BakerHostetler
Vacuum pump with abatement function
A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.
EBARA CORPORATION
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Kohtaro Toyoji Hideo Yasuhiko Keiichi Tetsuro Toshiharu Takashi Seiji
Kawamura Shinohara Arai Suzuki Ishikawa Sugiura Nakazawa Kyotani Kashiwagi