Antonelli, Terry, Stout & Kraus
Polymeric metal oxide materials and their formation and use
 A method of treating a metal alkoxide solution to form metal oxide prepolymer molecules therein is characterized by irradiating the solution with light energy having a wavelength selected to break the metal-alkoxy group bond in said metal alkoxide, thereby to form the metal oxide prepolymer molecules in the solution. The prepolymer is converted into polymeric metal oxide gel. The stoichiometry of the oxide is high. A gel of carbon content below 4 atomic % can be achieved by the step of decarbonizing the gel, preferably using light to produce ozone. 
Hitachi, Ltd.
H H H F H C Y H H H B C Y C C Y C H H Y H H C C H Y H H H H H H C H C H H H H H H H H H H H H H C H H C H Y H H H Y H H
H01L H01L H01G F02B H01L C09K Y10T H01L H01L H01L B01J C03C Y10T C03C C01B Y10T C01B H01L H01L Y10S H01L H01L C03C C03C H01L Y10T H01L H01L H01L H01L H05B H01L C07F H01L C03C H01L H01L H01L H01L H01L H01L H01L H01L H01L H05B H01L H01L H01G C09K H01L H01L C03C H01L Y10T H01L H05K H01L Y10T H01L H01L
inventional additional inventional additional additional additional additional additional inventional additional inventional inventional additional inventional inventional additional inventional additional additional additional additional inventional additional additional additional additional additional additional additional additional inventional additional inventional additional additional additional additional additional additional additional additional inventional inventional additional inventional additional additional inventional additional inventional additional inventional inventional additional additional inventional additional additional inventional inventional
Shigeru Tomoji Tetsuo Tadahiko Ken
Tanaka Oishi Nakazawa Miyoshi Takahashi