Terminal for mechanical support of a heating element
A terminal for mechanical support of a heating element, includes a base device, a mounting device, the mounting device adapted to support the heating element, and a support device connecting the base device to the mounting device, the support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis.
Veeco Instruments Inc. Plansee SE
C H C H
C23C H01L C23C H05B
inventional inventional inventional inventional
Chenghung Paul Alexander I. Christian Arno Vadim
Chang Gurary Feist Plankensteiner Boguslavskiy