Anderson Kill & Olick, PC
Process for growing a magnesium oxide film on a silicon (100) substrate coated with a cubic silicon carbide butter layer
A CVD method for growing MgO on a Si(100) substrate coated with a cubic SiC buffer layer provides a single-crystalline MgO film having improved quality.
Korea Research Institute of Chemical Technology
C C C C
C30B C30B C23C C30B
inventional inventional inventional inventional
Sun-Sook Sung-Yong Yun-Soo
Lee Lee Kim