Birch, Stewart, Kolasch & Birch, LLP
Method for forming light-sensing device
A method for forming a light-sensing device is provided. The method includes forming a light-sensing region in a semiconductor substrate. The semiconductor substrate has a front surface and a light-receiving surface opposite to the front surface. The method also includes forming a first dielectric layer over the front surface and forming a second dielectric layer over the first dielectric layer. The second dielectric layer has a different refractive index than that of the first dielectric layer, and the first dielectric layer and the second dielectric layer together form a (or a part of a) light-reflective element. The method further includes partially removing the first dielectric layer and the second dielectric layer to form a contact opening. In addition, the method includes forming a conductive contact to partially (or completely) fill the contact opening.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L
additional additional inventional additional inventional inventional additional additional
Chun-Hao Hsun-Ying Yun-Wei Kuo-Cheng
Chou Huang Cheng Lee