Charter IP LLC
Spin head, method of operating the spin head and apparatus for treating substrates with the spin head
A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.
Semes Co., Ltd.
H H
H01L H01L
inventional inventional
Ki Hoon Jung Keun Ju Won Jung Bong Kyo Woog
Choi Cho Kim Choi Koo