Kirton McConkie
Miniature fluid control device
A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.
MICROJET TECHNOLOGY CO., LTD.
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F16K F16K F16K F16K
inventional additional inventional additional
Shou-Hung Ying-Lun Chi-Feng Hung-Hsin Jia-Yu Shih-Chang Che-Wei Wei-Ming Jheng-Wei Yung-Lung Chia-Hao Chao-Chih
Chen Chang Huang Liao Liao Chen Huang Lee Chen Han Chang Chen