Armstrong, Kratz, Quintos, Hanson & Brooks, LLP
Capacitor device, electronic parts packaging structure, and method of manufacturing the capacitor device
In a capacitor device of the present invention includes a substrate, a plurality of lower electrodes formed on the substrate, a plurality of dielectric films formed on a plurality of lower electrodes respectively in a state that the dielectric films are separated mutually, and upper electrodes formed on a plurality of dielectric films respectively, a plurality of capacitors each composed of the lower electrode, the dielectric film, and the upper electrode are arranged on the substrate respectively, and each of the dielectric films in a plurality of capacitors has a different film thickness.
Shinko Electric Industries Co., Ltd.
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Tomoo
Yamasaki