Patterson + Sheridan, LLP
Bipolar collimator utilized in a physical vapor deposition chamber
The present invention provides an apparatus including a bipolar collimator disposed in a physical vapor deposition chamber and methods of using the same. In one embodiment, an apparatus includes a chamber body and a chamber lid disposed on the chamber body defining a processing region therein, a collimator disposed in the processing region, and a power source coupled to the collimator.
Applied Materials, Inc.
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Wei W. Joung Joo Prashanth Guojun
Wang Lee Kothnur Liu