Sheridan Ross, PC
Surface treating apparatus
In a flow down type surface treating apparatus, a scattering amount of a processing solution is reduced.A film forming mechanism 110 is provided on an inlet side and an outlet side of each treatment chamber.The film forming mechanism 110 ejects a continuous laminar liquid under pressure of about 0.01 MPa at a flow rate of 5 to 10 L/min. Such a liquid film prevents droplets reflected on a surface of an antiscattering member 60 from splashing and entering the adjacent treatment chamber. When a plate-like work 10 is shaken to collide with the liquid film, the film flows down along the plate-like work 10 since the film formed by the film forming mechanism 110 is liquid. Thereby, a shake of the plate-like work 10 is converged. An amount of air flowing in toward a transport direction in each treatment chamber is reduced.
C. Uyemura & Co., Ltd.
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Masaharu Masayuki
Takeuchi Utsumi