Tutunjian & Bitetto, P.C.
Nanoparticle structure and process for manufacture
A method for forming nanoparticles includes forming a stack of alternating layers including a first material disposed between a second material. The stack of alternating layers is patterned to form pillars. A dielectric layer is conformally deposited over the pillars. The pillars are annealed in an oxygen environment to modify a shape of the first material of the alternating layers. The dielectric layer and the second material are etched selectively to the first material to form nanoparticles from the first material.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Juntao Kangguo Qing
Li Cheng Cao