Cantor Colburn LLP
Incorporation of process variation contours in design rule and risk estimation aspects of design for manufacturability to increase fabrication yield
A system and method to perform risk assessment or design rule determination for an integrated circuit involves generating two or more process variation contours based on corresponding two or more combinations of two or more factors that affect manufacturability of the integrated circuit. Each of the two or more process variation contours is associated with a probability. The method also includes generating a random number to select from among the two or more process variation contours based on a cumulative probability value associated with each of the two or more process variation contours. The cumulative probability values are determined from the probabilities. The risk assessment or the design rule determination is performed using selected ones of the two or more process variation contours. Fabrication yield is increased based on finalizing the physical layout using the process variation contours.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Dongbing Robert Jing Jinning
Shao Wong Sha Liu