Dugan & Dugan, PC
Scrubber brush with sleeve and brush mandrel for use with the scrubber brush
In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.
Applied Materials, Inc.
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Hideshi Hui Takashi Sheshraj L. Toshikazu
Takahashi Chen Fujikawa Tulshibagwale Tomita