Vibrating type pressure measuring device
 A vibrating type pressure measuring device having good shock wave proof measuring characteristics, high frequency response, good temperature characteristics, and can be readily miniaturized, wherein pressure to be measured is applied to a silicon diaphragm provided in an internal vacant space of a housing, and a magnetic field is applied by a DC current magnetic field applying device to a vibrator beam arranged in the inside of the diaphragm, with a gap therebetween kept in vacuum, and fixed to the diaphragm at both ends, and detects the changes in natural frequency of the vibrator beam caused by the pressure to be measured. The diaphragm and/or vibrator beam are constructed so one or the other or both have rough or uneven surfaces so as to prevent any adhesion therebetween. 
Yokogawa Electric Corporation
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inventional inventional inventional
Akio Kyoichi Hideaki Takahiro Tetsuya Hideo Nobuaki
Fujita Ikeda Kuwayama Kudo Watanabe Tsukamoto Kohno