JCIPRNET
Wafer transferring device
A wafer transferring device adapted to suck and transfer a first wafer is provided. The wafer transferring device includes an arm and a supporting carrier. The supporting carrier is connected to the arm. The supporting carrier has a single vacuum suction port exposed to an upper surface of the supporting carrier. The supporting carrier is adapted to move to a position below the first wafer. The single vacuum suction port is adapted to suck a first central region of the first wafer so as to lift up and transfer the first wafer.
Powertech Technology Inc.
B H B B B
B25J H01L B25J B25J B25J
inventional inventional inventional inventional inventional
Yuan-Jung Cheng Fu-Hsiang Chu Yuan Ming Hsiu
Lu Chang Chang Mo Hsieh