Jackson IPG PLLC
Cleaning device using atmospheric gas discharge plasma
Atmospheric gas discharge plasma is generated in a gas whirlpool cavity. Then the plasma is sprayed out in a gas flow to clean an object. The whole process is simple with merits of utility and cost savings. And objects can be cleaned one after one continuously.
Atomic Energy Council
B H H H H H H
B08B H05H H01J H01L H01J H05H H01J
inventional inventional additional inventional inventional additional inventional
Ming-Song Shiaw-Huei Jyh-Ming Yung-Chih Men-Han
Yang Chen Yan Chen Huang