Morris Manning & Martin LLP
Measuring method for topography of moving specimen and a measuring apparatus thereof
A measuring method for topography of moving specimen and a measuring apparatus thereof is disclosed, providing a measuring module that moves along with a testing specimen to narrow relative velocity of the testing specimen and the measuring module so that the measuring module is able to have enough luminous intensity signal at the same position in time, to measure the topography or the thickness of the testing specimen.
Industrial Technology Research Institute
G G G
G01B G01B G01B
inventional inventional inventional
Wei-Cheng Shih-Hsuan
Wang Kuo