Haynes and Boone, LLP
Method and structure for mandrel and spacer patterning
A semiconductor device includes a first active fin on a substrate; a second active fin on the substrate and separate from the first active fin; a first fin stub on the substrate, wherein the first fin stub connects a bottom portion of the first active fin and a bottom portion of the second active fin; and an isolation feature over the first fin stub and between the first and second active fins. The first fin stub is lower than both the first and the second active fins in height. The isolation feature is higher than the first fin stub and lower than both the first and the second active fins in height. From a top view, the first active fin is oriented lengthwise in a first direction, and the first fin stub is oriented lengthwise in a second direction that is different from the first direction.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Chi-Kang Chih-Hsiung Kuei-Shun Shih-Chi Chung-Ming
Chang Peng Chen Fu Wang