Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Information processing apparatus, semiconductor manufacturing system, information processing method, and storage medium
A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104. 
Tokyo Electron Limited
G G Y G G
G05B G05B Y02P G05B G05B
additional additional additional inventional additional
Noriaki Wenling Minoru
Koyama Wang Obata