Integrated force sensing element
An integrated force sensing element includes a piezoelectric sensor formed in an integrated circuit (IC) chip and a strain gauge at least partially overlying the piezoelectric sensor, where the piezoelectric sensor is able to flex. A human-machine interface using the integrated force sensing element may include a conditioning circuit, temperature gauge, FRAM and a processor core.
TEXAS INSTRUMENTS INCORPORATED
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G01L G06F G01L G06F
inventional inventional inventional inventional
Wei-Yan Terry Lee Alok Scott Robert Seung Bae Steve Mark Stephen
Shih Sculley Lohia Summerfelt Lee Kummerl Toth