SoCal IP Law Group LLP
Solidly-mounted transversely-excited film bulk acoustic resonator
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a substrate and a single-crystal piezoelectric plate having parallel front and back surfaces. An acoustic Bragg reflector is sandwiched between a surface of the substrate and the back surface of the single-crystal piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface. The IDT and the single-crystal piezoelectric plate are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode within the single-crystal piezoelectric plate. The acoustic Bragg reflector is configured to reflect the primary shear acoustic mode over a frequency range including a resonance frequency and an anti-resonance frequency of the acoustic resonator device.
Resonant Inc.
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Bryant Robert B. Patrick Ventsislav Jesson Viktor Soumya
Garcia Hammond Turner Yantchev John Plesski Yandrapalli