Banner & Witcoff, Ltd.
Thin film transistor and fabrication method thereof, array substrate and display device
A thin film transistor and a fabrication method thereof, an array substrate and a display device are provided. The thin film transistor comprises a gate electrode, an active layer, a source electrode and a drain electrode. The source electrode and the drain electrode include a first conductive layer provided on the active layer, and an etching rate of a material of the first conductive layer is greater than an etching rate of a material of the active layer in an etching liquid. The problem that the active layer of the thin film transistor is easily corroded in a back channel etch process is avoided, a number of patterning processes is reduced, and fabrication cost is reduced.
BOE Technology Group Co., Ltd.
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Jingwen Yongqian Gang Quanhu Zhongyuan Longyan Cuili Baoxia Kun
Yin Li Wang Li Wu Wang Gai Zhang Cao