Abelman, Frayne & Schwab
Substrate inspection device
A substrate inspection device includes: a holding member configured to hold a probe card; a plate-shaped chuck facing the probe card and configured to place a substrate thereon; and an inspection chamber in which the holding member and the chuck are disposed. The substrate is brought into contact with the probe card by moving the chuck closer to the holding member. A sealed space is formed between the holding member and the chuck. A contact state between the probe card and the substrate are maintained by decompressing the sealed space. A gas introduction path is provided separately from the inspection chamber and configured to introduce a gas in a partitioned space into the sealed space, and the partitioned space is filled with a dry gas.
Tokyo Electron Limited
G G G G H H G H G G
G01R G01R G01R G01R H01L H01L G01R H01L G01R G01R
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Hiroshi Jun
Yamada Fujihara