Lerner, David, Littenberg, Krumholz & Mentlik, LLP
Method of manufacturing patterned substrate
Provided is a method of manufacturing a patterned substrate. The method may be applied to a process of manufacturing a device such as an electronic device or integrated circuit, or another use, for example, to manufacture an integrated optical system, a guidance and detection pattern of a magnetic domain memory, a flat panel display, a LCD, a thin film magnetic head or an organic light emitting diode, and used to construct a pattern on a surface to be used to manufacture a discrete tract medium such as an integrated circuit, a bit-patterned medium and/or a magnetic storage device such as a hard drive.
LG Chem, Ltd.
G C C G C C C H G C C C B B C C H G C H C C G C C C H G C G H C C G C C C B C C C B H C G B C C C
G03F C07B C08F G03F C08G C09D C08G H01L G03F C08J C08G C08G B82Y B05D C08F C08G H01L G03F C08F H01L C08L C01P G03F C08F C08G C08F H01L G03F C08F G03F H01L C08F C08G G03F C08F C08L C08F B81C C08L C08J C08G B05D H01L C08J G03F B81C C08F C08F C08F
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Hyung Ju Sung Soo Je Gwon No Jin Eun Young Se Jin Mi Sook Jung Keun
Ryu Yoon Lee Park Choi Ku Lee Kim