Buchanan Ingersoll & Rooney PC
Bevel etcher with gap control
A device for cleaning a bevel edge of a semiconductor substrate. The device includes a lower electrode assembly that has a top surface and is adapted to support the substrate and an upper electrode assembly that has a bottom surface opposing the top surface. The lower and upper electrode assemblies generate plasma for cleaning the bevel edge of the substrate disposed between the top and bottom surfaces during operation. The device also includes a mechanism for suspending the upper electrode assembly over the lower support and adjusting the tilt angle and horizontal translation of the bottom surface relative to the top surface.
Lam Research Corporation
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William S. Yunsang Alan M. Andrew D. Andras Gregory
Kennedy Kim Schoepp Bailey, III Kuthi Sexton