Thomas, Kayden, Horstemeyer & Risley
In-situ slurry mixing apparatus
 An in-situ CMP slurry mixing apparatus. The apparatus comprises a tubular main body and a plurality of tapered plugs. The tubular main body further comprises a plurality of first tubes with a first diameter, a plurality of second tubes with a second diameter. Each tapered plug is placed in each second tube, the tips of each tapered plug are pointed in the same direction, and the tips are each oriented opposite to a flowing direction of a CMP slurry. In addition, the second diameter is larger than the first diameter, and a diameter of the base of each tapered plug is larger than the first diameter but is smaller than the second diameter. 
United Microelectronics Corp.
B B B B H
B01F B24B B24B B01F H01L
inventional inventional inventional inventional additional
Juan-Yuan Ming-Sheng Chien-Hsin Chia-Jui
Wu Yang Lai Chang