Contactless test method for integrated circuits
 A method is provided for contactless testing of an integrated circuit by fabricating, integrally with the integrated circuit, semiconductor switch elements, that is, thyristors, transistors and combinations thereof, that are connected to power and/or signal electrical inputs of the integrated circuit. Base regions of the switch elements are selectively exposed to a fine-dimensioned electron beam to switch the elements and supply desired electrical inputs at the connected inputs of the integrated circuit. The integrated circuit can thus be selectively tested preferably by segments and modules. After testing, the switch elements are disconnected from the integrated circuit, and the integrated circuit selectively connected preferably while accommodating and passivating defective components and modules of the circuit. 
Westinghouse Electric Corporation
G
G01R
inventional
Robert M. David Paul R. Donald F.
Handy Green Malmberg Stoneburner