Scully, Scott, Murphy & Presser, P.C.
Vacuum package and manufacturing process thereof
A vacuum package has a chamber in which pressure is reduced to less than the atmospheric pressure, a functional component sealed in the chamber, and a material forming at least a part of the chamber. The material has at least one through hole to evacuate the chamber. In a cross section perpendicular to the material taken along the through hole, an edge portion of the material forming the through hole has an obtuse angle. The through hole is sealed with a sealing material.
NEC Corporation
H H B H B H H H H H H H H H H H H H H H
H01L H01L B81C H01L B81C H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional additional inventional additional additional additional additional inventional additional additional inventional additional additional additional additional additional additional additional additional additional
Takao Yuji Yoshimichi Seiji Masahiko
Yamazaki Akimoto Sogawa Kurashina Sano