WPAT, P.C., Intellectual Property Attorneys
Polishing pad, polishing apparatus and method for manufacturing polishing pad
The present invention relates to a polishing pad comprising a buffer sheet containing a pressure distribution sheet. The invention also relates to a polishing apparatus and a method for manufacturing a polishing pad.
San Fang Chemical Industry Co., Ltd.
B B
B24B B24B
inventional inventional
Wei-Te Chung-Chih I-Peng Yung-Chang
Liu Feng Yao Hung