Oliff & Berridge, PLC
Method for forming optical thin film and optical element provided with optical thin film
A method for forming an optical thin film on a substrate comprises the steps of preparing a sol solution containing minute particles for an optical element dispersed in a dispersion medium, putting the prepared sol solution in a tightly closable vessel to heat and pressurize the sol solution, and then applying the heated and pressurized sol solution onto an optical substrate. The obtained thin film has a refractive index of 1.16 with respect to a light beam having a wavelength of 193 nm, in which the transmission loss is not more than 0.5%. An optical lens including the optical thin film formed on the surface, and an exposure apparatus including the lens provided for a projection optical system or an illumination system are provided.
Nikon Corporation
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Tsuyoshi Hitoshi
Murata Ishizawa