Jones & Volentine, L.L.P.
Exhaust system for an ion implanter
 An exhaust system for an ion implanter includes an exhaust pump for removing remaining gases in an inner portion of the ion implanter, an exhaust duct for carrying the remaining gases from the exhaust pump to the outside of the exhaust system, and a gas introducing portion for introducing heated gases from a gas storage tank to the exhaust duct. Therefore, by-products on an inside of the exhaust duct are heated by the gases, such that a reaction between the remaining gases from the exhaust pump and the heated by-products is prevented. With the exhaust system, a corona discharge is not generated inside the exhaust duct, thereby preventing the exhaust duct from being burned out. 
Samsung Electronics Co., Ltd.
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additional inventional additional
Jueng-Gon Chan-Woo Sang-Guen Sang-Young
Kim Park Oh Moon