Sughrue Mion, PLLC
Downward type MEMS switch and method for fabricating the same
A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.
Samsung Electronics Co., Ltd.
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inventional inventional additional
Young-tack In-sang Dong-kyun Sang-wook Jung-han Jong-seok Che-heung Sang-hun
Houng Song Kim Kwon Choi Kim Kim Lee