McDermott Will & Emery LLP
Transistor, integrated circuit and method of fabricating the same
A transistor, an integrated circuit and a method of fabricating the integrated circuit are provided. In various embodiments, the transistor includes a source electrode, at least one semiconductor channel, a gate electrode, a drain electrode, and a drain pad. The source electrode is disposed in a substrate. The semiconductor channel extends substantially perpendicular to the source electrode. The gate electrode surrounds the semiconductor channel. The drain electrode is disposed on top of the semiconductor channel. The drain pad is disposed on the drain electrode, wherein the drain pad comprises multiple conductive layers.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chih-Hao Wai-Yi Ming-Shan Chia-Hao Cheng-Long
Wang Lien Shieh Chang Chen