Myers Bigel, P.A.
Semiconductor device
A semiconductor device includes: a fin-type active region extending on a substrate in a first direction that is parallel to an upper surface of the substrate; and a source/drain region in a recess region extending into the fin-type active region, wherein the source/drain region includes: a first source/drain material layer; a second source/drain material layer on the first source/drain material layer; and a first dopant diffusion barrier layer on an interface between the first source/drain material layer and the second source/drain material layer.
Samsung Electronics Co., Ltd.
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Min-hee Edward Namkyu Cho-eun Seok-hoon Seung-hun Sang-gil
Choi Cho Lee Kim Lee Lee