Systems and methods for conforming device testers to integrated circuit device profiles with feedback temperature control
An integrated circuit (IC) device tester maintains a set point temperature on an IC device under test (DUT) having a die attached to a substrate. The tester includes a thermal control unit and a fluid management system configured to supply the thermal control unit with fluids for pneumatic actuation, cooling, and condensation abating. The tester can includes a box enclosing the thermal control unit thereby providing a substantially isolated dry environment during low humidity testing of the DUT. The heat exchange plate may include an inner structure for thermal conductivity enhancement.
Essai, Inc.
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Oksana Nasser Joven R. Elena V. Chee Wah
Kryachek Barabi Tienzo Nazarov Ho