Baker & Hostetler LLP
Vacuum pump with abatement function
A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.
EBARA CORPORATION
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Seiji Toshiharu Tetsuro Toyoji Yasuhiko Takashi Hideo Kohtaro Keiichi
Kashiwagi Nakazawa Sugiura Shinohara Suzuki Kyotani Arai Kawamura Ishikawa