Birch, Stewart, Kolasch & Birch, LLP
Manufacture of synthetic quartz glass substrate
A rough surface of a starting synthetic quartz glass substrate is polished to a mirror finish, using a polishing slurry containing tetragonal or cubic zirconia.
SHIN-ETSU CHEMICAL CO., LTD.
B C B
B24B C09G B24B
inventional inventional inventional
Daijitsu Harunobu Ryouhei Masaki
Harada Matsui Hasegawa Takeuchi