Oblon, McClelland, Maier & Neustadt, L.L.P.
Capacitor structure and method of forming the same
A capacitor is provided. The capacitor includes a substrate that has opposing first and second main surfaces. The capacitor also includes at least two conductive plates that are formed in the substrate and extend from the first main surface to the second main surface of the substrate. The capacitor further includes at least one insulating structure that is formed between two adjacent conductive plates of the at least two conductive plates and extends from the first main surface to the second main surface.
YANGTZE MEMORY TECHNOLOGIES CO., LTD.
H G H G G H
H01L G11C H01L G11C G11C H01L
inventional inventional inventional inventional additional inventional
Cheng Xin Liang Wei
Gan Wu Chen Liu