Buchanan Ingersoll & Rooney PC
Plasma confinement rings including RF absorbing material for reducing polymer deposition
Plasma confinement rings are adapted to reach sufficiently high temperatures on plasma-exposed surfaces of the rings to substantially reduce polymer deposition on those surfaces. The plasma confinement rings include an RF lossy material effective to enhance heating at portions of the rings. A low-emissivity material can be provided on a portion of the plasma confinement ring assembly to enhance heating effects.
Lam Research Corporation
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James H.
Rogers