Sughrue Mion, PLLC
Process for producing a piezoelectric element using a first SOL and a second SOL having a lead content greater than the first SOL
A piezoelectric element having a piezoelectric film where the difference in the quantity of lead along the thickness of the film is minimized. The film is obtained by first applying, at least once, a first sol for use in forming a PZT film on a substrate having a lower electrode formed thereon. Second, applying a second sol having the greater lead content than the first sol. Third, subjecting these films to heat treatment at a predetermined temperature at least once. The second sol has a composition capable of forming a piezoelectric film having a Perovskite structure expressed generally by AxByO3, and the content of material constituting the A site of the first sol is greater than what constitutes the A site of the second sol.
Seiko Epson Corporation
C C Y H H C
C23C C23C Y10T H01L H01L C23C
inventional inventional additional additional inventional inventional
Hiroyuki Tsutomu Hong Soichi Masami Koji
Kamei Nishiwaki Qiu Moriya Murai Sumi