Amin, Turocy & Watson, LLP
Microprobe and microprobe manufacturing method
According to an embodiment, a microprobe includes a base and a lever. The base includes a first electrode provided on a surface thereof. The lever is supported by the base and includes a second electrode and a third electrode. The second electrode is connected between the first electrode and the third electrode. The third electrode is formed to project from the second electrode in a first direction in a main surface of the lever. A width of the third electrode in a second direction perpendicular to the first direction in the main surface defines a width of an electrical contact area when a scanning operation is performed by use of the third electrode in a third direction perpendicular to the main surface.
Kabushiki Kaisha Toshiba
G G G B G G
G03F G01R G11B B81C G01R G11B
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Yasushi Yongfang
Tomizawa Li