Brooks Kushman P C.
Tank for substrate cleaning, tank heating apparatus, tank heating method, and substrate cleaning apparatus
A tank for substrate cleaning, a tank heating apparatus, a tank heating method and a substrate cleaning apparatus are provided. The substrate cleaning tank includes a tank body, a hot waste gas recycle tube, a heater and a heat exchange tube. The hot waste gas recycle tube is used to receive a hot waste gas in a hot waste gas discharge tube of a production line, the heater and the heat exchange tube are used to heat a fluid in the tank body, and the heat exchange tube is communicated with the hot waste gas recycle tube. The hot waste gas is effectively utilized, the power consumption is reduced, the production cost is saved, and the discharge of the hot waste gas is reduced.
BOE TECHNOLOGY GROUP CO., LTD. HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
B G H G B B Y B F
B08B G02F H01L G02F B08B B08B Y02P B08B F28D
additional inventional inventional additional inventional inventional additional inventional inventional
Zhiguang Xin Dahu Jing Jianfeng Jinxia
Guo Cai Tang Li Liu Hu