Park & Associates IP Law LLC
Method and apparatus for fabricating high temperature superconducting film through auxiliary cluster beam spraying, and high temperature superconducting film fabricated using the method
Disclosed herein is a method of fabricating a high temperature superconducting film in a vacuum chamber through auxiliary cluster beam spraying using an evaporation method, wherein a high temperature superconducting material is deposited on a substrate in a vapor state by evaporating the high temperature superconducting material, and at the same time, a cluster beam material is formed into gas atoms by heating the cluster beam material charged in a housing, and the formed gas atoms pass through a nozzle of an inlet of the housing and then are sprayed and grown on the substrate in the form of the cluster beam, thereby forming pinning centers in the high temperature superconducting film.
Korea Electrotechnology Research Institute
H C C H
H01L C23C C23C H01L
inventional inventional inventional inventional
Ho Seop Sun Mi Do Jun Sang Moo Kyu Jung Yong Hwan Sang Soo Jae Eun Ye Hyun
Kim Lim Youm Lee Song Jung Oh Yoo Jung