Duane Morris LLP
Sensor
A sensor is provided with a sensor element which outputs a signal in accordance with a detected object contained in a specimen positioned on a detection part in an element surface and with a package which accommodates the sensor element inside it and has a passage including a space positioned on the element surface. A lower surface of the passage has the element surface and a lower surface of an inflow passage extending toward the space, and a gap is positioned between the lower surface of the inflow passage and the element surface. The element surface is positioned above the lower surface of the inflow passage.
KYOCERA CORPORATION OSAKA UNIVERSITY
G G G
G01N G01N G01N
inventional additional inventional
Masato Hiroyasu Hideharu Eiichi
Saito Tanaka Kurioka Tamiya