Sughrue Mion, PLLC
Method of manufacturing an actuator device
A method of manufacturing an actuator device includes forming a Zr layer on one surface of a substrate, forming a ZrO2 layer by oxidizing the Zr layer, forming a lower electrode on top of the ZrO2 layer, forming a piezoelectric layer on top of the lower electrode, and forming an upper electrode on top of the piezoelectric layer. In the method, in forming the Zr layer, the Zr layer is formed through crystal growth of Zr, and the Zr layer thus formed has special crystal regions that protrude from the opposite surface of the Zr layer from the substrate. Each special crystal region has a height of 10 to 100 nm and a diameter of 0.1 to 1 μm when viewed from above, and the special crystal regions exist with a density of 1.0×106 to 1.0×103/cm2.
Seiko Epson Corporation
Y B B H H B B Y B
Y10T B41J B41J H01L H01L B41J B41J Y10T B41J
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Xin-Shan
Li