Oblon, Spivak, McClelland, Maier, & Neustadt
Stocker
 A stocker for accommodating, storing or transporting articles in clean, contamination-free conditions for either a long time or temporarily. The stocker has a particle collector provided in a part thereof. The particle collector includes an irradiation source such as ultraviolet light source, and a photoelectron emitting material that emits photoelectrons on irradiation with irradiation energy from the irradiation source. The particle collector further includes an electric field forming electrode, and a charged particle collecting material. The space where the particle collector is provided is preferably partitioned from the other space of the stocker by an irradiation energy screening material. 
Ebara Research Co., Ltd.
H B B B
H01L B03C B03C B03C
inventional inventional inventional inventional
Hidetomo Toshiaki
Suzuki Fujii