Bingham McCutchen LLP
Method for forming self-aligned phase-change semiconductor diode memory
A method for fabricating a memory device includes depositing a phase-change and/or a resistive change material. The memory device is formed photolithographically using sixteen or fewer masks.
Contour Semiconductor, Inc.
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Thomas Lisa Mac D. Ailian Jenn C.
Brown Ceder Apodaca Zhao Chow