Keating & Bennett, LLP
Optical apparatus of a stacked design, and method of producing same
An optical apparatus includes a first substrate including an optical functional element, and a second substrate including a movable micromechanical functional element, the first substrate and the second substrate being connected in a stacked manner, so that a light path exists which is convoluted between the first substrate and the second substrate, the movable micromechanical functional element and the optical functional element being arranged in the light path. In addition, a method of producing an optical apparatus includes producing a first substrate including an optical functional element, and producing a second substrate including a movable micromechanical functional element, as well as connecting the first and second substrates, so that a light path exists which is convoluted between the first and second substrates, the movable micromechanical functional element and the optical functional element being arranged in the light path.
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
G G G G G G G G G
G02B G01J G02B G01J G02B G01J G02B G01J G01J
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Heinrich Jens Thomas
Grueger Knobbe Egloff