Armstrong Teasdale LLP
Cryopump
The embodiments of the present disclosure relates a cryopump including a pump housing including a suction port, a cold head located within the pump housing, a shielding element located within the pump housing and covering the cold head, a baffle at the suction port, the baffle including a gas passage with an inlet and an outlet, an orthographic projection of the baffle to the cross section of the pump housing completely covers an orthographic projection of the suction port thereto, the gas passage includes a first portion and a second portion intersecting with each other, the inlet is defined by one end of the first portion, the outlet is defined by one end of the second portion.
ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
F
F04B
inventional
Xiongfei Qingwu Jindong
Guo Kong Liu