Haynes and Boone, LLP
Residual gain monitoring and reduction for EUV drive laser
A system includes a laser source operable to provide a laser beam, a laser amplifier having a gain medium operable to provide energy to the laser beam when the laser beam passes through the laser amplifier, and a residual gain monitor operable to provide a probe beam and operable to derive a residual gain of the laser amplifier from the probe beam when the probe beam passes through the laser amplifier while being offset from the laser beam in time or in path.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Han-Lung Chun-Lin Louis Jen-Hao Po-Chung Bo-Tsun Tzung-Chi Li-Jui
Chang Chang Yeh Cheng Liu Fu Chen