Harness, Dickey & Pierce, P.L.C.
Micro-heater arrays and pn-junction devices having micro-heater arrays, and methods for fabricating the same
Example embodiments include micro-heater arrays including first and second micro-heaters disposed perpendicular to or parallel with each other on a substrate and methods of fabricating pn junctions between first and second heating portions using the heat generated from the first and second heating portions, respectively, when applying a voltage to the micro-heater array. Accordingly, when forming pn junctions using micro-heaters, a high-quality pn junction may be fabricated on a glass substrate over a large area.
Samsung Electronics Co., Ltd.
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Deuk Seok Jai Yong Junhee Sung Soo Andrei
Chung Han Choi Park Zoulkarneev