Roberts Mlotkowski Safran & Cole, P.C.
Self-healing crack stop structure
A self-healing crack stop structure and methods of manufacture are disclosed herein. The structure comprises a crack stop structure formed in one or more dielectric layers and surrounding an active region of an integrated circuit chip. The crack stop comprises self healing material which, upon propagation of a crack, is structured to seal the crack and prevent further propagation of the crack.
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Kendra A. Stephen P. John C. Alissa R. Benjamin J.
Lyons Ayotte Malinowski Cote Pierce