Blakely, Sokoloff, Taylor & Zafman LLP
Programmable mask and method for fabricating biomolecule array using the same
A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.
Electronics and Telecommunications Research Institute
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Chi Hoon Young Shin Yun Tae Moon Youn Dong Ho Hae Sik
Jun Kim Kim Jung Shin Yang