Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATE-short-configured, GATECNT-short-configured, and TS-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATE-short-related failure mode, one GATECNT-short-related failure mode, and one TS-short-related failure mode.
PDF Solutions, Inc.
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Nobuharu Marcin Hideki Andrzej Simone John Stephen Jonathan Timothy Kimon Hans Sheng-Che Rakesh Christopher Larg Vyacheslav Dennis Sherry Markus Kelvin Indranil Jeremy Marci Tomasz Carl Conor
Yokoyama Strojwas Matsuhashi Strojwas Comensoli Kibarian Lam Haigh Fiscus Michaels Eisenmann Lin Vallishayee Hess Weiland Rovner Ciplickas Lee Rauscher Doong De Cheng Liao Brozek Taylor O'Sullivan