Cantor Colburn LLP
Airgap formation in BEOL interconnect structure using sidewall image transfer
A method and structure of forming air gaps with a sidewall image transfer process such as self-aligned double patterning to reduce capacitances. Different materials can be provided in the mandrel and non-mandrel regions to enlarge a process window for metal line end formation.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Yi Juntao Peng Kangguo Ekmini A.
Song Li Xu Cheng De Silva