Haynes and Boone, LLP
Immersion lithography system using direction-controlling fluid inlets
Immersion lithography system and method using direction-controlling fluid inlets are described. According to one embodiment of the present disclosure, an immersion lithography apparatus includes a lens assembly having an imaging lens disposed therein and a wafer stage configured to retain a wafer beneath the lens assembly. The apparatus also includes a plurality of direction-controlling fluid inlets disposed adjacent to the lens assembly, each direction-controlling fluid inlet in the plurality of direction-controlling fluid inlets being configured to direct a flow of fluid beneath the lens assembly and being independently controllable with respect to the other fluid inlets in the plurality of direction-controlling fluid inlets.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G
G03F G03B
inventional inventional
Burn Jeng Ching-Yu
Lin Chang