Hoffman Warnick LLC
Embedded metal-insulator-metal (MIM) decoupling capacitor in monolitic three-dimensional (3D) integrated circuit (IC) structure
Various embodiments include three-dimensional (3D) integrated circuit (IC) structures and methods of forming such structures. In some cases, a 3D IC structure includes: a substrate; a first set of transistors overlying the substrate; a first inter-level dielectric (ILD) overlying the first set of transistors and the substrate; a dielectric overlying the first ILD; a semiconductor layer overlying the dielectric; a second set of transistors overlying the semiconductor layer; a capacitor embedded within the dielectric; and a first contact extending through the semiconductor layer and the dielectric to contact one layer of the capacitor, and a second contact extending through the semiconductor layer and the dielectric to contact a second, distinct layer of the capacitor.
GLOBALFOUNDRIES INC.
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Chengwen Kangguo Juntao Geng
Pei Cheng Li Wang