F. Chau & Associates, LLC
Forming composite metal oxide layer with hafnium oxide and titanium oxide
A metal oxide alloy layer comprises a first layer including a first metal oxide and having a first thickness, and a second layer formed on the first layer, the second layer including a second metal oxide and having a second thickness, wherein a value of the first thickness is such that the first metal oxide is allowed to move into the second layer and a value of the second thickness is such that the second metal oxide is allowed to move into the first layer to form a single-layered structure in which the first and second metal oxides are mixed.
Samsung Electronics Co., Ltd.
H H H C H H H H H C H H H C
H01L H01L H01L C23C H01L H01L H01L H01L H01L C23C H01L H01L H01L C23C
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Ji-Hyun Jun-Hyun Jung-Sik Tae-Min Jung-Ho
Lee Cho Choi Eom Lee