Knobbe Martens Olson & Bear LLP
Electron beam apparatus comprising monochromator
The present invention relates to an electron beam apparatus including a monochromator in which cylindrical electrostatic lenses for deflecting a path of an electron beam in the lenses are arranged symmetrically and an aperture including a plurality of selectable slits is disposed therebetween to be able to select an electron beam having a specified energy range. The electron beam apparatus has a monochromator having high resolution and excellent stability and maintainability by disposing slits and circular openings in one aperture part in parallel arrangement, thereby improving spatial resolution and energy resolution.
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
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Ju Hwang Takashi
Kim Ogawa