Burr & Brown
Yttria-alumina composite oxide films, laminated bodies having the same, a method for producing the same, and corrosion resistant members and films
An object of the invention is to provide an yttria-alumina composite oxide film wherein peeling-off of the film from a substrate may be prevented. An intermediary layer is provided on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component. In the intermediary layer, a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9. An yttria-alumina composite oxide film is formed on the intermediary layer. A ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than the garnet phase is 2.5 or more in the yttria-alumina composite oxide film based on an X-ray diffraction measurement.
NGK Insulators, Ltd.
Y C Y C Y C C
Y10T C04B Y10T C04B Y10T C04B C04B
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Hirotake
Yamada