Approach to integrate salicide gate for embedded DRAM devices
A process for integrating the formation of a salicide layer on DRAM word line structures, and on a bit line contact structure, has been developed. The process features selective etch back of the insulator layers embedding the tapered shaped bit line contact, and the tapered shape capacitor structures, exposing top surface portions of polysilicon word line structures. The selective etch back procedure also results in formation of insulator spacers on the sides of the tapered bit line contact, and capacitor structures, allowing a subsequent salicide procedure to form metal suicide layers only on the exposed top surfaces of the DRAM word line, bit line contact, and capacitor structures.
Taiwan Semiconductor Manufacturing Company
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Kuo-Chyuan Min-Hsiung Hsien-Yuan Hsiao-Hui Chung-Wei
Tzeng Chiang Chang Tseng Chang