Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATE-short-configured, GATECNT-short-configured, and AA-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATE-short-related failure mode, one GATECNT-short-related failure mode, and one AA-short-related failure mode.
PDF Solutions, Inc.
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Tomasz Sheng-Che Kelvin Hideki Marcin Dennis Simone Stephen Indranil Timothy Larg Christopher Rakesh Jonathan Marci John Nobuharu Conor Jeremy Carl Markus Vyacheslav Kimon Hans Andrzej Sherry
Brozek Lin Doong Matsuhashi Strojwas Ciplickas Comensoli Lam De Fiscus Weiland Hess Vallishayee Haigh Liao Kibarian Yokoyama O'Sullivan Cheng Taylor Rauscher Rovner Michaels Eisenmann Strojwas Lee