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Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part
A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
HARBIN INSTITUTE OF TECHNOLOGY
G G G G G
G01B G01D G01B G01B G01D
inventional additional inventional inventional inventional
Jiwen Junying Kunpeng Jiubin
Cui Li Feng Tan