Harness, Dickey & Pierce, P.L.C.
Pellicle and photomask assembly including the same
A pellicle includes a pellicle membrane, which includes a porous thin film. The porous thin film includes a plurality of nanowires, which are arranged across one another to form a net structure. A photomask assembly includes the pellicle and a photomask, wherein the pellicle is fixed to a surface of the photomask.
SAMSUNG ELECTRONICS CO., LTD.
G G
G03F G03F
inventional inventional
Byung-gook Sung-won Jae-hyuck Yong-seok Hwan-chul
Kim Kwon Choi Jung Jeon