Rankin, Hill & Clark LLP
Molecular glass of spirofluorene derivative, preparation method thereof and use thereof in photo-etching
Disclosed is a molecular glass of a spirofluorene derivative having a molecular structure as follows: formula (I),wherein each of R1-R12 is a hydrogen atom, a hydroxyl group, a methoxyl group or an acid-sensitive substituent; substituents R1˜R12 can be identical or different, but on the same benzene ring the substituents cannot all be hydrogen atoms. The molecular glass has a good solubility in various polar solvents, is suitable to be made into a film; meanwhile the molecular glass has a very high glass transition temperature and meets the requirements of the photolithography processing technology. Also disclosed is a preparation method of the above-mentioned molecular glass of a spirofluorene derivative. The synthetic process of the method is simple and suitable for industrialization. Further disclosed is the use of a photo-resist with the above-mentioned molecular glass as a main material in photo-etching, wherein the molecular glass of a spirofluorene derivative with hydroxyl groups (or partly with hydroxyl groups) on the periphery thereof can be used as a negative photo-resist, and the molecular glass with the hydroxyl groups on the periphery thereof protected (or partly protected) by an acid-sensitive substituent can be used as a positive photo-resist.
Technical Institute of Physics and Chemistry of the Chinese Academy of Sciences
C C C G G C G C C C C C C C C G
C07C C07C C07C G03F G03F C07C G03F C07C C07C C07C C07C C07C C07C C07C C07C G03F
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Qingshan Yi Yi Jinping Tianjun
Hao Zeng Li Chen Yu