McDermott Will & Emery LLP
Method for fabricating semiconductor device
A method for fabricating a semiconductor device includes: sequentially forming an n− type epitaxial layer, a p type epitaxial layer, and a first n+ region on a first surface of an n+ type silicon carbide substrate; forming a trench by penetrating the first n+ region and the p type epitaxial layer, and etching part of the n− type epitaxial layer; forming a buffer layer in the trench and on the first n+ region; etching the buffer layer to form a buffer layer pattern on both sidewalls defined by the trench; forming a first silicon film on the first n+ region, the buffer layer pattern, and a surface of the n− type epitaxial layer exposed by the trench; oxidizing the first silicon film to form a first silicon oxide film; removing the buffer layer pattern by an ashing process to form a first silicon oxide film pattern; forming a second silicon film on the first silicon oxide film pattern and in the trench; oxidizing the second silicon film to form a second silicon oxide film; and etching the second silicon oxide film to form a gate insulating film within the trench, wherein the first silicon oxide film pattern is positioned on the first n+ region and at the bottom of the trench on the surface of the n− type epitaxial layer.
Hyundai Motor Company
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Kyoung-Kook Dae Hwan Jong Seok Youngkyun
Hong Chun Lee Jung