Haynes Boone, LLP
Semiconductor-on-insulator chip with<100>-oriented transistors
A semiconductor-on-insulator device includes a silicon active layer with a <100> crystal direction placed over an insulator layer. The insulator layer is placed onto a substrate with a <110> crystal direction. Transistors oriented on a <100> direction are formed on the silicon active layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Yee-Chia Tim Fu-Liang Chenming Hung-Wei
Yeo Tsao Yang Hu Chen