Sawyer Law Group LLP
Integrated system for frontside navigation and access of multi-layer integrated circuits
 Aspects for an integrated system for frontside navigation and access of a multi-layer integrated circuit device are described. In an exemplary embodiment, an integrated system includes a focused ion beam device, the focused ion beam device capable of accessing a desired layer in the multi-layer integrated circuit device. The system further includes an optical imaging device coupled substantially adjacent to the focused ion beam device, the optical imaging device assisting in navigating the multi-layer integrated circuit device from a frontside to a desired location for accessing of the desired layer by the focused ion beam device. 
Advanced Micro Devices, Inc.
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H01J H01J
inventional inventional
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