Fish & Richardson P.C.
Microlithographic projection exposure apparatus
A projection exposure apparatus has a projection lens with an object plane, an image plane, an optical axis and a non-telecentric entrance pupil. The apparatus further comprises an illumination system having an intermediate field plane and a field stop. The field stop is positioned in or in close proximity to the intermediate field plane and defines an illuminated field in the object plane that does not contain the optical axis of the projection lens. The illumination system is configured such that, in the object plane, a mean of the angles formed between all principal rays emanating from the intermediate field plane on the one hand and the optical axis of the projection lens on the other hand differs from 0°.
Carl Zeiss SMT GmbH
G G G
G03F G03F G03F
inventional inventional inventional
Alexander Markus Toralf
Epple Degünther Gruner