Duane Morris LLP
Systems and methods for robotic arm sensing
In an embodiment, a robotic arm includes: a base; at least one link secured to the base; a gripper secured to the at least one link, wherein: the gripper comprises a finger, the gripper is configured to secure a wafer while the at least one link is in motion, and the gripper is configured to release the wafer while the at least one link is stopped, a sensor disposed on the finger, the sensor configured to collect sensor data characterizing the robotic arm's interaction with a semiconductor processing chamber while the wafer is secured using the finger.
Taiwan Semiconductor Manufacturing Co., Ltd.
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inventional inventional inventional inventional
Ming-Feng Yan-Hong Hung-Wen Che-fu
Chen Liu Chen Chen