Brinks Hofer Gilson & Lione
Position measuring arrangement
A position measuring arrangement for detecting a relative position is disclosed. The position measuring arrangement includes a reflection scale graduation and a scanning unit having a plurality of optical elements. The plurality of optical elements includes a combining grating, a retro-reflector element, a scanning grating and detector elements. The optical elements are arranged so that light beams and/or partial light beams of a scanning beam path act on the reflection scale graduation at least twice; a directional reversal of the incident partial light beams impinging on the reflection scale graduation perpendicularly with respect to the measuring direction takes place by the retro-reflector element; and a pair of partial light beams impinges in a non-parallel manner on the combining grating, and the combining grating brings the partial light beams impinging on the combining grating to interference, so that phase-shifted signals are detected by the plurality of detector elements.
Dr. Johannes Heidenhain GmbH
G
G01D
inventional
Karsten Wolfgang
Sändig Holzapfel