Pearne & Gordon LLP
Substrate processing apparatus, substrate processing method and recording medium
A substrate processing apparatus includes a stationary cup body 51 provided to surround a substrate holding unit 31 and configured to receive a processing liquid or mist of the processing liquid discharged onto a substrate, the stationary cup body not being moved relatively with respect to a processing vessel; a mist guard 80; and a guard elevating mechanism 84 configured to elevate the mist guard. Here, the mist guard is provided at an outside of the stationary cup body to surround the stationary cup body and configured to block a liquid scattered outwards beyond a space above the stationary cup body. Further, the mist guard includes a cylindrical portion 81 of a cylindrical shape and a protruding portion 82 protruded from an upper portion of the cylindrical portion toward an inside of the cylindrical portion.
TOKYO ELECTRON LIMITED
H H B B B B B B H
H01L H01L B08B B08B B08B B08B B08B B08B H01L
inventional additional inventional inventional additional additional additional additional additional
Nobuhiro Daisuke Takahisa Norihiro Yusuke Jiro Kazuhiro Yuichi
Ogata Goto Otsuka Ito Hashimoto Higashijima Aiura Douki