Tope-Mckay & Associates
Microelectromechanical device having a common ground plane layer and a set of contact teeth and method for making aspects thereof
The present invention relates to MEM switches. More specifically, the present invention relates to a system and method for making MEM switches having a common ground plane. One method for making MEM switches includes: patterning a common ground plane layer on a substrate; forming a dielectric layer on the common ground plane layer; depositing a DC electrode region through the dielectric layer to contact the common ground plane layer; and depositing a conducting layer on the DC electrode region so that regions of the conducting layer contact the DC electrode region, so that the common ground plane layer provides a common ground for the regions of the conducting layer.
Wireless MEMS, Inc.
B H H Y B
B81C H01H H01H Y10T B81C
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Chia-Shing
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