Scully, Scott, Murphy & Presser, P.C.
Method for forming silver-copper mixed kesterite semiconductor film
After forming a layer of a Cu-deficient kesterite compound having the formula Cu2-xZn1+xSn(SySe1-y)4, wherein 0<x<1, and 0≦y≦1, on a substrate and forming a Ag layer on the Cu-deficient kesterite compound layer, the Cu-deficient kesterite compound layer and Ag layer are annealed in a S- and/or Se-rich ambient to provide a film containing a Ag—Cu mixed kesterite compound having the formula AgxCu2-xZnSn(SySe1-y)4, wherein 0<x<2, and 0≦y≦1.
International Business Machines Corporation
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Yun S. Oki Ravin Talia S.
Lee Gunawan Mankad Gershon