Janah & Associates, P.C.
Manufacturing method for thin film battery
A thin film battery manufacturing method is provided for deposition of lithium metal oxide films onto a battery substrate. The films are deposited in a sputtering chamber having a plurality of sputtering targets and magnetrons. The sputtering gas is energized by applying a voltage bias between a pair of the sputtering targets at a frequency of between about 10 and about 100 kHz. The method can provide a deposition rate of lithium cobalt oxide of between about 0.2 and about 4 microns/hr with improved film quality.
Front Edge Technology, Inc.
H H C H H C Y
H01M H01M C23C H01M H01M C23C Y02E
inventional inventional inventional inventional inventional inventional additional
Weng-Chung Kai-Wei
Wang Nieh