Fitzpatrick, Cella, Harper & Scinto
Method of transforming polymer films into carbon films
A process of efficiently transforming polymer films arranged on an electron source substrate into carbon films is provided. A light is irradiated onto a region of the substrate where a plurality of polymer films, associated electrodes and part of wirings are arranged so that the plurality of polymer films are simultaneously transformed into lower resistance films such as carbon films through heating by the irradiated light, wherein for the irradiating light, a light absorptance of the wirings is lower than that of the electrodes.
Canon Kabushiki Kaisha
H H
H01J H01J
additional inventional
Hironobu Masafumi
Mizuno Kyogaku