McKenna Long & Aldridge LLP
Ion beam irradiation device
Disclosed is an ion beam irradiation device including a holder supporting a substrate; and an ion beam source that is a predetermined distance from the substrate and inclined to be substantially parallel with the substrate and that irradiates the substrate with an ion beam.
LG.Philips LCD Co., Ltd.
G H G H
G21K H01J G02F H01J
inventional inventional inventional inventional
Yong Sung Yun Bok
Ham Lee