Fitzpatrick, Cella, Harper & Scinto
Silicon-based film, formation method therefor and photovoltaic element
A silicon-based film of excellent photoelectric characteristics can be obtained by introducing a source gas containing silicon halide and hydrogen into the interior of a vacuum vessel, at least a part of the interior being covered with a silicon-containing solid, generating plasma in the space of the interior of the vacuum vessel, and forming a silicon-based film on a substrate provided in the interior of the vacuum vessel.
Canon Kabushiki Kaisha
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Masafumi Koichi Takaharu Makoto
Sano Matsuda Kondo Higashikawa