Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells with first DOE including tip-to-side short configured fill cells and second DOE including chamfer short configured fill cells
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of tip-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of chamfer shorts.
PDF Solutions, Inc.
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Hideki Andrzej Stephen Hans Marci Sherry Carl Markus Timothy Kelvin Vyacheslav Conor Indranil Jonathan Tomasz John Simone Jeremy Marcin Dennis Sheng-Che Christopher Kimon Larg Rakesh Nobuharu
Matsuhashi Strojwas Lam Eisenmann Liao Lee Taylor Rauscher Fiscus Doong Rovner O'Sullivan De Haigh Brozek Kibarian Comensoli Cheng Strojwas Ciplickas Lin Hess Michaels Weiland Vallishayee Yokoyama