Innovation Counsel LLP
Method of planarizing substrate and method of manufacturing thin film transistor using the same
A method of planarizing a substrate includes forming a conductive pattern on a first surface of a base substrate, forming a positive photoresist layer on the base substrate and the conductive pattern, exposing the positive photoresist layer to light by irradiating a second surface of the base substrate opposite to the first surface with light, developing the positive photoresist layer to form a protruded portion on the conductive pattern, forming a planarizing layer on the base substrate and the protruded portion and eliminating the protruded portion.
Samsung Display Co., Ltd.
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Jin-Ho Hyang-Shik Jun-Gi Seung-Bo
Ju Kong Kim Shim