Collimated and long throw magnetron sputtering of nickel/iron films for magnetic recording head applications
An apparatus and method for sputter depositing a magnetic film on a substrate to produce a magnetic device such as magnetic recording heads for reading digital information from a storage medium. The apparatus of the invention includes a sputtering chamber containing a target and a substrate, and a magnet array disposed within the chamber to form a substantially parallel magnetic field at a surface of the substrate. The sputtering chamber reduces interference between the magnetron and the magnet array by providing a long throw distance and/or a grounded collimator. The magnet array is preferably a circular ring.
Applied Materials, Inc.
G C H H H
G11B C23C H01J H01J H01J
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Sesh Thomas Imran Seh-Kwang
Ramaswami Brezoczky Hashim Lee