Fitzpatrick, Cella, Harper & Scinto
Precision polishing apparatus
 A precision polishing apparatus has a first hermetically sealed chamber provided with polishing means, a third hermetically sealed chamber capable of communicating with the first hermetically sealed chamber through a second hermetically sealed chamber, first and second opening-closing means for alternately placing the first and the third hermetically sealed chamber in communication with with the second hermetically sealed chamber, and atmosphere pressure control means for controlling the atmosphere pressure of the first and the second hermetically sealed chamber so that the atmosphere pressure of the first hermetically sealed chamber may become lower than the atmosphere pressure of the second hermetically sealed chamber when at least the first opening-closing means is opened. 
Canon Kabushiki Kaisha
B B
B24B B24B
inventional inventional
Mikichi Kazuo Matsuomi
Ban Takahashi Nishimura