Hauptman Ham, LLP
Method of manufacturing a semiconductor device
A method of making a semiconductor device includes determining a temperature profile for a first die of a three-dimensional integrated circuit (3DIC). The method further includes identifying a plurality of sub-regions of the first die based on the determined temperature profile. The method further includes simulating operation of a circuit in a second die of the 3DIC based on the determined temperature profile and a corresponding sub-region of the plurality of sub-regions. The method further includes manufacturing the semiconductor device.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Chi-Wen Ya Yun Jui-Feng Yi-Kan Hui Yu
Chang Liu Kuan Cheng Lee