Harness, Dickey & Pierce, P.L.C.
Image sensors and methods of forming the same
An image sensor includes a substrate including a plurality of pixel regions and having a trench between the pixel regions, a photoelectric conversion part in the substrate of each of the pixel regions, and a device isolation pattern in the trench. The device isolation pattern defines an air gap. The device isolation pattern has an intermediate portion and an upper portion narrower than the intermediate portion.
Samsung Electronics Co., Ltd.
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Yun Ki Minwook
Lee Jung