Young & Thompson
Resist pattern defined by inwardly arched lines
A device pattern of a semiconductor device. The pattern is defined by a plurality of non-straight lines that are inwardly arched and are formed from plural segments of plural ellipses that are arranged to surround the pattern.
NEC Electronics Corporation
H H H G
H01L H01L H01L G03F
inventional additional additional inventional
Mami
Takeuchi