Lowe Hauptman & Ham, LLP
Resistance variable memory structure
A semiconductor structure includes a resistance variable memory structure. The semiconductor structure also includes a dielectric layer. The resistance variable memory structure is over the dielectric layer. The resistance variable memory structure includes a first electrode disposed over the dielectric layer. The first electrode has a sidewall surface. A resistance variable layer has a first portion which is disposed over the sidewall surface of the first electrode and a second portion which extends from the first portion away from the first electrode. A second electrode is over the resistance variable layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Wen-Ting Kuo-Chi Hsia-Wei Chih-Yang Yu-Wen Chin-Chieh
Chu Tu Chen Chang Liao Yang