IPUSA, PLLC
Substrate relay apparatus, substrate relay method, and substrate processing apparatus
A substrate relay apparatus (200) includes a chassis (202) that is arranged to surround openings (144) formed at side walls of adjacent transfer apparatuses and has a dimension in the width direction between the side walls of the transfer apparatuses that is smaller than the substrate size, a gate valve (201) that is arranged inside the chassis (202) between the side walls of the adjacent transfer apparatuses and is configured to open and close with respect to the openings (144), and support pins (250) that are arranged on both sides of the gate valve (201) and are configured to support a wafer (W) that straddles the gate valve (201).
Tokyo Electron Limited
H H Y H
H01L H01L Y10S H01L
inventional inventional additional inventional
Shinji
Wakabayashi