Schwabe, Williamson & Wyatt, P.C.
Implanted substrate contact for in-process charging control
A substrate contact diode is disclosed. The substrate contact includes a first type substrate implant tap in a substrate, a second type epitaxial implant in an epitaxial layer that is on the substrate, and a first type epitaxial region above the second type epitaxial implant. A contact electrode that extends upward from the top of the first type epitaxial region to the surface of an interlayer dielectric that surrounds the contact electrode.
Intel Corporation
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Walid Han Wui Sansaptak Paul Marko
Hafez Then Dasgupta Fischer Radosavljevic