Semiconductor structure with deep trench thermal conduction
Diodes and resistors for integrated circuits are provided. Deep trenches (DTs) are integrated into the diodes and resistors for the purposes of thermal conduction. The deep trenches facilitate conduction of heat from a semiconductor-on-insulator substrate to a bulk substrate. Semiconductor fins may be formed to align with the deep trenches.
International Business Machines Corporation
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Balasubramanian Pranatharthi Junjun Theodorus Eduardus Kangguo Tenko Shom
Haran Li Standaert Cheng Yamashita Ponoth