Fitzpatrick, Cella, Harper & Scinto
Solid-state image sensor, method of manufacturing the same, and camera
A solid-state image sensor includes a pixel area and a peripheral circuit area. The pixel area includes a first MOS, and the peripheral circuit area includes a second MOS. A method includes forming a gate of the first MOS and a gate of the second MOS, forming a first insulating film to cover the gates of the first and second MOSs, etching the first insulating film in the peripheral circuit area in a state that the pixel area is masked to form a side spacer on a side face of the gate of the second MOS, etching the first insulating film in the pixel area in a state that the peripheral circuit area is masked, and forming the second insulating film to cover the gates of the first and second MOSs and the side spacers.
CANON KABUSHIKI KAISHA
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H01L H01L H01L H01L H04N H01L H01L H01L
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Masatsugu Nobuaki Seiichi Yusuke Mineo Masato
Itahashi Kakinuma Tamura Onuki Shimotsusa Fujita