Hauptman Ham, LLP
Method of making semiconductor devices and a control system for performing the same
A method includes calculating a processing tool offset for a processing tool based on process control parameters, wherein the processing tool offset is a first portion of a process offset time attributable to a processing tool. The method further includes calculating a product offset based on the process control parameters, wherein the product tool offset is a second portion of the process offset time attributable to a product. The method further includes determining whether the product offset is stable based on a difference between a processing time for different products being within a pre-determined tolerance and a number of processed wafers exceeding a threshold amount. The method further includes calculating an offset time for processing the product using the processing tool based on the calculated processing tool offset, without considering the product offset in response to a determination that the product offset is stable.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G Y G Y G
G05B Y02P G05B Y02P G05B
inventional additional inventional additional additional
Chia-Jung Yu-Hsiu Ching-Hsi
Chang Fu Nan