Gate structure and method for trimming spacers
A gate structure includes a gate disposed on a substrate, a first spacer disposed on the substrate and surrounding the gate and a second spacer disposed on the first spacer and surrounding the gate, the second spacer is lower than the first spacer.
UNITED MICROELECTRONICS CORP.
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inventional inventional inventional
Po-Chao Chieh-Te Ling-Chun Ming-Tsung Hui-Ling Shin-Chi I-Chang Cheng-Yen Tsung-Hung
Tsao Chen Chou Chen Chen Chen Wang Wu Chang