Cooper & Dunham LLP
Electromechanical transducer, droplet ejection head, and method for manufacturing electromechanical transducer
An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2θ-ω scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle θ. The full width at half maximum is not greater than 10 degrees.
RICOH COMPANY, LTD.
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B41J H01L B41J H01L Y10T H01L H01L B41J
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Masaru Toshiaki Keiji Tsutoh Kanshi Masahiro Manabu
Shinkai Masuda Ueda Aoyama Abe Ishimori Nishimura