Knobbe, Martens, Olson & Bear, LLP
Piston mode lamb wave resonators
Piston mode Lamb wave resonators are disclosed. A piston mode Lamb wave resonator can include a piezoelectric layer, such as an aluminum nitride layer, and an interdigital transducer on the piezoelectric layer. The piston mode Lamb wave resonator has an active region and a border region, in which the border region has a velocity with a lower magnitude than a velocity of the active region. The border region can suppress a transverse mode.
Skyworks Solutions, Inc.
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Chun Sing Gong Bin Jie Jiansong Chih-Ming
Lam Tang Zou Liu Lin