Brinks Hofer Gilson & Lione
Scanning unit for an optical position measuring device
A scanning unit for an optical position measuring device for scanning a periodic strip pattern in a detector plane, the scanning unit including a detector arrangement including a first detector array with a first set of several radiation-sensitive detector elements, which are arranged next to each other in a first direction on a common support substrate and a second detector array including a second set of several radiation-sensitive detector elements arranged adjacent to the first detector array in a second direction perpendicular with respect to the first direction a detection plane. The second set of several radiation-sensitive detector elements are arranged next to each other in the first direction with a common period PDET, and have a geometrically defined offset (Δx1i) in the first direction with respect to the first set of several radiation-sensitive detector elements.
Dr. Johannes Heidenhain GmbH
G
G01D
inventional
Wolfgang Elmar J.
Holzapfel Mayer