IC with test structures and e-beam pads embedded within a contiguous standard cell area
An IC that includes a contiguous standard cell area with a 4×3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
PDF Solutions, Inc.
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John Markus Hideki Marcin Kelvin Timothy Carl Larg Conor Tomasz Dennis Hans Indranil Christopher Jonathan Matthew Rakesh Sherry Marci Simone Nobuharu Andrzej Stephen Vyacheslav Sheng-Che Kimon Jeremy
Kibarian Rauscher Matsuhashi Strojwas Doong Fiscus Taylor Weiland O'Sullivan Brozek Ciplickas Eisenmann De Hess Haigh Moe Vallishayee Lee Liao Comensoli Yokoyama Strojwas Lam Rovner Lin Michaels Cheng