Harness, Dickey & Pierce, P.L.C.
Method of forming a fine pattern by using block copolymers
A method of forming a fine pattern includes forming a phase separation guide layer on a substrate, forming a neutral layer on the phase separation guide layer, forming a first pattern including first openings on the neutral layer, forming a second pattern including second openings each having a smaller width than each of the first openings, forming a neutral pattern including guide patterns exposing a portion of the phase separation guide layer by etching an exposed portion of the neutral layer by using the second pattern as an etch mask, removing the second pattern to expose a top surface of the neutral pattern, forming a material layer including a block copolymer on the neutral pattern and the phase separation guide layer exposed through the guide patterns, and forming a fine pattern layer including a first block and a second block on the neutral pattern and the phase separation guide layer.
Samsung Electronics Co., Ltd.
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Se-kyung Kyoung-mi Jae-ho Jung-sik Jeong-ju Soo-jin Hyoung-hee
Baek Kim Kim Choi Park Lee Kim