KED & Associates LLP
Semiconductor manufacturing apparatus
Disclosed is a semiconductor manufacturing apparatus including at least one pocket on which a passive subject on which deposition will be executed is mounted, and a carrier body having an insertion space to which the at least one pocket is detachably attached. Therefore, the semiconductor manufacturing apparatus shortens process time and reduces process expenses. The semiconductor manufacturing apparatus allows respective pockets to have different structures according to the positions of the pockets on the wafer carrier, and thus achieves uniform growth of a material on the surfaces of wafers regardless of the positions of the pockets.
LG Innotek Co., Ltd.
B H H H H
B05C H01L H01L H01L H01L
inventional inventional inventional inventional inventional
Jung Hyun Ki Bum Mhan Joong Chang Geun Jo Young
Kim Sung Kim Ahn Lee