Pearne & Gordon LLP
Light emitting device and method for manufacturing light emitting device
Disclosed is a light emitting device manufacturing apparatus including a plurality of processing chambers for performing a substrate processing for forming, on a target substrate, a light emitting device having multiple layers including an organic layer, wherein each of the plurality of processing chambers is configured to perform a substrate process on the target substrate while maintaining the target substrate such that its device forming surface, on which the light emitting device is to be formed, is oriented toward a direction opposite to a direction of gravity.
National University Corporation Tohoku University Tokyo Electron Limited
H C H C
H01L C23C H01L C23C
additional inventional inventional inventional
Chuichi Toshihisa Shingo Tadahiro Kimihiko Yasushi
Kawamura Nozawa Watanabe Ohmi Yoshino Yagi