WPAT, P.C. INTELLECTUAL PROPERTY ATTORNEYS
Gas shower head with plural hole patterns and with corresponding different plural hole densities and film formation method
A gas shower head includes a plate, a plurality of central holes disposed in a central region of the plate, and a plurality of peripheral holes disposed in a peripheral region of the plate. The central holes are configured to form a first portion of a material film, and the peripheral holes are configured to form a second portion of the material film. A hole density in the peripheral region is greater than a hole density in the central region. The first portion of the material film includes a first thickness corresponding to the hole density in central region, and the second portion of the material film includes a second thickness corresponding to the hole density in peripheral region and greater than the first thickness.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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Cheng-Hsien Chih-Hui Sheng-Chan Cheng-Yuan
Chou Huang Li Tsai