Tung & Associates
ESD-resistant photomask and method of preventing mask ESD damage
An ESD-resistant photomask and method of preventing mask ESD damage is disclosed. The ESD-resistant photomask includes a mask substrate, a pattern-forming material provided on the substrate, a circuit pattern defined by exposure regions etched in the pattern-forming material, and positive or negative ions implanted into the mask substrate throughout ion implantation regions. The ions in the ion implantation regions dissipate electrostatic charges on the mask, thus preventing the buildup of electrostatic charges which could otherwise attract image-distorting particles to the mask or damage the mask.
Taiwan Semiconductor Manufacturing Co., Ltd.
G H G
G03F H01J G03F
inventional additional inventional
Ching-Yu
Chang