Otterstedt, Wallace & Kammer, LLP
Selective ion filtering in a multipurpose chamber
A multipurpose semiconductor process chamber includes a vessel wall that encloses contiguous first and second volumes of the multipurpose chamber, and means for selectively effectively preventing ions moving across a plane that partitions the first volume from the second volume. For example, the means can include an electromagnet, or at least one permanent magnet, that is operable to impose and remove a magnetic field with field lines extending in the plane.
International Business Machines Corporation
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Chih-Chao Roger Allan Wei Theodorus E. Lawrence A.
Yang Quon Wang Standaert Clevenger