Fay, Sharpe, Beall, Fagan, Minnich & McKee
Production system using wafer-like carrier jig
 The present invention provides a carrier jig for use in processing, transporting and stocking a wafer-like material used in manufacture processes of semiconductor products, and a semiconductor production system using the carrier jig. The carrier jig of the present invention comprises a holder for holding and storing therein one wafer, for example, and a container box for loading therein the holder. A mechanism for transferring wafers by the use of the carrier jig is provided in each process, with the result the period of production time can be shortened and the production speed can be enhanced. 
Hitachi, Ltd.
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Tsutomu Sadao Hiroshi Masahiro Haruo Takemasa
Takahashi Shimoyashiro Kikuchi Watanabe Ohya Iwasaki