Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Probe card clamp mechanism and probe apparatus
A clamp mechanism includes an insertion ring and a lock ring. The insertion ring includes a cylindrical portion and a flange portion. At the cylindrical portion, first cam followers to be inserted into a groove of the lock ring are arranged at predetermined intervals along a circumferential direction thereof, and at the flange portion, second cam followers to be in contact with the inner peripheral surface of the lock ring are arranged at predetermined intervals along a circumferential direction thereof. At the lock ring, cutoff portions, through which the first cam followers pass, are arranged corresponding to the first cam followers.
Tokyo Electron Limited
G G
G01R G01R
inventional additional
Hiroshi
Yamada