Integrated circuit containing first and second DOEs of standard Cell Compatible, NCEM-enabled Fill Cells, with the first DOE including tip-to-side short configured fill cells, and the second DOE including corner short configured fill cells
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of tip-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of corner shorts.
PDF Solutions, Inc.
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Marci Markus Rakesh Carl Larg Christopher Tomasz Stephen Kimon Timothy Hideki Dennis John Marcin Hans Vyacheslav Sheng-Che Indranil Nobuharu Kelvin Conor Jeremy Jonathan Simone Sherry Andrzej
Liao Rauscher Vallishayee Taylor Weiland Hess Brozek Lam Michaels Fiscus Matsuhashi Ciplickas Kibarian Strojwas Eisenmann Rovner Lin De Yokoyama Doong O'Sullivan Cheng Haigh Comensoli Lee Strojwas