Ladas & Parry
Buried hetero-structure opto-electronic device
A method of manufacturing a semiconductor optical device comprising the steps of: providing a substrate having an active layer thereon; providing an aluminium-bearing layer, the aluminium bearing layer being adjacent the active layer; and oxidising the aluminium-bearing layer substantially entirely.
Agency for Science, Technology and Research
H H
H01S H01S
additional inventional
Wei Zhi-Jie Fan Soo-Jin
Wang Wang Zhou Chua