Cushman, Darby & Cushman
Method for manufacturing an electromagnetic conversion device and a displacement detector which uses an electromagnetic conversion device
 A method of manufacturing a magneto-electric conversion device having a large rate of change of magnetic resistance and which is easy to position with respect to a magnetized surface, and a moving subject displacement detector using a magneto-electric conversion device manufactured by that method. A magnet which rotates together with the rotation of a drive gear is magnetized in alternately differing north and south poles, arranged in an equal sized section from a center portion thereof. An IC chip is positioned opposite to and at a distance from the magnetized surface of the magnet. Magneto-electric conversion devices are located on the IC chip. These magneto-electric conversion devices are formed by repeated alternate depositions, onto a surface of a single-crystal silicon substrate, of magnetic cobalt films having a thickness of several to several tens of angstroms and non-magnetic copper films having a thickness of several to several tens of angstroms. 
Nippondenso Co., Ltd.
B H G G C G
B82Y H01L G01P G01D C23C G01R
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Kenichi Yoshimi Yasutoshi Hirofumi Motofumi
Ao Yoshino Suzuki Uenoyama Suzuki