Maschoff Brennan
Apparatus and process of electro-chemical plating
An electro-chemical plating process begins with supplying a supercritical fluid into an electroplating solution to be deposited, and a bias is applied between a substrate and an electrode, which is located in the electroplating solution. The substrate is placed into the electroplating solution to deposit a material on the substrate.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chi-Ming Yu-Ming Ying-Hsueh
Yang Lee Changchien