JCIPRNET
Stocker
A stocker for storing a plurality of wafer carriers is provided. The stocker includes a frame, a plurality of pod stoppers, a plurality of truss members and a plurality of partitions. The frame includes a plurality of stocking units. Each of the stocking units includes a carrying plate for carrying one of the plurality of wafer carriers. The pod stoppers stand on an edge of each of the carrying plates. The truss members are disposed diagonally across at least one side surface of at least one of the stocking units, wherein each of the truss members comprises a shock absorber. The partitions are disposed on side surfaces of the stocking units and fixed to the frame.
Taiwan Semiconductor Manufacturing Co., Ltd.
H B
H01L B65G
inventional inventional
Fu-Hsien Hsiang-Yin Chi-Feng Guan-Cyun
Li Shen Tung Li