Ladas & Parry LLP
Capacitor and manufacturing method thereof, semiconductor device and substrate for a semiconductor device
A capacitor includes a capacitor part formed of a dielectric film sandwiched by a pair of electrodes and a support body formed of a film of an organic polysilane. The support body is provided so as to support the capacitor part thereon.
Shinko Electric Industries Co., Ltd.
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Kiyoshi Yasuyoshi Tomoo
Ooi Horikawa Yamasaki