Jiang Chyun LP Office
Method of increasing cell retention capacity of silicon nitride read-only-memory cell
A method of increasing the cell retention capacity of a silicon nitride read-only-memory on a wafer. The method includes carrying out a baking process after performing the last plasma treatment of the wafer but before a wafer sort test.
Macronix International Co., Ltd.
H H
H01L H01L
inventional inventional
Kuen-Chi Jiong-Zhong Chen-Chin
Chuang Chen Liu