Blakely, Sokoloff, Taylor & Zafman
Semiconductor device and method for fabricating the same
A semiconductor device and a method for fabricating the same are provided. The semiconductor device includes: an inter-layer dielectric (ILD) layer formed on a semiconductor substrate; a contact plug formed in the ILD layer, such that a predetermined portion of the contact plug protrudes above the ILD layer; an etch stop layer formed on the ILD layer exposing a top portion of the contact plug; and a bottom electrode of a capacitor formed partially in the etch stop layer to be isolated from the ILD layer by the etch stop layer and the contact plug to prevent a direct contact with the ILD layer, and to be partially contacted with the contact plug.
Hynix Semiconductor Inc.
H H
H01L H01L
inventional inventional
Hyung-Bok
Choi