Harness, Dickey & Pierce, P.L.C.
Gate electrode structure
An electrode structure, e.g., a gate electrode for a transistor, includes: a volume of semiconductor material; a gate oxide on the semiconductor volume; a barrier layer, including silicon nitride, on the gate oxide layer; an adhesion layer on the barrier layer; and a metallic layer on the adhesion layer.
Samsung Electronics Co., Ltd.
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Yungi Jaeman Hyeoungwon Kangyoon
Kim Yoon Seo Lee