Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Needle trace transfer member and probe apparatus
A needle trace transfer member to which needle traces of probes are transferred is installed at a movable mounting table to align the probes before electrical characteristics of a target object on the mounting table are inspected by bringing the probes into electrical contact with the target object. The needle trace transfer member is made of a shape memory polymer transformed reversibly and rapidly between a glass state with a high modulus elasticity and a rubber state with a low modulus of elasticity near its glass transition temperature. The glass transition temperature is set to a temperature close to a set temperature of the mounting table. The shape memory polymer is mainly made of polyurethane-based resin.
Tokyo Electron Limited
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inventional inventional additional
Hiroshi Tetsuji Takeshi Hirofumi
Yamada Watanabe Kawaji Katagiri