Tung & Associates
Wafer transfer system with temperature control apparatus
A wafer transfer system having a temperature control apparatus. The temperature control apparatus is constructed and arranged so that a material, element, or atomic particle may flow therethrough to heat or cool a wafer carried by the wafer transfer system. The material, element or atomic particle flowing through the temperature control apparatus causes heat to be pumped to or from an upper surface or lower surface. Preferably the temperature control apparatus is a thermoelectric device. Preferably the thermoelectric device includes a plurality of alternating N-type and P-type semiconductor pellets arranged electrically in series and thermally in parallel, and connected to a DC power supply. A switch or relay is provided for altering the direction of current flow to the thermoelectric device from a DC supply.
Taiwan Semiconductor Manufacturing Co., Ltd
F H F
F25B H01L F25B
inventional inventional additional
Cheng-Cheng Chih-Wei Fa-Yuan Shih-Fang Chin-Chang Cheng-Ting
Chang Chang Chang Chen Chen Tseng