Antonelli, Terry, Stout & Kraus, LLP
Semiconductor integrated circuit device having multi-level wiring capacitor structures
 A semiconductor integrated circuit device of the invention is provided with a memory cell array portion and a peripheral circuit portions. In the memory cell array portion, a plurality of plugs which penetrate each of a plurality of interlayer insulating films and the sides of which are almost vertical are directly connected in sequence. In the peripheral circuit portion, a plurality of plugs are mutually connected through contact pads for wiring. 
Hitachi, Ltd.
H H H H H
H01L H01L H01L H01L H01L
inventional inventional inventional inventional inventional
Masayoshi Takuya Yoshitaka Nobuyoshi
Saito Fukuda Nakamura Kobayashi