Finnegan, Henderson, Farabow, Garrett & Dunner
Fine object having position and direction sensing mark and a system for detecting the position and direction of the sensing mark
 A position and direction sensing mark is formed on an integrated circuit pellet formed with a prescribed electrode pattern. The position and direction sensing mark comprises a plurality of strips which are extended in a direction different from that in which the electrode pattern is extended and are arranged in turn at prescribed intervals in a direction intersecting the different direction at right angles thereto. 
Tokyo Shibaura Electric Co., Ltd.
G
G06T
inventional
Hideharu Yoshiaki Yasoji
Egawa Arimura Suzuki