Jenkins, Wilson, Taylor & Hunt, P.A.
Substrate supporting unit and apparatus for treating substrate using the substrate supporting unit
Provided are a substrate supporting unit and a substrate treating apparatus using the substrate supporting unit. The substrate supporting unit comprises a base plate and a supporting portion formed on the base plate. The supporting portion comprises two supporting rods and a plurality of supporting members. The two supporting rods extend in a predetermined direction to be separated from each other. The plurality of supporting members is disposed to be separated from each other in the predetermined direction. Each of the supporting members connects the supporting rods.
Semes Co. Ltd.
H Y
H01L Y10S
inventional additional
Hye-Son Seung-Ho
Jung Lee