Fitzpatrick, Cella, Harper & Scinto
Method of forming deposited film and method of forming photovoltaic element
Provided is a deposited film containing microcrystalline silicon by plasma CVD, which includes changing at least one of conditions selected from a high frequency power density, a bias voltage with respect to an interelectrode distance, a bias current with respect to an electrode area, a high frequency power with respect to a source gas flow rate, a ratio of a diluting gas flow rate to a source gas flow rate, a substrate temperature, a pressure, and an interelectrode distance, between conditions for forming a deposited film of a microcrystalline region and conditions for forming a deposited film of an amorphous region; and forming a deposited film under conditions within a predetermined range in the vicinity of boundary conditions under which the crystal system of the deposited film substantially changes between a amorphous state and a microcrystalline state.
Canon Kabushiki Kaisha
Y C C Y C
Y02E C23C C23C Y02E C23C
additional inventional inventional additional inventional
Yasuyoshi Keishi Masafumi
Takai Saito Sano