Workman Nydegger
Actuator device, method of manufacturing the same and liquid-jet head
Provided is an actuator device including a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate having a silicon oxide layer formed by thermal oxidation on at least a surface, and an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.
Seiko Epson Corporation
B B B Y B B B B B B H B B
B41J B41J B41J Y10T B41J B41J B41J B41J B41J B41J H01L B41J B41J
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Xin-Shan
Li