Sughrue Mion, PLLC
Catadioptric projection objective
A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.
Carl Zeiss SMT AG
G G G G G G
G02B G02B G02B G02B G03F G03F
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Wilhelm David Karl-Heinz Aurelian Alexander
Ulrich Shafer Schuster Dodoc Epple