Abel Schillinger, LLP
Gas permeable superstrate and methods of using the same
A gas permeable superstrate and method using the same is disclosed. The superstrate can include a body and an amorphous fluoropolymer layer on the body. The method of planarization can include dispensing a planarization precursor material over a substrate and contacting the planarization precursor material with a body of a superstrate. In one embodiment, the substrate includes a non-uniform surface topography. The method can also include curing the planarization precursor material to form a planarization layer over the substrate, where curing can be performed while the superstrate is contacting the planarization precursor material.
CANON KABUSHIKI KAISHA
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H01L H01L H01L G03F H01L H01L
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Fen James P. Weijun
Wan De Young Liu