Ladas & Parry LLP
Substrate heating apparatus
A substrate heating apparatus includes: a heating chamber, as well as a heating unit and a suspension holding unit which are provided in the heating chamber. The heating unit is provided at the bottom of the heating chamber, and the suspension holding unit holds the substrate in suspension above the heating unit. The apparatus avoids collision and friction on the substrate, and ensures uniform heating of the substrate.
BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
F F F F F F
F26B F26B F26B F26B F26B F26B
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Jie Yu Qingyang Yanming
Liu Jiao Yao Wang