F. Chau & Associates, LLC
Thin film transistor array panel
A thin film transistor array panel includes a substrate, a gate insulating layer, an interface layer, and a semiconductor layer. The gate insulating layer is disposed on the substrate. The interface layer is disposed on the gate insulating layer. The semiconductor layer is disposed on the interface layer. The interface layer includes a fluorinated silicon oxide. The semiconductor layer includes a p-type oxide semiconductor material.
SAMSUNG DISPLAY CO., LTD. SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
H H H
H01L H01L H01L
inventional inventional inventional
Min Ho Eun-Kil Jong Woo Ji Young Jae Heung Young Cheol Yoon Hyeung Seung Jae Hyeong Joon Sang Jin
Oh Park Kim Moon Ha Joo Cho Lee Kim Han