Finnegan, Henderson, Farabow, Garrett, and Dunner
Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer
 A dopant film contains an organic binder, an inorganic binder and a compound of an impurity element for diffusion. Both surfaces of the dopant film are coated with adhesive. Releasable sheets sandwich the dopant film. The dopant film permits automated alternate stacking with semiconductor wafers, providing an advantage of labor saving. When the alternate stacking is automated, it will become hard for the wafer breakage to occur, sharply decreasing the rate of breakage. Furthermore, since the adhesion of a semiconductor wafer improves, the variation in the diffusion depth will decrease. The semiconductor wafer manufacturing method includes the steps of impurity diffusion into both surfaces, dividing the wafer into two wafers in the direction of thickness, and polishing to a mirror surface each divided wafer opposite to the surface on which the impurity diffusion layer is formed. The material loss per wafer is reduced more than the conventional method due to the slicing into two wafers. 
Kabushiki Kaisha Toshiba
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Y10S Y10T C09J H01L Y10S Y10T Y10T H01L
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Hideyoshi Kenji Masaburo
Ito Unetsubo Iwabuchi