Lewis Roca Rothgerber Christie LLP
Laser induced thermal imaging device and laser induced thermal imaging method
A laser induced thermal imaging device includes a substrate stage configured to support a substrate and a donor film; a beam radiation portion configured to emit a laser beam toward the donor film to image an imaging layer of the donor film on a pixel region on the substrate; an error measurement portion configured to determine a position of the laser beam and a position of the pixel region from the donor film to measure a pattern error; and a stage moving portion configured to move the substrate stage in accordance with the pattern error to correct the pattern error.
Samsung Display Co., Ltd.
H H
H01L H01L
inventional inventional
Jin-Hong Yuna
Jeun Lee