Leydig, Voit & Mayer, Ltd.
Interferential position-measuring device and method for operating an interferential position-measuring device
An interferential position-measuring device determines a position of an object which is disposed to be movable along a measurement direction. A light source is configured to emit a beam which is split into two sub-beams. One of the sub-beams impinges on an optical functional element on the object. The sub-beams are subsequently superimposed and interfered at a superposition location and a resulting signal beam propagates toward an evaluation unit configured to generate a position-dependent measurement signal from the resulting signal beam. A switching element is disposed in the signal path downstream of the superposition location and upstream of a signal-digitizing device. The switching element is configured to define a specific sampling point in time.
DR. JOHANNES HEIDENHAIN GMBH
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Markus Wolfgang Joerg
Meissner Holzapfel Drescher