Birch, Stewart, Kolasch & Birch, LLP
Rectangular mold-forming substrate
A rectangular substrate is used as a mold after it is provided with a topological pattern. The substrate has A-side and B-side opposed surfaces, the A-side surface being provided with the topological pattern. The A-side surface includes a central rectangular region of 1 to 50 mm by 1 to 50 mm having a flatness of up to 350 nm. Use of the mold-forming substrate prevents the occurrence of a pattern misalignment or pattern error between the step of forming a pattern on a mold-forming substrate and the transfer step. Transfer of a fine size and complex pattern is possible.
SHIN-ETSU CHEMICAL CO., LTD.
C G B G B B B G
C03C G03F B29C G03F B29C B29C B29C G03F
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Masaki Hiroyuki Daijitsu Daiyu
Takeuchi Yamazaki Harada Okafuji