Soroker Agmon Nordman
Carrying device and fixing method of carrying device
A carrying device and, a fixing method of a carrying device are provided. The carrying device includes a body and an electromagnet fixing module disposed on the body; wherein the electromagnet fixing module is configured to fix the carrying device. The present application uses the electromagnet fixing module to fix the carrying device, which can avoid downtime of an exposure machine caused by shaking of the carrying device when a robot arm of the exposure machine picks or places the mask form the carrying device so as to improve throughput.
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
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inventional additional inventional inventional
Wei
Wang