Troutman Sanders LLP
Method and equipment based on detecting the polarization property of a polarization maintaining fiber probe for measuring structures of a micro part
A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
HARBIN INSTITUTE OF TECHNOLOGY
G G G
G01B G01B G01B
inventional inventional inventional
Jiwen Jiubin Kunpeng Junying
Cui Tan Feng Li