Weihrouch IP
Dry air generation apparatus, dry air generation method, and substrate processing system
A dry air generation apparatus includes a first heat exchanger, a second heat exchanger, a switching valve, and a controller. The first heat exchanger and the second heat exchanger are provided in the air flow path, and the moisture contained in the air is removed by cooling the air which flows through the flow path to 0° C. or lower. The switching valve switches the direction of the air flowing through the first heat exchanger and the second heat exchanger. The controller controls the first heat exchanger, the second heat exchanger, and the switching valve. The first heat exchanger and the second heat exchanger are connected in series in the air flow path.
TOKYO ELECTRON LIMITED
F F B H H F H
F28D F24F B01D H01L H01L F28D H01L
inventional inventional inventional additional additional additional additional
Jun Young
Chung