Method of fabricating high efficiency CIGS solar cells
A method for fabricating high efficiency CIGS solar cells including the deposition of Ga concentrations (Ga/(Ga+In)=0.25−0.66) from sputtering targets containing Ga concentrations between about 25 atomic % and about 66 atomic %. Further, the method includes a high temperature selenization process integrated with a high temperature anneal process that results in high efficiency.
Intermolecular, Inc.
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Haifan Wei Sang Sandeep Jeroen
Liang Liu Lee Nijhawan Van Duren