Sughrue, Mion, Zinn, Macpeak & Seas, PLLC
Laminated ink-jet recording head, a process for production thereof and a printer equipped with the recording head
 A laminated ink-jet recording head is provided that has a strong joint between the diaphragm and the piezoelectric vibrating element and which can be driven on low voltage. The recording head is of such a design that a lower electrode is provided on the diaphragm in at lest a region that corresponds to said pressure generating chamber, the lower electrode being overlaid with the piezoelectric vibrating element formed by a hydrothermal method, said piezoelectric vibrating element in turn being overlaid with an upper electrode and having a film thickness of not less than 1 .mu.m but not more than 10 .mu.m. The invention further provides a process for producing this recording head, as well as an apparatus such as a printer that is equipped with this recording head. 
Seiko Epson Corporation
H B H B B H B Y Y B Y B B B B B B
H01L B41J H01L B41J B41J H01L B41J Y10T Y10T B41J Y10T B41J B41J B41J B41J B41J B41J
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Tsutomu Masami Kouji Minoru Masato
Nishiwaki Murai Sumi Usui Shimada