Zilka-Kotab, PC
Method for manufacturing a magnetic read sensor with narrow track width using amorphous carbon as a hard mask and localized CMP
A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE® which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.
HGST Netherlands B.V.
G Y G G Y G
G11B Y10T G11B G11B Y10T G01R
inventional additional inventional additional additional inventional
Jordan A. Samuel W. Neil L. Jui-Lung Hamid Yang Patrick M. Kanaiyalal C.
Katine Yuan Robertson Li Balamane Li Braganca Patel