Arent Fox LLP
Gas purge apparatus, load port apparatus, and gas purge method
A gas purge apparatus, a load port apparatus, and a gas purge method are capable of filling a container with a cleaning gas without leaning the container to be purged. The first and second purge nozzles are configured to be escalated so that the first purge nozzle 30-1 contacts with the first purge port 5-1 whose distance to the regulating distance 90 is near before the second purge nozzle 30-2 contacts with the second purge port 5-2. 
TDK CORPORATION
H H
H01L H01L
inventional inventional
Nozomu Tomoshi Hiroshi
Kato Abe Igarashi