Renaissance IP Law Group LLP
Substrate processing apparatus and method for assembling tube assembly
In accordance with an exemplary embodiment, a substrate processing apparatus includes: a tube assembly having an inner space in which substrates are processed and assembled by laminating a plurality of laminates, a substrate holder configured to support the plurality of substrates in a multistage manner in the inner space of the tube assembly, a gas supply unit installed on one side of the tube assembly to supply a process gas to each of the plurality of substrates in the inner space; and an exhaust unit connected to the tube assembly to exhaust the process gas supplied into the inner space, the substrate processing apparatus that induces a laminar flow to supply a uniform amount of process gas to a top surface of the substrate.
EUGENE TECHNOLOGY CO., LTD.
C H H C H H H H C C H
C23C H01L H01L C23C H01L H01L H01L H01L C23C C23C H01L
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Jae Woo Jun Cha Young Kyung Seok Yong Ki Ja Dae Sung Tae Kyu Jin Bong Ju
Kim Kim Yoo Park Kim Ku Je Choi Jung