Hauptman Ham, LLP
Microscope apparatus
A microscope apparatus including an electromagnetic wave source configured to generate an illuminating electromagnetic wave. The microscope apparatus includes a first beam splitter configured to split the illuminating electromagnetic wave into a first component along a first path and a second component along a second path. The microscope apparatus includes a movable reflector module configured to adjust the second path. The microscope apparatus includes a second beam splitter configured to recombine the first component and the second component. The microscope apparatus includes an observing device arranged along the first path and configured to receive the recombined first component and second component. The microscope apparatus is configured to acquire, from the observing device, a phase image based on positioning of the movable reflector module and representative of an electric field distribution near an object located along the first path between the first beam splitter and the second beam splitter.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G G G
G02B G02B G02B
inventional additional inventional
Fu-Sheng Chih-Shiang Yu-Po Yan-Ying
Chu Chou Tang He