Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Carrier box for semiconductor substrate
A carrier box 21 for a semiconductor substrate, including an opening and closing mechanism for taking the semiconductor in or out of the box 21. The box 21 is provided with a gas cleaning device A-2 which uses a photo-electron or the photo-catalyst actuated by light irradiation for cleaning an inside of the box, or a gas cleaning unit including the gas cleaning device and a rechargeable battery for supplying the gas cleaning device with electricity and integrated into the gas cleaning unit, and thereby providing a practically efficient function to remove particles or gaseous harmful components.
Ebara Corporation
H H
H01L H01L
inventional inventional
Toshiaki Osamu
Fujii Horita