Tung & Associates
Micro-electro-mechanical system device with enhanced structural strength
The invention provides a MEMS device with enhanced structural strength. The MEMS device includes a plurality of metal layers, including a top metal layer with a plurality of metal segments. The metal segments are individually connected to an adjacent metal layer immediately under the top metal layer through at least one supporting pillar, and there is no dielectric layer between the metal segments and the adjacent metal layer immediately under the top metal layer. The metal layers except the top metal layer are respectively connected to their adjacent metal layers through at least one supporting pillar and a dielectric layer filling in between.
PIXART IMAGING INCORPORATION
B B B H
B81B B81B B81B H02N
additional inventional inventional inventional
WeiChung Hsin-Hui Chih-Ming Ming-Han
Wang Hsu Sun Tsai