X-ray detector and fabrication method thereof
A structure of X-ray detector includes a Si-rich dielectric material for serving as a photo-sensing layer to increase light sensitivity. The fabrication method of the X-ray detector including the Si-rich dielectric material needs less photolithography-etching processes, so as to reduce the total thickness of thin film layers and decrease process steps and cost.
AU Optronics Corp.
H
H01L
inventional
Yu-Cheng Chia-Tien Ching-Sang An-Thung
Chen Peng Chuang Cho