JCIPRNET
Optical modulator and package
An optical modulator includes a dielectric layer and a waveguide. The waveguide is disposed on the dielectric layer. The waveguide includes an electrical coupling portion, a slab portion, and an optical coupling portion. The slab portion is sandwiched between the electrical coupling portion and the optical coupling portion. The slab portion has at least two sub-portions having different heights. A maximum height of the slab portion is smaller than a height of the electrical coupling portion.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G G
G02F G02F G02F
inventional additional additional
Feng-Wei Lan-Chou Chewn-Pu Huan-Neng Min-Hsiang
Kuo Cho Jou Chen Hsu