Rabin & Berdo, PC
Dual stage positioning and switching system
The present invention has disclosed a dual stage positioning and switching system, which comprises at least a base, a first object stage positioning unit disposed on the base for a first workstation, and a second object stage positioning unit for a second workstation. Each of the object stage positioning units comprises at least a supporting structure, an X-direction guide bar, a Y-direction guide bar, and a motion positioning detector, wherein, the supporting structure comprises an object stage, and an object stage connector moving relative to the object stage. The object stage positioning unit further comprises a driver connecting to the object stage connector and driving the connector to move along the X-direction guide bar. The X-direction guide bars are positioned on and movable along the Y-direction guide bars. The system further comprises an object stage connector for transitional use during the switching process, which is positioned at the center of the Y-direction guide bar located on one side of the base. The present system does not include a cable stage, so that the structure of the system is simplified.
Shanghai Micro Electronics Equipment Co., Ltd.
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inventional inventional inventional
Yingsheng Xiaoping
Li Li