Westerman, Hattori, Daniels & Adrian, LLP
Mold-forming substrate and inspection method
A circular mold-forming substrate of 125-300 mm diameter having a surface on which a topological pattern is to be formed is provided wherein the thickness of the substrate has a variation of up to 2 μm within a circle having a diameter of 125 mm.
SHIN-ETSU CHEMICAL CO., LTD.
B G G B
B82Y G03F G03F B82Y
inventional additional inventional inventional
Daijitsu Masaki
Harada Takeuchi