Fitzpatrick, Cella, Harper & Scinto
Electromechanical transducer and manufacturing method therefor
In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate.
Canon Kabushiki Kaisha
Y B
Y10T B06B
additional inventional
Chienliu
Chang