Staas & Halsey LLP
Reaction apparatus
A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.
Samsung Electronics Co., Ltd.
Y H H B Y
Y10T H01L H01L B01J Y10T
additional inventional inventional inventional additional
Jin-hyuk Suk-chan Jung-wook Do-young
Choi Lee Kim Kam