ScienBiziP, P.C.
TFT substrate, scanned antenna having TFT substrate, and method for manufacturing TFT substrate
A TFT substrate includes a dielectric substrate and a plurality of antenna unit regions arranged on the dielectric substrate. Each of the plurality of antenna unit regions has a TFT and a patch electrode electrically connected to the drain electrode of the TFT. The patch electrode includes a first electrode layer formed of the same conductive film as the gate electrode of the TFT and a second electrode layer formed of the same conductive film as the source electrode of the TFT.
SHARP KABUSHIKI KAISHA
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Fumitoshi Juxian Kenichi Junichi Shinya
Yasuo Li Kitoh Inukai Kadono