Oblon, McClelland, Maier & Neustadt, L.L.P.
Electrostatic chuck, mount plate support, and manufacturing method of electrostatic chuck
According to one embodiment, an electrostatic chuck comprises a mount plate, a first layer, and a second layer. The first layer includes a heater. The second layer is provided between the mount plate and the first layer. The second layer transmits heat from the heater to the mount plate. The second layer includes a compressive attachment portion. The compressive attachment portion is formed at the outer edge. The face on the mount plate side of the compressive attachment portion is compressed and attached to the mount plate. The face on the first layer side of the compressive attachment portion is compressed and attached to the first layer.
Kabushiki Kaisha Toshiba
Y H H B
Y10T H01L H01L B32B
additional inventional inventional inventional
Yasuhiro Hideo Makoto
Nojiri Eto Saito