Birch, Stewart, Kolasch & Birch, LLP
Synthetic quartz glass substrate and making method
A synthetic quartz glass substrate has a surface of 6 inch squares including a central surface area of 132 mm squares. The central surface area of 132 mm squares has a flatness of up to 50 nm. A frame region obtained by subtracting the central surface area of 132 mm squares from the central surface area of 148 mm squares has a flatness of up to 150 nm.
SHIN-ETSU CHEMICAL CO., LTD.
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Masaki Harunobu Daijitsu
Takeuchi Matsui Harada