Blakely Sokoloff Taylor & Zafman
Methods for forming a spin-on-glass layer
 There is provided a method for forming a SOG layer, which can enhance flatness. In the method, the SOG layer is spin-coated on a wafer and the SOG solvent is spread in a closed receptacle containing the wafer to make a saturated vapor pressure in the receptacle. Thus, the SOG layer can be more flattened and be obtained with larger thickness than that of the prior art to enhance the productivity. The present invention can also maximally suppress the production of edge beads generated by spin coating and inhibit the bowing generated during etching of the SOG layer for forming a contact hole, with enhancing the flatness. 
Hyundai Electronics Industries Co., Ltd.
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Seung Jin
Lee