Lexyoume IP Group, PLLC.
Patterning method of metal oxide thin film using nanoimprinting, and manufacturing method of light emitting diode
A method for forming a metal oxide thin film pattern using nanoimprinting according to one embodiment of the present invention includes: coating a photosensitive metal-organic material precursor solution on a substrate; pressurizing the photosensitive metal-organic material precursor coating layer to a mold patterned to have a protrusion and depression structure; forming the metal oxide thin film pattern by irradiating ultraviolet rays to the pressurized photosensitive metal-organic material precursor coating layer to cure it; and removing the patterned mold from the metal oxide thin film pattern.
Korea Institute of Machinery & Materials
B H B G H
B82Y H01L B82Y G03F H01L
inventional additional inventional inventional inventional
Sa-Rah Hyeong-Ho Seong-Je Jun-Ho Dae-Geun So-Hee Jun-Hyuk Ji-Hye Ki-Don
Kim Park Park Jeong Choi Jeon Choi Lee Kim