Banner & Witcoff, Ltd.
Thin film layer and manufacturing method thereof, substrate for display and liquid crystal display
A thin film layer and manufacturing method thereof, a substrate for display and a liquid crystal display are provided. The embodiments according to the present invention can solve the problem that the gradient at the edge of the thin film layer produced with current methods is too steep or perpendicular, thus the thin film layer deposited in the next step easily has step coverage defect or even breakage. The thin film layer of the embodiments of the present invention comprises a plurality of sub-layers with different densities, wherein, the density of an upper sub-layer is smaller than that of a lower sub-layer. The yield and reliability of the thin film transistor and the thin film transistor liquid crystal display produced with the thin film layer of the embodiments of the present invention are high.
BOE Technology Group Co., Ltd. HEFEI BOE Optoelectronics Technology Co., Ltd.
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Xiaohe Qinghua Q
Li Jiang