Koda & Androlia
Wafer conveying apparatus
 An apparatus for conveying a wafer to wafer work suction-holding stage and then discharging a worked wafer from the wafer work suction-holding stage, including a loader side elevator device, a wafer position correcting stage, a wafer work suction-holding stage, a wafer carrying table and an unloader side elevator device which are successively disposed in this order; and the apparatus further including a conveyor which conveys a wafer inside a loader side magazine carried on the loader side elevator device to a point above the positional correction suction-holding stage, a stopper which positions the wafer conveyed by the conveyor to the wafer position correcting stage, and a feeding pawl moving device which operates after the wafer position correcting stage and wafer work suction-holding stage have been moved vertically so that the upper surface of the wafer position correcting stage is at substantially the same height as the upper surface of the stopper and so that the upper surface of the wafer work suction-holding stage is at the same height as the upper surfaces of the stopper and wafer carrying table. 
Kabushiki Kaisha Shinkawa
Y Y H H
Y10S Y10S H01L H01L
additional additional inventional inventional
Yasunobu Tetsuya Kazuhiro Hirofumi
Suzuki Kobaru Imai Moroe