Kratz, Quintos & Hanson, LLP
Method for forming tungsten nitride film
A method for forming a tungsten nitride film including a first material gas supply step of supplying a first material gas composed of a tungsten compound gas, a reduction step of supplying a reducing gas, a second material gas supply step of supplying a second material gas composed of a tungsten compound gas, and a nitridation step of supplying a nitriding gas. Since a step of depositing tungsten on a substrate 5, and a step of forming tungsten nitride are performed separately, by varying the flow rate of each gas, the pressure when each gas is supplied, and the supply time, or the number of times each step is performed and the order in which the steps are performed, the quantity of tungsten deposited and the quantity of tungsten nitride formed can be controlled easily.
Ulvac Inc.
C H H
C23C H01L H01L
inventional inventional inventional
Eiichi Narishi Nobuyuki Masamichi
Mizuno Gonohe Kato Harada