Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least Via-open-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one metal-short-related failure mode.
PDF Solutions, Inc.
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Tomasz Indranil Jonathan Andrzej Hans Jeremy Kimon Sherry Carl Stephen Hideki John Rakesh Larg Nobuharu Dennis Simone Timothy Markus Vyacheslav Sheng-Che Conor Kelvin Marci Christopher Marcin
Brozek De Haigh Strojwas Eisenmann Cheng Michaels Lee Taylor Lam Matsuhashi Kibarian Vallishayee Weiland Yokoyama Ciplickas Comensoli Fiscus Rauscher Rovner Lin O'Sullivan Doong Liao Hess Strojwas