McClure, Qualey & Rodack, LLP
MEMS microphone
A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate disposed on a side of the substrate, and a diaphragm movably disposed between the substrate and the backplate. The diaphragm includes a plurality of implantation portions, and the implantation portions have different concentration-depth profiles.
FORTEMEDIA, INC.
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Hsin-Li Jien-Ming Nai-Hao Feng-Chia Wen-Shan
Lee Chen Kuo Hsu Lin