Sughrue Mion, PLLC
Ion source
An ion source is provided. The ion source includes a plasma generation chamber, a plate member, and an extraction electrode. The plasma generation chamber is supplied with a halogen-containing material. The plate member is provided on an end of the plasma generation chamber located on a side toward which an ion beam is extracted. The extraction electrode is disposed downstream of the plate member. The plate member is formed with a gas supply passage via which hydrogen gas is supplied to the extraction electrode.
NISSIN ION EQUIPMENT CO., LTD.
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Weijiang Takayuki Shigeki Tomoya Masakazu Yuya
Zhao Murayama Sakai Taniguchi Adachi Hirai