ScienBiziP, P.C.
Low energy electron microscopy
The disclosure relates to a low energy electron microscopy. The electron microscopy includes a vacuum chamber; an electron gun used to emit electron beam; a diffraction chamber; an imaging device; a sample holder used to fix two-dimensional nanomaterial sample; a vacuum pumping device; and a control computer. The electron beam transmits the sample to form a transmission electron beam and diffraction electron beam. The control computer includes a switching module to switch the work mode between a large beam spot diffraction imaging mode and small beam spot diffraction imaging mode.
Tsinghua University HON HAI PRECISION INDUSTRY CO., LTD.
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H01J H01J H01J H01J H01J H01J H01J H01J H01J G01N H01J H01J H01J
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Chun-Hai Kai-Li Duan-Liang Xiao-Yang Peng Wei Shou-Shan
Zhang Jiang Zhou Lin Liu Zhao Fan