Fitzpatrick, Cella, Harper & Scinto
Element array, electromechanical conversion device, and process for producing the same
An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.
Canon Kabushiki Kaisha
H B H H H H B
H01L B06B H01L H01L H01L H01L B81B
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Takahiro Chienliu Yasuhiro Kenji
Ezaki Chang Soeda Tamamori