Muncy, Geissler, Olds & Lowe, P.C.
Method for producing a thin film transistor
A method for producing a thin film transistor includes forming a transistor prototype on a substrate. The transistor prototype includes two transparent electrodes adapted to form a source and a drain of a thin film transistor. Next, the two transparent electrodes of the transistor prototype are exposed in an environment full of a plasma. The plasma conducts a surface treatment on the two transparent electrodes of the transistor prototype to form the thin film transistor. The method can solve the problem of excessive contact resistance of the transparent conductive films of conventional thin film transistors.
NATIONAL SUN YAT-SEN UNIVERSITY
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inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Hua-Mao Ting-Chang Ming-Yen Tian-Yu
Chen Chang Tsai Hsieh