Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Nonvolatile semiconductor storage device including a plurality of memory strings
A nonvolatile semiconductor storage device has a plurality of memory strings in which a plurality of electrically rewritable memory cells are connected in series. The memory string has a columnar semiconductor layer extending in a direction perpendicular to a substrate; a conductive layer formed so as to sandwich a charge storing layer in cooperation with the columnar semiconductor layer; and a metal layer formed so as to be in contact with the top face of the conductive layer.
Kabushiki Kaisha Toshiba
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Megumi Hiroyasu Masaru Yosuke Akihiro Hideaki Ryota Masaru Hitoshi Yasuyuki Yoshiaki
Ishiduki Tanaka Kidoh Komori Nitayama Aochi Katsumata Kito Ito Matsuoka Fukuzumi