Morgan, Lewis & Bockius, LLP
Method for forming capacitor of semiconductor device
A method for forming a capacitor of a semiconductor device prevents characteristic of a device from being deteriorated due to residue resulting from a process step of defining a storage node. The method for forming a capacitor of a semiconductor device includes the steps of forming an insulating film having a contact hole on a substrate, forming a conductive layer within the contact hole, forming a first metal layer on an entire surface including the conductive layer, forming a dummy pattern and an etching barrier film on the first metal layer, selectively etching the dummy pattern and the etching barrier film to form a lower electrode formation region, forming a second metal layer in the lower electrode formation region using the first metal layer as a seed layer, removing the etching barrier film and the dummy pattern and performing a wet cleaning process to remove residue resulting from removing the etching barrier film and the dummy pattern, and removing the exposed first metal layer to form a lower electrode.
Hynix Semiconductor Inc.
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Hyung Bok
Choi