Systems and methods for conforming device testers to integrated circuit device with pressure relief valve
The present invention relates to systems and methods for preventing over pressurization in a fluid management system used in an integrated circuit (IC) device tester. The prevention of the over pressurization in the fluid management system is based on the use of a pressure relief valve coupled to the fluid management system.
ESSAI, INC.
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Elena V. Joven R Nasser Chee Wah Oksana
Nazarov Tienzo Barabi Ho Kryachek