Sawyer Law Group LLP
Automatic decapsulation system utilizing an integrated spacer/protection plate
An automatic decapsulation system for a device is disclosed. The system comprises an etch plate, an etch head, a sheet coupled to the etch head, a rubber gasket disposed between the etch head and the sheet, and an integrated spacer and protection plate for securing the device without damaging the backside of the device during decapsulation. In one embodiment of the present invention, the integrated spacer and protection plate is adjustable to accommodate devices of varying sizes.
Advanced Micro Devices, Inc.
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H01L G01R G01N
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Xia Jose Mohammad
Li Hulog Massoodi