Maschoff Brennan
Image sensor
An image sensor includes a semiconductor substrate, a gate dielectric layer over the semiconductor substrate, a gate electrode over the gate dielectric layer, and a protection oxide film in contact with a top surface of the gate electrode. A top surface of the protection oxide film is free from contact with a hard mask comprising nitrogen.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Shyh-Fann Kai-Chun Chun-Hao Chun-Wei Kuo-Cheng
Ting Hsu Chou Chia Lee