Birch, Stewart, Kolasch & Birch
Method of forming a microscopic pattern
 A method of forming a microscopic pattern wherein the object to be etched is overlaid with a film made of a material which is highly immune to etching and further provided with a reflection reducing film. Thus, the reflection of the irradiating ultraviolet rays by the underlying layer is effectively prevented. 
Hitachi, Ltd.
G
G03F
inventional
Nagatugu Hiroshi Hideki Norikazu Katsuhiro Hirozi
Koiso Umezaki Nishida Tsumita Kaneko Yamada