WPAT, P.C.
Method for enhancing the measurement capability of multi-parameter inspection systems
A method for improving the measurement capability of multi-parameter inspection systems includes performing a measuring procedure to acquire a measured signature of a sample, calculating weighting factors representing a correlation between structural parameters of the sample by using a weighting algorithm, transforming the weighting factors into a sampling function by using a transforming rule, updating the measured signature to form an updated measured signature and generating a plurality of updated nominal signatures according to the sampling function, and comparing the updated measured signature and the updated nominal signatures to determine the structural parameters of the sample.
Industrial Technology Research Institute
G G G G G
G01N G01B G01N G01N G01B
inventional inventional additional additional inventional
Chung Chu Chun Hung Yi Sha
Chang Ko Kuo