Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
Optical system with compensation lens
An optical system used in a charged particle beam inspection system. The optical system includes one or more optical lenses, and a compensation lens configured to compensate a drift of a focal length of a combination of the one or more optical lenses from a first medium to a second medium.
ASML Netherlands B.V.
G H G H H H H G H H G
G02B H01J G02B H01J H01J H01J H01J G03F H01J H01J G03F
inventional inventional inventional additional inventional additional inventional inventional inventional additional inventional
Jian Yixiang Zhiwen
Zhang Wang Kang