Scully, Scott, Murphy & Presser
Method to operate GEF4 gas in hot cathode discharge ion sources
 The present invention provides a method of extending, i.e. prolonging, the operating lifetime of hot cathode discharge ion source by utilizing and introducing a nitrogen-containing co-bleed gas into an ion implantation apparatus which contains at least a hot cathode discharge ion source and an ion implantation gas such as GeF.sub.4. 
International Business Machines Corporation
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inventional additional additional
John F. Brian S. Jiong Lawrence T. Joseph L.
Grant Freer Chen Jacobs Malenfant, Jr.