Ultrasonic sensor and manufacturing method thereof
An ultrasonic sensor includes a substrate. A first electrode and a first piezoelectric layer are stacked on one side of the substrate. A second electrode and a second piezoelectric layer are stacked on the other side of the substrate. A notch is defined in the first piezoelectric layer. And a conductive film is coated within the notch to couple the first electrode and the first piezoelectric layer.
MiiCs & Partners Inc.
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Juan
Wang