Hamilton, Brook, Smith & Reynolds, PC
Reticle storage system
A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a series of doors for providing access to the reticles in the slots. An air circulation system flows filtered air past the reticles in the rack to prevent contaminants from accumulating on the reticles. The air circulation system is capable of providing positive air pressure within the enclosure with one door open, thereby preventing contaminants from entering the enclosure through the open door.
R. Foulke Development Company, LLC
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Y10S G03F G03F G03F Y10S Y10S
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Cord W. Takman Richard F. Richard F.
Ohlenbusch Lui Foulke, Jr. Foulke