Thomas, Kayden, Horstemeyer & Risley, LLP
Method of mixing slurries
 A slurry mixing apparatus has a mixing chamber, a rotatable bearing and several blades. The bearing is connected to one end of each of the blades and located in the center of the mixing chamber. Several kinds of the slurries can be mixed rapidly in the apparatus and flowed into the CMP polisher immediately to perform a CMP process. Being mixed by the mixing chamber, the slurry is supplied to the chemical mechanical polisher for polishing. 
United Microelectronics Corp.
B B B
B24B B01F B24B
inventional inventional inventional
Juan-Yuan Chia-Jui Peng-Yih Ming-Sheng
Wu Chang Peng Yang