Haynes and Boone, LLP
Method of using time interval in IC foundry to control feed back system
An advanced process control method using time interval between lots of a particular product to control the weighting of feedback data is described. A plurality of products are fabricated wherein the products are tracked by the process control method based on product type, for example. Variation in a parameter is detected. The adjustment speed of a process recipe is determined based on a time interval weighting wherein the time interval is defined as the time between processing of lots of the same product type. The process recipe is updated at the determined adjustment speed to decrease variation of the parameter.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Jimmy Yi-Chuan Shui-Tien Chen-Yu
Hu Lo Lin Chang