Hamilton DeSanctis & Cha
Method and apparatus for the formation of an electronic device
A process of forming an electronic device, by forming the source and drain contacts using photolithography, incorporating a self-assembled monolayer (SAM) over the electrical contacts to form an increased work function of the source and drain electrodes and further forming more favorable charge injection properties or within the channel region to improve film morphology and therefore improve charge transport. The SAM material is added to the photoresist stripper during a step of the photolithography process of forming electrical contacts.
Plastic Logic Limited
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Catherine Martin Rashmi Sachin Dean Bradley
Ramsdale Lewis Bhintade Baker