WPAT, P.C., Intellectual Property Attorneys
Method for improving exposure performance and apparatus thereof
A method of operating an illuminator and apparatus thereof are proposed. A method includes: directing a radiation beam to the illuminator comprising slit fingers; sensing a temperature value of each of the slit fingers; determining a shifting value of the respective slit finger based on the temperature value; causing the respective slit finger to move according to the shifting value to form a light slit from the radiation beam; and exposing a workpiece using the light slit.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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inventional inventional inventional inventional
Yung-Yao Chao Pei
Lee Lu