Scully, Scott, Murphy & Presser
Oxide thin film for bolometer and infrared detector using the oxide thin film
An oxide thin film for bolometer having a vanadium oxide represented by VOx, where x satisfies 1.5&lE;x&lE;2.0, part of vanadium ion in the vanadium oxide being substituted by metal ion M, where the metal ion M is at least one of chromium (Cr), aluminum (Al), iron (Fe), manganese (Mn), niobium (Nb), tantalum (Ta) and titanium (Ti). Also, provided is an infrared detector having a bolometer thin film defined above. The oxide thin film for bolometer offers a low resistivity and a large TCR value. Also, the infrared detector offers a finer temperature resolution capability (NETD) as low as 0.03&deg; C.
NEC Corporation
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G01J H01L H01L H01L
inventional inventional additional additional
Toru Katsuya
Mori Kawano