Method and apparatus for depositing LED organic film
The disclosure relates to a method for depositing an organic film layer on a substrate. In one implementation a method to deposit organic film by generating vaporized organic particles; streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate; transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores; depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate.
Massachusetts Institute of Technology
B H H
B05D H01L H01L
additional inventional additional
Vladimir Valerie Martin A. Marc A. Jianglong
Bulovic Gassend Schmidt Baldo Chen