Carter, DeLuca, Farrell & Schmidt, LLP
System and method for regenerating phosphoric acid solution, and apparatus and method for treating substrate
Disclosed is a method of regenerating a phosphoric acid solution from a treatment liquid including silicon (Si), hydrogen fluoride (HF), and phosphoric acid, the method including removing the silicon by supplying hydrogen fluoride corresponding to a preset amount or more to the treatment liquid, removing the hydrogen fluoride by heating the treatment liquid to a boiling point of hydrogen fluoride or higher, and adjusting a temperature and a concentration of the phosphoric acid to preset values.
SEMES CO., LTD.
B B B H B H H C B
B01D B01D B01D H01L B01D H01L H01L C09K B01D
inventional inventional inventional inventional inventional inventional inventional inventional inventional
Tae-Keun Minhee Seungho Ki-Moon
Kim Cho Lee Kang