Slater Matsil, LLP
Semiconductor device and method of manufacturing
A semiconductor device includes a substrate, a trench in the substrate, the trench having an inclined sidewall, a reflective layer over the inclined sidewall, a grating structure over the substrate, and a waveguide in the trench. The waveguide is configured to guide optical signals between the grating structure and the reflective layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
G H G G H G G G H G G G G G G G
G02B H01L G02B G02B H01L G02B G02B G02B H01L G02B G02B G02B G02B G02B G02B G02B
additional additional inventional inventional additional inventional inventional additional additional additional additional inventional inventional additional inventional additional
Ying-Hao Tien-Yu
Kuo Huang