Slater Matsil, LLP
Semiconductor device and method of manufacture
An interposer substrate is manufactured with a scribe line between adjacent regions. In an embodiment a separate exposure reticle is utilized to pattern the scribe line. The exposure reticle to pattern the scribe line will create an exposure region which overlaps and overhangs the exposure regions utilized to form adjacent regions.
Taiwan Semiconductor Manufacturing Company, Ltd.
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additional additional inventional additional additional additional additional additional inventional inventional additional inventional additional additional additional additional additional additional additional inventional inventional additional inventional additional additional additional additional additional additional additional additional inventional inventional additional additional
Shih-Wen Wen-Jung Jhih-Ming Chen-Hua Hsien-Pin Chun Hua Shang-Yun Wen-Hsin Tsung-Yang Chun-Che Chi-Hsi Chih-Ching
Huang Chuang Lin Yu Hu Chang Hou Wei Hsieh Chen Wu Lin