Vidas, Arrett & Steinkraus, P.A.
Thermal spray powder, method for forming thermal spray coating, and plasma resistant member
A thermal spray powder contains granulated and sintered particles composed of an oxide of any of the rare earth elements having an atomic number from 60 to 70. The average particle size of the primary particles constituting the granulated and sintered particles is 2 to 10 μm. The crushing strength of the granulated and sintered particles is 7 to 50 MPa. A plasma resistant member includes a substrate and a thermal spray coating provided on the surface of the substrate. The thermal spray coating is formed by thermal spraying, preferably plasma thermal spraying, the thermal spray powder.
Fujimi Incorporated
C Y C C
C23C Y10T C23C C23C
inventional additional inventional inventional
Hiroyuki Isao Yoshiyuki Junya Nobuyuki Hiroaki
Ibe Aoki Kobayashi Kitamura Nagayama Mizuno