Scully, Scott, Murphy & Presser, P.C
Ion-sensitive field effect transistor (ISFET) with enhanced sensitivity
An ion-sensitive field effect transistor (ISFET) is provided that has enhanced sensitivity due to an increased passivation capacitance, Cp. The increased Cp is obtained by increasing the surface area of the passivation layer by forming particles (metallic, semiconductor or dielectric) in a micro-well, and by embedding the particles in an electrically conductive liner that is formed under the passivation layer and within the micro-well.
International Business Machines Corporation
G
G01N
inventional
Juntao Chanro Ruilong Kangguo
Li Park Xie Cheng