Lerner, David, Littenberg, Krumholz & Mentlik, LLP
Method of manufacturing patterned substrate
Provided is a method of manufacturing a patterned substrate. The method may be applied to a process of manufacturing a device such as an electronic device or integrated circuit, or another use, for example, to manufacture an integrated optical system, a guidance and detection pattern of a magnetic domain memory, a flat panel display, a LCD, a thin film magnetic head or an organic light emitting diode, and used to construct a pattern on a surface to be used to manufacture a discrete tract medium such as an integrated circuit, a bit-patterned medium and/or a magnetic storage device such as a hard drive.
LG Chem, Ltd.
G B C H G C C C G C C H G C G C H C C C C C C C C C B C G B C C B C H C G C C C G B G C C C
G03F B05D C08F H01L G03F C08F C08F C08G G03F C08L C08G H01L G03F C08F G03F C08F H01L C08F C08L C08J C01P C08F C08J C08L C08G C08G B82Y C07B G03F B05D C08F C08G B81C C08J H01L C08F G03F C08F C08F C09D G03F B81C G03F C08G C08G C08G
inventional inventional inventional inventional inventional inventional inventional additional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional additional inventional inventional additional additional additional inventional inventional inventional additional additional inventional inventional additional inventional additional inventional inventional inventional inventional inventional additional additional additional
Eun Young Je Gwon Hyung Ju No Jin Se Jin Jung Keun Mi Sook Sung Soo
Choi Lee Ryu Park Ku Kim Lee Yoon