Suiter Swantz pc llo
High-power short-pass total internal reflection filter
An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.
KLA-Tencor Corporation
H H H G H H H
H01J H01J H01J G03F H01J H01J H05H
inventional inventional inventional inventional inventional inventional inventional
Wei Ilya
Zhao Bezel