Slater & Matsil, L.L.P.
Surface treatment in the formation of interconnect structure
A Ultra-Violet (UV) treatment is performed on an exposed surface of a low-k dielectric layer and an exposed surface of a metal line. After the UV treatment, an organo-metallic soak process is performed on the exposed surface of the low-k dielectric layer and the exposed surface of the metal line. The organo-metallic soak process is performed using a process gas including a metal bonded to an organic group.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Mei-Ling Chia-Cheng Shwang-Ming Po-Cheng Hui-Chun Joung-Wei
Chen Chou Jeng Shih Yang Liou