Cantor Colburn LLP
Method for transferring substrate using vacuum roll-to-roll device
A vacuum roll-to-roll device includes: a first chamber; a second chamber neighboring the first chamber; a shutter disposed between the first chamber and the second chamber; a sealing member attached to the shutter; and a roll-type substrate which moves from the first chamber to the second chamber through the sealing member. A thickness of a lateral side of the roll-type substrate decreases in a direction toward an edge thereof.
SAMSUNG DISPLAY CO., LTD.
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B01J C23C C23C C23C B01J B05C B65H D06B B65H C23C B65H
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Gug Rae Dae-Young Jae Hyuk Ki-Beom Seung-Jun Seung-Min Sang-Mi
Jo Lee Chang Lee Lee Lee Kim