Fitzpatrick, Cella, Harper & Scinto
Method of manufacturing photoelectric transducer with improved ultrasonic and purification steps
 A method of manufacturing a photoelectric transducer forms a functional film on a conductive substrate. The method comprises applying ultrasonic cleaning with a cleaning liquid containing water to the conductive substrate, then allowing the surface of the conductive substrate to contact purified water so as to import uniform oxidation and then forming the functional film thereon. The functional film is characterized in being formed with a metal layer as light-reflecting layer, a reflection enhancing layer, and a semiconductor photovoltaic device layer, prepared by a plasma CVD method, comprising a non-monocrystalline material containing silicon atoms as the matrix. 
Canon Kabushiki Kaisha
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Nobuo Ryo Masafumi Makoto
Tokutake Hayashi Sano Higashikawa