Schmeiser, Olsen & Watts
Trench capacitors and memory cells using trench capacitors
A trench structure and a memory cell using the trench structure. The trench structure includes: a substrate; a trench having contiguous upper, middle and lower regions, the trench extending from a top surface of said substrate into said substrate; the upper region of the trench having a vertical sidewall profile; and the middle region of the trench having a tapered sidewall profile.
International Business Machines Corporation
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Xi Kangguo
Li Cheng