Anova Law Group, PLLC
Insulated gate bipolar transistor and fabrication method thereof
An insulated gate bipolar transistor and a method for fabricating the insulated gate bipolar transistor are provided. The insulated gate bipolar transistor includes a semiconductor layer including a bulk layer and a cell region including a first region and a second region. The insulated gate bipolar transistor also includes a well region, a drift region, and a plurality of gate structures in the bulk layer associated with the cell region. Further, the insulated gate bipolar transistor includes source and drain doped regions and an ohmic contact region in a top region of the well region. A size of the source and drain doped regions in the second region is smaller than a size of the source and drain doped regions in the first region. A size of the ohmic contact region in the second region is larger than a size of the ohmic contact region in the first region.
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
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Jian
Liu