Westman, Champlin & Koehler, P.A.
Manufacturing method of phase shift mask and phase shift mask
Disclosed are a manufacturing method of a phase shift mask and a phase shift mask. The manufacturing method of a phase shift mask includes: forming a pattern of metal shielding layer on a base substrate; forming a phase shift layer and a first photoresist layer in sequence on the pattern of metal shielding layer; patterning the first photoresist layer with the pattern of metal shielding layer serving as a mask to form a pattern of first photoresist layer; and etching the phase shift layer with the pattern of first photoresist layer serving as a mask to form a pattern of phase shift layer.
BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
G
G03F
inventional
Huibin Xiaolong Yongzhi Zumou Xiaoxiang Wenqing Mingxuan
Guo Li Song Wu Zhang Xu Liu