WPAT, P.C., Intellectual Property Attorneys
Apparatus and method for generating an electromagnetic radiation
A method for generating an electromagnetic radiation includes the following operations. A target material is introduced in a chamber. A light beam is irradiated on the target material in the chamber to generate plasma and an electromagnetic radiation. The electromagnetic radiation is collected with an optical device. A gas mixture is introduced in the chamber. The gas mixture includes a first buffer gas reactive to the target material, and a second buffer gas to slow down debris of the target material and/or plasma by-product, so as to increase an reaction efficiency of the target material and the first buffer gas, and to reduce deposition of the debris of the target material and/or the plasma by-product on the optical device.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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Feng Yuan Chi-Ming Chun-Lin Chung-Chieh Tsiao-Chen Chyi Shyuan
Hsu Yang Chang Lee Wu Chern