Morgan Lewis & Bockius LLP
Method for eliminating process byproduct during fabrication of liquid crystal display
A fabricating method of a liquid crystal display includes the steps of inserting a first substrate into a chamber to perform a dry etching process, removing the first substrate from the chamber after completion of the dry etching process, inserting a dummy substrate into the chamber, injecting inert gas into the chamber to eliminate a process byproduct and a remaining gas, taking the dummy substrate out from the chamber, and inserting a second substrate into the chamber having the process byproduct and the remaining gas removed, to perform an ashing process.
LG. Philips LCD Co., Ltd.
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Ki Choon Hwan Chang Kuk Young Sup
Park Kim Yang Jung