Alston & Bird LLP
Method for error correction in scanning probe microscopy
Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INCORPORATED
G G
G01Q G01Q
inventional inventional
Yunmei Xianqi Xiaoguang Hao An-Ping
Chen Li Zhang Zhang Li