Haynes and Boone, LLP
TARC material for immersion watermark reduction
A coating material for use during a lithography process. In an example, a coating material disposed on a material layer includes a polymer and a quencher catcher chemically bonded to the polymer. The quencher catcher substantially neutralizes any quencher that diffuses into the coating material from the material layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G Y G G
G03F G03F Y10S G02B G03F
inventional inventional additional inventional inventional
Ching-Yu
Chang