Oblon, McClelland, Maier & Neustadt, L.L.P.
Aperture for inspecting multi beam, beam inspection apparatus for multi beam, and multi charged particle beam writing apparatus
In one embodiment, an aperture for inspecting a multi-beam allows passage of one beam among multi-beams applied in a multi-beam writing apparatus. The aperture includes a scattering layer that is provided with a through-hole through which the one beam passes, and by which the other beams are scattered, and an absorbing layer that is provided with an opening having a diameter greater than the diameter of the through-hole and that absorbs at least some of the beams entering it.
NuFlare Technology, Inc.
H H H H H H H H H H H
H01J H01J H01J H01J H01J H01J H01J H01J H01J H01J H01J
additional additional additional inventional additional inventional additional additional inventional inventional inventional
Munehiro Hiroshi
Ogasawara Yamashita