Slater & Matsil, L.L.P.
Anti-reflective layer and method
A system and method for anti-reflective layers is provided. In an embodiment the anti-reflective layer comprises a floating component in order to form a floating region along a top surface of the anti-reflective layer after the anti-reflective layer has dispersed. The floating component may be a floating cross-linking agent, a floating polymer resin, or a floating catalyst. The floating cross-linking agent, the floating polymer resin, or the floating catalyst may comprise a fluorine atom.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ching-Yu Yu-Chung Wen-Yun
Chang Su Wang