Kenyon & Kenyon LLP
Measuring device for high-precision optical determination of distance or position
A measuring device for the high-precision optical determination of distance or position includes a light source, at least one optical functional element in the form of a plane mirror or a measuring standard, and a detector system. At least two sub-beams are generated, of which at least one impinges on the functional element at least three times before the sub-beams propagate, interferingly superposed, in the direction of the detector system, via which at least one phase-encoded measuring signal is able to be generated from the superposed sub-beams. Between the impingements on the optical functional element, the sub-beam passes through at least two imaging elements, the imaging elements having imaging factors such that no location and directional shear of the interfering sub-beams results in the event the optical functional element tilts out of its setpoint position.
DR. JOHANNES HEIDENHAIN GMBH
G G G G G
G01B G01B G01B G01B G01B
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Wolfgang
Holzapfel