Foley & Lardner LLP
Metal line with increased inter-metal breakdown voltage
A wide trench having a width W1 and narrow trenches having a width W2 that is less than W1 are formed in a dielectric layer, the wide trench extending deeper in outer regions than in a central region. A trench modification step changes the width of the wide trench and reduces a depth difference between the outer regions and the central region of the wide trench.
SANDISK TECHNOLOGIES INC.
H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional additional inventional inventional additional inventional inventional inventional additional
Yuji Noritaka Takuya Katsuo Kiyokazu Shunsuke Masami
Takahashi Fukuo Futase Yamada Shishido Watanabe Uozaki