Kenyon & Kenyon
Process management system
A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.
Hitachi, Ltd. Hitachi Engineering Co., Ltd.
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Ikuo Hidekuni Yuichi Toshimitsu Masataka Terushige Jun Yasuhiro Tetsuji Fumio Kenji Isao Masami Makoto Seiji Seiji Yoshiharu Mari
Suzuki Sugimoto Ohyama Hamada Shiba Asakawa Nakazato Yoshitake Yokouchi Mizuno Watanabe Miyazaki Ikota Ariga Ishikawa Isogai Shigyo Nozoe