Ladas & Parry LLP
Apparatus and method for calibrating extreme ultraviolet spectrometer
Provided are an apparatus and method for calibrating an extreme ultraviolet (EUV) spectrometer in which a wavelength of a spectrum of EUV light used for EUV lithography and mask inspection technology can be measured accurately.
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
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G03F G03F G03F G01J G01J
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Deok Ha Min Chul Min Ah Myung Suk Woon Jo Young Min Taik Jin Jae Hun Seok Sun Ho Yong Soo
Woo Park Seo Chun Cho Jhon Lee Kim Lee Kim Kim