Klintworth & Rozenblat IP LLP
Capacitive sensing structure with embedded acoustic channels
A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the top membrane and the electrode and the interconnecting structure defines a spacing between the top membrane and the bottom membrane.
INVENSENSE, INC.
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Mei-Lin Martin Xiang
Chan Lim Li