Ryan, Mason & Lewis, LLP
Lateral semiconductor nanotube with hexagonal shape
A method of forming a semiconductor structure includes forming one or more fins disposed on a substrate, rounding surfaces of the one or more fins, forming faceted sidewalk from the rounded surfaces of the one or more fins, and forming a lateral semiconductor nanotube shell on the faceted sidewalk. The lateral semiconductor nanotube shell comprises a hexagonal shape.
International Business Machines Corporation
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Peng Kangguo Juntao Choonghyun
Xu Cheng Li Lee