Morgan, Lewis & Bockius LLP
Thermal control for formation and processing of aluminum nitride
In various embodiments, controlled heating and/or cooling conditions are utilized during the fabrication of aluminum nitride single crystals and aluminum nitride bulk polycrystalline ceramics. Thermal treatments may also be utilized to control properties of aluminum nitride crystals after fabrication.
CRYSTAL IS, INC.
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Shichao Shailaja P. Robert T. Jianfeng Keisuke Leo J. Takashi
Wang Rao Bondokov Chen Yamaoka Schowalter Suzuki