Sughrue, Mion, Zinn, Macpeak & Seas, PLLC
Piezoelectric device, actuator using the same, and ink-jet recording head
 A piezoelectric device comprises: a lower electrode; a piezoelectric film formed on the lower electrode; and an upper electrode formed on the piezoelectric film, wherein a low dielectric material having a dielectric constant that is lower than the piezoelectric film is formed at grain boundary exposed regions of the piezoelectric film. 
Seiko Epson Corporation
H H
H01L H01L
inventional inventional
Tsutomu
Nishiwaki