Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including tip-to-tip short configured fill cells, and the second DOE including corner short configured fill cells
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of tip-to-tip shorts, and the second DOE contains fill cells configured to enable NC detection of corner shorts.
PDF Solutions, Inc.
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Jeremy Jonathan Vyacheslav Christopher Dennis Timothy Hans Hideki Stephen Kelvin Conor Tomasz John Simone Kimon Sherry Rakesh Larg Markus Carl Marcin Sheng-Che Marci Andrzej Nobuharu Indranil
Cheng Haigh Rovner Hess Ciplickas Fiscus Eisenmann Matsuhashi Lam Doong O'Sullivan Brozek Kibarian Comensoli Michaels Lee Vallishayee Weiland Rauscher Taylor Strojwas Lin Liao Strojwas Yokoyama De