Kinney & Lange, P.A.
Method of processing surface of polysilicon and method of processing surface of substrate assembly
Embodiments of the present invention provide a method of processing a surface of a polysilicon and a method of processing a surface of a substrate assembly. The method of processing a surface of a polysilicon includes forming a material film on the surface of the polysilicon; and processing, by using a chemico-mechanical polishing technology, the surface of the polysilicon on which the material film is formed. The material film is selected such that the polysilicon is preferentially removed in a polishing process.
BOE TECHNOLOGY GROUP CO., LTD.
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Xiaoyong Yucheng Zheng Xiaolong Chunping Chien Hung
Lu Chan Liu Li Long Liu