Drinker Biddle & Reath LLP
Inductor device and method of manufacturing the same
An inductor device formed on a semiconductor substrate includes an inductor body penetrating the semiconductor substrate, taking a spiral shape and having a conductivity, and an insulating film provided between a side surface of the inductor body and the semiconductor substrate.
Shinko Electric Industries Co., Ltd.
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Masahiro Manabu Tomoharu
Sunohara Nakamura Fujii