defined as σn pascals, and a thickness thereof is defined as tn meters (where n is a natural number), Teff expressed by Teff=r(σptp+Σσntn)/M satisfies {(−0.36f2+210)/33}≦Teff≦{(0.44f2+210)/33}.
FUJIFILM Corporation
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G01P G01P G01C G01C G01C
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Takuma Takayuki
Nakano Naono