Harrington & Smith
Semiconductor yield management system and method
A system and method for yield management are disclosed wherein a data set containing one or more prediction variable values and one or more response variable values is input into the system. The system can process the input data set to remove prediction variables with missing values and data sets with missing values based on a tiered splitting method to maximize usage of all valid data points. The processed data can then be used to generate a model that may be a decision tree. The system can accept user input to modify the generated model. Once the model is complete, one or more statistical analysis tools can be used to analyze the data and generate a list of the key yield factors for the particular data set.
Rudolph Technologies, Inc.
H
H01L
inventional
Weidong Jonathan B.
Wang Buckheit