McGinn IP Law Group, PLLC.
β-Ga2O3-based single crystal substrate
A β-Ga2O3-based single crystal substrate includes a β-Ga2O3-based single crystal. The β-Ga2O3-based single crystal includes a full width at half maximum of an x-ray rocking curve of less than 75 seconds.
TAMURA CORPORATION KOHA CO., LTD.
H Y C C H
H01L Y10T C30B C30B H01L
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Yu Shinya Kimiyoshi Masaru Daiki Makoto
Yamaoka Watanabe Koshi Takizawa Wakimoto Watanabe