Birch, Stewart, Kolasch & Birch, LLP
Method of preparing graphene layer
Disclosed is a method of forming a graphene layer, including: putting a substrate in a chamber of an electron cyclotron resonance device, and then evacuating the chamber. Conducting a carbon-containing gas into the chamber, wherein the carbon-containing gas has a pressure of 10−2 torr to 10−4 torr in the chamber. Heating the substrate until the substrate has a temperature of 100° C. to 600° C., and using a microwave with an electron cyclotron resonance mechanism to excite the carbon-containing gas to deposit a graphene layer on the substrate.
Industrial Technology Research Institute
B B C
B82Y B82Y C01B
inventional inventional inventional
Po-Wen Chih-Chen Yu-Tse Kun-Ping Henry
Chiu Chang Hsieh Huang Medina