Processing system having magnet keeper
A processing system for and a method of producing ions inside a process chamber and shielding the ions from a magnetic field by directing the magnetic field through a magnet keeper is described.
WD Media, LLC
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C23C H01J H01J C23C
inventional inventional inventional inventional
Yew Ming Allen J. Robert D. Jinliang
Chiong Bourez Hempstead Chen