Hauptman Ham, LLP
Semiconductor structures including metal insulator metal capacitor
A metal insulator metal (MIM) capacitor includes a base layer and a copper bulk layer in the base layer. The MIM capacitor further includes an etch stop layer over the base layer and the copper bulk layer and an oxide-based dielectric layer over the etch stop layer. The MIM capacitor further includes a capacitor bottom layer over the oxide-based dielectric layer, an insulator layer over the capacitor bottom layer, and a capacitor top layer over the insulator layer.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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inventional inventional inventional
Chia-Wei Ren-Wei Fang-Ting Chien-Ying Chun Hua Sheng Yu
Liu Xiao Kuo Wu Chang Lin