Stanzione & Kim, LLP
Method of forming memory device
A variable resistance memory device, and a method of forming the same. The method may include forming a lower electrode on a substrate, stacking a first etch stop layer and a second etch stop layer on the substrate, forming an insulating layer on the second etch stop layer, forming a recessing region to expose the lower electrode by patterning the insulating layer and the first and second etch stop layer, forming a variable resistance material layer in the recess region, and forming an upper electrode on the variable resistance material layer. The first etch stop layer can have an etching selectivity with respect to the second etch stop layer.
Samsung Electronics Co., Ltd.
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Jung-in Ji-Hyun Hyunho Jae-Hee
Kim Jeong Kim Oh