McDermott Will & Emery LLP
Defect inspection apparatus and method
A defect inspection apparatus is disclosed that includes a stage, a photosensitive element, and a controller. The stage can support a semiconductor element that has a plurality of complete dies and partial dies surrounding the complete dies. The photosensitive element is located above the stage. The controller is electrically connected to the photosensitive element to drive the photosensitive element to inspect the defects of the complete dies and the partial dies.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H H G
H01L H01L G01N
inventional inventional inventional
Tsung-Hsien Chun-Yen Han-Tang
Lee Ho Lo