Harness, Dickey & Pierce, P.L.C.
Methods of forming dielectric structures and capacitors
A capacitor including a dielectric structure, a lower electrode may be formed on a substrate. The dielectric structure may be formed on the lower electrode, and may include a first thin film, which may improve a morphology of the dielectric structure, and a second thin film, which may have at least one of an EOT larger than that of the first thin film and a dielectric constant higher than that of the first thin film. An upper electrode may be formed on the dielectric structure, and the dielectric structure may have an improved morphology and/or a higher dielectric constant.
Samsung Electronics Co., Ltd.
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Dae-Sik Seung-Hwan Han-Mei Ki-Yeon Kyoung-Ryul Cha-Young Young-Sun Sung-Tae
Choi Lee Choi Park Yoon You Kim Kim