Rabin & Berdo, P.C.
Nano/micro-patterned optical device and fabrication method thereof
A nano/micro-patterned optical device includes a soft film substrate and nano/micro thin wires. A surface of the soft film substrate includes a nano/micro-pattern formed through a lithography process, and the nano/micro-pattern includes a plurality of depressed grooves. The nano/micro thin wires are placed in the depressed grooves, and used to form a plurality of optical waveguides, in which the optical waveguides include at least one optical coupling region, and the optical coupling region is located on a joining position of the optical waveguides. A fabrication method of the nano/micro-patterned optical device is also provided.
National Taiwan University
G G
G02B G02B
inventional inventional
Jian-Hong Lon Shih-Min
Chen Wang Chuo