Ziegler IP Law Group, LLC
Deposition reactor with plasma source
A deposition reactor includes an in-feed part that defines an expansion space which leads reactants as a top to bottom flow from a plasma source towards a reaction chamber, the expansion space widening towards the reaction chamber, and a lifting mechanism for loading at least one substrate to the reaction chamber from the top side of the reaction chamber. The deposition reactor deposits material on the at least one substrate in the reaction chamber by sequential self-saturating surface reactions.
PICOSUN OY
H C C C C C C H C
H01J C23C C23C C23C C23C C23C C23C H01J C23C
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Wei-Min Timo Vaino Sven Juhana
Li Malinen Kilpi Lindfors Kostamo