Lee & Morse, P.C.
Apparatus for calibrating a probe station
An apparatus for calibrating a probe station includes a disk having a flat bottom surface, a plurality of thermosensors for measuring a temperature of a wafer chuck of the probe station, the plurality of thermosensors being disposed at predetermined positions on a top surface of the disk, and a level disposed at a predetermined position on the top surface of the disk.
Samsung Electronics Co., Ltd.
G G
G01R G01R
inventional additional
Jung-nam
Kim