Cantor Colburn LLP
Cleaning composition
Provided is a cleaning composition, including, from about 0.01 weight % to about 10.0 weight % of a chelating agent, from about 0.01 weight to about 3.0 weight % of an organic acid containing a carboxyl group, from about 0.01 weight % to about 2.0 weight % of an inorganic acid, from about 1.0 weight % to about 15.0 weight % of an amine and water in an amount sufficient to bring the total weight of the cleaning composition to 100 weight %.
LTCAM CO., LTD. SAMSUNG DISPLAY CO., LTD.
C H C C C C
C11D H01L C11D C11D C11D C11D
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Jinho Dongeon Seokho Junhyuk
Ju Lee Lee Woo