Scully, Scott, Murphy & Presser, P.C.
Continuous prediction of expected chip performance throughout the production lifecycle
A system, method and computer program product for predicting at least one feature of at least one product being manufactured. The system receives, from at least one sensor installed in equipment performing one or more manufacturing process steps, at least one measurement of the feature of the product being manufactured. The system selects one or more of the received measurement of the feature of the product. The system estimates additional measurements of the feature of the product at a current manufacturing process step. The system creates a computational model for predicting future measurements of the feature of the product, based on the selected measurement and the estimated additional measurements. The system predicts the future measurements of the feature of the product based on the created computational model. The system outputs the predicted future measurements of the feature of the product.
International Business Machines Corporation
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G05B G05B G05B H01L G05B Y02P G05B H01L
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Amit Sholom M. Robert J. Brian F.
Dhurandhar Weiss Baseman White