Marger Johnson & McCollom, P.C.
Method of manufacturing a semiconductor device having a switching function
A semiconductor device capable of suppressing void migration is provided. The semiconductor device includes a dummy region extending in a first direction substantially perpendicular to a second direction in which a word line extends. In addition, an isolation layer pattern may not cut the dummy region in the second direction. Consequently, leaning of the dummy region and void migration are prevented. A method of fabricating the semiconductor device is also provided.
Samsung Electronics Co., Ltd.
H H
H01L H01L
inventional inventional
Yong-Tae Gyo-Young Sung-Sam Mi-Youn Dae-Won Yun-Gi
Kim Jin Lee Kim Ha Kim