Hollingsworth Davis, LLC
Integration of semiconductor epilayers on non-native substrates
An article includes a support substrate bonded to heterostructure epitaxial layers that include one or more electronic devices. The support substrate has a bonding surface and the heterostructure epitaxial layers have a surface with the epitaxial growth direction of the heterostructure epitaxial layers towards the surface. The surface of the heterostructure epitaxial layers is bonded at the bonding surface of the support substrate by ion exchange between the surface of the heterostructure epitaxial layers and the bonding surface of the support substrate.
PALO ALTO RESEARCH CENTER INCORPORATED
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Qian Christopher L. JengPing Scott J. Brent S.
Wang Chua Lu Limb Krusor