Gifford, Krass, Sprinkle, Anderson & Citkowski, P.C.
Substrate transfer apparatus
A substrate transfer apparatus that is designed provide an inclined transfer function that improves liquid saving efficiency of a process solution (developing solution) during the transfer of the substrate. The substrate transfer apparatus includes a first transfer unit for transferring a substrate, a second transfer unit spaced apart from an end of the first transfer unit, a third transfer unit disposed between the first and second transfer units and providing an inclined transfer that is capable of saving a developing solution adhered to the substrate during transfer of the substrate, and a transfer controller for controlling an inclined transfer angle and a connection state of the third transfer unit.
DMS Co., Ltd.
G H H
G02F H01L H01L
inventional inventional inventional
Ho-Youn Chun-Seok Sok-Joo Seung-Won
Park Jeong Lee Lee