Blakely Sokoloff Taylor & Zafman LLP
Process for manufacturing micromechanical and microoptomechanical structures with backside metalization
The present invention provides a micromechanical or microoptomechanical structure produced by a process comprising defining the structure in a single-crystal silicon layer separated by an insulator layer from a substrate layer; selectively etching the single crystal silicon layer; depositing and etching a polysilicon layer on the insulator layer, with remaining polysilicon forming mechanical elements of the structure; metalizing a backside of the structure; and releasing the formed structure.
Xerox Corporation Microscan Systems Incorporated
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Bruce R. Chuang-Chia Joel A. Andrew J. Jingkuang Peter M. Alex T.
Scharf Lin Kubby Zosel Chen Gulvin Tran