Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
Strain sensor and a method of making the same
A strain sensor is provided including a substrate, and a sensing layer, including cobalt, provided on the substrate. A first electrode is coupled to the sensing layer, and a tunnel layer including aluminum oxide is provided on the sensing layer. In addition, a pinned layer, also including cobalt, is provided on the tunnel layer. An exchange biasing layer is provided on the pinned layer, and a second electrode is coupled to the exchange biasing layer. The strain sensor is configured such that, over a range of values of strain applied to the sensor, a resistance of the sensor is a linear function of the strain. A related method is also disclosed.
Academia Sinica
Y H H G G
Y10T H01C H01C G01L G01L
additional inventional inventional inventional inventional
Wen-Chih Shien-Uang Yuan-Tsung Yeong-Der
Chen Jen Chen Yao