Tutunjian & Bitetto, P.C.
Middle of the line integrated eFuse in trench EPI structure
A fuse includes a semiconductor layer having a dielectric material formed thereon. An epitaxially grown material is formed in a trench within the dielectric material. The epitaxially grown material includes a peak region. A fuse metal is formed over the peak region and extends along sidewalls of the trench and over the dielectric material outside the trench. Contacts are formed outside the trench connecting to fuse metal over the dielectric material.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Junli Hong Juntao Chih-Chao
Wang He Li Yang