Cushman Darby & Cushman, L.L.P.
Method for fabricating an optical waveguide
 A process for forming film structure using Flame Hydrolysis Deposition (FHD) in which (1) glass soot is deposited on a substrate via FHD to form a first porous vitreous layer having a first bulk density, (2) a second porous vitreous layer having a second bulk density that is larger than the first bulk density is formed from a portion of the first porous vitreous layer, and (3) a third porous vitreous layer having a third bulk density is formed by depositing glass soot containing a refractive index increasing dopant on the second porous vitreous layer by FHD. The first, second and third porous vitreous layers are then heated to form an undercladding layer and a core layer, the undercladding layer being formed from the first and second porous vitreous layers and the core layer being formed from the third porous vitreous layer. 
Sumitomo Electric Industries, Ltd.
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Masahide Chisai Haruhiko Hiroo Akira Shinji
Saito Hirose Aikawa Kanamori Urano Ishikawa