Haynes and Boone, LLP
Method and apparatus for transferring pixel data for electron beam lithography
A method of manufacturing a substrate is disclosed. The method includes receiving a plurality of pixel elements, wherein each of the pixel elements includes data members; and transferring the data members to a plurality of exposing devices that are configured to conditionally expose the substrate with an incident energy beam when coupled with the data members, wherein different data members of one pixel element are transferred at different system cycles.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Yu-Chi
Chen