Slater Matsil, LLP
Composite contact plug structure and method of making same
An embodiment contact plug includes a bilayer structure and a diffusion barrier layer on a sidewall and a bottom surface of the bilayer structure. The bilayer structure includes a conductive core and a conductive liner on a sidewall and a bottom surface of the conductive core. In the embodiment contact plug, the conductive liner comprises cobalt or ruthenium.
Taiwan Semiconductor Manufacturing Company, Ltd.
H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional inventional inventional additional inventional inventional inventional additional inventional inventional inventional inventional inventional inventional
Chia-Lin You-Hua Chih-wei Yu-Hung Sheng-Hsuan
Hsu Chou Chang Lin Lin