Posz & Bethards, PLC
Thermo pile infrared ray sensor manufactured with screen print and method thereof
In a thermo pile infrared ray sensor, an opening portion is formed by etching a substrate from a second surface after an n-type poly-Si layer and a thin aluminium layer are formed so that first and second connection portions are formed by parts thereof. An infrared ray absorbent layer is formed on the substrate to cover the first connection portion with a screen print after the opening portion is formed.
Nippon Soken, Inc Denso Corporation
G H
G01J H01L
inventional inventional
Takahiko Inao Yasutoshi Kazuaki
Yoshida Toyoda Suzuki Hamamoto