Fenwick & West LLP
Micro-electrode array package using liquid crystal polymer and manufacturing method thereof
Disclosed herein is a micro-electrode array package including a micro-electrode array comprising: a substrate section including a liquid crystal polymer; an electrode section collecting and transferring bio-signals; and a cover section insulating and protecting the electrode section and including a liquid crystal polymer, wherein the electrode section is disposed in contact with one surface of the substrate section, the cover section is adhered in contact with the surface of the substrate section on which the electrode section is disposed, and a space independent from the external environment is formed between the substrate section and the cover section adhered thereto. Disclosed herein too is a method for manufacturing a micro-electrode array package, including: forming alignment holes in a substrate section including a liquid crystal polymer and a cover section including a liquid crystal polymer; forming site window holes for an electrode section-exposure in the cover section; forming an electrode section on one surface of the substrate section; aligning the substrate section and the cover section by the alignment holes, and adhering the substrate section and the cover section with each other; and cutting the substrate section and the cover section adhered thereto to provide an outer shape.
SNU R&DB Foundation M.I.Tech Co., Ltd
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Seung Woo Choong Jae Sung June Soonkwan
Lee Lee Kim An