Boyle Fredrickson S.C.
Torsion wing probe assembly
A torsional probe for a metrology instrument includes a cantilever coupled to a support structure via a torsion bar. The cantilever, support structure, and arms of torsion bar have substantially the same thickness.
Bruker Nano, Inc.
G G G G
G01Q G01Q G01Q G01Q
inventional inventional inventional inventional
Weijie Shuiqing Chanmin Martin
Wang Hu Su Wagner