Fish & Richardson P.C.
Catadioptric projection objective
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.
Carl Zeiss SMT GmbH
G G G G G G G
G02B G02B G03F G02B G02B G02B G02B
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David Rudolf M. Hans-Juergen Alexander Wilhelm Aurelian
Shafer Von Buenau Mann Epple Ulrich Dodoc