Muncy, Geissler, Olds & Lowe, P.C.
Laser interferometer system for measuring six degrees of freedom with respect to a linear axis
A laser interferometer system includes a beam splitter to split a laser beam into first and second beam sets, a first retroreflector mounted to an object to reflect the first beam set, a first detecting device for detecting movements of the object in x-, y- and z-axis directions based on the reflected first beam set, a second retroreflector mounted to the object to reflect the second beam set, and a second detecting device for detecting rotations and movements of the object with respect to the y- and z-axis directions based on the reflected second beam set. The movements of the object in the z-axis direction obtained by the first and second detecting devices are used to obtain a rotation of the object with respect to the x-axis direction.
National Yunlin University of Science and Technology
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Hung-Ta Yung-Cheng Pi-Cheng Lih-Horng Chung-Ping
Shih Wang Tung Shyu Chang