Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Plasma treatment apparatus and plasma generation method using the apparatus
A plasma treatment apparatus can generate atmospheric pressure plasma with reliability by help of an ignition electrode to facilitate starting the apparatus without using an expensive impedance matching device. The apparatus comprises a plasma-generation chamber having an aperture from which the plasma blows out, a gas supply unit for supplying a gas for plasma generation into the chamber, a pair of electrodes, a power source for applying an AC electric field between the electrodes to maintain the plasma in the chamber, a pulse generator for providing a pulse voltage, and the ignition electrode for applying the pulse voltage to the gas supplied in the chamber to generate the plasma.
Matsushita Electric Works, Ltd.
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H05H H05H
additional inventional
Noriyuki Kazuya Yasushi Yoshiyuki Yukiko Keiichi
Taguchi Kitayama Sawada Nakazono Inooka Yamazaki