Leepi
Thin film electrode separation method using thermal expansion coefficient
In a thin film electrode separation method using thermal expansion coefficient, a first solution is coated on a substrate. The first solution coated on the substrate is hardened. The substrate is left in a predetermined time, to form a first thin film having a first thermal expansion coefficient on the substrate. A photoresist is coated on the substrate having the thin film formed thereon. The photoresist coated on the substrate is hardened, to form a photoresist film having a second thermal expansion coefficient. A metal and a passivation layer are formed on the photoresist film. The photoresist film is detached from the first thin film, using difference of a thermal expansion coefficient between the photoresist film and the first thin film.
OSONG MEDICAL INNOVATION FOUNDATION
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B81C H01L H01L H01L H01L H01L B81B
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Ha Na Seung-A Ha-Chul Young-Jin Jin-Woo
Park Lee Jung Kim Ahn