Ditthavong & Steiner, P.C.
Optoelectronic device and method for manufacturing the same
A method of fabricating an optoelectronic device, comprises: providing a substrate, wherein the substrate comprises a first major surface and a second major surface opposite to the first major surface; forming a light emitting stack on the second major surface of the substrate; forming a supporting layer covering the light emitting stack; forming a plurality of first modified regions in the substrate by employing a first energy into the substrate after forming the supporting layer; and cleaving the substrate.
EPISTAR CORPORATION
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Pei Shan Cheng Hsiang Biau-Dar Liang Sheng Chun Chang
Fang Ho Chen Chi Chen