Faceted structure formed by self-limiting etch
An eFuse device on a substrate is formed on a substrate used for an integrated circuit. A semiconductor structure is created from a semiconductor layer deposited over the substrate. A mask layer is patterned over the semiconductor structure such that a first region of the semiconductor structure is exposed and a second region of the semiconductor structure is protected by the mask layer. Next, a self-limiting etch is performed on the exposed areas in the first region of the semiconductor structure, producing a first faceted region of the semiconductor structure in the first region. The semiconductor in the first faceted region has a minimum, nonzero thickness at a point where two semiconductor facet planes meet which is thinner than a thickness of semiconductor in the second region of the semiconductor structure is protected by the mask layer. The first faceted region is used as a link structure in the eFuse device.
International Business Machines Corporation
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Juntao Ali Werner A Kangguo
Li Khakifirooz Rausch Cheng