Fish & Richardson P.C.
Semiconductor element, semiconductor device, and method for manufacturing the same
The semiconductor element includes an oxide semiconductor layer on an insulating surface; a source electrode layer and a drain electrode layer over the oxide semiconductor layer; a gate insulating layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer; and a gate electrode layer over the gate insulating layer. The source electrode layer and the drain electrode layer have sidewalls which are in contact with a top surface of the oxide semiconductor layer.
Semiconductor Energy Laboratory Co., Ltd.
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Hideomi Mayumi Motomu
Suzawa Mikami Kurata