Scully, Scott, Murphy & Presser, P.C.
Hybrid aspect ratio trapping
A semiconductor structure includes a material stack located on a surface of a semiconductor substrate. The material stack includes, from bottom to top, a silicon germanium alloy portion that is substantially relaxed and defect-free and a semiconductor material pillar that is defect-free. A dielectric material structure surrounds sidewalls of the material stack and is present on exposed portions of the semiconductor substrate.
International Business Machines Corporation
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Juntao Ramachandra Hong Kangguo
Li Divakaruni He Cheng