McKenna, Long & Aldridge, LLP.
Method of fabricating top gate type thin film transistor having low temperature polysilicon
A method of forming a polysilicon thin film transistor that includes depositing an amorphous silicon layer over a substrate, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, patterning the polycrystalline silicon layer to form a polysilicon active layer for a thin film transistor, depositing silicon oxide over the polysilicon active layer to form a gate insulation layer under a vacuum condition, applying heat to anneal the gate insulation layer under a vacuum condition and forming a gate electrode on the annealed gate insulation layer.
LG.Philips LCD Co., Ltd.
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Seok-Woo
Lee