Haynes and Boone, LLP
Structures for acoustic wave overlay error determination using periodic structures
A structure includes a first periodic structure positioned on a chip, the first periodic structure comprising a material of a first layer disposed on the chip. The structure further includes a second periodic structure positioned within the region of the chip adjacent the first periodic structure, the second periodic structure comprising a second material of a second layer disposed on the chip. The structure further includes an acoustic wave transmitter device disposed on the chip and an acoustic wave receiver device disposed on the chip.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
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Yu-Piao Yu-Ching
Fang Lee