Haynes and Boone, LLP
Silicon-based middle layer composition
A method of making a semiconductor device is provided. The method includes forming a first material layer that includes a silicon-based component having an alkyl group on a substrate, forming a photoresist layer directly on the material layer, and exposing the photoresist layer to a radiation source.
Taiwan Semiconductor Manufacturing Company, Ltd.
C G H H G H
C09D G03F H01L H01L G03F H01L
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Chen-Yu Ching-Yu
Liu Chang