Crowell & Moring LLP
Charged particle beam apparatus, image forming method using a charged particle beam apparatus, and image processing apparatus
To provide a charged particle beam apparatus capable of obtaining an image with high contrast and high visibility, the apparatus has: a charged particle optical system; a detection part to detect secondary charged particles generated from the sample; an image formation part to receive a detection signal from the detection part and form an image of the sample; an image processing part to process the image formed with the image formation part; and a display part to display the result of processing with the image processing part, wherein the image formation part has a pulse-count signal processing part to generate cumulative histogram information on a pulse signal component in the detection signal, set a threshold value for pulse signal detection using information on the generated cumulative histogram, and output a detection signal having a value higher than the set threshold value as a pulse signal.
Hitachi High-Technologies Corporation
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Hajime Wen Kazuki Makoto Hiroyuki
Kawano Li Ikeda Suzuki Takahashi