Mei & Mark LLP
Surface defect measuring apparatus and method by microscopic scattering polarization imaging
A surface defect measuring apparatus and method by microscopic scattering polarization imaging is provided. The apparatus mainly comprises a laser, a first converging lens, a rotary diffuser, a second converging lens, a diaphragm, a third converging lens, a pinhole, a fourth converging lens, a polarizer, a half-wave plate, a polarizing beam splitter, an X-Y translation stage, a sample, a microscope lens, a quarter-wave plate, a micro-polarizer array, a camera and a computer. The micro-polarizer array is adopted to realize real-time microscopic scattering polarization imaging of the surface defects; a polarization-degree image is calculated to improve the sensitivity for detecting the surface defects of the ultra-smooth element, and the effective detection of the surface defects of a high-reflective coating element is also realized, and the requirement for rapid detection of the surface defects of a meter-scale large-aperture ultra-smooth element can be met.
Shanghai Institute of Optics And Fine Mechanics, Chinese
 Academy of Sciences
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You Tianzhu Shijie Shenghao Jianda Weiwei Kaizao Qi
Zhou Xu Liu Wang Shao Wang Ni Lu