Systems and methods for conforming test tooling to integrated circuit device profiles with ejection mechanisms
A test pusher assembly, useful in association with a thermal control unit used to maintain a set point temperature on an integrated circuit device under test, is provided with ejection mechanisms configured to facilitate the disengagement of the DUT at the end of the test. One example of the ejection mechanisms is to provide the substrate pusher assembly with spring-loaded pins that can push the substrate of the DUT away from the pedestal at the end of the test. Another example of the ejection mechanisms is to use a pressurized fluid that can push the substrate of the DUT away from the pedestal at the end of the test.
Essai, Inc.
G G G
G01R G01R G01R
inventional additional inventional
Chee Wah Nasser Oksana Joven R. Elena V.
Ho Barabi Kryachek Tienzo Nazarov