Lee & Morse, P.C.
Semiconductor device
A semiconductor device includes gate electrodes vertically stacked on a substrate, and channel holes passing through the gate electrodes to extend perpendicularly to the substrate and including a gate dielectric layer and a channel area. The gate dielectric layer may be formed of a plurality of layers, and at least one layer among the plurality of layers may have different thicknesses in different locations.
Samsung Electronics Co., Ltd.
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Jae Young Ju Mi BiO Hyung Joon HanMei Jung Ho Su Jin Young Seon
Ahn Yun Kim Kim Choi Kim Shin Son