Birch, Stewart, Kolasch & Birch, LLP
Structure and formation method of light-sensing device
Structures and formation methods of a light-sensing device are provided. The light-sensing device includes a semiconductor substrate and a light-sensing region in the semiconductor substrate. The light-sensing device also includes a light-reflective element over the semiconductor substrate. The light-sensing region is between the light-reflective element and a light-receiving surface of the semiconductor substrate. The light-reflective element includes a stack of multiple pairs of dielectric layers. Each of the pairs has a first dielectric layer and a second dielectric layer, and the first dielectric layer has a different refractive index than that of the second dielectric layer.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Yun-Wei Hsun-Ying Kuo-Cheng Chun-Hao
Cheng Huang Lee Chou