Collard & Roe, P.C.
Manufacturing method of via-hole connection structure, array substrate and manufacturing method thereof, display device and manufacturing method thereof
A manufacturing method of a via-hole connection structure, a manufacturing method of an array substrate and an array substrate are provided by the embodiments of the present disclosure, and the manufacturing method of the via-hole connection structure includes: forming an insulation layer on a base substrate and forming a first via hole in the insulation layer; forming a connection portion in the first via hole; forming a protection layer covering the connection portion on a surface of the insulation layer; forming a second via hole in the insulation layer and in the protection layer; removing at least a portion of the protection layer to expose the connection portion.
BOE TECHNOLOGY GROUP CO., LTD.
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Hui Guohong Xiaochuan Yanming Shengji Kuanta Yage Weihai Pengcheng Jiantong
Wang Qin Chen Wang Yang Huang Song Wang Lu Li