Slater & Matsil, L.L.P.
Reticle transfer system and method
A fabrication system comprises a global system comprising a plurality of stockers and a global transportation system connected to the stockers, a local system coupled to the global system through the global transportation system, wherein the local system comprises a first buffer located at a boundary between the global system and the local system, a plurality of lithography apparatuses coupled to the first buffer through a local transportation system and an empty pod buffer.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ching-Jung
Chang