Perkins Coie LLP
Systems and methods for thermal hydro-synthesis of semiconductor materials by holding a substrate wafer within a chamber in a vertical direction
Devices, systems and methods for fabricating semiconductor material devices by placing a batch of wafers in a chemical solution within a growth chamber. The wafers are held in a vertical direction and are actuated to move within the chemical solution while growing a layer over exposed surfaces of the wafers.
SEOUL VIOSYS CO., LTD.
H H H H C C H
H01L H01L H01L H01L C30B C30B H01L
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Yi Jung Young Deuk Seom Geun Ki Suk
Kim Park Lee Kim