Ditthavong Mori & Steiner, P.C.
Multi-gas sensor and method of fabricating the sensor
The present invention is a multi-gas sensor and a method for fabricating the multi-gas sensor.The multi-gas sensor comprises a substrate, an epitaxial layer, a metal oxide layer, a first metal layer, a second metal layer and multiple third metal layers.The method for fabricating the multi-gas sensor comprises steps of forming an epitaxial layer on a substrate; etching the epitaxial layer to form a first epitaxial structure and a second epitaxial structure a fixed distance from the first epitaxial structure; forming a metal oxide layer on the first epitaxial structure; forming a first metal layer that has at least two metal layers on the second epitaxial structure; forming a second metal layer a fixed distance from the first metal layer on the second epitaxial structure; forming third metal layers respectively on the metal oxide layer, the first metal layer and the second metal layer.
National Cheng Kung University
G
G01N
inventional
Chi-Hsiang Huey-Ing Tsung-Han Tai-You Chung-Fu Wen-Chau
Hsu Chen Tsai Chen Chang Liu