Amin, Turocy & Watson, LLP
Vertically stacked nanofluidic channel array
Techniques regarding a vertical nanofluidic channel array are provided. For example, one or more embodiments described herein can regard an apparatus that can comprise a semiconductor substrate and a dielectric layer adjacent to the semiconductor substrate. The dielectric layer can comprise a first nanofluidic channel and a second nanofluidic channel. The second nanofluidic channel can be located between the first nanofluidic channel and the semiconductor substrate.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Choonghyun Kangguo Peng Juntao
Lee Cheng Xu Li