Slater Matsil, LLP
Anti-reflective coating materials
In accordance with an embodiment a bottom anti-reflective layer comprises a surface energy modification group which modifies the surface energy of the polymer resin to more closely match a surface energy of an underlying material in order to help fill gaps between structures. The surface energy of the polymer resin may be modified by either using a surface energy modifying group or else by using an inorganic structure.
Taiwan Semiconductor Manufacturing Company
G H H
G03F H01L H01L
inventional inventional inventional
Ching-Yu Yu-Chung
Chang Su