Method for minimizing peeling at the surface of spin-on glasses
 A gas discharge through nitrous oxide or nitrogen is used to remove polymeric deposits that form on the surface of a layer of a spin-on glass that was etched in an atmosphere of carbon-fluorine compounds. Removal of the polymeric deposit greatly improves adhesion to the spin-on glass layer of subsequently deposited layers. The removal is accomplished without increasing any tendency of the spin-on glass layer to absorb moisture. 
Taiwan Semiconductor Manufacturing Company, Ltd.
H H C
H01L H01L C23C
inventional inventional inventional
Cheng-Cheng Chin-Kun
Chang Wang