Leydig, Voit & Mayer, Ltd.
Ultrasonic cleaning method
A cleaning method involves: disposing in a cleaning liquid held in a cleaning tank an object to be cleaned; and ultrasonically vibrating the cleaning liquid via an intermediate medium in contact with the cleaning tank to clean said object, the ultrasonically vibrating involving: ultrasonically vibrating the cleaning liquid with the cleaning liquid and the intermediate medium allowing sonic velocities, respectively, having a first difference; and ultrasonically vibrating the cleaning liquid with the cleaning liquid and the intermediate medium allowing sonic velocities, respectively, having a second difference different from the first difference.
SILTRONIC AG
B B
B08B B08B
inventional inventional
Etsuko Masashi Yoshihiro Teruo
Kubo Uchibe Mori Haibara