Goodwin Procter LLP
Integrated waveguide photodetector apparatus with matching propagation constants and related coupling methods
High-speed optoelectronic devices having a waveguide densely integrated with and efficiently coupled to a photodetector are fabricated utilizing methods generally compatible with CMOS processing techniques. In various implementations, the waveguide consists essentially of single-crystal silicon and the photodetector contains, or consists essentially of, epitaxially grown germanium or a silicon-germanium alloy having a germanium concentration exceeding about 90%.
Massachusetts Institute of Technology
H H H Y H G G H G
H01L H01L H01L Y02E H01L G02B G02B H01L G02B
inventional inventional inventional additional inventional additional inventional inventional inventional
Jifeng Jurgen Lionel C. Donghwan
Liu Michel Kimerling Ahn