Mills & Onello, LLP
Non-volatile memory device for 2-bit operation and method of fabricating the same
A non-volatile memory device for 2-bit operation and a method of fabricating the same are provided. The non-volatile memory device includes an active region and a gate extending in a word line direction on a semiconductor substrate, and crossing each other repeatedly; a charge storage layer disposed below the gate, and confined at a portion where the gate and the active region cross; a charge blocking layer formed on the charge storage layer; a tunnel dielectric layer formed below the charge storage layer; first and second source/drain regions formed in the active region exposed by the gate; and first and second bit lines crossing the word line direction. The active region may be formed in a first zigzag pattern and/or the gate may be formed in a second zigzag pattern in symmetry with the first zigzag pattern.
Samsung Electronics Co., Ltd.
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Yun-gi Choong-ho Hye-jin Young-mi Dong-gun Byung-yong
Kim Lee Cho Lee Park Choi