Antonelli, Terry, Stout & Kraus, LLP
Inspection data analyzing system
The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
Hitachi, Ltd.
H H G G
H01L H01L G01N G01N
inventional additional inventional inventional
Osamu Yuzo Taizo Masao Tsutomu Shuichi Kimio Isao Kazuhiko Sadao Hiroto Yuichi Jun Yuzaburo Yutaka Seiji
Satou Taniguchi Hashimoto Sakata Okabe Hanashima Muramatsu Miyazaki Matsuoka Shimoyashiro Nagatomo Ohyama Nakazato Sakamoto Ebara Ishikawa