Boult Wade Tennant
Method and apparatus for neutralizing space charge in an ion beam
Space charge effects in an ion implanter can be caused by the mutual repulsion of ions of a particular polarity in a beam of ions which tend to cause the beam to &#8220;blow up&#8221; and become uncontrollable. This occurs for example in the ion implanter along the path of the ion beam and in particular at regions of external electric field. Introducing into the ion beam a second polarity of ions space charge neutralises the ion beam.
Applied Materials, Inc.
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Stephen Hiroyuki
Moffatt Ito