McDermott Will & Emery LLP
Thin film capacitor and circuit board incorporating the same
Disclosed herein is a thin film capacitor that includes a capacitive insulating film, a first metal film formed on one surface of the capacitive insulating film, and a second metal film formed on other surface of the capacitive insulating film and made of a metal material different from that of the first metal film. The thin film capacitor has an opening penetrating the capacitive insulating film, first metal film, and second metal film. The second metal film is thicker than the first metal film. A first size of a part of the opening that penetrates the first metal film is larger than a second size of a part of the opening that penetrates the second metal film.
TDK CORPORATION
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inventional additional inventional additional inventional additional additional inventional additional inventional
Hitoshi Kazuhiro Tatsuo Kenichi Yuuki
Saita Yoshikawa Namikawa Yoshida Aburakawa