Semiconductor structure and a fabricating method thereof
A gate structure is provided. The gate structure includes a substrate, a gate disposed on the substrate and a gate dielectric layer disposed between the substrate and the gate, wherein the gate dielectric layer is in the shape of a barbell. The barbell has a thin center connecting to two bulging ends. Part of the bulging ends extends into the gate and the substrate.
UNITED MICROELECTRONICS CORP.
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Chien-Hung Tzu-Ping Wei-Shiang Kuan-Yi Chun-Lung Chih-Haw
Chen Chen Huang Tseng Chang Lee