Oliff PLC
Waveguide including first and second layers and manufacturing method thereof
A manufacturing method for a waveguide includes forming a core including a first layer and a second layer. The first layer has a top surface including a first region with which a bottom surface of the second layer is in contact, and a second region with which the bottom surface of the second layer is not in contact. Forming the core includes the steps of: forming an initial first layer; forming an etching stopper layer on the second region of the initial first layer; forming an initial second layer on the initial first layer and the etching stopper layer; etching the initial second layer and the initial first layer so as to make the initial first layer into the first layer; and etching the initial second layer until the etching stopper layer is exposed, so as to make the initial second layer into the second layer.
HEADWAY TECHNOLOGIES, INC.
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G11B G11B H01P G11B H01P G11B G11B
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Seiichiro Masakazu Shigeki Hiroyuki Hironori Yoshitaka
Tomita Okada Tanemura Ito Araki Sasaki