Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least chamfer-short-configured, AACNT-short-configured, GATE-short-configured, and GATECNT-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of short-circuit failure modes, including at least one chamfer-short-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one GATECNT-short-related failure mode.
PDF Solutions, Inc.
H H H H H H H G H G G H H H G H G H H H H H H G H G H H
H01L H01L H01L H01L H01L H01L H01L G06F H01L G06F G01R H01L H01L H01L G06F H01L G06F H01L H01L H01L H01L H01L H01L G06F H01L G06F H01L H01L
inventional inventional inventional additional inventional inventional inventional inventional inventional additional inventional inventional inventional additional additional inventional additional additional inventional inventional inventional additional inventional inventional inventional additional inventional inventional
Markus Stephen Tomasz Kelvin Jonathan Timothy Larg Andrzej Marci Vyacheslav John Hans Nobuharu Sherry Dennis Marcin Simone Carl Christopher Conor Rakesh Jeremy Indranil Hideki Kimon Sheng-Che
Rauscher Lam Brozek Doong Haigh Fiscus Weiland Strojwas Liao Rovner Kibarian Eisenmann Yokoyama Lee Ciplickas Strojwas Comensoli Taylor Hess O'Sullivan Vallishayee Cheng De Matsuhashi Michaels Lin