Patterson + Sheridan, LLP
Ceramic heater and esc with enhanced wafer edge performance
Embodiments of the present disclosure provide an improved electrostatic chuck for supporting a substrate. The electrostatic chuck comprises a chuck body coupled to a support stem, the chuck body having a substrate supporting surface, a plurality of tabs projecting from the substrate supporting surface of the chuck body, wherein the tabs are disposed around the circumference of the chuck body, an electrode embedded within the chuck body, the electrode extending radially from a center of the chuck body to a region beyond the plurality of tabs, and an RF power source coupled to the electrode through a first electrical connection.
Applied Materials, Inc.
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inventional inventional inventional inventional
Jian Juan Carlos Jianhua Xing Zheng John
Chen Rocha-Alvarez Zhou Lin Ye