Kacvinsky Daisak Bluni PLLC
Ion source with single-slot tubular cathode
An ion source including a chamber housing defining an ion source chamber and including an extraction plate on a front side thereof, the extraction plate having an extraction aperture formed therein, and a tubular cathode disposed within the ion source chamber and having a slot formed in a front-facing semi-cylindrical portion thereof disposed in a confronting relationship with the extraction aperture, wherein a rear-facing semi-cylindrical portion of the tubular cathode directed away from the extraction aperture is closed.
Applied Materials, Inc.
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inventional additional additional additional inventional inventional
Alexander Jay Daniel Alexandre Frank Jay T. Bon-Woong Graham Svetlana Tseh-Jen You Chia Ronald
Perel Johnson Tieger Likhanskii Sinclair Scheuer Koo Wright Radovanov Hsieh Li Johnson