Morgan Lewis & Bockius LLP
Sputtering apparatus and method of preventing damage thereof
A sputtering apparatus includes a container; a plate for supporting the container; a first attachment for attaching the container to the plate; and a second attachment for less tightly attaching the container to the plate than through the first attachment.
LG Display Co., Ltd.
C C H C H H
C23C C23C H01J C23C H01J H01J
inventional inventional additional inventional inventional inventional
Kagkyu Seunglyul Jaehoon Jinhee Sanghyo Jaekwang Munik Junhyung Kyoungshik
Jung Lee Choi Yun Park Kim Na Park Kim