WPAT, P.C., Intellectual Property Attorneys
System for a semiconductor fabrication facility and method for operating the same
A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance tool including a first track and at least one maintenance crane on the first track, a rectangular zone overlapping with the load port, a plurality of first sensors on the first track and at corners of the rectangular zone configured to detect a location of the maintenance crane and generate a first location date, a transporting tool including a second track and a OHT vehicle on the second track, at least a second sensor on the OHT vehicle and configured to generate a second location data, at least a third sensor on the load port, and a control unit configured to receive the first location data and the second location data, and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
G G H G G H B H H G G G G B B B H G G H G H
G03F G05B H01L G03F G05B H01L B66C H01L H01L G05B G03F G05B G03F B66C B66C B66C H01L G03F G03F H01L G03F H01L
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Chi-Feng Fu-Hsien Sheng-Kang Hsiang Yin Guancyun
Tung Li Yu Shen Li