Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including snake open configured fill cells, and the second DOE including metal island open configured fill cells
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of snake opens, and the second DOE contains fill cells configured to enable NC detection of metal island opens.
PDF Solutions, Inc.
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Stephen Jonathan Sherry John Jeremy Sheng-Che Marcin Larg Dennis Christopher Marci Simone Nobuharu Carl Kelvin Timothy Hans Rakesh Markus Hideki Conor Tomasz Kimon Vyacheslav Andrzej Indranil
Lam Haigh Lee Kibarian Cheng Lin Strojwas Weiland Ciplickas Hess Liao Comensoli Yokoyama Taylor Doong Fiscus Eisenmann Vallishayee Rauscher Matsuhashi O'Sullivan Brozek Michaels Rovner Strojwas De