Haynes and Boone, LLP
Patterning for substrate fabrication
Various examples of a technique for forming a pattern for substrate fabrication are disclosed herein. In an example, a method includes receiving a substrate. A patterned resist is formed on the substrate and has a trench defined therein. A dielectric is deposited on the patterned resist and within the trench such that the dielectric narrows a width of the trench to further define the trench. A fabrication process is performed on a region of the substrate underlying the trench defined by the dielectric.
Taiwan Semiconductor Manufacturing Co., Ltd.
H G H G H G G G H H G H G G G
H01L G03F H01L G03F H01L G03F G03F G03F H01L H01L G03F H01L G03F G03F G03F
inventional additional inventional additional inventional additional inventional inventional inventional inventional additional inventional inventional additional inventional
Feng-Jia Kai Chih-Chien Cheng-Ta Ching-Sen Wei-Chao Chun-Wei
Shiu Tzeng Wang Wu Kuo Chiu Chang