Rabin & Berdo, P.C.
Optically restorable semiconductor device, method for fabricating the same, and flash memory device using the same
Provided is an optically restorable semiconductor device including a gate electrode, a gate insulation film on the gate electrode, a photo-responsive semiconductor film on the gate insulation film, and an interface charge part disposed adjacent to an interface between the photo-responsive semiconductor film and the gate insulation film, wherein the interface charge part includes charge traps, and the interface charge part and the photo-responsive semiconductor film directly contact with each other.
Electronics and Telecommunications Research Institute
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JungWook Sun Jin Tae Yoon Seong Hyun Kwang Hoon Jeho
Lim Yun Kim Lee Jung Na