Ladas & Parry
Method of forming emitter tips for use in a field emission display
A method of forming emitter tips for use in a field emission display. A dielectric layer, an insulating layer, and a conductor layer are formed on a substrate in sequence. An annular groove is formed the conductive layer and the insulating layer. A tip cavity with an insulating tip within is formed by isotropic wet etching. A molybdenum metal layer is formed on the insulating tip. The method of the present invention can substantially reduce the consumption of molybdenum.
Au Optronics Corp.
H
H01J
inventional
Ying-Diean Chih-Chin
Hwang Chang