Townsend and Townsend/Khourie and Crew
Probe card system
A semiconductor wafer probe test interface system (2) and method of operating the system. The wafer probe system includes a plurality of cassettes (302) adapted to hold wafer probe test cards (304). The cassettes are loaded into position for testing of semiconductor wafers with a transport assembly system (6). A memory device (316) on the cassette is used to store data regarding usage of the card such as number of wafer touchdowns. A smart controller (220) has the capability to "talk" to the prober and tester.
Xandex, Inc.
G
G01R
inventional
Charles Brian P. James C.
Honek Phillips Anderson