Micro swivel actuators and a procedure for the production of the same
 The invention refers to micro swivel actuators and a procedure for the manufacturing of the same. The micro swivel actuators consist basically of a semiconductor wafer equipped with three layers, which contains on the one hand individual mirrors with integrated springs and support elements as mechanical components and on the other hand electrodes, feeder lines and electrical contacts as electrical arrangements. The manufacturing of the micro swivel actuators utilizes procedure steps from the field of surface micromechanics, so that well-tried technologies are being applied. The micro swivel actuators, especially the micromechanical mirror arrays, are in particular suited for applications in the pictorial reproduction technique via laser beam. With these actuators, a laser beam can be directed by turning several parallel triggered individual mirrors. 
CMS Mikrosystene GmbH Chemnitz
G
G02B
inventional
Christian Heinz-Ulrich Udo Joachim Wolfram Thomas Manfred Ramon
Kaufmann Lowe Wollmann Markert Dotzel Gessner Rauch Hahn