Slater & Matsil, L.L.P.
Fabrication monitoring system
System and method for monitoring a fabrication process. Generally, an actual-to-planned variance is calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the planned quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site. Furthermore, a planned-to-actual variance may be calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the actual quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site.
Taiwan Semiconductor Manufacturing Company, Ltd.
H
H01L
inventional
Chao-Fan Chin-Cheng Oliver Pai-Cheng
Chang Pan Wu Huang