Meagher Emanuel Laks Goldberg & Liao, LLP
Rotary conveying equipment for exposing substrate
Disclosed is a rotary conveying equipment for exposing a substrate. The rotary conveying equipment includes a carrying device and a rotary moving device. The carrying device carries the substrate by fastening the substrate thereon. The rotary moving device includes a rotating means, and the rotating means is connected to the carrying device and is moved together while rotated. And the efficiency of the exposure process is improved.
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Wei-Lin
Liu