Rabin & Berdo, P.C.
Method of drawing a pattern for magnetic transfer
A method of drawing a pattern for magnetic transfer on a substrate, including the steps of rotating the substrate and scanning the substrate, by an electron beam, in a circumferential direction thereof, deflecting, using a deflection signal, the electron beam in a radial direction thereof, and switching irradiation of the electron beam on and off, so as to create the pattern of a plurality of dots.
Fuji Electric Co., Ltd.
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inventional inventional inventional
Hiroto
Kikuchi