Sughrue, Mion, Zinn, Macpeak & Seas
Electron beam deflecting apparatus with reduced settling time period
 In an electron beam deflecting apparatus including an electromagnetic deflection unit and a driver for driving the electromagnetic deflection unit in accordance with a main deflection amount, when a current main deflection amount is different from a previous main deflection amount, a corrected main deflection amount, which is an opposite value of the previous main deflection amount with respect to the current main deflection amount, is calculated as the main deflection amount. 
NEC Corporation
B H H H B H H
B82Y H01J H01J H01J B82Y H01J H01J
inventional inventional additional additional inventional inventional inventional
Hiroshi
Yamashita