Fitzpatrick, Cella, Harper & Scinto
Plasma treatment method
In a plasma treatment method of and apparatus for treating the surface of a treatment target substrate by utilizing glow discharge produced by supplying high-frequency power into an inside-evacuated reactor through a high-frequency power supply means, a plurality of impedance regulation means for regulating impedances on the side of the reactor and on the side of the high-frequency power supply means are provided correspondingly to the impedances of a plurality of reactors, and the high-frequency power is supplied into the reactors via the impedance regulation means corresponding to the reactors. Plasma treatment can be made in a good efficiency and a low cost on a plurality of reactors having different impedances.
Canon Kabushiki Kaisha
H H C C H
H01J H05H C23C C23C H01J
inventional inventional inventional inventional inventional
Toshiyasu Yukihiro Hitoshi Takashi Kazuyoshi Kazuto Daisuke Tatsuyuki
Shirasuna Abe Murayama Otsuka Akiyama Hosoi Tazawa Aoike