Rankin, Hill & Clark LLP
Angular velocity sensor
Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weight 3 is columnar or conic. The outline of an outer peripheral portion of a diaphragm 1 has such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodes 11 are respectively located in four regions partitioned by a first imaginary line L1 and a second imaginary line L2. Four angular velocity sensing electrodes 13 are respectively located in four regions partitioned by a first imaginary diagonal line CL1 and a second imaginary diagonal line Cl2. 
HOKURIKU ELECTRIC INDUSTRY CO., LTD.
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Takayuki Tetsuji Shouhei Osamu Hidekazu Masahide
Nakano Imamura Niikawa Kawasaki Yano Tamura