Oblon, Spivak, McClelland, Maier & Neustadt
Optical axis displacement sensor with cylindrical lens means
 Disclosed herewith is an optical axis displacement sensor, which has a convex lens having a hole on the optical axis, a light shielding plate having a hole on the optical axis and two parallel straight slits, a laser light source for irradiating a laser beam on a target surface through the holes of the light shielding plate and the convex lens, a CCD line sensor provided in parallel to the light shielding plate, perpendicular to the optical axis and perpendicular to the two straight slits, a cylindrical lens provided between the light shielding plate and the CCD line sensor, and a calculation unit for calculating the displacement of the target surface from the focal point of the convex lens, using the output of the CCD line sensor. 
Kohgakusha Engineering Co., Ltd. Okada Inc.
G G
G01B G01B
inventional inventional
Takashi
Miyoshi