Nath, Goldberg & Meyer
Thin film transistor, fabricating method thereof, array substrate and display device
The present invention provides a thin film transistor, a fabricating method thereof, an array substrate and a display device. The fabricating method of the thin film transistor of the present invention comprises: forming an inducing layer film and an oxide active layer film in contact therewith on a substrate, the oxide active layer film being provided above or below the inducing layer film; and heating the substrate subjected to the above step, crystallizing the oxide active layer film through inducement of the inducing layer film to form a crystalline oxide active layer.
BOE TECHNOLOGY GROUP CO., LTD.
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Dongfang Jiangbo
Wang Chen