Abel Schillinger, LLP
Liquid adhesion composition, multi-layer structure and method of making said structure
A liquid adhesion composition can include at least one polymerizable compound comprising at least two functional groups; a solvent; a catalyst; and a cross-linking agent, wherein the cross-linking agent can have a structure of Formula (1): A [X—(O—Y—)n1—N(CH2—OR)2]n2 (1), wherein A is an alkyl group, or an aromatic group, or a heteroaromatic group; X is C1-5 alkyl, Y is C1-4 linear or branched alkyl; n1 is 1-10; R is C1-6 alkyl; and n2 is 1-6. The liquid adhesion composition can be cured at elevated temperatures and may be applied in nanoimprint lithography for attaching an imprint resist layer on a substrate.
CANON KABUSHIKI KAISHA
B B B B C H C H H
B32B B32B B32B B32B C08K H01L C09J H05K H01L
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Weijun Fen
Liu Wan