Bacon & Thomas, PLLC
Capacitor and fabrication method thereof
A fabrication of a capacitor in a semiconductor is simplified by using nitrogen plasma in forming an aluminum nitride layer functioning as an insulation layer on the aluminum layer disposed in a capacitor region. Subsequently, a planarized IMD (inter-metal dielectric) layer is obtained, facilitating via etching process.
Dongbu Electronics Co., Ltd.
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Jung Joo
Kim