Sinorica, LLC
Al-Sb-Te phase change material used for phase change memory and fabrication method thereof
The present invention discloses an Al—Sb—Te phase change material used for PCM and fabrication method thereof. Said phase change material, which can be prepared by PVD, CVD, ALD, PLD, EBE, and ED, is a mixture of three elements aluminum (Al), antimony (Sb) and tellurium (Te) with a general formula of Alx(SbyTe1)1-x, where 0<x≦0.85, 0.67≦y≦7. Said material is electrically driven from outside. By adjusting the content of three elements in the mixture, storage materials with different crystallization temperatures, melting temperatures and activation energies of crystallization can be achieved. Any two elements of aluminum, antimony and tellurium can be bonded to each other, so the adjustability is very high, maintaining the phase change properties in a wide range. Compared with conventional Ge2Sb2Te5, the materials achieved by properly adjusting the element ratio in Alx(SbyTe1)1-x have higher crystallization temperatures, better thermal stability and data retention, and lower melting temperatures, while at the same time inheriting the fast phase change capability from SbyTe1. Moreover, as a common element used in microelectronics, aluminum (Al) features mature technology and nice compatibility with CMOS.
Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
C H G G H C C C
C23C H01L G11C G11C H01L C23C C23C C01B
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Min Feng Liangcai Bo Zhitang Xilin Cheng
Zhu Rao Wu Liu Song Zhou Peng