Brooks Kushman P.C.
Substrate lifting device, substrate packaging apparatus and substrate packaging method
A substrate lifting device, a substrate packaging apparatus and a substrate packaging method are provided. The substrate lifting device is for lifting a first substrate when the first substrate is aligned to a second substrate, and includes a rotatable mechanism, a rotatable rod, a nozzle and a gas providing mechanism. The rotatable rod is rotatable about the rotatable mechanism. The nozzle is on the rotatable rod. The gas providing mechanism ejects a gas from the nozzle to lift the first substrate.
BOE TECHNOLOGY GROUP CO., LTD.
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inventional inventional inventional inventional
Zhongyuan Xiang
Sun Zhou