Thomas, Kayden, Horstemeyer & Risley
Method and system for mask fabrication process control
A mask fabrication system. The mask fabrication system contains a processing tool, a metrology tool, and a controller. The processing tool processes a mask. The metrology tool inspects the mask to obtain an inspection result. The controller generates a manufacturing model of the processing tool and calibrates the manufacturing model according to a device data, a material data, and the inspection result of the mask.
Taiwan Semiconductor Manufacturing Co., Ltd.
G
G03F
inventional
Yuh-Fong Wen-Yao Chiech-Yi Chen-Yu
Hwang Chen Kuo Chang