Brundidge & Stanger, P.C.
Single-axis rotary actuator
Provided is a single-axis rotary actuator that is suitable for rotationally driving an optical element, such as a diffraction grating, in a single-axis direction and that is suitable for forming light having a wide wavelength band. An actuator (500) includes a holder (550) having a mounting surface on which a diffraction grating (401) is attached and a rotary shaft (552); a fixed unit (520) having a bearing that holds the rotary shaft (552) of the holder (550); an elastic member (530) formed of an outer circumferential section fixed on the fixed unit (520), an inner circumferential section fixed on the holder (550), and an arm section interconnecting the outer circumferential section and the inner circumferential section and having elasticity; and a driving unit having a coil (540) provided on the holder (550) and a magnet (510) provided on the fixed unit (520).
MITSUMI ELECTRIC CO., LTD.
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Masahiro
Saito