Genus Law Group
Method for fabricating a flash memory cell
A method for fabricating a flash memory cell is provided. After an ONO dielectric layer is formed on a first conductive layer over a tunnel oxide layer, a second conductive layer is formed on the ONO dielectric layer. Then, patterning the second conductive layer to form a periphery region comprising an exposed portion of a semiconductor substrate and a memory cell region comprising the left second conductive layer. During the present process, the ONO dielectric layer is protected from being exposed in various solvents and gases with the second conductive layer. Thus, a flash memory cell with a high-quality ONO gate dielectric layer, without increasing complexity of the process and additional masks, is obtained.
Macronix International Co., Ltd.
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inventional inventional inventional inventional
Hong-Chi Hsuan-Ling Huei-Huarng Chun-Pei
Chen Kao Chen Wu