Antonelli, Terry & Wands
Silicon carbide electrical insulator material of low dielectric constant
 A silicon carbide electrical insulator material of low dielectric constant comprising an electrically insulating sintered body containing silicon carbide as a main constituent and an element providing electrical insulating properties in sintered state, wherein the sintered body comprises an element selected from V family in the periodic table and the carrier concentration within the crystal grain of silicon carbide is 5.times.10.sup.17 cm.sup.-3 or less. 
Hitachi, Ltd.
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Kunihiro Tadahiko
Maeda Miyoshi