Sughrue Mion, PLLC
Lithography lens system and projection exposure system provided with at least one lithography lens system of this type
An optical imaging system for a microlithography projection exposure system is used for imaging an object field arranged in an object plane of the imaging system into an image field arranged in an image plane of the imaging system. A projection objective or a relay objective to be used in the illumination system can be involved, in particular. The imaging system has a plurality of lenses that are arranged between the object plane and the image plane and in each case have a first lens surface and a second lens surface. At least one of the lenses is a double aspheric lens where the first lens surface and the second lens surface is an aspheric surface. Lenses of good quality that have the action of an asphere with very strong deformation can be produced in the case of double aspheric lenses with an acceptable outlay as regards the surface processing and testing of the lens surfaces.
Carl Zeiss SMT AG
G G
G03F G03F
inventional inventional
Aurelian Joachim Hans-Juergen Joerg Wolfgang Johannes Franz-Josef Karl-Heinz Alexander
Dodoc Wietzorrek Rostalski Schultz Singer Wangler Stickel Schuster Epple