Rossi, Kimms & McDowell LLP
Optical element holding apparatus and exposure apparatus
A holding apparatus for holding an optical element includes a measuring part configured to measure a coordinate of the optical element, and a driving part configured to move the optical element based on the coordinate measured by the measuring part, wherein the measuring part includes a first sensor configured to detect a displacement amount of a part of the optical element, and a second sensor configured to detect that a part of the optical element is located at a predetermined position.
Canon Kabushiki Kaisha
G G G G
G03F G02B G03F G02B
inventional inventional inventional inventional
Kenji Jun Kenichi Ichiro
Yoshida Ota Kobayashi Onuki