Lewis Roca Rothgerber Christie LLP
Laser processing apparatus
A laser processing apparatus using a laser. The laser processing apparatus includes a light source for generating a hollow laser beam in a first direction; a reflection member for changing a path of the hollow laser beam toward the first direction into a second direction toward the substrate; a lens for collecting the hollow laser beam reflected by the reflection member; and an air supply unit for supplying air toward particles generated while the substrate is processed by the hollow laser beam, wherein the lens has a first hole passing through the lens, the reflection member has a second hole passing through the reflection member, and the first and second holes form a discharge path of the particles.
Samsung Display Co., Ltd.
B B B
B23K B23K B23K
inventional inventional inventional
Il-Young Gyoo-Wan Jun-Hyung
Jeong Han Kim