Embedded MRAM structure and method of fabricating the same
An embedded MRAM structure includes a substrate divided into a memory cell region and a logic device region. An active area is disposed in the memory cell region. A word line is disposed on the substrate and crosses the active area. A source plug is disposed in the active area and at one side of the word line. A drain plug is disposed in the in the active area and at another side of the word line. When viewing from a direction perpendicular to the top surface of the substrate and taking the word line as a symmetric axis, the source plug is a mirror image of the drain plug.
UNITED MICROELECTRONICS CORP.
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inventional inventional inventional inventional
Ting-Hsiang Sheng-Yuan Kuo-Hsing
Huang Hsueh Lee