Adams & Wilks
Process for producing vibrator for piezoelectric motor
 A vibrator for a piezoelectric motor is produced by forming an elastic material into a predetermined shape, forming a piezoelectric material on the shaped elastic material for polarization and for driving, forming an electrode for polarization on the piezoelectric material, forming an electrode for driving on the surface of the electrode for polarization or on the piezoelectric material after stripping the electrode for polarization, and etching the elastic material into a predetermined shape has an elastic body and to remove the elastic body from a base. Instead of forming the piezoelectric material on the shaped elastic material for polarization and for driving, an electrode both for polarization and for driving can be formed on one face of the shaped elastic material, and the piezoelectric material can be formed on that electrode. 
Seiko Instruments Inc.
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inventional inventional inventional
Masao Hiroshi Hironobu
Kasuga Okano Ito