CKC & Partners Co., Ltd.
Manufacturing method of two-dimensional transition-metal chalcogenide thin film
A manufacturing method of a two-dimensional transition-metal chalcogenide thin film includes providing a substrate, providing a reaction film, providing a source and providing a microwave. The substrate is made of material having dipole moments. The reaction film, disposed on the substrate, has a predefined thickness and includes a transition-metal compound. The source includes S, Se, or Te. The substrate is heated by the microwave to produce a heat energy to the reaction film and the source; thus a chemical reaction takes place and the two-dimensional transition-metal chalcogenide thin film is formed on the substrate. The two-dimensional transition-metal thin film includes a plurality of elements, and each of the elements aligns along a predefined direction by controlling a value of the predefined thickness.
NATIONAL TSING HUA UNIVERSITY
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Yu-Ze Yu-Lun Henry Yi-Chen
Chen Chueh Medina Hsieh