Eschweiler & Potashnik, LLC
Metal reflector grounding for noise reduction in light detector
The problem of reducing noise in image sensing devices, especially NIR detectors, is solved by providing ground connections for the reflectors. The reflectors may be grounded through vias that couple the reflectors to grounded areas of the substrate. The grounded areas of the substrate may be P+ doped areas formed proximate the surface of the substrate. In particular, the P+ doped areas may be parts of photodiodes. Alternatively, the reflectors may be grounded through a metal interconnect structure formed over the front side of the substrate.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Yimin Dun-Nian Yen-Ting Shyh-Fann Jhy-Jyi Jen-Cheng Ching-Chun
Huang Yaung Chiang Ting Sze Liu Wang