Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including metal island open configured fill cells
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of merged-via opens, and the second DOE contains fill cells configured to enable NC detection of metal island opens.
PDF Solutions, Inc.
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Marcin Andrzej Indranil Larg Jonathan Kimon Rakesh Marci Hans Timothy Christopher Nobuharu Kelvin Tomasz Stephen Carl Sherry Dennis Conor Jeremy Simone Hideki Sheng-Che Markus Vyacheslav John
Strojwas Strojwas De Weiland Haigh Michaels Vallishayee Liao Eisenmann Fiscus Hess Yokoyama Doong Brozek Lam Taylor Lee Ciplickas O'Sullivan Cheng Comensoli Matsuhashi Lin Rauscher Rovner Kibarian