Prebake equipment and air discharge method thereof
A prebake equipment for drying a substrate (105) and an air discharge method, the prebake equipment comprising: a bottom plate (105), a periphery frame (101) and an upper cover plate, the bottom plate (105) and the upper cover plate being spaced from each other, the periphery frame (101) being provided between the bottom plate (105) and the upper cover plate such that the bottom plate (105), the periphery frame (101) and the upper cover plate define a cavity, wherein discharge holes are provided at the periphery frame (101) and a filler (104) for filtering moisture and dust in the air stream is provided between the bottom plate (105) and the periphery frame (101).
BOE TECHNOLOGY GROUP Co., Ltd. HEFEI BOE OPTOELECTRONICS TECHNOLOGY, Co., Ltd.
F G F
F26B G03F F26B
inventional inventional inventional
Xinxiao Seong Cho Xudong Kun Wenxu Dongdong Chao Lifeng
Hua Lee Cao Li Wang Yin Li Wu