Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Electron beam drawing apparatus, deflection amplifier, deflection control device, electron beam drawing method, method of manufacturing semiconductor device, and electron beam drawing program
According to an aspect of the invention, there is provided an electron beam drawing apparatus comprising at least one stage of a deflection amplifier and a deflection unit, a first storage section which stores shot information at a drawing time, a second storage section which stores a correction table indicating a relation between the shot information and an output voltage of the deflection amplifier, and an adjusting section which adjusts an output of the deflection amplifier based on the correction table stored in the second storage section and the shot information stored in the first storage section.
Kabushiki Kaisha Toshiba
H B B H H H
H01J B82Y B82Y H01J H01J H01J
inventional inventional inventional additional additional inventional
Noriaki Tatsuhiko Hiroyuki Kazuo Tetsuro Shunko Takumi Takeshi
Sasaki Higashiki Mizuno Tawarayama Nakasugi Magoshi Ota Koshiba