Method of making 2,2,4,4-tetrasilylpentasilane
A compound that is 2,2,4,4-tetrasilylpentasilane, chemical compositions comprising same, methods of making and purifying 2,2,4,4-tetrasilylpentasilane, the purified 2,2,4,4-tetrasilylpentasilane prepared thereby, and methods of forming silicon-containing materials using 2,2,4,4-tetrasilylpentasilane as a precursor.
DOW CORNING CORPORTION
H C H C C H H H H H H H C C H H
H01L C07F H01L C23C C23C H01L H01L H01L H01L H01L H01L H01L C23C C01B H01L H01L
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Xiaobing
Zhou