WPAT, P.C., Intellectual Property Attorneys
Semiconductor structure
A semiconductor structure includes a substrate, a gate structure disposed over the substrate, a source/drain structure disposed in the substrate at two sides of the gate structure, and a conductive plug. The source/drain structure includes an epitaxial layer and a dual metal silicide on the epitaxial layer. The epitaxial layer includes a first semiconductor material and a second semiconductor material. A lattice constant of the second semiconductor material is greater than a lattice constant of the first semiconductor material. The dual metal silicide includes the first semiconductor material, the second semiconductor material, a first metal material and a second metal material. An atomic size of the second metal material is greater than an atomic size of the first metal material. The conductive plug penetrates the dual metal silicide.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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Hung-Hsu Wei-Yip Chih-Wei Yu-Ming Yan-Ming
Chen Loh Chang Huang Tsai