Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Vacuum prober and vacuum probe method
In a vacuum prober, a head plate is arranged on a prober chamber. A stage, first moving mechanism, recessed chamber, and sealing member are provided in the prober chamber. The stage is arranged below a probe card. The first moving mechanism vertically moves the stage in at least the Z direction. The recessed chamber has a bottom portion and side portion. A lower camera, an upper camera, and the stage are operated to obtain data for alignment. When the upper end of the side portion of the recessed chamber comes into tight contact with the lower surface of the sealing member and a vacuum mechanism evacuates the recessed chamber, a vacuum chamber is formed. As the chamber has a small capacity, the time required for evacuation can be shortened.
Tokyo Electron Limited
G G
G01R G01R
inventional additional
Haruhiko Kiyoshi Shinjiro
Yoshioka Takekoshi Watanabe