Sughrue Mion, PLLC
Thin film capacitor, method for manufacturing the same and printed circuit board incorporating the same
A thin film capacitor is provided with a substrate having a thickness equal to or more than 2 &mgr;m and equal to or less than 100 &mgr;m; a lower electrode on the substrate, which includes at least a highly elastic electrode and an anti-oxidation electrode on the highly elastic electrode; a dielectric thin film on the first lower electrode; and an upper electrode on the dielectric thin film; wherein the highly elastic electrode is made of a material having a Young's modulus higher than that of the anti-oxidation electrode.
NEC Corporation
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Shintaro Akinobu Toru
Yamamichi Shibuya Mori