Burns, Doane, Swecker & Mathis, L.L.P.
Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a fullerene containing surface and process for manufacturing thereof.
LAM Research Corporation
C Y B H B Y B B B Y B Y
C23C Y10S B01J H01J B01J Y10S B01J B82Y B01J Y10S B01J Y10S
inventional additional inventional inventional additional additional additional inventional additional additional additional additional
Christopher C. Robert J. John E.
Chang O'Donnell Daugherty