Burns, Doane, Swecker & Mathis, LLP
Diamond coatings on reactor wall and method of manufacturing thereof
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.
Lam Research Corporation
B C B C Y B Y H C Y B
B01J C23C B01J C23C Y10T B01J Y10T H01J C23C Y10T B01J
additional inventional additional inventional additional inventional additional inventional inventional additional inventional
John E. Robert J. Christopher C.
Daugherty O'Donnell Chang