Birch, Stewart, Kolasch & Birch, LLP
Image sensor device structure
An image sensor structure is provided. The image sensor device structure includes a substrate, and the substrate includes an array region and a peripheral region. The image sensor device structure includes an anti-reflection layer formed on the substrate and a buffer layer formed on the anti-reflection layer. The image sensor device structure includes a first etch stop layer formed on the buffer layer and a metal grid structure formed on the first etch stop layer. The image sensor device structure also includes a dielectric layer formed on the metal grid structure.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Hung-Wen Cheng-Hsien Jiech-Fun Shih-Pei Ching-Chung Yeur-Luen
Hsu Chou Lu Chou Su Tu