Positive working photosensitive material
Disclosed herein is a photosensitive composition comprising a heterocyclic thiol compound or tautomeric form thereof and its method of use on a substrate, which may include a chalcophile substrate.
AZ Electronic Materials (Luxembourg) S.A.R.L.
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G03F G03F G03F
inventional inventional inventional
Aritaka Weihong Ping-Hung Medhat Yoshiharu SookMee
Hishida Liu Lu Toukhy Sakurai Lai