Sterne, Kessler, Goldstein & Fox P.L.L.C.
Semiconductor wafer storage device
The present disclosure describes a device and a method for substrate storage. The device can include a first and a second groups of panels configured to form an enclosed volume, and fin structures disposed at inner surfaces of the second group of panels. Each of the fin structures can be configured to hold a substrate. Each fin structure can include a protrusion extending inwardly into the enclosed volume and a binding device disposed over the protrusion. The binding device can be configured to bind the substrate over the protrusion.
Taiwan Semiconductor Manufacturing Co, , Ltd.
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Yu Ju- Ren-Hao
Chen Jheng