Thomas, Kayden, Horstemeyer & Risley
Air supply systems and pressure adjustment devices for use therewith
An air supply system for a clean room with a critical machine. An intake duct connects the exterior of the clean room to a make-up air unit, and is configured to transport external air into the make-up air unit. A first air duct connects the make-up air unit to an air conditioning cabinet including a first chemical filter, and is configured to transport the air flowing through the make-up air unit into the air conditioning cabinet. The first chemical filter removes airborne molecular contamination from the air transported into the air conditioning cabinet. A second air duct connects the air conditioning cabinet to the critical machine, and is configured to transport the air flowing through the first chemical filter of the air conditioning cabinet into the critical machine. An exhaust duct connects the critical machine to the exterior of the clean room, discharging waste gas produced in the critical machine.
Taiwan Semiconductor Manufacturing Co., Ltd.
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Po-Sung Ming-Wen Yung-Dar Tung-Li Jheng-Long
Kuo Huang Chen Wu Chou