Contact magnetic transfer template
A contact magnetic transfer (CMT) master template has a flexible plastic film with a planarized top or upper surface containing magnetic islands separated from one another by nonmagnetic regions. The flexible plastic film is secured at its perimeter to a silicon annulus that provides rigid support at the perimeter of the film. The plastic film is preferably polyimide that has recesses filled with the magnetic material that form the pattern of magnetic islands. The upper surfaces of the islands and the upper surfaces of the nonmagnetic regions form a continuous planar surface. The nonmagnetic regions are formed of chemical-mechanical-polishing (CMP) stop layer material that remains after a CMP process has planarized the upper surface of the plastic film.
Hitachi Global Storage Technologies Netherlands B.V.
Y G G
Y10T G11B G11B
additional inventional inventional
Zvonimir Z. Michael J. Jordan Asher Quang Kim Y. Jui-Lung A. David
Bandic Rooks Katine Le Lee Li Erpelding