Diaminosilane compounds
Disclosed is a compound of formula (I): (R1 R2N)SinH2n(NR3R4) (I) wherein subscript n, R1, R2, R3 and R4 are as defined herein. Also disclosed are a method of making, intermediates useful therein, method of using, and composition comprising the compound of formula (I).
DOW SILICONES CORPORATION
H C H C C C C H H H C C H
H01L C23C H01L C23C C07F C07F C23C H01L H01L H01L C07F C23C H01L
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Brian D. Xiaobing
Rekken Zhou