Kilpatrick Townsend & Stockton LLP
FinFET having improved Ge channel interfacial layer
A semiconductor device includes a substrate structure. The Substrate structure includes a substrate, a plurality of fins each protruding from the substrate structure, a germanium layer on a top surface of the fins, spacers on opposite sides of the germanium layer, an oxide layer on a surface of the germanium layer between the spacers, the oxide layer comprising silicon and germanium, a high-k dielectric layer on the oxide layer and on inner sidewalls of the spacers, and a gate electrode on the high-k dielectric layer.
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
H H H H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Yong
Li