Birch, Stewart, Kolasch & Birch, LLP
Synthetic quartz glass lid precursor, synthetic quartz glass lid, and preparation methods thereof
A synthetic quartz glass lid for use in optical device packages is prepared by furnishing a synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate (1) and a metal or metal compound film (2), and forming a metal base adhesive layer (3) on the metal or metal compound film (2). The metal or metal compound film contains Ag, Bi, and at least one element selected from P, Sb, Sn and In.
SHIN-ETSU CHEMICAL CO., LTD.
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Masaki Daijitsu Harunobu
Takeuchi Harada Matsui