Oblon, McClelland, Maier & Neustadt, L.L.P.
Field-effect transistor, processes for producing the same, and electronic device using the same
Provided is a field-effect transistor which has a high mobility and a low variation of mobility.A field-effect transistor at least comprising a substrate, a semiconductor layer, a source electrode, and a drain electrode is produced by forming the source electrode and/or the drain electrode so that the source electrode and/or the drain electrode has a taper shape in a cross-section which is parallel with a channel length direction and perpendicular to the substrate, and forming the semiconductor layer through coating process.
Mitsubishi Chemical Corporation
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Yosuke Akira Yoshimasa
Oseki Ohno Sakai