Fleit Gibbons Gutman Bongini & Bianco PL
Silicon carbide member for plasma processing apparatus
A silicon carbide member for a plasma processing apparatus is obtained by mixing an α-silicon carbide powder having an average particle size of 0.3 to 3 μm, with an amount of metal impurities in the α-silicon carbide powder reduced to 20 ppm or less, and a sintering aid comprising B4C in amount of 0.5 to 5 weight parts or Al2O3 and Y2O3 in total amount of 3 to 15 weight parts; sintering a mixture of the α-silicon carbide powder and the sintering aid in an argon atmosphere furnace or a high-frequency dielectric heating furnace; and then processing the resulting sintered body. The resulting silicon carbide member for a plasma processing apparatus is low cost and durable.
HOKURIKU SEIKEI INDUSTRIAL CO., LTD.
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Masahiro Hiroshi Makoto Yukio Michito Hideo
Okesaku Sanda Saito Okudo Miyahara Eto