Brinks Gilson & Lione
Apparatus and method for magnetic-field guided metal-assisted chemical etching
A magnetic field-guided method of metal-assisted chemical etching comprises immersing a structure that comprises a two-dimensional magnetic pattern layer on a surface thereof in an etchant solution. The magnetic pattern layer sinks into the structure as portions of the structure directly under the magnetic pattern layer are etched. A programmable magnetic field H(t) is applied to the structure during etching to guide the sinking of the magnetic pattern layer, thereby controlling the etching of the structure in three dimensions.
The Board of Trustees of the University of Illinois Board of Regents, The University of Texas System
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Wen Weidong Xiuling
Huang Zhou Li