McDermott Will & Emery LLP
Semiconductor test device and manufacturing method thereof
A semiconductor test device for measuring a contact resistance includes: first fin structures, upper portions of the first fin structures protruding from an isolation insulating layer; epitaxial layers formed on the upper portions of the first fin structures, respectively; first conductive layers formed on the epitaxial layers, respectively; a first contact layer disposed on the first conductive layers at a first point; a second contact layer disposed on the first conductive layers at a second point apart from the first point; a first pad coupled to the first contact layer via a first wiring; and a second pad coupled to the second contact layer via a second wiring. The semiconductor test device is configured to measure the contact resistance between the first contact layer and the first fin structures by applying a current between the first pad and the second pad.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H G
H01L G01R
inventional inventional
Chia-Cheng Carlos H. Ming-Shiang Cheng-Yi Chih-Sheng
Ho Diaz Lin Peng Chang