Mahamedi Paradice Kreisman LLP
Microactuator, head gimbal assembly, and disk drive device
Embodiments of the present invention relate to approaches to effectively let noise on a head slider bonded to a silicon substrate of a microactuator, escape to the ground. A head gimbal assembly (HGA) according to an embodiment of the present invention comprises a microactuator bonded to a gimbal tongue. The microactuator comprises a piezoelectric element and a movable part for moving in response to expansion or contraction of the piezoelectric element. The motion of the movable part causes a head slider to slightly move. The microactuator further comprises a conductive path including an impurity-containing silicon layer formed on the silicon substrate. The conductive path transmits electric charge of the head slider to a suspension. The conductivity of the impurity-containing silicon layer is lower than the one of the silicon substrate so that the noise charge of the head slider may escape to the suspension.
Hitachi Global Storage Technologies Netherlands B.V.
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G11B G11B G11B
inventional inventional inventional
Nobumasa Ryo Shinobu Toshiki Haruhide
Nishiyama Yoshida Hagiya Hirano Takahashi