Varndell Legal Group
Inorganic article for crystal growth and liquid-phase epitaxy apparatus using the same
 An inorganic article used as a container for holding a solution for crystal growth according to the present invention is provided by filling the pores of substrate having a porous inorganic structure with an inorganic material which has a melting point of 400.degree. to 900.degree. C. A liquid-phase epitaxy apparatus according to the present invention is comprised of a crucible made of the inorganic article or from a material selected from P-BN, quartz and sapphire and has an arrangement with less sliding contact. Thus, the dispersion of diffusive elements contained in a solution during the epitaxial growth is prevented. Accordingly, both the article and the apparatus of the present invention permit growth of crystals having high quality and less structural defects, thus contributing to the production of a semiconductor device made of materials having high vapor pressure. 
Mitsubishi Cable Industries, Ltd.
C C
C30B C30B
inventional inventional
Hirotaka Shinichi Tokuzo
Ito Watabe Sukegawa