Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
 The present invention discloses a two basic structures (including multiple variations within one of the basic structures) and methods for fabrication of the structures which facilitate the flow of cooling gas or other heat transfer fluid to the surface of an electrostatic chuck. The basic structures address both the problem of breakdown of a heat transfer gas in an RF plasma environment and the problem of arcing between a semiconductor substrate and the conductive pedestal portion of the electrostatic chuck in such an RF plasma environment. 
Applied Materials, Inc.
Y H H H H Y C Y
Y10T H01J H01J H01L H01L Y10T C23C Y10T
additional inventional additional inventional inventional additional inventional additional
Arik Edwin C. Timothy Dan Robert J. Brian
Donde Weldon Dyer Maydan Steger Lue