Sughrue Mion, PLLC
MEMS switch
A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.
Samsung Electronics Co., Ltd.
H H
H01H H01H
additional inventional
In-sang Che-heung Hyung Sang-wook Sang-hun
Song Kim Choi Kwon Lee