Brinks Hofer Gilson & Lione
Optical position measuring system with a graduation that causes essentially only first orders of diffraction
An optical position measuring system that includes a light source, a measuring graduation, a scanning unit movable relative to the measuring graduation in at least one measurement direction. A projection graduation has periodic amplitude and phase structures disposed in alternation in the measurement direction. The arrangement further includes a detection graduation and a plurality of optoelectronic detector elements, wherein light from the light source interacts with the projection graduation so as to project a fringe pattern onto the detection graduation, so that via the plurality of optoelectronic detector elements, displacement-dependent output signals are detectable, and wherein the projection graduation has a structure such that in addition to even orders of diffraction and the zero order of diffraction, at least some of the (2n+1)th orders of diffraction are suppressed, where n=1, 2, 3, . . . , as a result of which essentially only the &plusmn;1st orders of diffraction contribute to generating the output signals.
Dr. Johannas Heidenhain GmbH
G G
G01D G01D
inventional inventional
Walter Wolfgang
Huber Holzapfel