Haynes and Boone, LLP
Residual gain monitoring and reduction for EUV drive laser
A laser system includes a laser source operable to provide a laser beam; a laser amplifier having an input port and an output port and operable to amplify the laser beam, the laser beam travelling along a main beam path through the laser amplifier from the input port to the output port; and a residual gain monitor operable to provide a probe laser beam, the probe laser beam travelling along a probe beam path through the laser amplifier from the output port to the input port, wherein the residual gain monitor calculates a residual gain of the laser amplifier according to the probe laser beam.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Li-Jui Bo-Tsun Tzung-Chi Po-Chung Chun-Lin Louis Jen-Hao Han-Lung
Chen Liu Fu Cheng Chang Yeh Chang