Servilla Whitney LLC
Graded interface in bragg reflector
A multilayer stack in the form of a Bragg reflector comprising a graded interfacial layer and a method of manufacturing are disclosed. The graded interfacial layer eliminates the formation of low-reflectivity interfaces in a multilayer stack and reduces roughness of interfaces in a multilayer stack.
Applied Materials Inc.
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Wen Shuwei Vibhu Weimin
Xiao Liu Jindal Li