Rabin & Berdo, PC
Method of fabricating a poly-silicon thin film
A silicon layer and a heat-retaining layer are formed on a substrate in turn, and a laser beam with a sharp energy density gradient is next utilized to perform a laser heating process for inducing super lateral growth crystallization occurred in part of the Si layer. The heat-retaining layer provides additional heating-enhancement function for the Si layer in crystallization so as to increase the super lateral growth length. Then, the laser beam is repeatedly moved to irradiate the substrate to finish the crystallization process for the full substrate.
Industrial Technology Research Institute
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Jia-Xing Yu-Cheng Hung-Tse
Lin Chen Chen