Westerman, Hattori, Daniels & Adrian, LLP
Methods for working and sensing synthetic quartz glass substrate
A synthetic quartz glass substrate having front and back surfaces is worked by lapping, etching, mirror polishing, and cleaning steps for thereby polishing the front surface of the substrate to a mirror-like surface. The etching step is carried out using a hydrofluoric acid solution at pH 4-7.
SHIN-ETSU CHEMICAL CO., LTD.
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Shuhei Masaki
Ueda Takeuchi