Dense plasma focus radiation source
A dense plasma focus radiation source for generating EUV radiation using Lithium vapor and including a coaxially disposed anode and cathode. The invention includes methods and apparatuses for enhancing the efficiency of EUV radiation production, for protecting, cooling and extending the life of the anode and cathode, for protecting and shielding collecting optics from debris and pressure disturbances in the discharge chamber, and for feeding Lithium into the discharge chamber.
Cymer, Inc.
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James Jonah Joseph A. Mordechai Rodney Alexander
Moran Jacob Mangano Rokni Petr Bykanov