Brinks Hofer Gilson & Lione
Ceramic heater and method for manufacturing the same
A ceramic heater includes a silicon nitride ceramic substrate and a heating member embedded in the silicon nitride ceramic substrate. An Al-thickened layer is formed in a surface layer portion of the silicon nitride ceramic substrate. The Al-thickened layer has an Al concentration higher than that of an internal layer portion of the silicon nitride ceramic substrate. The Al-thickened layer assumes such a graded composition structure that the Al concentration increases toward the surface of the silicon nitride ceramic substrate.
NGK Spark Plug Co., Ltd.
C H H H F F C
C04B H05B H05B H05B F23Q F23Q C04B
inventional inventional inventional additional additional inventional inventional
Masahiro Shindo
Konishi Watanabe