Thomas, Kayden, Horstemeyer & Risley
Reticle management systems and methods
Reticle management systems and methods. The system comprises at least one reticle and at least one cabinet with an inert gas environment. The cabinet comprises a plurality of storage spaces. When the reticle is put in a storage space, the cabinet identifies the reticle and the storage space occupied thereby. The cabinet provides inert gas to the reticle. The storage information of the reticle in the cabinet and/or an inert gas status of the reticle are provided to a query system and a dispatch system for reticle location query and lot dispatching.
Taiwan Semiconductor Manufacturing Co., Ltd.
H H G G H Y G G
H01L H01L G03F G03F H01L Y10S G03F G03F
inventional inventional inventional inventional inventional additional inventional inventional
Yung-Ho Ping-Yung
Chen Yen