Anova Law Group, PLLC
Semiconductor structure, static random access memory and fabrication method thereof
A semiconductor structure, a method for fabricating the semiconductor structure, and a static random access memory are provided. The method includes providing a base substrate including a substrate and a plurality of discrete fins on the substrate. The substrate includes a pass gate transistor region. The method also includes forming a gate structure across a length portion of each fin, covering top and sidewall surfaces of each fin, and on each fin. Further, the method includes forming pass gate doped regions in the fin on both sides of the gate structure in the pass gate transistor region. At least one of the pass gate doped regions is formed by performing an ion-doped non-epitaxial layer process on the fin.
Semiconductor Manufacturing International (Shanghai) Corporation Semiconductor Manufacturing International (Beijing) Corporation
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Yong
Li