Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Device for transferring plate-like objects
 A plate-like object carrier device comprising plural arms arranged at a same pitch interval to horizontally support a wafer on each of the arms, a first motor for driving a single arm forward and backward and independently of a group of arms, a second motor for driving the group of arms forward and backward at the same time except the single arm, a power supply for supplying power to the first and second motors, and a controller for selecting whether to supply power only to the first motor or both of the first and second motors. 
Tokyo Electron Tohoku Limited Tokyo Electron Limited
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Y10S Y10S Y10S H01L
additional additional additional inventional
Hisashi Katsumi
Kikuchi Ishii