Brinks Hofer Gilson & Lione
Exchange coupled film having improved current-carrying reliability and improved rate of change in resistance and magnetic sensing element using same
A seed layer having a chromium content in the range of 35 to 60 atomic percent and a thickness of 10 to 200 Å is deposited to have a single phase of the face-centered cubic structure by optimizing the sputtering conditions, etc. The surface of the seed layer maintaining the face-centered cubic structure exhibits improved wettability, and the rate of change in resistance ΔR/R can thereby be improved.
Alps Electric Co., Ltd.
B G H H B H B Y Y H G G
B82Y G01R H01F H01F B82Y H01F B82Y Y10T Y10T H01F G11B G11B
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Naoya Masamichi
Hasegawa Saito