Haynes and Boone, LLP
Method and composition of a chemically amplified copolymer resist
The present disclosure provides a sensitive material. The sensitive material comprises a copolymer that includes polymer units including a hydrophobic unit; a hydrophilic unit comprising an acid generator; and a connection unit bonded between the hydrophobic unit and the hydrophilic unit, the connection unit comprising an acid-labile group.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G G G G G G G G G
G03F G03F G03F G03F G03F G03F G03F G03F G03F
inventional inventional inventional inventional inventional inventional inventional inventional inventional
Ching-Yu Ya-Ling
Chang Cheng