Slater Matsil, LLP
Photoresist layer and method
A system and method for middle layers is provided. In an embodiment the middle layer comprises a floating component in order to form a floating region along a top surface of the middle layer after the middle layer has dispersed. The floating component may be a polymer with a floating group incorporated into the polymer. The floating group may comprise a fluorine atom.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ching-Yu Chen-Yu
Chang Liu