Morgan, Lewis & Bockius LLP
Array substrate for fringe field switching mode liquid crystal display and method of manufacturing the same
A method of manufacturing an array substrate for a fringe field switching mode liquid crystal display includes: forming an auxiliary insulating layer having a first thickness; forming first and second photoresist patterns on the auxiliary insulating layer; performing an ashing to remove the second photoresist pattern and expose the auxiliary insulating layer therebelow; performing a dry etching to remove the auxiliary insulating layer not covered by the first photoresist pattern and expose a first passivation layer and to form an insulating pattern below the first photoresist pattern, the insulating pattern and the first photoresist pattern forming an undercut shape; forming a transparent conductive material layer having a fourth thickness less than the first thickness; and performing a lift-off process to remove the first photoresist pattern and the transparent conductive material layer thereon together and form a pixel electrode.
LG Display Co., Ltd.
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inventional inventional additional additional inventional inventional inventional
Seok-Woo Han-Seok Kum-Mi In-Hyuk Young-Ki Won-Keun Dong-Cheon
Lee Lee Oh Song Jung Park Shin