Method of synthesizing diamond
 In a method of synthesizing diamond on a substrate from plasma containing a carbon component, filaments containing tungsten as a thermoelectron-emitting material are arranged above a substrate in a chamber. An electrode is provided at a position separated from and particularly above the filaments. The filaments are at least temporarily energized with a potential relatively higher than that of the substrate, while the electrode is at least temporarily supplied with a potential relatively higher than that of the filaments. Thus, plasma is generated between the filaments and the substrate, while electrons are moved from the filaments to the electrode for also generating plasma between the filaments and the electrode, thereby forming nuclei of diamond on the substrate. Thereafter, the respective potentials of the electron emitting filaments and the electrode are equalized with each other, for growing a film of diamond from the nuclei of diamond. 
Sumitomo Electric Industries, Ltd.
H C Y C H C C C
H01J C23C Y10S C23C H01J C30B C23C C30B
additional inventional additional inventional inventional inventional inventional inventional
Takahiro Yoshiaki Kentaro Takashi
Imai Kumazawa Yoshida Tsuno