Patterson + Sheridan LLP
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
Embodiments of this disclosure describe an electrode biasing scheme that enables maintaining a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate that consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
APPLIED MATERIALS, INC.
H H C H H H H H C H C C
H01J H01J C23C H05H H01J H01J H01J H01J C23C H05H C23C C23C
inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional inventional
Sunil Olivier James Rajinder Anurag Kumar Leonid
Srinivasan Luere Rogers Dhindsa Mishra Dorf