Method for fabricating a TFT backplane and TFT backplane
The present application discloses a method for fabricating a TFT backplane and a TFT backplane. The method includes: providing a substrate; subsequently forming a first active region, a first oxide layer, a nitride layer and a first and a second gate independently of each other on the substrate; removing the nitride layer not covered by the first and second gate electrodes; depositing a second insulating layer; forming a second active region with different material from the first active region on the on the second insulating layer above the second gate electrode; forming a first and a second source electrodes, a first and a second drain electrodes respectively. This method can improve the performance of the TFT backplane.
Shenzhen China Star Optoelectronics Technology Co., Ltd.
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Xingyu
Zhou