Miles & Stockbridge P.C.
Charged particle beam apparatus
A charged particle beam apparatus is provided with a parameter adjustment practice function for allowing any user to easily learn manual focus adjustment and stigma adjustment. Control conditions of the focus arrangement of an objective lens, an X-stigmator and a Y-stigmator are set according to the user's operation. According to a group of the focus adjustment, an X-stigma adjustment and a Y-stigma adjustment which are set, a practice-purpose image corresponding to the control conditions is read out from a storage device and is displayed on a screen.
Hitachi High-Technologies Corporation
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Mami Mitsugu Noriko Ryuichiro Hiroyuki Shinichi Shunya Masako Kunji
Konomi Sato Iizumi Tamochi Noda Tomita Watanabe Nishimura Shigeto