Blakely, Sokoloff, Taylor & Zafman LLP
Temperature enhanced electrostatic chucking in plasma processing apparatus
Methods and systems for temperature enhanced chucking and dechucking of resistive substrates in a plasma processing apparatus are described herein. In certain embodiments, methods and systems incorporate modulating a glass carrier substrate temperature during a plasma etch process to chuck and dechuck the carrier at first temperatures elevated relative to second temperatures utilized during plasma etching. In embodiments, one or more of plasma heat, lamp heat, resistive heat, and fluid heat transfer are controlled to modulate the carrier substrate temperature between chucking temperatures and process temperatures with each run of the plasma etch process.
Applied Materials, Inc.
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Michael G. David Jingbao Sergey G.
Chafin Palagashvili Liu Belostotskiy