Antonelli, Terry, Stout & Kraus
Processed substrate obtained by a process for effecting suppression of electrification
 Electrification is suppressed with a water-soluble electrification-suppressing film having an electron conductivity and comprising a polymer resin. A high electrification-suppressing effect which is also high in vacuum can be easily obtained by using the electrification-suppressing film with less contamination. 
Showa Denko K.K. Hitachi, Ltd.
G Y G
G03F Y10T G03F
inventional additional inventional
Yoshiaki Yasunori Ryuma Yoshihiro Hideki Fumio
Ikenoue Suzuki Takashi Saida Tomozawa Murai