Adams & Wilks
Ion beam device and ion beam processing method
There is provided a liquid metal ion beam irradiation device for irradiating a specific portion of a sample 6 with a prescribed liquid metal ion beam so as to form a cross section, and a gaseous ion beam irradiation device 7 for scanning a prescribed region (observation region) of the cross section using a gaseous ion beam focused to a prescribed diameter and removing a damaged layer on the prescribed region.
SII NanoTechnology Inc.
G H
G01N H01J
inventional inventional
Toshio Masakatsu Yasuhiko Toshiaki Yasuyuki Kouji
Kodama Hasuda Sugiyama Fujii Takagi Iwasaki