Device comprising multi-layered thin film having excellent adhesive strength and method for fabricating the same
A device comprises a multi-layered thin film having excellent adhesion due to the method of fabricating the same. More particularly, the device includes a multi-layered thin film consisting of a tantalum nitride layer, a tantalum layer formed on the tantalum nitride layer, and a gold thin film formed on the tantalum layer.
Seoul National University Industry Foundation Samsung SDI Co., Ltd.
H H H
H01L H01L H01L
inventional additional additional
Ju-Yong Ho-Jin Oh-Joong Jin-Goo Jae-Jeong
Kim Kweon Kwon Ahn Kim