Tung & Associates
Low stress integrated circuit fusible link
A fuse structure and method for fabricating same are disclosed. The fuse structure is designed for opening by conventional laser energy application. The fuse structure is characterized by an absence of high stress areas in the surrounding substrate thereby resulting in higher fabrication yields due to lower occurrence of substrate fracturing or other damage occasioned by the opening of the fuse.
Taiwan Semiconductor Manufacturing Co. Ltd.
H H
H01L H01L
inventional additional
Jiun-Pyng Chieh-Chih Yu-Ching
You Chou Chang