Jianq Chyun IP Office
Microwave-excited plasma device
A microwave-excited plasma device is proposed. The device comprises of a plurality of microwave plasma reaction units which are capable of generating plasma independently such that a large-area plasma is able to be generated by all of the units. Besides, the high cost of the large-area microwave coupling window and its deformation together with possible breakage caused by atmospheric pressure can be prevented. Moreover, when a plurality of permanent magnets is assembled upon each of the plasma reaction units, the microwave-excited plasma device is improved to be a large-area electron cyclotron resonance (ECR) plasma device.
Industrial Technology Research Institute
H H H H
H01J H01J H05H H05H
inventional inventional inventional additional
Kun-Ping Chih-Chen Yu-Tse
Huang Chang Hsieh