Myers Bigel, P.A.
Semiconductor device including a dielectric layer
A semiconductor device including a dielectric layer is provided. The semiconductor device includes a stack structure, and a vertical structure within the stack structure. The vertical structure includes a lower region having a first width and an upper region having a second width, greater than the first width. The vertical structure further includes two dielectric layers of which respective ratios of lower thicknesses in the lower region to upper thicknesses in the upper region are different from each other.
Samsung Electronics Co., Ltd.
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Bio Young Seon Byong Hyun Jung Ho Jae Young Young Wan Eun Yeoung
Kim Son Jang Kim Ahn Kim Choi