Patterson + Sheridan, LLP
Disk-brush cleaner module with fluid jet
Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using a disk brush. One embodiment provides a substrate cleaner comprising a substrate chuck disposed in the processing volume, and a brush assembly disposed in the processing volume, wherein the brush assembly comprises a disk brush movably disposed opposing the substrate chuck, and a processing surface of the disk brush contacts a surface of the substrate on the substrate chuck.
APPLIED MATERIALS, INC.
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H01L H01L
inventional inventional
Lakshmanan Adrian Sen-Hou Hui Mario D. Allen L. Gerald J. Yufei
Karuppiah Blank Ko Chen Silvetti D'Ambra Alonzo Chen