Antonelli, Terry, Stout & Kraus, LLP.
Apparatus and method for testing defects
A method for detecting defects on a specimen includes mounting a specimen on a table with which is movable, obliquely projecting a laser as a line onto a surface of the specimen, detecting with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks scattered light resulting from repetitive patterns formed on the specimen, processing a signal outputted from the image sensor to extract defects of the specimen, and a displaying information of defects extracted by the signal processor.
Hitachi, Ltd Hitachi High-Technologies Corporation
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Keiji Shunichi Tetsuya Hisato Yoshimasa Takanori Yoshio Yukio Takahiro Minori Hidetoshi Shuichi Ryouji
Sakai Matsumoto Watanabe Nakamura Ohshima Ninomiya Morishige Kembo Jingu Noguchi Nishiyama Chikamatsu Matsunaga