Morgan Law Offices, PLC
Neural sensing device and method for making the same
The present invention provides a neural sensing device and method for making the same. The neural sensing device includes a base, an integrated circuit portion, a plurality of microprobes and at least one conductive via. The base has an active surface and a backside surface. The integrated circuit portion is disposed on the active surface of the base. The microprobes protrude from the backside surface of the base. The through silicon via is disposed in the base and electrically connects the integrated circuit portion and the microprobes. Each of the microprobes includes an isolation layer partially covering a conductive layer.
Advanced Semiconductor Engineering, Inc.
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Jin-Chern Chih-Wei Kuo-Hua
Chiou Chang Chen