Lee & Morse, P.C.
Method of fabricating semiconductor device
A method of fabricating a semiconductor device includes forming a trench in a substrate, forming a pre-gate insulating film along side surfaces and a bottom surface of the trench, and oxidizing the pre-gate insulating film through a densification process.
SAMSUNG ELECTRONICS CO., LTD.
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Tai-Su Ki-Hong Dong-Chan Ju-Eun
Park Nam Kim Kim