Cantor Colburn LLP
Deformation measuring apparatus and method of evaluating deformation using thereof
A deformation measuring apparatus of a specimen includes: a holder which supports the specimen; a contact portion disposed facing the holder and including a hemispherical tip; a position controlling portion which adjusts a position of the contact portion along a thickness direction of the specimen to allow the hemispherical tip to be in contact with a surface of the specimen; a heating chamber which accommodates the holder and the contact portion and heating the specimen; and a sensing portion which measures at least one of a thermal deformation force (F) of the specimen or a thickness direction thermal expansion (Δh) of the specimen.
SAMSUNG ELECTRONICS CO., LTD.
G G
G01B G01N
inventional inventional
Ga Hee Young Hoon Young Suk Yoo Seong Hyun Mi
Kim Lee Jung Yang Lee