Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Film forming apparatus and method for manufacturing light emitting element
A film forming apparatus is provided with a processing chamber having a substrate holding table for holding a substrate to be processed inside the container; a gas material generation unit arranged outside the processing chamber, for generating a gas material by evaporating or sublimating a film forming source material including a metal; a gas material supply unit for supplying the processing chamber with the gas material; and a transport path for transporting the gas material to the gas material supply unit from the gas material generation unit. The film forming apparatus is characterized in that a metal-containing layer is formed on an organic layer including a light emitting layer on the target substrate.
Tokyo Electron Limited
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Toshihisa Shingo
Nozawa Watanabe