Harness, Dickey & Pierce, P.L.C.
Piezoelectric thin film element, ink jet recording head using such a piezoelectric thin film element, and their manufacture methods
A piezoelectric thin film element D, in which a piezoelectric thin film 1 with first and second electrode films 2 and 3 respectively formed on its opposite surfaces in the thickness direction is held by a hold film 5, is fabricated by forming each film 1, 2, 3, and 5 on a film formation substrate 11 and removing the film formation substrate 11 by etching. Even when the hold film 5 is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film 1 is protected from damage by etchant because the first electrode film 2 which comes into contact with the film formation substrate 11 is formed such that the overall circumference of a peripheral edge portion of the first electrode film 2 laterally extends beyond the lateral surface of the piezoelectric thin film 1 and closely adheres to the hold film 5. 
Matsushita Electric Industrial Co., Ltd.
H B H B H B B H B B B
H01L B41J H01L B41J H01L B41J B41J H01L B41J B41J B41J
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Satoru Osamu Isaku Shigeyuki Ryoichi Kenji
Fujii Watanabe Kanno Takao Takayama Tomita