Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Etching resist
An etching resist has a first heat-generating layer, a second heat-generating layer, and a metal compound layer including a metallic oxynitride layer containing a metallic oxynitride. The first heat-generating layer, the metallic oxynitride layer, and the second heat-generating layer are directly or indirectly laminated such that the metallic oxynitride layer is positioned between the first heat-generating layer and the second heat-generating layer.
Nitto Denko Corporation National Institute of Advanced Industrial Science and Technology
B G B G Y
B82Y G03F B82Y G02B Y10T
inventional inventional inventional additional additional
Kazuya Kazuma Junji Takayuki Takashi Ichiro
Fujioka Kurihara Tominaga Shima Nakano Suehiro