Foley & Lardner
Cantilever and process for fabricating it
 A probe formed in a flexible portion of a cantilever is protected by a protection frame. This protection frame is separated from a support portion at a border of a groove between the protection frame and the support portion. A piezoelectric crystal layer is formed in the flexible portion, and when the flexible portion is bent by an interatomic force acting between the probe and a sample, a voltage induced between the both ends of the piezoelectric crystal layer changes. 
Nikon Corporation
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G01Q G01Q G01Q B82Y Y10S
inventional inventional inventional inventional additional
Takamitsu Shunji
Fujiu Watanabe