Carter, DeLuca & Farrell LLP
Substrate treating apparatus and method
The inventive concepts provide an apparatus for treating a substrate. The apparatus includes a housing proving an inner space in which a substrate is treated, a spin head supporting and rotating the substrate in the housing, an injection unit comprising a first nozzle member spraying a first treatment solution to the substrate put on the spin head, and a controller controlling the first nozzle member. The first nozzle member includes a body, a vibrator, a pump, and a power source.
SEMES CO., LTD.
B B H B
B05B B08B H01L B05B
inventional inventional inventional inventional
Yu Hwan Yoon-Jong Edwin Jong Han Seong Soo
Kim Ju Lee Kim Lee