Neugeboren O'Dowd PC
Mass flow controller
A mass flow controller includes a flow meter, a mechanical pressure-regulating valve disposed adjacent to and on an upstream side of the flow meter, and a flow control valve disposed on a downstream side of the flow meter. The mechanical pressure-regulating valve is embedded in a base of the mass flow controller. The mass flow controller also includes a compulsive valve-opening mechanism configured to compulsorily open the mechanical pressure-regulating valve. Thereby, the mass flow controller can instantly recover pressure on the upstream side of the flow meter to its original pressure even in a case where the pressure changes, and can raise measurement accuracy of a flow rate measured by the flow meter.
Hitachi Metals, Ltd.
G G G
G01L G05D G05D
inventional inventional inventional
Hiroyuki Tomokazu
Ito Hirota