Kenyon & Kenyon LLP
Interferometer
An interferometer includes a light source and a beam splitter, via which the beam of rays emitted by the light source is split into a measurement beam and a reference beam. The measurement beam propagates in a measuring arm extending in a first direction between the beam splitter and a measuring reflector. The measuring reflector brings about an offset perpendicular to the direction of incidence between the measurement beam falling on it and the measurement beam reflected back by it. In a reference arm extending in a second direction, the reference beam propagates between the beam splitter and a reference reflector. In addition, the interferometer has a detector system, to which the superposed and recombined measurement beam and reference beam are able to be supplied, and via which a distance-dependent interference signal with respect to the position of the measuring reflector is able to be generated. The measuring reflector in each case includes at least one transmission grating as well as a reflector element.
DR. JOHANNES HEIDENHAIN GMBH
G G
G01B G01B
inventional inventional
Erwin Wolfgang Joerg Bernhard Markus Thomas Ralph
Spanner Holzapfel Drescher Musch Meissner Kaelberer Joerger