Hauptman Ham, LLP
System and method for liquid leak detection
A system for detecting leakage of a liquid supply pipe includes a pipe casing for enclosing an end portion of the liquid supply pipe adjoined to a nozzle and a sensor system configured to detect presence of a liquid leaked from the liquid supply pipe at the end portion. The sensor system is in alignment with the end portion of the liquid supply pipe.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Ko-Bin Yu Kai Li-Jen Chin-Kun
Kao Chen Wu Fang