Syncoda LLC
Semiconductor element and fabrication method thereof
A semiconductor element includes a super-lattice buffer layer including AlxN1-x layers and AlyO1-y layers (0<x<1, 0<y<1). The super-lattice buffer layer can mitigate corrosion to the side wall by chemical solution during chip fabrication, and improve chip yield. Fabrication the super-lattice buffer layer to achieve the effects can be realized, for example, using chemical vapor deposition (CVD).
XIAMEN SANAN OPTOELECTRONICS TECHNOLOGY CO., LTD.
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Chan-chan Chang-cheng Chia-hung Sheng-wei
Ling Chuo Chang Chou