Antonelli, Terry, Stout & Kraus, LLP
Single-layer dielectric structure with rounded corners, and circuits including such structures
A single-layer, metal-insulator-metal capacitor, a monolithic microwave integrated circuit including such capacitors, and a process of fabricating such capacitors. The capacitor has a single layer of insulating material between two metallic layers. At least one of the metallic layers has rounded corners, reducing the electric field at the corners, and so lessening the likelihood of breakdown. In one preferred embodiment, each metal layer has rounded corners. The capacitors can be fabricated by an optical lithographic process.
TRW Inc.
H
H01L
inventional
Roger S. Richard Michael E. Ronald W.
Tsai Lai Barsky Grundbacher