Birch, Stewart, Kolasch & Birch, LLP
Cylindrical target production method and cylindrical target
To provide a process for producing a cylindrical target which has almost no distortion in the longitudinal direction. The process for producing a cylindrical target according to the present invention comprises the steps of: processing a target material into a cylindrical shape; providing an adapter for attachment to a sputtering apparatus, in the target material processed into the cylindrical shape; and measuring a straightness in a longitudinal direction of an appearance of the target material having the adapter to confirm whether the straightness of the target material having the adapter is within a predetermined range.
SUMITOMO CHEMICAL COMPANY, LIMITED
H C C G G
H01J C23C C23C G01B G01B
inventional inventional inventional inventional inventional
Masahiro Koji Takuto Mizuki
Fujita Nishioka Sugawara Shiraishi