Morgan, Lewis & Bockius LLP
High purity trisilylamine, methods of making, and use
A composition, comprising: trisilylamine and less than 5 ppmw of halogen. A method of making a silylamine comprising combining ammonia and a compound comprising aminosilane functionality, where the compound comprising aminosilane functionality is according to formula (I) R1 N(R2)a(SiH3)2−a (I), where R1 is an organic polymer, a C-1-20 hydrocarbyl group or —SiR331, where R3 is C1-6 hydrocarbyl, R2 is a C-1-20 hydrocarbyl group, H, or —SiR331, where R3 is as defined above, subscript a is 0 or 1, provided that R1 and R2 may be the same or different except if R1 is phenyl, R2 is not phenyl, under sufficient conditions to cause a reaction to form a silylamine and a byproduct.
Jiangsu Nata Opto-Electronic Materials Co. Ltd.
C B C C C B C C C H C B C
C07F B01J C01B C23C C01B B01J C07F C23C C07F H01L C08G B01J C07F
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Michael D. Jesse A. Xiaobing Barry M. Brian D.
Telgenhoff Maddock Zhou Ketola Rekken