Kilpatrick Townsend & Stockton LLP
Method of manufacturing a liquid jet head and a liquid jet apparatus
A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
Seiko Epson Corporation
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Setsuya Eiju Shiro Tsutomu
Iwashita Hirai Yazaki Nishiwaki