Canon USA, Inc. IP Division
Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.
CANON KABUSHIKI KAISHA
H B H Y H Y B B
H04R B81B H04R Y10T H04R Y10T B06B B81C
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Chienliu
Chang