Ostrolenk, Faber, Gerb & Soffen, LLP
Thin film multilayered structure, ferroelectric thin film element, and manufacturing method of the same
A thin film multilayered structure comprises a single crystal Si substrate; a MgO buffer layer epitaxially grown on said single crystal Si substrate; and a metallic thin film made of Ir or Rh epitaxially grown on said MgO buffer layer.
Murata Manufacturing Co., Ltd.
H H
H01L H01L
inventional inventional
Xiao-min
Li