Morgan, Lewis & Bockius LLP
Thermal control for formation and processing of aluminum nitride
In various embodiments, controlled heating and/or cooling conditions are utilized during the fabrication of aluminum nitride single crystals and aluminum nitride bulk polycrystalline ceramics. Thermal treatments may also be utilized to control properties of aluminum nitride crystals after fabrication.
CRYSTAL IS, INC.
C H H H C H C C H
C30B H01S H01S H01S C01B H01L C30B C30B H01L
inventional additional additional additional inventional inventional inventional inventional additional
Shailaja P. Takashi Keisuke Jianfeng Shichao Robert T. Leo J.
Rao Suzuki Yamaoka Chen Wang Bondokov Schowalter