Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Probe apparatus and method for correcting contact position by adjusting overdriving amount
A probe apparatus includes a movable mounting table for supporting an object to be tested; a probe card disposed above the mounting table and having a plurality of probes to come into contact with electrodes of the object; a support body for supporting the probe card; and a control unit for controlling the mounting table. Electrical characteristics of the object are tested based on a signal from a tester by bringing the object and the probes into electrical contact with each other by overdriving the mounting table in a state where a test head is electrically connected with the probe card by a predetermined load. Further, one or more distance measuring devices for measuring a current overdriving amount of the mounting table are provided at one or more locations of the test head or the probe card.
Tokyo Electron Limited
G
G01R
inventional
Hiroshi Shinya Tomoya
Yamada Koizumi Endo