McDermott Will & Emery LLP
Semiconductor device and method for fabricating the same
A semiconductor device includes an n+ type silicon carbide substrate; a plurality of n type pillar regions, a plurality of p type pillar regions, and an n− type epitaxial layer disposed on a first surface of the n+ type silicon carbide substrate; a p type epitaxial layer and an n+ region sequentially disposed on the n− type epitaxial layer; a trench penetrating the n+ region and the p type epitaxial layer and disposed on the n− type epitaxial layer; a gate insulating film disposed within the trench; a gate electrode disposed on the gate insulating film; an oxide film disposed on the gate electrode; a source electrode disposed on the p type epitaxial layer, the n+ region, and the oxide film; and a drain electrode positioned on a second surface of the n+ type silicon carbide substrate.
Hyundai Motor Company
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inventional inventional additional additional inventional inventional
Jong Seok Kyoung-Kook Dae Hwan Youngkyun
Lee Hong Chun Jung