Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATECNT-short-configured, metal-short-configured, and AA-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATECNT-short-related failure mode, one metal-short-related failure mode, and one AA-short-related failure mode.
PDF Solutions, Inc.
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Andrzej Carl Conor Tomasz Simone Kimon Jeremy Dennis Sheng-Che Markus Nobuharu Marci Sherry Jonathan John Larg Rakesh Vyacheslav Indranil Hideki Marcin Kelvin Christopher Hans Timothy Stephen
Strojwas Taylor O'Sullivan Brozek Comensoli Michaels Cheng Ciplickas Lin Rauscher Yokoyama Liao Lee Haigh Kibarian Weiland Vallishayee Rovner De Matsuhashi Strojwas Doong Hess Eisenmann Fiscus Lam