NSIP Law
Method of controlling amount of adsorbed carbon nanotubes and method of fabricating carbon nanotube device
Provided are a method of controlling an amount of adsorbed carbon nanotubes (CNTs) and a method of fabricating a CNT device. The method of controlling an amount of adsorbed CNTs includes adsorbing CNT particles onto a semiconductor structure, and removing some of the adsorbed CNTs by performing an oxygen plasma treatment on the adsorbed CNT particles.
Korea Institute of Science and Technology
H B H B H H B H
H01L B82Y H01L B82Y H01L H01L B82Y H01L
inventional inventional additional inventional additional inventional inventional additional
Deok Ha Chi Woong Sun Ho Young Min Kyeong Heon Seok Young Tae
Woo Jang Kim Jhon Kim Lee Byun