Banner & Witcoff, Ltd.
Thin film transistor including diffusion blocking layer and fabrication method thereof, array substrate and display device
A thin film transistor and a fabrication method thereof, an array substrate and a display device are provided. The thin film transistor includes: an active layer, a source-drain metal layer and a diffusion blocking layer located between the active layer and the source-drain metal layer, wherein, the source-drain metal layer includes a source electrode and a drain electrode; the diffusion blocking layer includes a source blocking part corresponding to a position of the source electrode and a drain blocking part corresponding to a position of the drain electrode; and the diffusion blocking layer is doped with different concentrations of nitrogen from a side close to the source-drain metal layer to a side close to the active layer.
BOE Technology Group Co., Ltd.
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Lung Pao Wei Chunsheng
Hsin Liu Jiang