Cook, Alex, McFarron, Manzo, Cummings & Mehler, Ltd.
Process for making optical waveguides
 A process for treating a waveguide structure which comprises a silicon substrate with an integrally formed rib waveguide is described. The waveguide has an end portion with a facet, the end portion overhanging the silicon substrate and having an oxide layer on its underside protruding from the facet of the waveguide. A nitride layer extends over the upper surface of the waveguide and the facet. The treatment process involves etching the oxide layer from the underside, growing a new oxide layer, etching the nitride layer and then depositing a new nitride layer. 
Bookham Technology PLC
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John Paul
Drake