Control method for differentiated etching depth
A control method for differentiated etching depth is provided. The method includes: providing a first etching stop pattern layer in a panel having stacked structure; adopting a first etchant to perform a first etching process to the panel such that a location of the panel provided with the first etching stop pattern layer forms a first etching depth, and forms a second etching depth at a location of the panel without providing the first etching stop pattern layer; through controlling an etching time, the second etching depth is deeper than a bottom of the first etching stop pattern layer; and adopting a second etchant to perform a second etching process to the panel in order to etch and remove the first etching stop pattern layer. In a same mask process, through changing the etchant, different depths are etched and formed to reduce the time consuming and decrease the production cost.
Wuhan China Star Optoelectronics Technology Co., Ltd
H H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional inventional additional inventional inventional additional inventional additional inventional inventional inventional inventional inventional inventional inventional
Wei
Wang