Tutunjian & Bitetto, P.C.
Method and structure for forming silicon germanium finFET
A method of a forming a plurality of semiconductor fin structures that includes forming a sacrificial gate structure on a hardmask overlying a channel region portion of the plurality of sacrificial fins of a first semiconductor material and forming source and drain regions on opposing sides of the channel region. The sacrificial gate structure and the sacrificial fin structure are removed. A second semiconductor material is formed in an opening provided by removing the sacrificial gate structure and the sacrificial fin structure. The second semiconductor material is etched selective to the hardmask to provide a plurality of second semiconductor material fin structures. A function gate structure is formed on the channel region.
International Business Machines Corporation
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Juntao Peng Heng Kangguo
Li Xu Wu Cheng