Wolf, Greenfield & Sacks, P.C.
Mode-matching of MEMS resonators
Systems and techniques are described for matching the resonance frequencies of multiple resonators. In some embodiments, a resonator generates an output signal reflecting the resonator's response to an input drive signal and an input noise signal. The output signal is then compared to the noise signal to derive a signal representative of the resonance frequency of the resonator. Comparing that signal to the output signal of a second resonator gives an indication of whether there is a difference between the resonance frequencies of the two resonators. If there is, one or both of the resonators may be adjusted. In this manner, the resonance frequencies of resonators may be matched during normal operation of the resonators.
Analog Devices, Inc.
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G01P G01C G01P G01H G01C
additional inventional additional inventional inventional
Jianrong Youn-Jae Jose Barreiro Ronald A.
Chen Kook Silva Kapusta, Jr.