WPAT, P.C., Intellectual Property Attorneys
System of exhuast and operation method thereof
Some embodiments of the present disclosure provide a method of dissipating process exhaust from a chamber. The method includes conveying the process exhaust from the chamber through an inner tube of a pipeline to abatement. The process exhaust has a first temperature while exiting the chamber, and a second temperature while exiting the pipeline. The method maintains an outer tube of the pipeline at a vacuum state by a pump such that the inner tube is substantially thermal isolated from the atmosphere outside the pipeline. The second temperature is negative offset from the first temperature within a predetermined value.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
H C F F F C
H01L C23C F04D F15D F04D C23C
inventional inventional inventional inventional inventional inventional
Tung-Lin Rouh Jier Chun-Hung
Yang Wang Chang