Crowell & Moring LLP
Defect inspection apparatus and defect inspection method
A defect inspection apparatus includes: stages each mounting an inspecting object on which a circuit pattern having a group of parallel lines is formed, and each running perpendicular or parallel to the group of lines; an illumination optical system which illuminating a surface of the inspecting object with a slit beam being slit light so that a longitudinal direction of the slit beam is substantially perpendicular to the running directions of the stages, and which has a first inclined angle formed by the direction of the group of lines and a projection line, of an optical axis of the slit beam, to the inspecting object; a spatial filter that shields or transmits reflected and scattered light of the inspecting object according to a difference in distribution of orientation; and a detection optical system that detects the reflected and scattered light transmitted through the spatial filter by image sensors. Moreover, the illumination optical system illuminates the inspecting object with another slit beam from a direction opposite to an incident direction of the slit beam on a plane.
Hitachi High-Technologies Corporation
G G G G G G G G
G01N G06V G01N G06T G01N G06T G06V G01N
inventional inventional inventional additional inventional inventional additional inventional
Shuichi Kei Kenji Takuaki Masayuki Minori Shigeo Hiroyuki Shigeru Masaaki
Chikamatsu Shimura Aiko Sekiguchi Ochi Noguchi Otsuki Yamashita Abe Ito