Muncy, Geissler, Olds & Lowe, P.C.
Probe holding structure and optical inspection device equipped with the same
A probe holding structure includes a substrate and a plurality of holding modules. The substrate has an opening and a plurality of grooves arranged around a periphery of the opening. The holding modules are connected with the grooves, respectively. Each holding modules includes a fixing member and a plurality of probes. The fixing member is connected with a corresponding groove. The probes are connected with the fixing member and pass through the corresponding groove. The probe holding structure is combined with a lens adjusting mechanism having a lens to form an optical inspection device for testing electric characteristics of chips.
MPI Corporation
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Keng-Shieng Hui-Pin Chien-Chang Chiu-Kuei Chen-Chih Chin-Yi Chia-Tai Chin-Tien Yun-Ru
Chang Yang Lai Chen Yu Tsai Chang Yang Huang