Anova Law Group, PLLC
Device for holding disk-shaped articles and method thereof
A device for holding disk-shaped articles and a method thereof are provided. The device comprises a rotatable chuck body and at least two groups of clamping elements arranged at the edge of the chuck body. Each of the clamping elements is mounted to a pivot with the chuck body respectively by means of the rotation of the clamping element with respect to the chuck body. A radial compression spring is connected between the bottom of the clamping element and the chuck body to provide a clamping force for the clamping element. The clamping elements in the same group are provided with magnets with the same polarity, while the clamping elements in different groups are provided with magnets with the opposite polarity. Two sets of electromagnets are arranged on the chuck body and spaced apart evenly.
BEIJING SEVENSTAR ELECTRONICS CO., LTD.
H Y B B Y Y
H01L Y10T B23B B23B Y10T Y10T
inventional additional inventional inventional additional additional
Ruiting Yi Wei Hao Bao
Wang Wu Li Wang Zhang