Hill, Van Santen, Steadman & Simpson
Dielectric thin film
 A high dielectric constant capacitor comprising a thin film deposited on a substrate, the thin film being composed of a mixture of a tantalum oxide and a titanium oxide wherein the ratio of Ti to Ta is in the range from 0.1 to 4 atomic percent. 
Sony Corporation
C H H
C23C H01G H01G
inventional inventional inventional
Toshio Masaki
Mori Saito