Greenblum & Bernstein, P.L.C.
Substrate having a coating comprising copper and method for the production thereof by means of atomic layer deposition
A method can be used for the production of a coated substrate. The coating contains copper. A copper precursor and a substrate are provided. The copper precursor is a copper(I) complex which contains no fluorine. A copper-containing layer is deposited by means of atomic layer deposition (ALD) at least on partial regions of the substrate surface by using the precursor. Optionally, a reduction step is performed in which a reducing agent acts on the substrate obtained in the layer deposition step. In various embodiments, the precursor is a complex of the formula L2Cu(X∩X) in which L are identical or different σ-donor-π acceptor ligands and/or identical or different σ,π-donor-π acceptor ligands and X∩X is a bidentate ligand which is selected from the group consisting of β-diketonates, β-ketoiminates, β-diiminates, amidinates, carboxylates and thiocarboxylates.
Technische Universitaet Chemnitz Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
C H H H H C C H
C23C H01L H01L H01L H01L C23C C23C H01L
inventional additional inventional inventional additional inventional inventional additional
Thomas Thomas Stefan Alexander Heinrich
Gessner Waechtler Schulz Jakob Lang