Darby & Darby P.C.
Surface acoustic wave substrate
A surface acoustic wave substrate includes: a diamond layer; a piezoelectric layer of aluminum nitride; and a titanium nitride-based buffer layer sandwiched between the diamond layer and the piezoelectric layer. The titanium nitride-based buffer layer includes a graded structure or includes a first sub-layer of titanium and a second sub-layer of titanium nitride sandwiched between the first sub-layer and the piezoelectric layer.
Tamkang University
H H
H03H H03H
inventional inventional
I-Nan Jin-Hua Cheng-Hsien
Lin Huang Chou