Fish & Richardson P.C.
Sputtered piezoelectric material
Piezoelectric actuators having a composition of Pb1.00+x(Zr0.52Ti0.48)1.00−yO3Nby, where x>−0.02 and y>0 are described. The piezoelectric material can have a Perovskite, which can enable good bending action when a bias is applied across the actuator.
FUJIFILM Corporation
H H B B B H B H Y
H01L H01L B41J B41J B41J H01L B41J H01L Y10T
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Youming Jeffrey
Li Birkmeyer