Sughrue Mion, PLLC
Coupled resonator filter and fabrication method thereof
A coupled resonator filter and a method of fabricating the coupled resonator filter are provided. The method includes: sequentially stacking a first electrode, a first piezoelectric layer, a second electrode, an insulating layer, a third electrode, a second piezoelectric layer, and a fourth electrode on a surface of a substrate; sequentially patterning the first electrode, the first piezoelectric layer, the second electrode, the insulating layer, the third electrode, the second piezoelectric layer, and the fourth electrode to expose areas of the first, second, and third electrodes; forming a plurality of connection electrodes respectively connected to the exposed areas of the first, second, and third electrodes and an area of the fourth electrode; and etching an area of the substrate underneath the first electrode to form an air gap.
Samsung Electronics Co., Ltd.
H H H H
H03H H03H H03H H03H
inventional inventional inventional inventional
Hyung In-sang Joo-ho Seog-woo Byeoung-ju Hao-seok
Choi Song Lee Hong Ha Park