WPAT, P.C., Intellectual Property Attorneys
Electro-optic phase modulator and method of manufacturing the same
An electro-optic (EO) phase modulator is disclosed. The EO phase modulator includes: an insulating layer; a central optical waveguide over the insulating layer; a first region having a first type doping adjacent to a first sidewall of the central optical waveguide; a second region having a second type doping opposite to the first type doping adjacent to a second sidewall of the central optical waveguide opposite to the first sidewall; and a first dielectric layer passing through the central optical waveguide from a top surface of the central optical waveguide to a bottom surface of the central optical waveguide. A method of manufacturing the same is disclosed as well.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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G02F G02F
inventional inventional
Chewn-Pu Huan-Neng Feng Wei Lan-Chou
Jou Chen Kuo Cho