High aspect ratio motion limiter of a microactuator and method for fabrication
A high-aspect ratio motion limiter of a microactuator and a method for fabrication are disclosed. In one embodiment, at least one low-aspect ratio gap is created in a substrate of a microactuator of a hard disk drive. The low-aspect ratio gap is then utilized to facilitate the creation of a high-aspect ratio motion limiter in the substrate of the microactuator.
HGST Netherlands B.V.
G
G11B
inventional
Haruhide Toshiki
Takahashi Hirano