Crowell & Moring LLP
Semiconductor sensor device and method for manufacturing same
To provide a high-performance semiconductor sensor device and a method for manufacturing the semiconductor sensor device. This semiconductor sensor device has a sensor chip, and a first thin film formed on the sensor chip, said sensor chip being mechanically connected, via the first thin film, to a second thin film formed on a base formed of a polycrystalline material.
Hitachi Automotive Systems, Ltd.
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Takeshi Hiroshi Munenori Kentarou
Konno Kikuchi Degawa Miyajima