Workman Nydegger
Liquid discharge head, liquid discharge apparatus, piezoelectric device, and ultrasonic sensor
A liquid discharge head includes a pressure chamber that accommodates a liquid, a diaphragm that forms a wall surface of the pressure chamber, and a piezoelectric element that is provided on an opposite side of the pressure chamber with the diaphragm interposed between the piezoelectric element and the pressure chamber and vibrates the diaphragm. The diaphragm includes a silicon oxynitride layer formed with including silicon oxynitride.
Seiko Epson Corporation
H B B H H B B B
H01L B06B B41J H01L H01L B41J B41J B41J
inventional inventional inventional additional inventional additional additional additional
Tsutomu Hiroshi Tsutomu
Nishiwaki Kato Asakawa