Oblon, McClelland, Maier & Neustadt, L.L.P.
Multi-beam blanking device and multi-charged-particle-beam writing apparatus
In one embodiment, a multi-beam blanking device includes a semiconductor substrate, an insulating film that is disposed on the semiconductor substrate, an antistatic film that is disposed on the insulating film, a plurality of cells each of which is related to a through-hole that penetrate the semiconductor substrate and the insulating film and each of which includes a blanking electrode and a ground electrode that are disposed on the insulating film, and a ground wiring line that is disposed in the insulating film. The antistatic film and the ground wiring line are connected to each other at a joint that extends through the insulating film on the ground wiring line.
NuFlare Technology, Inc.
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Yoshikuni Hirofumi Hiroshi Hiroshi
Goshima Morita Yamashita Matsumoto