Hunton Andrews Kurth LLP
Device for measuring the vibrational amplitude of a capillary tube of a wire bonder
In a device for measuring the vibrational amplitude of a capillary tube of a wire bonder, the capillary tube is placed between a light source and a detector system, so that the vibrational amplitude is able to be ascertained from the shading of a beam of light by the capillary tube. The beam of light emitted by the light source is split into a measuring beam of light and a reference beam of light, an edge of the capillary tube at least partially shading the measuring beam of light in the vibrating state, while the reference beam of light is not shaded. The detector system includes a measuring detector assigned to the measuring beam of light as well as at least one reference detector assigned to the reference beam of light, and the vibrational amplitude of the capillary tube is ascertainable from the interconnected output signals of the measuring detector and the reference detector.
DR. JOHANNES HEIDENHAIN GMBH
G H H B
G01H H01L H01L B06B
inventional additional additional inventional
Wolfgang Walter
Holzapfel Huber