Antonelli, Terry, Stout, & Kraus, LLP
Inspection data analyzing system
 The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip. 
Hitachi, Ltd.
H G G H
H01L G01N G01N H01L
inventional inventional inventional additional
Tsutomu Yuzo Sadao Taizo Isao Masao Kazuhiko Hiroto Seiji Kimio Yuzaburo Shuichi Yuichi Jun Osamu Yutaka
Okabe Taniguchi Shimoyashiro Hashimoto Miyazaki Sakata Matsuoka Nagatomo Ishikawa Muramatsu Sakamoto Hanashima Ohyama Nakazato Satou Ebara