Parkhurst, Wendel & Rossi
Method of producing a minutely patterned structure
 A patterned structure including a plurality of patterned sheet members which have respective configurations and which are partially superposed on each other and which cooperate with each other to define a plurality of voids. At least one of the sheet members includes a thin-walled portion whose thickness is smaller than a thickness of the other portion. The thin-walled portion is formed by etching the appropriate sheet member or members. The thin-walled portion of one sheet member engages the corresponding thin-walled portion or the other portion of the other sheet member or members. 
Toppan Printing Co., Ltd. NGK Insulators, Ltd.
Y Y H B Y H H
Y10T Y10T H01L B41J Y10T H01L H01L
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Yukihisa Tetsuo Takao Azuma Kazuo
Takeuchi Watanabe Segawa Yamamoto Shirakawa