Fitzpatrick, Cella, Haper & Scinto
Oscillator device
An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.
Canon Kabushiki Kaisha
B B B B G
B81B B81B B81B B81B G01C
additional additional inventional additional inventional
Atsushi Makoto Chienliu
Kandori Takagi Chang