Eschweiler & Potashnik, LLC
Pad structure for front side illuminated image sensor
The present disclosure relates to an integrated circuit. The integrated circuit includes a plurality of interconnects within a dielectric structure over a substrate. A passivation structure is arranged over the dielectric structure. The passivation structure has sidewalls connected to one or more upper surfaces of the passivation structure. A bond pad is arranged directly between the sidewalls of the passivation structure. An upper passivation layer is disposed over the passivation structure and the bond pad. The upper passivation layer extends from over an upper surface of the bond pad to within a recess in the upper surface of the bond pad.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Shyh-Fann Kai-Chun Ching-Chun Jeng-Shyan Dun-Nian
Ting Hsu Wang Lin Yaung