F. Chau & Associates, LLC
Apparatus and method of segmenting sensor data output from a semiconductor manufacturing facility
An apparatus and method of segmenting sensor data are provided. The apparatus includes a sensor, a first segmentation unit, a continuity evaluation unit, a second segmentation unit, and a segmentation determination unit. The sensor collects sensor data for a process of the semiconductor manufacturing facility. The first segmentation unit extracts a variation point of the sensor data to perform an abnormal difference (AD) segmentation on the sensor data based on the at least one variation point. The continuity evaluation unit evaluates a continuity ratio of the sensor data. The second segmentation unit performs a free-knot spline (FS) segmentation on the sensor data when the continuity ratio exceeds a reference ratio. The segmentation determination unit compares the AD segmentation result with the FS segmentation result and to select one of the results on the comparison result.
SAMSUNG ELECTRONICS CO., LTD. SEOUL NATIONAL UNIVERSITY R & DB FOUNDATION
Y G G
Y02P G05B G05B
additional inventional additional
Jung-Hee Eunjeong Lucy Jooseoung Sungzoon Hae-Sang Young-Hak Heui-Sik Jiwon
Kim Park Park Cho Park Lee Jeon Yang