Mei & Mark LLP
Four-axis four-subdividing interferometer
Four-axis four-subdividing interferometer comprising a four-axis light splitting module and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser. The four-axis light splitting system comprises three 50% plane beam splitters and three 45-degree plane reflecting mirrors. The invention comprises a four-axis four-subdividing plane mirror interferometer and a four-axis four-subdividing differential interferometer. In the differential interferometer, an adjustable 45-degree reflecting mirror is used to guide the reference light to a reference reflecting mirror which is arranged in the same direction as a measurement mirror and fixed on the moving object.
Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences Shanghai Micro Electronics Equipment Co., Ltd.
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Jianfang Zhaogu Ya Feng Huijie
Chen Cheng Cheng Chi Huang