Roberts Calderon Safran & Cole, P.C.
Structures, methods and applications for electrical pulse anneal processes
Structures and methods are provided for nanosecond electrical pulse anneal processes. The method of forming an electrostatic discharge (ESD) N+/P+ structure includes forming an cathode on a substrate and a anode on the substrate. The anode is in electrical contact with the cathode. The method further includes forming a device between the cathode and the anode. A method of annealing a structure or material includes applying an electrical pulse across an electrostatic discharge (ESD) N+/P+ structure for a plurality of nanoseconds.
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Tom C. Souvick Christopher S. Junjun Robert R. Robert J. Michel J.
Lee Mitra Putnam Li Robison Gauthier, Jr. Abou-Khalil