Posz & Bethards, PLC
Electrical capacitance pressure sensor having electrode with fixed area and manufacturing method thereof
An electrical capacitance pressure sensor has a lower electrode, a movable electrode, and an upper electrode. A first cavity portion is formed between the lower electrode and the movable electrode. A second cavity portion is formed between the upper electrode and the movable electrode. The substrate has an opening portion that penetrates the substrate from the first surface to the second surface thereof. The lower electrode has at least one first window portion that penetrates the lower electrode from the side of the substrate to the side of the first cavity portion and communicates the cavity portion to the opening portion of the substrate. The upper electrode has at least one second window portion that penetrates the upper electrode from the side of the cavity portion to the outside thereof to communicate the cavity portion with the outside.
Denso Corportation
G
G01L
inventional
Yasutoshi Keiichi Seiichiro Tetsuo Hirofumi
Suzuki Shimaoka Ishio Fujii Funahashi