Renner, Otto, Boisselle & Sklar, LLP
Method for improving capacitance uniformity in a MIM device
A method for improving capacitance uniformity in a MIM device, mainly for the purpose of improving uniformity of a thin film within the MIM device, includes eight steps in order and step S2-step S6 may be repeated for several times as needed. According to the method for improving capacitance uniformity in a MIM device of the present invention, a certain quantity of defects in the thin film are removed by means of several times of deposition/plasma processes based on the current PECVD, and uniformity of the deposited thin film is increased, thereby improving uniformity in wet etching rate of the thin film and further improving capacitance uniformity in the MIM device.
Shanghai Huali Microelectronics Corporation
C H C C C
C23C H01L C23C C23C C23C
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Wenguang Qiang Yuwen Chunsheng
Zhang Xu Chen Zheng