McDermott Will & Emery LLP
Defect inspection apparatus and method utilizing multiple inspection conditions
To provide a defect inspection apparatus and method adapted to easily assign threshold levels to scattered-light detectors and to appropriately acquire data detected by each scattered-light detector. The apparatus includes a stage device on which to rest a sample; a laser light irradiation device that irradiates the sample on the stage device with inspection light; scattered-light detectors, each of which detects a beam of light, scattered from the sample, and outputs an image signal; a threshold level setter formed so that an associated threshold level for judging whether defects are present is set only for an image signal selected from individual image signals of the scattered-light detectors or from image signals obtained by arithmetic processing based on the image signals, and a threshold level setting circuit that acquires the individual image signals, only if the image signal exceeds the threshold level set in the threshold level setter.
Hitachi High-Technologies Corporation
G G
G01N G01N
inventional inventional
Koji Hiroshi Atsushi Nobuhiro Yuji
Kawaki Kikuchi Takane Obara Inoue