Birch, Stewart, Kolasch & Birch
Resist compositions
 A resist based on a living polymer is provided. Living anionic polymerization of p-alkoxycarbonylstyrene monomers results in polymers having a molecular weight distribution (Mw/Mn) of from 1 to 1.4. 
Shin-Etsu Chemical Co., Limited
C G
C08F G03F
inventional inventional
Tomoyoshi Fujio Motoyuki Osamu
Furihata Yagihashi Yamada Watanabe