Osha Liang LLP
Sample observing apparatus and sample observing method
There is provided a sample observing apparatus for observing the surface of a sample by irradiating an electron beam thereto, having an electron gun for irradiating the electron beam to the surface of the sample, a potential control section for adjusting electric potential of the surface of the sample to potential set in advance by applying voltage determined based on an amount of electric charge on the surface of the sample to the sample, an electron detecting section for detecting electrons produced when the electron beam is irradiated to the surface of the sample and an appearance acquiring section for acquiring the appearance of surface of the sample per each spot on the surface based on the electrons detected by the electron detecting section.
Advantest Corporation
H H H G
H01J H01J H01J G01N
additional additional inventional inventional
Masahiro Masayuki Toshihiko Kazuhiro Toshimichi
Seyama Kuribara Hara Arakawa Iwai