Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Manufacturing apparatus and method for semiconductor device
There is provided an apparatus for manufacturing a semiconductor device including a chamber in which a wafer is loaded; a gas supply mechanism for supplying process gas into the chamber; a gas discharge mechanism for discharging gas from the chamber; a heater having a slit and for heating the wafer to a predetermined temperature; a push-up base on which the wafer is mounted in an lifted state and housed in the slit in a lower state; a vertical rotation drive control mechanism for moving the push-up base up/down and rotating the push-up base in an lifted state; and a rotating member for rotating the wafer in a predetermined position and a rotation drive control mechanism connected to the rotating member.
NuFlare Technology, Inc.
H H C C C C
H01L H01L C30B C23C C30B C23C
additional additional inventional inventional inventional inventional
Kunihiko Hideki
Suzuki Ito