Oliff PLC
Thin-film capacitor
A thin-film capacitor satisfies a relationship of CTE1>CTE2>CTE3 regarding a linear expansion coefficient CTE1 of a base, a linear expansion coefficient CTE2 of a capacitance unit, and a linear expansion coefficient CTE3 of a barrier layer. The inventors have newly found that in a case in which such a relationship is satisfied, when a temperature falls from a deposition temperature, cracking occurring in the capacitance unit of the thin-film capacitor is prevented, and cracking occurring in the barrier layer is also prevented.
TDK CORPORATION
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inventional inventional inventional
Mitsuhiro Kenichi Kazuhiro Junki Daiki Koichi
Tomikawa Yoshida Yoshikawa Nakamoto Ishii Tsunoda