Cooper & Dunham, LLP
Electrostatic actuator formed by a semiconductor manufacturing process
An electrostatic actuator has high-reliability and less variation in characteristics. An electrode (12a) is formed on a substrate (1), and a plurality of partition parts (50a) are formed on the electrode. A vibration plate (19) is formed on the partition parts (50a), and is deformable by an electrostatic force generated by a voltage applied to the electrode (12a) so that an air gap (14a) is formed between the partition parts (50a) by etching a part of a sacrifice layer (14) formed between the electrode (12a) and the vibration plate (19). The partition parts (50a) are formed of remaining parts of the sacrifice layer (14) after the etching.
Ricoh Company, Ltd.
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Mitsugu Shuya Makoto Kenichiroh Takahiko Manabu
Irinoda Abe Tanaka Hashimoto Kuroda Nishimura