Brooks Kushman P.C.
Stripping apparatus and method using the same to clean glass substrates
The present disclosure provides a stripping apparatus including a cleaning device, a transition unit and a stripping device. The cleaning device includes a first cleaning unit, a second cleaning unit and a third cleaning unit. The stripping device is connected with the transition unit; the transition unit is further connected with the first cleaning unit; the first cleaning unit is further connected with the second cleaning unit; the second cleaning unit is further connected with the third cleaning unit. Temperatures of the first cleaning unit, the second cleaning unit and the third cleaning unit are gradually decreased. The temperature of the third cleaning unit is equal to the temperature of water injected into the third cleaning unit.
BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
H B B H B H
H01L B08B B08B H01L B08B H01L
inventional inventional inventional inventional inventional inventional
Meng Qihui Youngjin Zhongfei Kai Wei Xiaoyu Shuangqiang Zhixue Yunliang
Yang Wang Song Bai Yu Li Shen Zhang Dong Zheng