Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Container and loader for substrate
A loader is provided, which is disposed in a low cleanliness room along a border between the low cleanliness room and a high cleanliness room, for transporting a dust free article between an inside of a container receiving the dust free article and the high cleanliness room, comprising a movable stage for mounting the container; an opening portion through which the dust free article is transported between the container and the high cleanliness room; a door for opening and closing the opening portion; a unifying means for unifying a cover of the container and the door when the container approaches the door; and a driving apparatus for moving the cover and the door unified within the loader to open and close the opening portion and the container.
Rorze Corporation
H
H01L
inventional
Mineo Fumio Koji Toshiaki Toshiya Osamu
Kinpara Sakiya Ohyama Fujii Nakayama Horita