Griffin & Szipl, P.C.
Flow rate range variable type flow rate control apparatus
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
Tokyo Electron Ltd. Fujikin Incorporated National University Corporation Tohoku University
G G G Y Y Y Y G Y G G Y Y Y Y Y G Y G G
G05D G01F G05D Y10T Y10T Y10T Y10T G01F Y10T G01F G01F Y10T Y10T Y10T Y10T Y10T G05D Y10T G05D G01F
inventional inventional inventional additional additional additional additional inventional additional inventional inventional additional additional additional additional additional inventional additional inventional inventional
Masaaki Tadahiro Kaoru Shoichi Tomokazu Tsuyoshi Katsuyuki Toshihide Nobukazu Masahito Kazuyuki Ryousuke Tsutomu Kouji Hisashi Takashi
Nagase Ohmi Hirata Hino Imai Shimazu Sugita Yoshida Ikeda Saito Miura Dohi Shinohara Nishino Tanaka Hirose