Sughrue Mion, PLLC
Catadioptric reduction lens
A catadioptric projection lens configured for imaging a pattern arranged in an object plane (2) onto an image plane (4) while creating a single, real, intermediate image (3) has a catadioptric imaging group (5) having a concave mirror (6) and a beam-deflector (7), and a dioptric imaging lens group (20) that commences after the beam-deflector. The system is configured such that the intermediate image follows the first lens (17) of a dioptric section (8) and is preferably readily accessible. Arranging the intermediate image both between a pair of lenses (17, 21) of the dioptric section and at a large distance behind the final reflective surface of the beam-deflector helps to avoid imaging aberrations.
Carl Zeiss SMT AG
G G G G G G
G02B G02B G02B G03F G03F G02B
inventional inventional inventional inventional inventional inventional
Helmut Alexander
Beierl Epple