Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Film forming apparatus, susceptor, and film forming method
A film forming apparatus according to an embodiment of the invention includes: a film forming chamber configured to form a film on a substrate; a susceptor configured to place the substrate thereon; a rotating part configured to rotate the susceptor; a heater configured to heat the substrate; and a gas supplier configured to supply process gases into the film forming chamber, wherein the susceptor includes: a ring-shaped outer circumferential susceptor supported by the rotating part; a holder provided at an inner circumferential portion of the outer circumferential susceptor, the holder configured to hold the substrate; a ring-shaped plate provided over the outer circumferential susceptor; and a cover member configured to cover a top surface and an outer circumferential surface of the plate and an outer circumferential surface of the outer circumferential susceptor.
NuFlare Technology, Inc.
C C C C C
C30B C30B C23C C30B C23C
inventional inventional inventional inventional inventional
Hiroaki Hideki Katsumi Koichi Masami Hidekazu Masahiko Isaho
Fujibayashi Ito Suzuki Nishikawa Naito Tsuchida Ito Kamata