Nath, Goldberg & Meyer
Transfer device and transfer method
A transfer device includes: a transfer unit configured to transfer a substrate from a transfer original position to a corrected transfer destination position; a plurality of position detecting units installed between the transfer original position and the corrected transfer destination position and configured to detect a position of the substrate which is being transferred by the transfer unit; and a control unit configured to calculate the corrected transfer destination position by correcting an initial transfer destination position set at the start of the transfer of the substrate, based on the position of the substrate detected by the position detecting units, before the substrate is transferred to the initial transfer destination position, and configured to control the transfer unit to transfer the substrate to the corrected transfer destination position along a transfer path produced by modifying an initial transfer path.
SANKYO SEISAKUSHO CO. TOKYO ELECTRON LIMITED
H B H B G H H H G
H01L B25J H01L B25J G05B H01L H01L H01L G05B
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Tsutomu Hisayoshi
Hiroki Ito