Fish & Richardson P.C.
Method for evaluating semiconductor device
The present invention provides a method for evaluating an intended element or a parameter. In addition, the invention provides an evaluation method for obtaining a more precise result rapidly. According to the invention, a plurality of evaluation circuits are formed over the same substrate, and while simultaneously operating the plurality of evaluation circuits, an output of one evaluation circuit selected by a selection circuit that is formed over the substrate is arbitrarily evaluated.
Semiconductor Energy Laboratory Co., Ltd.
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Masahiko Kiyoshi Etsuko Yutaka
Hayakawa Kato Asano Shionoiri