Birch, Stewart, Kolasch & Birch, LLP
Method for producing substrate
There is furnished a working tool comprising a rotating shaft (6), a polishing plate (3) mounted on the shaft, an expandable elastomer sheet (4) attached to the polishing plate (3), an abrasive cloth (5) attached to the elastomer sheet (4), and means for pressing the elastomer sheet (4) at a plurality of positions under respective predetermined different pressures such that a lower surface of the abrasive cloth (5) is deformed to the desired inverted convex shape in accordance with differences of pressing force applied to the elastomer sheet (4) at the plurality of positions. A substrate is produced by bringing the inverted convexly deformed surface of the abrasive cloth (5) in contact with a substrate stock, and rotating and moving the working tool for polishing the substrate over a selected area.
SHIN-ETSU CHEMICAL CO., LTD.
B B B B B
B24B B24B B24B B24B B24B
inventional inventional inventional inventional inventional
Yoko Masaki Atsushi
Ishitsuka Takeuchi Watabe