Posz & Bethards, PLC
Pressure detecting apparatus with metallic diaphragm
A pressure detecting apparatus has a single-crystal semiconductor sensor chip disposed on a metallic diaphragm through a low melting point glass. The sensor chip has a planar shape selected from a circular shape, a first polygonal shape having more than five sides and having interior angles all less than 180&deg;, and a second polygonal shape having a ratio of a circumscribed circle diameter relative to an inscribed circle diameter being less than 1.2. Four strain gauge resistors are disposed on X, Y axes passing through a center point O of the sensor chip in parallel with <110> directions. Accordingly, thermal stress is reduced not to adversely affect a detection error and simultaneously high sensitivity is provided.
Denso Corporation
G
G01L
inventional
Yukihiko Yasutoshi Hiroaki Kazuaki Inao
Tanizawa Suzuki Tanaka Hamamoto Toyoda