Venable LLP
Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold
A pattern is formed on a substrate with forming a layer of a curable composition (A1) containing a component (a1) serving as a polymerizable compound on a surface of the substrate, then dispensing droplets of a curable composition (A2) containing a component (a2) serving as a polymerizable compound (a2) and a component (b2) serving as a photopolymerization initiator dropwise discretely onto the layer of the curable composition (A1), subsequently sandwiching a mixture layer of the curable composition (A1) and the curable composition (A2) between a mold and the substrate, then irradiating the mixture layer with light to cure the mixture layer, and then releasing the mold from the mixture layer after the curing.
CANON KABUSHIKI KAISHA
C G C
C09D G03F C09D
inventional inventional inventional
Niyaz Masayuki Tomonori Weijun Toshiki Timothy Brian
Khusnatdinov Tanabe Otani Liu Ito Stachowiak