Ion implantation with improved ion source life expectancy
A method of increasing ion source lifetime in an ion implantation system uses the introduction of an inert gas, such as argon or xenon, into the halide-containing source gas. Inert gas constituents have a cleansing effect in the plasma ambient by enhancing sputtering.
Advanced Micro Devices, Inc. Varian Associates, Inc.
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inventional additional inventional
Sandeep Jinning Emi Che-Hoo Jaime M.
Mehta Liu Ishida Ng Reyes