Defect detection system with multilevel output capability and method thereof
A defect detection system and related method take advantage of multilevel detection technique for detecting defects on an integrated circuit. The defect detection system utilizes an analog-to-digital converter for converting an analog sensing signal into an output code having a plurality of bits. The defect detection methods include an open test method and a short test method. The open and short test methods both include a calibrating method and a testing method individually. The calibrating method functions to determine a preset reference voltage for the analog-to-digital converter based on a predetermined code. The testing method makes use of the preset reference voltage and the predetermined code for generating the output code having a plurality of bits. The output code is then utilized to determine whether or not there are open or short defects on the integrated circuit and to classify the defects.
United Microelectronics Corp.
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inventional inventional inventional
Tsuoe-Hsiang Yu-Ming Chien-Kuo Yuan-Che Tai-Chi
Liao Sun Wang Lee Kao