Pillsbury Winthrop LLP
Method for fabricating semiconductor device
The present invention discloses a method for fabricating a semiconductor device. In particular, methods of the present invention produces a contact plug which is larger than the presumed contact region. As a result, the acceptable process error margin for misalignment is increased, and the property and the yield of semiconductor devices are improved.
Hyundai Electronics Industries Co., Ltd.
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Yu Chang Jeong Ho
Kim Kim