Sherr & Vaughn, PLLC
Optofluidic lithography system, method of manufacturing two-layered microfluidic channel, and method of manufacturing three-dimensional microstructures
An optofluidic lithography system including a membrane, a microfluidic channel, and a pneumatic chamber is provided. The membrane may be positioned between a pneumatic chamber and a microfluidic channel. The microfluidic channel may have a height corresponding to a displacement of the membrane and have a fluid flowing therein, the fluid being cured by light irradiated from the bottom to form a microstructure. The pneumatic chamber may induce the displacement of the membrane depending on an internal atmospheric pressure thereof.
SNU R&DB Foundation
B F B B G G B G B F G
B29C F15B B29L B81C G03F G03F B33Y G03F B81C F15B G03B
inventional inventional additional inventional inventional inventional additional inventional additional additional inventional
SeungAh SuEun Sunghoon Wook
Lee Chung Kwon Park