Fish & Richardson P.C.
Immersion catadioptric projection objective having two intermediate images
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1<10 holds.
Carl Zeiss SMT GmbH
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Wilhelm Hans-Juergen Rudolf M. Aurelian Wolfgang Alexander Susanne David R.
Ulrich Mann von Buenau Dodoc Singer Epple Beder Shafer