Integrated circuit containing first and second does of standard cell compatible, NCEM-enabled fill cells, with the first DOE including side-to-side short configured fill cells, and the second DOE including tip-to-tip short configured fill cells
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of side-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of tip-to-tip shorts.
PDF Solutions, Inc.
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Carl Marci Jeremy Rakesh Nobuharu Kelvin Marcin Jonathan Markus John Timothy Simone Hideki Vyacheslav Christopher Tomasz Sherry Indranil Larg Conor Stephen Kimon Andrzej Dennis Hans Sheng-Che
Taylor Liao Cheng Vallishayee Yokoyama Doong Strojwas Haigh Rauscher Kibarian Fiscus Comensoli Matsuhashi Rovner Hess Brozek Lee De Weiland O'Sullivan Lam Michaels Strojwas Ciplickas Eisenmann Lin