Birch, Stewart, Kolasch & Birch, LLP
Method for preparing synthetic quartz glass substrate
Synthetic quartz glass substrates are prepared by furnishing a synthetic quartz glass block, coating two opposed surfaces of the glass block with a liquid having a transmittance of at least 99.0%/mm at a birefringence measuring wavelength, measuring a birefringence of the glass block by directing light thereacross, determining a slice thickness on the basis of the birefringence measurement and the dimensions of the substrate, and slicing the glass block at the determined slice thickness.
SHIN-ETSU CHEMICAL CO., LTD.
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Yoko Daijitsu Atsushi Masaki
Ishitsuka Harada Watabe Takeuchi