Harness, Dickey & Pierce, P.L.C.
Methods for forming materials using micro-heaters and electronic devices including such materials
Nano-sized materials and/or polysilicon are formed using heat generated from a micro-heater, the micro-heater may include a substrate, a heating element unit formed on the substrate, and a support structure formed between the substrate and the heating element unit. Two or more of the heating element units may be connected in series.
Samsung Electronics Co., Ltd.
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SungSoo Andrei Junhee
Park Zoulkarneev Choi