Marshall, O'Toole, Gerstein, Murray & Bicknell
Ultrapure water producing system
 This disclosure relates to an ultrapure water producing system having a primary ultrapure water system including a pretreatment process into which raw water is fed, and a primary ultrapure water device connected to the outlet of the pretreatment process. A reservoir is connected to the outlet of the primary ultrapure water device. A secondary ultrapure water system includes a pump having an inlet connected to the reservoir, a polisher connected to the outlet of the pump, and first use point connected to the outlet of the polisher and to the reservoir. A branch line is connected to the outlet of the polisher and has a heating and deaerating part connected thereto, and a high-temperature second use point is connected to the outlet of the heating and deaerating part. 
Shinko Pantec Co., Ltd.
B C C B C C C Y C
B01D C02F C02F B01D C02F C02F C02F Y10S C02F
inventional additional additional inventional inventional additional additional additional additional
Tadahiro Masao Akihiko Kenichi
Ohmi Saito Hogetsu Ushikoshi