FinFET transistor with epitaxial structures
A field effect transistor with epitaxial structures includes a fin-shaped structure and a metal gate across the fin-shaped structure. The metal gate includes a pair of recess regions disposed on two sides of the bottom of the metal gate.
UNITED MICROELECTRONICS CORP.
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H01L H01L H01L
inventional inventional inventional
Chen-Yi Chung-Fu Chun-Hsien
Weng Chang Lin