Ohlandt, Greeley, Ruggiero & Perle, LLP
Semiconductor stress buffer coating edge bead removal compositions and method for their use
An edge bead remover composition that includes at least one ketone selected from the group consisting of:wherein R1 and R2 are independently selected from the group consisting of:
Arch Specialty Chemicals, Inc.
H C C C C G G C
H01L C11D C11D C11D C11D G03F G03F C11D
additional inventional inventional additional additional inventional inventional additional
Ahmad A. William D. Laurie J. Richard L. Pamela J.
Naiini Weber Peterson Hopla Waterson