Duane Morris LLP
Routing system and method for double patterning technology
A method includes receiving an identification of a plurality of circuit components to be included in an IC layout. Data are generated representing a first pattern to connect two of the circuit components. The first pattern has a plurality of segments. At least two of the segments have lengthwise directions perpendicular to each other. At least one pattern-free region is reserved adjacent to at least one of the at least two segments. Data are generated representing one or more additional patterns near the first pattern. None of the additional patterns is formed in the pattern-free region. The first pattern and the additional patterns form a double-patterning compliant set of patterns. The double-patterning compliant set of patterns are output to a machine readable storage medium to be read by a system for controlling a process to fabricate a pair of masks for patterning a semiconductor substrate using double patterning technology.
Taiwan Semiconductor Manufacturing Co., Ltd.
G
G06F
inventional
Zhe-Wei Huang-Yu Lee-Chung Gwan Sin Yuan-Te Wen-Ju Yi-Kan
Jiang Chen Lu Chang Hou Yang Cheng