Arent Fox LLP
ESD protection device
The present invention is provided with a Si substrate, an ESD protection circuit formed in the Si substrate, pads formed on the surface of the Si substrate and electrically connected to first and second input/output terminals of the ESD protection circuit, a rewiring layer formed on the surface of the Si substrate for electrically connecting the pads and metal plated films, and an insulating resin film formed on the rear surface of the Si substrate. Thus, provided is an ESD protection device which can suppress the influence of external noise, etc.
MURATA MANUFACTURING CO., LTD.
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Noboru Toshiyuki
Kato Nakaiso