Haynes and Boone, LLP
Backside illuminated image sensor device with refractive index dependent layer thicknesses and method of forming the same
Provided is an image sensor device. The image sensor device includes a device substrate having a front side and a back side. The device substrate has a radiation-sensing region that can sense radiation that has a corresponding wavelength. The image sensor also includes a first layer formed over the front side of the device substrate. The first layer has a first refractive index and a first thickness that is a function of the first refractive index. The image sensor also has a second layer formed over the first layer. The second layer is different from the first layer and has a second refractive index and a second thickness that is a function of the second refractive index.
Taiwan Semiconductor Manufacturing Company, Ltd.
H H H H
H01L H01L H01L H01L
inventional inventional inventional inventional
Dun-Nian Han-Chi Jen-Cheng Wen-De Jeng-Shyan Chun-Chieh
Yaung Liu Liu Wang Lin Chuang