Westerman, Hattori, Daniels & Adrian, LLP
Method for manufacturing electronic grade synthetic quartz glass substrate
An electronic grade synthetic quartz glass substrate is manufactured by machining a synthetic quartz glass substrate to form a recess, channel or step and polishing the bottom and side surfaces of the recess, channel or step to mirror finish by a working portion of a rotary polishing tool while keeping the working portion in contact with the bottom and side surfaces under independent constant pressures.
Shin-Etsu Chemical Co., Ltd.
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B24B C03C B24B B24B
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Hiroyuki Daiyu Masaki
Yamazaki Okafuji Takeuchi