Morgan, Lewis & Bockius LLP
Tris(disilanyl)amine
A method for making tris(disilanyl)amine. The method comprises steps of: (a) contacting a disilanyl(alkyl)amine with ammonia to make bis(disilanyl)amine; and (b) allowing bis(disilanyl)amine to produce tris(disilanyl)amine and ammonia.
Jiangsu Nata Opto-Electronic Materials Co., Ltd.
C C C C C B C C C H C B B
C01B C07F C01B C23C C07F B01J C07F C08G C07F H01L C23C B01J B01J
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Byung K. Barry Xiaobing Brian D.
Hwang Ketola Zhou Rekken