Lee & Morse, P.C.
Hardmask composition and method of forming patterns using the hardmask composition
A hardmask composition includes a polymer including a moiety represented by the following Chemical Formula 1 and a solvent.In the above Chemical Formula 1, A and B are as defined in the specification.
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C H C C G G C C H G C G H G H H H H G C H
C08G H01L C08G C08G G03F G03F C09D C09D H01L G03F C08G G03F H01L G03F H01L H01L H01L H01L G03F C08G H01L
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Sung-Hwan Hea-Jung Yun-Jun Joon-Young Hyun-Ji Youn-Hee Sang-Kyun
Kim Kim Kim Moon Song Nam Kim