Rabin & Berdo, P.C.
Self-aligned fabrication method for ridge-waveguide semiconductor laser
A self-aligned fabrication method utilizes dielectric planarization process for fabricating ridge waveguide semiconductor lasers. The dielectric planarization process starts with depositing a thick dielectric film onto the ridge-structured semiconductor wafer surface, and then the resulting corrugated dielectric surface is polished into a flat surface in a self-terminated manner. This dielectric flat surface is able to uniformly expose its semiconductor ridge tops by an overall etch-back process.
Chunghwa Telecom Co., Ltd.
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Chia-Ju Chong-Long Wen-Jeng Jy-Wang
Lin Ho Ho Liaw