Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Substrate processing method, substrate processing system, and computer-readable recording medium recording program thereon
In the present invention, the position of a substrate on a thermal plate is detected when baking after exposure is performed in a first round of patterning. In a second round of patterning, the setting position of the substrate is adjusted based on a detection result of the position before the substrate is mounted on the thermal plate in the baking after exposure. In the baking after exposure in the second round of patterning, the substrate is mounted at the same position with respect to the thermal plate as that in the baking after exposure in the first round of patterning. In performing a plurality of rounds of patterning on a film to be processed, a pattern with a desired dimension is finally formed above the substrate, and the uniformity of the pattern dimension within the substrate is ensured.
Tokyo Electron Limited
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inventional inventional inventional inventional
Takahisa
Otsuka