The Webb Law Firm
Apparatus for detecting backscattered electrons in a beam apparatus
A beam apparatus has a beam source producing a primary electron beam, an objective lens focusing the beam onto an observed sample, and at least one condenser lens mounted between the beam source and the objective lens. The condenser lens operates such that the beam forms one crossover point between the condenser lens and the objective lens. A first detector is mounted at the crossover point or at a position closer to the sample than the crossover point. A second detector is mounted at a position closer to the electron source than the crossover point.
Jeol Ltd.
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Manabu
Saito