Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Sensor having improved thermal stability
The invention provides a sensor comprising a frame, a plurality of beams extending inwardly from said frame, a weight portion supported by the beams, a piezoelectric-resistor formed on each beam and an insulating layer that covers the piezoelectric-resistor. The piezoelectric-resistor has at least one bend, and a metal wiring is located on the insulting layer positioned at the bend. The metal wiring is connected to the bend via at least two contact holes formed in the insulating layer. Contact holes are formed in the insulating layer positioned at both ends of the piezoelectric-resistor, and a bridge circuit wiring is connected to the piezoelectric-resistor via the contact holes.
Dai Nippon Printing Co., Ltd.
Y B G G B G G B B
Y10T B81B G01P G01P B81B G01P G01P B81B B81B
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Kazuhiko Toshiaki Katsumi
Aida Mori Hashimoto