Birch, Stewart Kolasch & Birch, LLP
Method for producing a single integrated device containing a plurality of passive elements
A method for producing a single integrated device containing a plurality of passive elements. The method includes providing a semiconductive ferroelectric substrate, applying a diffusant onto the substrate, and thermally processing the substrate. The ferroelectric material is a substrate with polycrystalline structure or a thin film formed by Ba1-xSrxTiO3 or Sr1-xCaxTiO3 or combinations thereof. Thermal processing is performed by isothermal heating or pulse laser.
Industrial Technology Research Institute
H H
H01L H01L
inventional inventional
Yun-Tien Syh-Yuh
Chen Cheng