Finnegan, Henderson, Farabow, Garrett & Dunner L.L.P.
Vibration sensor and sensor module
A vibration sensor according to an embodiment includes a laminated body. The laminated body includes a support layer a first end of which is fixed; a piezoelectric layer on the support layer; an insulating layer disposed between the support layer and the piezoelectric layer; a common electrode disposed on a first principal surface of the piezoelectric layer; a first sensing electrode disposed in a first area on a second principal surface of the piezoelectric layer on the side opposite to the first principal surface; and a drive electrode disposed in a second area different from the first area on the second principal surface of the piezoelectric layer. The first area is located near the first end of the support layer.
KABUSHIKI KAISHA TOSHIBA
G G G
G01H G01L G01C
inventional inventional inventional
Yongfang
Li