Whitham, Curtis & Christofferson, PC
Semiconductor device tester and method of testing semiconductor device
There is provided a semiconductor device tester including (a) a tester substrate having the same structure as a structure of a substrate as a product except that a semiconductor device is not mounted on the tester substrate, (b) an electrically conductive sheet covering therewith a first area in which the semiconductor device is to be mounted on the tester substrate, the electrically conductive sheet being electrically insulating in a certain direction, and (c) a holder supporting a semiconductor device to be tested therewith, and compressing the semiconductor device onto the electrically conductive sheet to thereby electrically connect an externally projecting terminal of the semiconductor device to a connection terminal mounted on the tester substrate in the first area.
NEC Corporation
H G H
H01L G01R H01L
additional inventional additional
Michinobu Takahiro Hiroo Hirobumi Yoshihito
Tanioka Kimura Ito Inoue Fukasawa