Arent Fox LLP
Resonator manufacturing method
A method for manufacturing a resonator that effectively addresses variations in resistivity for each wafer. The method for manufacturing a resonator includes forming a Si oxide film on a surface of a degenerated Si wafer, where the Si oxide film has a thickness set that is based on the doping amount of impurity in the degenerated Si wafer.
MURATA MANUFACTURING CO., LTD.
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Hiroshi Yasuhiro Keiichi
Yamada Aida Umeda