Sughrue Mion, PLLC
MEMS switch and manufacturing method thereof
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
Samsung Electronics Co., Ltd.
H H
H01H H01H
additional inventional
Jun-o Jong-seok Sang-wook Young-tack Hee-moon In-sang Che-heung Sang-hun
Kim Kim Kwon Hong Jeong Song Kim Lee