Slater Matsil, LLP
Image sensor comprising reflective guide layer and method of forming the same
Various structures of image sensors are disclosed, as well as methods of forming the image sensors. According to an embodiment, a structure comprises a substrate comprising photo diodes, an oxide layer on the substrate, recesses in the oxide layer and corresponding to the photo diodes, a reflective guide material on a sidewall of each of the recesses, and color filters each being disposed in a respective one of the recesses. The oxide layer and the reflective guide material form a grid among the color filters, and at least a portion of the oxide layer and a portion of the reflective guide material are disposed between neighboring color filters.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Shyh-Fann Wei Chuang Jhy-Jyi Yen-Chang Yu-Jen Ching-Chun
Ting Wu Sze Chu Wang Wang