Robinson Intellectual Property Law Office, P.C.
Semiconductor device and manufacturing method thereof
An object of the present invention to provide a semiconductor device having a highly functional memory element with improved reliability, and to provide a technique for manufacturing such a highly reliable semiconductor device with a high yield at low cost without complicating an apparatus or a process. As a top view shape of a memory element, a rectangular shape having a projection and a depression on the periphery, a zigzagged shape having one or plural bends, a comb shape, a ring shape having an opening (space) inside, or the like is used. Alternatively, a rectangle with a ratio of a long side to a short side being high, an ellipse with a ratio of a long axis to a short axis being high, or the like can also be used.
Semiconductor Energy Laboratory Co., Ltd.
H H G H H H G G H H G H B G H H H
H01L H01L G11C H01L H01L H01L G11C G11C H01L H01L G11C H01L B82Y G11C H01L H01L H01L
additional additional inventional additional additional additional additional inventional additional additional inventional additional inventional inventional additional additional inventional
Tamae Toshihiko Kiyoshi
Takano Saito Kato