JCIPRNET
Plasma treatment apparatus
In order to ensure quality even when a sheet-like base material is thin while improving efficiency of production, a plasma treatment apparatus disclosed herein includes a plasma treatment chamber X for treating a sheet-like base material Z with plasma, a high-frequency antenna 3 for generating plasma in the plasma treatment chamber X, and a feeding mechanism 10 for feeding the sheet-like base material Z into the plasma treatment chamber X in a vertical direction.
Plasma Ion Assist Co., Ltd.
B H C C B C H C C H H H
B29C H05H C23C C23C B32B C23C H01J C23C C23C H05H H05H H05H
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Masayasu Yasuo
Tanjo Suzuki