Oblon, Spivak, McClelland, Maier & Neustadt
Gas adsorber for exhaust gas
 A gas adsorber which is capable of reliably removing harmful gases discharged from processes in the semiconductor industry, the ceramic industry, etc. The gas adsorber has an integral structure comprising a main treating section having an exhaust gas inlet port and packed with an adsorbent, an auxiliary treating section having a treated gas outlet port and packed with an adsorbent, and a space section provided in between the main and auxiliary treating sections, the space section having a gas outlet port and a gas return port, which provide communication between the space section and a gas sensor. With this arrangement, the adsorption conditions in the main treating section can be perceived accurately. 
Ebara Corporation
B B
B01D B01D
inventional inventional
Akira Yoichi
Fukunaga Mori