DLA Piper LLP (US)
Low etch pit density (EPD) semi-insulating GaAs wafers
A method for manufacturing wafers using a low EPD crystal growth process and a wafer annealing process is provided that results in GaAs/InGaP wafers that provide higher device yields from the wafer.
AXT, Inc.
C H C C
C30B H01L C30B C30B
inventional inventional inventional inventional
Morris S. Weiguo M. Hani
Young Liu Badawi