Laser-breakable fuse link with alignment and break point promotion structures
A severable horizontal portion of a fuse link is formed relative to a vertically configured structure in an IC to promote separation of the severable portion upon applying energy from a laser beam. The vertically configured structure may be a reduced vertical thickness of the severable portion, an elevated lower surface of the severable portion above adjoining portions of the fuse link, a protrusion which supports the severable portion at a height greater than a height of the adjoining portions of the fuse link, flowing the melted severable portion down sloped surfaces away from a break point, and a propellent material beneath the severable portion which explodes to ablate the severable portion.
LSI Logic Corporation
H H
H01L H01L
additional inventional
Shiva Gary K. Ruggero Yauh-Ching
Ramesh Giust Castagnetti Liu