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Susceptor
A susceptor device for a chemical vapor deposition (CVD) reactor including metal organic CVD (MOCVD) used in the semiconductor industry. The susceptor device particularly is used with induction heating and includes a horizontal plate adapted for holding one or more wafers and a vertical rod around which the induction heating coils are disposed. A screw system and an insulator can further be used. This design helps prevent undesired levitation and allows for the gas injectors of the reactors to be placed closer to the wafer for deposition during high-temperature deposition processes at susceptor surface temperatures of about 1500° C. or higher.
KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
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C23C C23C C23C C23C C23C C30B
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Kuang-Hui Hamad S. Xiaohang
Li Alotaibi Li