Burns, Doane, Swecker & Mathis, LLP
Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a carbonitride containing surface and process for manufacture thereof.
Lam Research Corporation
B H B C B
B01J H01J B01J C23C B01J
additional inventional additional inventional inventional
John E. Christopher C. Robert J.
Daugherty Chang O'Donnell