Banner & Witcoff, Ltd.
Crucible device
A crucible device comprises a crucible body configured to store evaporation material, with an opening disposed therein; a crucible cover which matches the opening of the crucible body and which forms a hermetic space in cooperation with the crucible body when being in a closed state and opens the opening of the crucible body when being in an open state; a driving mechanism comprising a housing with a cavity therein and a piston disposed within the cavity, the cavity being divided by the piston into a closed chamber and an open chamber by the piston, the open chamber being in communication with outside of the cavity through a cavity opening of the cavity, the closed chamber storing gas therein, the piston being connected with the crucible cover by a transmission mechanism, the piston being moved within the cavity in accordance with change of pressure in the open chamber, thereby driving the crucible cover to switch between the open state and the closed state.
BOE Technology Group Co., Ltd.
C H C F F
C23C H01L C23C F16K F16K
inventional additional inventional inventional inventional
Zhongyuan Xiaohu
Sun Li