Oliff PLC
Method for determining defect region
A method for determining a defect region of a silicon wafer which is sliced off from a silicon single crystal manufactured by a CZ method, the method including: (1) mirror-surface processing the silicon wafer in such a manner that a haze level of a surface thereof in haze measurement performed by a particle counter which uses a laser having a wavelength of 266 nm becomes 0.06 ppm or less; (2) measuring the number of defects and/or a defect density distribution on the mirror-surface-processed surface of the silicon wafer by using a particle counter capable of measuring defects having a size of 15 nm or less; and (3) determining the defect region of the silicon wafer from the measured number of the defects and/or defect density distribution.
SHIN-ETSU HANDOTAI CO., LTD.
C G C G G G G G
C30B G01N C30B G01N G01N G01B G01N G01N
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Kazuya Hiroyasu
Tomii Kikuchi