Brinks Hofer Gilson & Lione
Tunnel-effect type magnetic sensor having free layer including non-magnetic metal layer
A free magnetic layer of a tunnel-effect type magnetic sensor is formed on an insulating barrier layer made of Mg—O, and the free magnetic layer includes an enhancement layer, a first soft magnetic layer, a non-magnetic metal layer, and a second soft magnetic layer, which are laminated in that order from the bottom. For example, the enhancement layer is formed of Co—Fe, the first and the second soft magnetic layers are formed of Ni—Fe, and the non-magnetic metal layer is formed of Ta. The average thickness of the first soft magnetic layer is formed in the range of 5 to 60 Å. Accordingly, a high resistance change rate (ΔR/R) can be obtained.
Alps Electric Co., Ltd.
H G G G G B B G
H01F G11C G01R G01R G11B B82Y B82Y G11B
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Ryo Yosuke Yoshihiro Hidekazu Masamichi Kazumasa Naoya
Nakabayashi Ide Nishiyama Kobayashi Saito Nishimura Hasegawa