Rothwell, Figg, Ernst & Manbeck, P.C.
Electric actuator
Provided is an electric actuator capable of preventing the release of particles from the body thereof. The electric actuator includes a body made of an elongated enclosure; a slider configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the slider; a dust seal band provided to cover the opening; and a pair of electrodes protruding from the body at opposite sides of the opening toward the outside of the body and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes. Positive potential is generated in the upper electrode of the pair of electrodes and negative potential is generated in the lower electrode of the pair of electrodes.
TOKYO ELECTRON LIMITED
B B H Y B
B65G B65G H01L Y10T B65G
inventional inventional inventional additional inventional
Shinji
Wakabayashi