Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
Bonding apparatus and bonding method
The present invention is a bonding apparatus which bonds a first object to be bonded and a second object to be bonded by bringing a bonding member into contact with an upper surface of the second object to be bonded placed on an upper surface of the first object to be bonded and ultrasonically vibrating the second object to be bonded by the bonding member, and the bonding member includes: a contact portion brought into contact with the second object to be bonded; and a holding portion holding the second object to bonded. With this structure, it is possible to prevent the object to bonded from sliding sideways to thereby properly bond the objects to be bonded to each other, even with a low pressing force.
Tokyo Electron Limited
G B G
G01R B23K G01R
additional inventional additional
Shinjiro
Watanabe