Nixon Peabody LLP
System and method for high resolution optical imaging, data storage, lithography, and inspection
A system for applications, such as imaging, lithography, data storage, and inspection, includes an optical element, at least one structure, and a source of light. The structure is at least partially in and at least adjacent a surface of the optical element. The source of light has a mode profile that provides an electric field which has a vector component substantially perpendicular to a surface of the optical element. The source of light is positioned to propagate at least a portion of the light through the optical element onto the object. The structure enhances the electric field of the light which optically interacts with the object.
University of Rochester
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Lukas Thomas G.
Novotny Brown