Slater Matsil, LLP
Semiconductor device and method of manufacture
An interposer substrate is manufactured with a scribe line between adjacent regions. In an embodiment a separate exposure reticle is utilized to pattern the scribe line. The exposure reticle to pattern the scribe line will create an exposure region which overlaps and overhangs the exposure regions utilized to form adjacent regions.
Taiwan Semiconductor Manufacturing Company, Ltd.
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additional inventional additional inventional additional additional additional additional additional additional inventional additional inventional additional inventional additional additional additional additional additional additional additional inventional additional inventional additional additional additional additional inventional additional additional inventional additional additional
Shang-Yun Wen-Hsin Chun-Che Tsung-Yang Chen-Hua Jhih-Ming Chih-Ching Chi-Hsi Chun Hua Hsien-Pin Wen-Jung Shih-Wen
Hou Wei Chen Hsieh Yu Lin Lin Wu Chang Hu Chuang Huang