Rothwell, Figg, Ernst & Manbeck, P.C.
Particle collecting apparatus and particle collecting system
A particle collecting apparatus includes a cylindrical housing, a gap forming unit, a supply port and an intake port. The cylindrical housing has a closed top and an open bottom facing a target object. The gap forming unit is configured to form a gap having a predetermined distance between the bottom and the target object. The supply port is formed at the opening of the bottom in an annular shape along an inner wall of the housing and configured to supply a gas to the target object. The intake port is provided closer to a central axis of the supply port than the supply port and configured to suck particles on the target object.
TOKYO ELECTRON LIMITED
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Toshihiko Hikaru Katsushi Nobuyuki
Kikuchi Kikuchi Abe Nagayama