Slater Matsil, LLP
Substrate resistor and method of making same
A semiconductor structure includes a resistor on a substrate formed substantially simultaneously with other device elements, such as one or more transistors. A diffusion barrier layer deposited on a substrate is patterned to form a resistor and barrier layers under a transistor gate. A filler material, a first connector, and a second connector are formed on the resistor in a substantially similar manner as that used to form the gate of the transistor. The filler material is removed.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Shu-Hui Hua Feng Mu-Chi
Wang Chen Chiang