Heat treatment apparatus
 Disclosed is a heat treatment apparatus comprises a body having an opening section on the clear room side, a furance disposed in the body, a process tube arranged elevatably relative to the furnace, and a preventing plate arranged closably at the opening section for shutting off the opening section when it is closed, thereby it is possible to prevent dust from entering into the clean room by closing the opening section with the preventing plate. Further, disclosed is an heat treatment apparatus wherein the process tube is supported by arms, these arms being horizontally receiprocated between the space section below the furnace and position outside of the space section, where the process tube is located, while the arms are elevated and lowered so that the process tube supported on the arms is delivered to and received from the elevaotr, and the process tube is supported, elevated and lowered by the elevator, relative to the furnace, thereby it is possible to move the process tube and to mount and remove the same to and from the body without relying upon human hands, thereby it is possible to facilitate the movement operation of the process tube and enhance the economy of operation and the safety of working. 
Tel Sagani Limited
C H Y H
C30B H01L Y10S H01L
inventional inventional additional inventional
Shingo
Watanabe