Duane Morris LLP
Gas delivery for uniform film properties at UV curing chamber
A UV curing system includes an enclosure defining an interior, a UV radiation source disposed within the interior of the enclosure, and a first window disposed within the interior of the enclosure. The first window creates a barrier that separates the UV radiation source and a processing chamber. A second window is disposed within the interior of the enclosure at a distance from the first window to define a gas channel. The second window defines a plurality of openings such that the gas channel is in fluid communication with the processing chamber. A gas inlet conduit is in fluid communication with the gas channel and is configured to introduce a cooling gas into the gas channel. A gas outlet is in fluid communication with the processing chamber and is configured to remove gas from the processing chamber.
Taiwan Semiconductor Manufacturing Co., Ltd.
H B H
H01L B05D H01L
inventional inventional inventional
Kuo-Shu Ding-I Sung-Po Chung-Wen Yu-Ying
Tseng Liu Yang Chang Lu