Tung & Associates
Method for insulating metal conductors by spin-on-glass and devices made
 A method for insulating metal conductors by spin-on-glass in inter-metal dielectric layers and devices formed by such method are disclosed. In the method, an additional step of scrubber clean is incorporated after an etch-back process on the spin-on-glass layer is conducted. Contaminating metal ions such as those of calcium is thus removed to eliminate formation of voids by such particles. The method can be easily implemented by including the additional scrubber clean step into a total wafer fabrication recipe. 
Taiwan Semiconductor Manufacturing Company, Ltd
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Mei Yen Jing Kuan Ding Dar Li Dum
Li Lin Hu Chen