Myers Bigel, P.A.
Methods of forming a layer and methods of manufacturing magnetic memory devices using the same
A method of forming a layer includes providing a first insulator and a second insulator over a lower structure, generating a first ion source and a second ion source from the first insulator and the second insulator, respectively, and forming an insulating layer on the lower structure using the first ion source and the second ion source. The first and second insulators are vertically spaced apart from the lower structure and are laterally spaced apart from each other. The first insulator and the second insulator include the same material.
Samsung Electronics Co., Ltd.
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Yong Sung Ki Woong Juhyun Sechung Joonmyoung
Park Kim Kim Oh Lee