Burr & Brown
Method for producing electrochemical element and electrochemical element
 A method for producing a NOx sensor comprises the steps of forming electrodes on ceramic green sheets, and stacking and integrating the ceramic green sheets into one unit followed by sintering to prepare a substrate, wherein an oxygen concentration is controlled to be not more than 0.5% in a sintering atmosphere after removal of a binder in the step of sintering the substrate. Specifically, the sintering is performed in an atmospheric atmosphere in Interval 1 in which the temperature in a furnace is changed from room temperature to about 1000.degree. C., and the sintering is performed in a nitrogen atmosphere (oxygen concentration in the atmosphere in the furnace is controlled to be about 400 ppm) in Interval 2 in which the temperature is changed from 1000.degree. C. to a maximum temperature followed by spontaneous radiational cooling. Accordingly, it is possible to suppress alloy formation on a detecting electrode for detecting a measurement gas component (for example, NOx), and it is possible to improve the measurement accuracy of the NOx sensor. 
NGK Insulators, Ltd.
G
G01N
inventional
Kunihiko Nobuhide
Nakagaki Kato