McKenna Long & Aldridge LLP
Digital x-ray detector and fabrication method thereof
A digital x-ray detector and its fabrication method are disclosed to strengthen an electrical connection between an upper electrode and a lower by employing a multi-contact hole structure and obtaining reliability of a contact hole by electrically connecting the side of the lower line and the upper electrode. A semiconductor layer is inserted at a lower portion of the contact hole to prevent damage of a gate insulating layer possibly caused by an overetch to thus reduce a defective contact.
Display Co., Ltd.
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inventional additional inventional
Ju-Han
Kim