Leydig, Voit & Mayer, Ltd.
Ultrasonic cleaning method
A cleaning method for cleaning an object involves disposing the object in a cleaning liquid held in a cleaning tank; and ultrasonically vibrating the cleaning liquid via an intermediate medium in contact with the cleaning tank, wherein the ultrasonically vibrating includes: ultrasonically vibrating the cleaning liquid with a first difference between respective sonic velocities allowable in the cleaning liquid and the intermediate medium; and ultrasonically vibrating the cleaning liquid with a second difference between the respective sonic velocities allowable in the cleaning liquid and the intermediate medium, wherein the second difference is different from the first difference.
SILTRONIC AG
B B
B08B B08B
inventional inventional
Masashi Teruo Yoshihiro Etsuko
Uchibe Haibara Mori Kubo