Westerman, Hattori, Daniels & Adrian, LLP
Electronic grade glass substrate and making method
An electronic grade glass substrate is provided with a recess, channel or step in one surface, and a first chamfer between the side surface of the recess, channel or step and the one surface. The side and bottom surfaces of the recess, channel or step are mirror finished, and the first chamfer is mirror finished.
SHIN-ETSU CHEMICAL CO., LTD.
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B24B B24B B24B Y10T B24B B24B B24B G03F B24B Y10T B24B
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Hiroyuki Masaki Daiyu
Yamazaki Takeuchi Okafuji