Antonelli, Terry, Stout & Kraus
Self-propelled vehicle
 A self-propelled vehicle capable of all directional movement over a floor surface and adapted to be guided along a path such as a semiconductor processing line. The vehicle is provided with at least three wheels having a construction enabling rotational movement in a rotational plane of the wheel and in a direction orthogonal thereto. When at least four wheels are provided, the vehicle is provided with a suspension mechanism for mounting the wheels and a mechanism for maintaining a parallel relationship of the suspension mechanism and a chassis of the vehicle so that slanting of the vehicle body during travel is avoided. Also, the vehicle is provided with a vibration preventing base interposed between the vehicle and a substance mounting base for controlling the proper vibration frequency of the vibration presenting base to be lower than 1/.sqroot.2 of the proper vibration frequency of the vehicle. 
Hitachi, Ltd.
H G G G B B B B B
H01L G05D G05D G05D B62D B60B B60Y B60B B60B
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Masayasu Hiroshi Isao Minoru Takamichi Noriyuki Kazumi Toyohide Naoki
Akaiwa Kikuchi Takahashi Ikeda Suzuki Oroku Adachi Hamada Takehara