Controlling template surface composition in nano-imprint lithography
A nano-imprint lithography process includes forming a multiplicity of hydroxyl groups on a surface of a substantially inorganic nano-imprint lithography template, heating the template, and reacting a pre-selected percentage of the hydroxyl groups on the surface of the template with a mono-functional, non-fluorinated compound to form a monolayer coating on the surface of the nano-imprint lithography template. The coated template may be contacted with a polymerizable composition disposed on a nano-imprint lithography substrate, and the polymerizable composition solidified to form a patterned layer. The coated template is separated from the patterned layer.
Molecular Imprints, Inc. Canon Nanotechnologies, Inc.
B B G Y
B82Y B82Y G03F Y10T
inventional inventional inventional additional
Weijun Frank Y.
Liu Xu