Lex IP Meister, PLLC
Hydrogen sensor and method of manufacturing the same
A method of the invention includes preparing a mold having a hydrogen detection part pattern, a nanogap pattern and a base to be formed on a hydrogen sensor substrate; preparing a material to which the patterns are transferrable; forming the hydrogen sensor substrate by bringing the mold into contact with the material to thus transfer the patterns to the material and then detaching the mold from the material to which the patterns are transferred, the hydrogen sensor substrate having a base part corresponding to the base, a plurality of hydrogen detection parts erected from the base part and corresponding to the nanogap pattern and a plurality of nanogaps formed between the hydrogen detection parts and corresponding to the hydrogen detection part pattern; and forming, on the hydrogen sensor substrate, a thin film of a transition metal or an alloy thereof to be expanded by hydrogen.
INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
C G C G G
C23C G01N C23C G01N G01N
inventional inventional inventional inventional inventional
Woo Young Jun Min Byueng Jin Seung Hyun Heon
Lee Lee Chang Lee Lee