Washida & Associates
Method of producing a biosensor
A method for manufacturing a biosensor includes forming a laminate of a first silicon oxide film and a polysilicon film on one surface of a silicon substrate; forming a second silicon oxide film on the other surface of the silicon substrate; forming a source electrode, a drain electrode, and a channel on the first silicon oxide film, the channel connecting the source electrode and the drain electrode; and removing the polysilicon film.
Mitsumi Electric Co., Ltd.
G
G01N
inventional
Tomoaki Hiroaki Osamu
Yamabayashi Kikuchi Takahashi