Morrison & Foerster LLP
Laminated wafer sensor system for UV dose measurement
A laminated wafer sensor structure includes a housing layer having pocket openings formed therein, a circuit layer having a sensor element and electronic components mounted for registration with the pocket openings in the housing layer, and a rigid back layer. The laminated structure is suitable for handling by conventional robotic wafer handling systems. The wafer sensor structure is adapted for electrical connection to a base station that is also adapted for connection to a host computer system to facilitate communication among the sensor structure, the base station and the host computer.
Coherent, Inc.
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Larry Wolfram Jim Michele Kevin Sam Guang
Potter Urbanek Schloss Winz Shea Mallicoat Li