Wenderoth, Lind & Ponack L.L.P.
High frequency coupler, and plasma processing apparatus and method
 A high frequency coupler wherein a section of the high frequency coupler cut by a plane perpendicular to a straight line which connects the center of a joint surface between the coupler and an output portion of a matching circuit and the center of a joint surface between the coupler and the antenna has a configuration such that the section contains a plurality of line segments arranged radially from a point adjacent the center of the section. This arrangement enables the flow of currents having good symmetry, uniform distribution of currents flowing on antenna, and uniform plasma generation. 
Matsushita Electric Industrial Co., Ltd.
H
H01J
inventional
Tomohiro Shozo
Okumura Watanabe