Schwabe, Williamson & Wyatt, P.C.
Water soluble organic-inorganic hybrid mask formulations and their applications
Water soluble organic-inorganic hybrid masks and mask formulations, and methods of dicing semiconductor wafers are described. In an example, a mask for a wafer singulation process includes a water-soluble matrix based on a solid component and water. A p-block metal compound, an s-block metal compound, or a transition metal compound is dissolved throughout the water-soluble matrix.
Applied Materials, Inc.
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Wenguang James S.
Li Papanu