Webb Ziesenheim Logsdon Orkin & Hanson, P.C.
Manufacture of a silicon waveguide structure
 A process for making a silicon rib wavegide structure is described comporising the following steps: PA1 (i) forming a window in a protective layer on the surface of a silicon wafer to expose a part of said surface; PA1 (ii) depositing a buffer layer at least over said exposed surface; PA1 (iii) carrying out an etch step to etch the buffer layer and silicon outside a protected rib portion thereby to form a silicon rib with the buffer layer on its upper surface; and PA1 (iv) forming a layer of cladding at least on side walls of the silicon rib. 
Bookham Technology Limited
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John Paul Matthew Peter
Drake Shaw