Apex Juris, pllc
XY platform device with nanoscale precision
The present invention discloses an XY platform device with nanoscale precision including an optical pickup head for focusing and seeking the tracks of an optical data storage medium; a servo device for driving the optical pickup head to move in focusing and radial directions; a carrier platform for receiving a testing object thereon and providing a connecting member to be connected with the optical pickup head. With the focusing and radial movements of the optical pickup head, the carrier platform is driven to move accordingly, and thus achieving the high-precision and low-cost effects.
National Taipei University of Technology
G B
G01Q B82Y
inventional inventional
Tian-Sen Yu-Zen Hsi-Hsun Wen-Yi Ping-Lang Gian-We
Lu Chen Tsai Hsiao Yen Lin