McDermott Will & Emery LLP
Electron gun
The present invention has an object to provide a cold cathode field-emission electron gun with low aberration, to thereby provide a high-brightness electron gun even in the case of a large current. The present invention provides a field-emission electron gun which extracts an electron beam from a cathode and converges the extracted electron beam, the field-emission electron gun including: a magnetic field lens which is provided such that the cathode is disposed inside of a magnetic field of the lens; and an extraction electrode for extracting electrons from the cathode, the extraction electrode being formed into a cylindrical shape without an aperture structure. The present invention can provide an electron gun having a function of converging an electron beam using a magnetic field, the electron gun which is capable of reducing an incidental electrostatic lens action and has small aberration and high brightness.
Hitachi High-Technologies Corporation
H H H H H H H
H01J H01J H01J H01J H01J H01J H01J
inventional additional inventional inventional additional additional additional
Takashi Keiji Shunichi Mikio
Onishi Tamura Watanabe Ichihashi