Armstrong, Westerman, Hattori, McLeland & Naughton
Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same
 A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid. 
Fujitsu Limited
Y H B H B H
Y10S H01L B08B H01L B08B H01L
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Ken Masanori Yuka
Yamazaki Kobayashi Hayami