Patterson + Sheridan LLP
Arcing detection apparatus for plasma processing
Embodiments described herein generally relate to a plasma processing chamber and a detection apparatus for arcing events. In one embodiment, an arcing detection apparatus is disclosed herein. The arcing detection apparatus comprises a probe, a detection circuit, and a data log system. The probe positioned partially exposed to an interior volume of a plasma processing chamber. The detection circuit is configured to receive an analog signal from the probe and output an output signal scaling events present in the analog signal. The data log system is communicatively coupled to receive the output signal from the detection circuit. The data log system is configured to track arcing events occurring in the interior volume.
APPLIED MATERIALS, INC.
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inventional inventional inventional
Jian J. Lin Rongping Andrew V. Michael S.
Chen Zhang Wang Le Cox