Lowe Hautman & Ham, LLP
Front side implanted guard ring structure for backside illuminated image sensor
An image sensor includes a semiconductor substrate, a guard ring structure in the substrate, and at least one pixel surrounded by the guard ring structure. The guard ring structure is implanted in the substrate by high-energy implantation.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chun-Chieh Wen-De Jen-Cheng Dun-Nian Jeng-Shyan
Chuang Wang Liu Yaung Lin