Procopio, Cory, Hargreaves & Savitch LLP
Support unit and substrate treating apparatus comprising the same
Disclosed are a support unit and a substrate treating apparatus comprising the same. The inventive concept provides a support unit that may prove temperature uniformity between facing areas on a substrate the other areas of the substrate and may solve a problem of not easily separating a substrate by a negative pressure in a pin hole when the substrate is separated from the support unit, and a substrate treating apparatus.
SEMES CO., LTD.
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Hyung Joon Seung Pyo
Kim Lee