Venable LLP
Probe and object information acquisition apparatus using the same
A probe is provided in which penetration of an acoustic medium into a support layer of an optical reflection member through a pinhole or a scratch on an optical reflection layer is suppressed, occurrence of a solvent crack is suppressed, and noise due to photoacoustic waves that occurs on a receiving surface can be suppressed. The probe includes an element having at least one cell in which a vibration film containing one electrode out of two electrodes that are provided so as to interpose a space therebetween is vibratably supported. The probe further includes a support layer disposed on the vibration film, and an optical reflection layer disposed on the support layer. A protection layer against an acoustic medium is formed on the optical reflection layer.
CANON KABUSHIKI KAISHA
G G G
G01N G01N G01N
inventional inventional inventional
Kazutoshi Shinichiro Atsushi
Torashima Watanabe Kandori