Birch, Stewart, Kolasch & Birch, LLP
Structure and formation method of light sensing device
Structures and formation methods of a light sensing device are provided. The light sensing device includes a semiconductor substrate and a filter element over the semiconductor substrate. The light sensing device also includes a light sensing region below the filter element and a light shielding element over the semiconductor substrate and surrounding a lower portion of the filter element. The light sensing device further includes a dielectric element over the light shielding element and surrounding an upper portion of the filter element. A top width of the light shielding element and a bottom width of the dielectric element are different from each other.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Yun-Wei Chun-Hao Yi-Hsing Hsun-Ying Yin-Chieh Hsin-Chi Kuo-Cheng
Cheng Chou Chu Huang Huang Chen Lee