Abelman, Frayne & Schwab
Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus
The clamp apparatus of the present disclosure includes a clamp member configured to contact a substrate accommodating container from an upper side and fix the substrate accommodating container to a predetermined position when a cover provided on a front surface of the substrate accommodating container is opened/closed, a driving mechanism configured to drive the clamp member; a casing configured to cover the driving mechanism, a suction port configured to communicate with the casing, an exhaust chamber provided near the casing, and a fan provided inside the exhaust chamber.
Tokyo Electron Limited
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Hiroshi Norio Masahiro Keishi Mitsuru Hisashi
Kikuchi Baba Kobayashi Shionaga Obara Inoue