Rankin, Hill & Clark LLP
Vapor phase growth apparatus comprising n reactors, a primary gas supply path, a main secondary gas supply path, (n−1) auxiliary secondary gas supply paths, a first control circuit, and a second control circuit
A vapor phase growth apparatus includes n (n is an integer of 2 or more) reactors; a primary gas supply path supplying a mixed gas to the reactors; n secondary gas supply paths connected to one of the reactors including a main secondary gas supply path and (n−1) auxiliary secondary gas supply paths; a first pressure gauge; a main flow rate controller provided in the main secondary gas supply path; (n−1) auxiliary flow rate controllers provided in the auxiliary secondary gas supply paths; a first control circuit instructing a first flow rate value; and a second control circuit calculating a second flow rate value being 1/n of a sum of a flow rate value measured by the main flow rate controller and flow rate values measured by the auxiliary flow rate controllers, and instructing the second flow rate value to the auxiliary flow rate controllers.
NuFlare Technology, Inc.
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C23C C23C C23C C23C C30B C23C C23C C30B C30B C23C H01L C30B
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