Turocy & Watson, LLP
MEMS apparatus and method of manufacturing the same
A MEMS apparatus includes a MEMS unit formed on a semiconductor substrate and a cover provided with a pore and serving to seal the MEMS unit. The pore is sealed with a sealing material shaped in a sphere or a hemisphere.
Kabushiki Kaisha Toshiba
B B
B81C B81C
additional inventional
Michihiko Yutaka Kazuhiko Hiroshi Kazuhiro Hideyuki
Nishigaki Onozuka Itaya Yamada Suzuki Funaki