Thomas, Kayden, Horstemeyer & Risley
System and method for acquiring semiconductor process status information
A system for acquiring semiconductor process status information. An equipment server outputs a start command according to a HSMS protocol to a computer system server, which converts the start command from the HSMS protocol to a RS232 protocol and outputs the converted command to a protocol converter. The protocol converter converts the start command from the RS232 protocol to a RS485 protocol and outputs the converted command to an AD/DA module. The AD/DA module converts the start command from the RS485 command to an analog signal and outputs the converted command to an external sensor, which acquires semiconductor equipment status information as initiated by the start command. The acquired status information is then sent on a reverse path to the start command, undergoing successive conversion and output until reaching the equipment server.
Taiwan Semiconductor Manufacturing Co., Ltd.
Y G G
Y02P G05B G05B
additional inventional additional
Yuk-Tong Chun-Ching
Lee Lin