Sughrue Mion, PLLC
Coating composition for preventing collapse of capacitor
Disclosed herein is a coating composition for preventing the collapse of a capacitor, comprising a silane compound or a phosphorus compound. The coating composition can adjust a contact angle with regard to water on a substrate, thereby preventing the collapse of capacitor patterns on the substrate.
YOUNG CHANG CHEMICAL CO., LTD
H H C H C C C
H01L H01L C09D H01L C09D C09D C08K
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Su Jin Seung Hun Gi Hong
Lee Lee Kim