Mayer, Brown, Rowe & Maw LLP
Capacitive micro-electro-mechanical switch and method of manufacturing the same
The present invention relates to a capacitive micro-electro-mechanical switch and method of manufacturing the same. In the capacitive micro-electro-mechanical switch for use in the radio frequency (RF) and the microwave driven by the electrostatic force, a capacitor of a 3-dimensional structure is formed on a signal transmission line. An ON capacitance is increased without increasing an capacitor area while preventing an increase in an OFF capacitance using the capacitor. Thus, an ON/OFF capacitance ratio of the capacitive micro-electro-mechanical switch can be increased and insertion loss and isolation characteristic could be improved.
Electronics and Telecommunication Research Institute
H H H
H01G H01H H01P
inventional inventional inventional
Woo Seok Sung Hae Yun Tae Sung Weon
Yang Jung Kim Kang