Muncy, Geissler, Olds & Lowe, PC
Exposure system and exposure method
An exposure system and a manufacturing method of a component of a display panel are disclosed. The exposure system includes a carrying device and a light source device. The carrying device carries the object. The light source device, including a plurality of lamp sets arranged along a first direction, emits light to irradiate the object. The lamp sets include a first lamp set and a second lamp set, which are disposed adjacent to each other. The first lamp set has a first lamp and a second lamp, which are extending along a second direction. The second lamp set has a third lamp and a fourth lamp, which are extending along the second direction. The first and second lamps are connected with a first junction, and the third and fourth lamps are connected with a second junction. The first junction and the second junction are misaligned on the first direction.
INNOLUX CORPORATION
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inventional inventional inventional
Yao-Teng Chen-Kuan Yu-Ju Chun-Teng
Tseng Kao Chen Chen