Nixon Peabody LLP
Transient measurements of mass flow controllers
An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.
PIVOTAL SYSTEMS CORPORATION
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Joseph R. Adam J. Tao Jialing
Monkowski Monkowski Ding Chen