RatnerPrestia
Thin film piezoelectric element
To provide a piezoelectric thin film having an improved and stable characteristic by controlling stress applied during forming a piezoelectric thin film and providing the piezoelectric thin film having a perovskite structure. A thin film piezoelectric element in which a lower electrode is formed on a substrate, a piezoelectric thin film containing lead is formed on the lower electrode, and an upper electrode is further placed on the piezoelectric thin film, characterized in that the piezoelectric thin film is a dielectric with the perovskite structure having lead, zirconium, and titanium as the main ingredients, and is in a composition region in which, in the composition of the whole piezoelectric thin film, the. Zr/(Zr+Ti) ratio is not less than substantially 0.53, and has a crystal structure of the tetragonal system in which a c axis is longer than an a axis.
Matsushita Electric Industrial Co., Ltd.
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inventional inventional inventional
Takanori Shintarou Isaku
Nakano Hara Kanno