Slater Matsil, LLP
Compact vertical inductors extending in vertical planes
A device includes a substrate, and a vertical inductor over the substrate. The vertical inductor includes a plurality of parts formed of metal, wherein each of the parts extends in one of a plurality of planes perpendicular to a major surface of the substrate. Metal lines interconnect neighboring ones of the plurality of parts of the vertical inductor.
Taiwan Semiconductor Manufacturing Company, Ltd.
H H H H H H H
H01F H01L H01F H01F H01F H01F H01L
inventional inventional additional additional additional inventional additional
Min-Chie Mei-Show Huan-Neng Ho-Hsiang Yu-Ling Hsiao-Tsung Chin-Wei
Jeng Chen Chen Chen Lin Yen Kuo