Pennie & Edmonds
Scanning probe microscope having a cantilever used therein
 A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes. 
Nikon Corporation
H B G G G
H01L B82Y G01Q G01Q G01Q
inventional inventional inventional inventional inventional
Takamitsu Toru Tatsushi Shunji Yoshinori
Fujiu Fujii Nomura Watanabe Sango