Socal IP Law Group LLP
Film bulk acoustic resonators in thin LN-LT layers
Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a single-crystal piezoelectric plate having a front surface and a back surface opposite the front surface, wherein the back surface is coupled to a surface of a substrate. A floating back-side conductor pattern is formed on a portion of the back surface. A front-side conductor pattern including two electrodes is formed on a portion of the front surface opposite the back-side conductor. A portion of the piezoelectric plate forms a diaphragm spanning a cavity in the substrate and the front-side conductor pattern is on the diaphragm.
Resonant Inc.
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Julius Viktor
Koskela Plesski