Amerson Law Firm, PLLC
Asymmetric overlay mark for overlay measurement
One illustrative example of an overlay mark disclosed herein includes four quadrants (I-IV). Each quadrant of the mark contains an inner periodic structure and an outer periodic structure. Each of the outer periodic structures includes a plurality of outer features. Each of the inner periodic structures includes a plurality of first inner groups, each of the first inner groups having a plurality of first inner features, each first inner group being oriented such that there is an end-to-end spacing relationship between each first inner group and a selected one of the outer features.
GLOBALFOUNDRIES Inc.
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additional additional inventional
Rui Haiting Erik Scott Minghao Dongyue Wei
Chen Wang Geiss Beasor Tang Yang Zhao