Norton Rose Fulbright US LLP
Plasma equipment for treating powder
A powder plasma processing apparatus is disclosed. The powder plasma processing apparatus is a powder plasma processing apparatus of a circular surface discharge plasma module, and the apparatus includes a plate-like electrode layer serving as an external surface of the circular surface discharge plasma module, an insulating layer disposed on an internal surface of the plate-like electrode layer, and a plasma generating electrode disposed on the insulating layer, wherein the circular surface discharge plasma module rotates, an alternating voltage is applied to the plasma generating electrode and the plate-like electrode layer to generate plasma around the plasma generating electrode, and a powder for plasma processing is processed by the plasma within the circular surface discharge plasma module.
KOREA BASIC SCIENCE INSTITUTE
H H H H B B B H H
H01J H05H H01J H01J B01J B01J B01J H05H H01J
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Yong Ho Hyun Young Dong Chan
Jung Jeong Seok