Kratz, Quintos & Hanson, LLP
Semiconductor photodetector element and method
A semiconductor photodetector element includes a semiconductor substrate having a first conductivity type; a columnar structure formed on a first surface of the semiconductor substrate, the columnar structure being composed of a semiconductor of the first conductivity type; a light absorption layer formed so as to surround the columnar structure; and a semiconductor layer formed so as to surround the light absorption layer.
FUJITSU LIMITED
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Hiroyasu Yoshiaki Kenichi Nami
Yamashita Nakata Kawaguchi Yasuoka