Knobbe Martens Olson & Bear LLP
Substrate cleaning apparatus
A substrate cleaning apparatus is provided. The substrate cleaning apparatus includes a plurality of transfer rollers for transferring a substrate; a liquid chemical feeder supplying a liquid chemical to a first surface of the substrate; wherein the liquid chemical feeder comprises a first housing and a first cleaning roller rotatably installed within the housing and having an upper portion configured to contact with the substrate.
Samsung Display Co., Ltd.
B B H H H H B B
B08B B08B H01L H01L H01L H01L B08B B08B
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Sohra Seung-Jun Jung-Hwa Dong-Myung
Hahn Lee You Shin