JCIPRNET
Semiconductor package and manufacturing method thereof
A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a photonic die, an encapsulant and a wave guide structure. The photonic die includes a substrate and a dielectric layer. The substrate has a wave guide pattern. The dielectric layer is disposed over the substrate. The photonic die is encapsulated by the encapsulant. The wave guide structure spans over the front side of the photonic die and a top surface of the encapsulant, and penetrates the dielectric layer to be optically coupled with the wave guide pattern.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chuei-Tang Chung-Hao Chih-Chieh Chen-Hua
Wang Tsai Chang Yu