Workman Nydegger
Method of scribing stuck mother substrate and method of dividing stuck mother substrate
There is provided a method of scribing a stuck mother substrate for obtaining a plurality of stuck substrates formed by sticking a first square substrate and a second square substrate together so that one side of opposing two sides of the square substrates is aligned and the other side is not aligned so that the first substrate is set back to the second substrate from a stuck mother substrate in which a first mother substrate and a second mother substrate are stuck together. In the method of scribing a stuck mother substrate, the second mother substrate is strongly scribed for a full scribe line and the first mother substrate is strongly scribed for a half scribe line. On the other hand, the first mother substrate is weakly scribed for the full scribe line.
Seiko Epson Corporation
H
H01L
inventional
Yoichi Norihiko Makoto
Miyasaka Kato Nakadate