Maschoff Brennan
Dual-function wafer handling apparatus
A dual-function wafer handling apparatus for handling a wafer includes an aligner for rotating the wafer, an ID reader disposed corresponding to an edge of the wafer for reading an ID of the wafer, and an optical defect inspection unit for capturing images to analysis.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
G
G01N
inventional
Chiung-Min Yi-Ming Yen-Ju Ming-Han Sheng-Hsiang Guan-Cyun
Lin Chen Wei Tsai Chuang Li