Lee & Morse, P.C.
Hardmask composition and method of forming patterns using the hardmask composition
A hardmask composition includes a polymer including a moiety represented by the following Chemical Formula 1 and a solvent. *-A-B—*  [Chemical Formula 1]In the Chemical Formula 1, A and B are the same as defined in the detailed description.
Samsung SDI Co., Ltd.
H G H H G C H G
H01L G03F H01L H01L G03F C08L H01L G03F
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Mi-Young Joon-Young Hyun-Ji Chung-Heon You-Jung Yun-Jun Youn-Hee Hea-Jung Yoo-Jeong
Kim Moon Song Lee Park Kim Nam Kim Choi