Duane Morris LLP
Recipe management system and method
A recipe management system associates a selected process recipe with a recipe group and checks to see if other recipes of the recipe group have been updated since the selected recipe was last run. If another recipe of the recipe group has been run and adjustments have been made to the other recipe based on an analysis of a manufacturing or test run, the recipe management system identifies the selected recipe as requiring an update. The recipe management system sends error reports noting the discrepancy between a parameter setting changed in the test run and needing adjustment in the selected run. The recipe management system also effectuates the needed adjustments to the selected recipe before the selected recipe is allowed to be used in the manufacturing environment.
WAFERTECH, LLC
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Richard Jing Wei-Chin Shih-Tzung
Liu Yin Li Chang