Jianq Chyun IP Office
Thin film transistor and fabricating method thereof
A thin film transistor and a fabricating method thereof are provided. The thin film transistor includes a semiconductor stacked layer, an insulating layer, a gate, a dielectric layer, a source and a drain. The semiconductor stacked layer includes a first metal oxide semiconductor layer and a second metal oxide semiconductor layer disposed on the first metal oxide semiconductor layer. A resistance value of the first metal oxide semiconductor layer is less than a resistance value of the second metal oxide semiconductor layer. The insulating layer is disposed on the semiconductor stacked layer. The gate is disposed on the insulating layer. The dielectric layer covers the gate, wherein the dielectric layer has a plurality of contact openings. The source and the drain are disposed on the dielectric layer, and filled into the contact openings to electrically connect with the semiconductor stacked layer.
Au Optronics Corporation
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H01L H01L H01L
inventional inventional inventional
Chih-Pang Tzu-Yin
Chang Kuo