Thomas, Kayden, Horstemeyer & Risley
Sensing membrane with stress releasing structure and micro-electro-mechanical system device using the same
A sensing membrane applied to a micro-electro-mechanical system (MEMS) device includes a body, a stress releasing structure and a connecting portion. The stress releasing structure for releasing a membrane residual stress surrounds the body. The stress releasing structure has several first perforations and several second perforations. The first perforations are located between the body and the second perforations. The connecting portion connects the stress releasing structure and a substrate of the MEMS device.
Industrial Technology Research Institute
H G B B
H04R G01L B81B B81B
inventional inventional inventional additional
Jien-Ming Chia-Yu
Chen Wu