Gibb & Rahman, LLC
Trench capacitor with void-free conductor fill
A method forms a node dielectric in a bottle shaped trench and then deposits an initial conductor within the lower portion of the bottle shaped trench, such that a void is formed within the initial conductor. Next, the method forms an insulating collar in the upper portion of the bottle shaped trench above the initial conductor. Then, the method simultaneously etches a center portion of the insulating collar and the initial conductor until the void is exposed. This etching process forms a center opening within the insulating collar and the initial conductor. Additional conductor is deposited in the center opening such that the additional conductor is formed at least to the level of the surface of the substrate.
International Business Machines Corporation
H H
H01L H01L
inventional inventional
Johnathan E. Xi Kangguo
Faltermeier Li Cheng