General Electric Company
Actuation system utilizing MEMS technology
An actuator includes a pump including a first cavity and a diaphragm coupled in flow communication with the first cavity. The diaphragm is configured to pressurize a fluid contained in the first cavity. The pump further includes a first valve coupled in flow communication with the first cavity. The first valve is configured to release fluid from the first cavity when the first cavity is pressurized. The actuator also includes a piston assembly operatively coupled to the pump.
General Electric Company
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Joseph George Chenyu Jack Robert Joseph Thomas Ory
Rose Chou Orlando Moniz