Kratz, Quintos & Hanson, LLP
Film-forming apparatus
A film-forming apparatus capable of discharging a feedstock gas and a reactive gas to an inner side of the vacuum chamber by more effectively cooling the gases without mixing them in comparison with the conventional art. A discharge plate having a first face exposed inside the vacuum chamber is provided with a plurality of feedstock gas introduction holes and a plurality of reactive gas introduction holes penetrating the discharge plate. A plurality of grooves having the feedstock gas introduction holes located on the bottom face are formed in the second face opposite to the first face of the discharge plate, a top plate that covers the groove is arranged over the second face, and the feedstock gas through-hole formed in the top plate and the feedstock gas introduction hole are connected to each other with the first auxiliary pipe.
ULVAC, Inc.
H C H C C C C
H01L C23C H01L C23C C23C C23C C23C
additional inventional additional inventional inventional inventional inventional
Kenji Yasumasa Kazuya Takashi
Kimura Suzuki Tsukagoshi Kageyama