Abelman, Frayne & Schwab
Magnetic annealing apparatus
Disclosed is a magnetic annealing apparatus including a carrier conveyance region and a workpiece conveyance region. The carrier conveyance region includes: a first mounting table where a carrier is disposed; second mounting tables where carriers convey workpieces from the carrier conveyance region to the workpiece conveyance region; a storage unit; and a carrier conveyance mechanism that performs carrying-out/carrying-in of the carriers. The workpiece conveyance region includes: an aligner device; a workpiece boat; a workpiece conveyance mechanism that conveys the workpieces from the carriers disposed on the second mounting tables to the workpiece boat via the aligner device; a heating unit; a magnetic field generating unit; and a transfer mechanism that transfers the workpieces held by the workpiece boat into the magnetic field generating unit.
Tokyo Electron Limited
C F F F F F F F F F H G H C
C21D F27D F27B F27D F27D F27B F27B F27D F27D F27D H01L G11C H01L C21D
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Makoto Yasushi Yuji Toru Mitsuru
Saito Takeuchi Ono Ishii Obara