Antonelli, Terry, Stout & Kraus, LLP
Microfabrication apparatus and microfabrication method
A microfabrication apparatus and a microfabrication method that, using a mechanical probe formed at its tip with a microscopic rod in sample preparation, can improve the life of the probe to 10 to 300 times from conventional 3 to 5 times in terms of the number of sample preparation enabling times.
Hitachi High-Technologies Corporation
H H
H01J H01J
inventional inventional
Muneyuki Satoshi Osamu Hiroyasu
Fukuda Tomimatsu Watanabe Shichi