Beveridge, DeGrandi, Weilacher & Young
Vertical heat treatment apparatus with vented heat insulation cover means
 In a vertical type of heat treatment apparatus, a cover for covering an opening portion at a lower end of a reaction chamber is configured from a heat retention cylinder cover and a heat retention cylinder support plate. This cover is made so that the lower end is open and so that the upper end is a cylindrical shape with a closed end. The heat retention cylinder is disposed inside a region which is surrounded by the cover, and the heat retention cylinder is supported by the support plate, and the closed end portion of the heat retention cylinder and the support plate both have vent holes formed therein so that the inside of the heat retention cylinder is maintained at atmospheric pressure. The cover airtightly separates the heat retention cylinder from the heat treating region and so there is no contamination from the heat retention cylinder, and the heat retention cylinder is maintained at atmospheric pressure and so there is no danger of destruction of the heat retention portion. 
Tokyo Electron Sagami Kabushiki Kaisha
F F C H C
F27B F27D C23C H01L C30B
inventional additional inventional inventional inventional
Shingo
Watanabe