Harness, Dickey & Pierce, P.L.C.
Test apparatuses including probe card for testing semiconductor devices and operation methods thereof
A probe apparatus includes a tester including a voltage supply, and a probe card including a first probe and a first sensing pin. The first probe is electrically connected to both an output port of the voltage supply and an electrode pad of a first semiconductor device. The first sensing pin is electrically connected to both a controller and a sensing pad of the first semiconductor device.
Samsung Electronics Co., Ltd.
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Yukyum Gyuyeol
Kim Kim