Sterne, Kessler, Goldstein & Fox, P.L.L.C.
Method for manufacturing piezoelectric element, and piezoelectric element, ink-jet recording head and printer
Provided is a method for manufacturing a piezoelectric element that has excellent piezoelectric characteristics and can be made into a thicker film. A piezoelectric thin film is crystallized by a process in which piezoelectric precursor films 4021 through 4025 containing the metal elements of a piezoelectric ceramic are coated with a material, dried, pyrolyzed, and then heat-treated under prescribed conditions in a diffusion furnace. With this method, a piezoelectric thin film can be made into a thicker film without initiating cracking.
Seik Epson Corporation
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inventional additional inventional inventional
Souichi Hong Koji Masato Tsutomu
Moriya Qiu Sumi Shimada Nishiwaki