Mask pellicle remove tool
 A mask pellicle removal apparatus for separating a mask pellicle from a glass reticle to which it is bonded by prying against its releasable bond. The apparatus includes a table support for nesting the glass reticle and for supporting a manually operated prying mechanism having only the necessary degrees of freedom for prying free the mask pellicle without damaging the glass reticle. 
Taiwan Semiconductor Manufacturing Company
Y G Y
Y10T G03F Y10T
additional inventional additional
Meng-Chun Liu
Li Hsieh-Mei