Finnegan, Henderson, Farabow, Garrett & Dunner
Semiconductor device
 A semiconductor device is produced in such a manner that light having a wavelength in a range of 400 to 1000 nm is irradiated on a substrate so as to excite bonding hand of a material gas into a vibrating condition, and a thin film is formed on the substrate in accordance with a chemical vapor deposition method. 
Kabuskiki Kaisha Toshiba
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Hitoshi Takahiko
Ito Moriya