Process for manufacturing a vibrating type transducer
 A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation. 
Yokogawa Electric Corporation
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G01H Y10T G01L
inventional additional inventional
Kinji Tadashi Tetsuya Hideki Takashi Kyoichi Takashi
Harada Nishikawa Watanabe Kuwayama Yoshida Ikeda Kobayashi