Adams & Wilks
Ion beam apparatus, ion beam processing method and sample holder member
An ion beam processing device has a sample holder for fixing a sample on which a section has been formed by irradiation of a specified focused ion beam from a surface side, and gas ion beam irradiation device for irradiating a gas ion beam to a region of the sample fixing using the holder member that contains the section to remove a damage layer on the section. The gas ion beam from the gas ion beam irradiation device irradiates the section from a rear surface side of the sample at a specified incident angle.
SII Nanotechnology Inc.
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Toshiaki Yasuhiko Masakatsu Yasuyuki Toshio Kouji
Fujii Sugiyama Hasuda Takagi Kodama Iwasaki