McClure, Qualey & Rodack, LLP
Microwave modulation device
A microwave modulation device includes a first radiator, a second radiator and a modulation structure. The first radiator includes a substrate; a metal layer disposed on the substrate; a protective layer disposed on at least a portion of the metal layer and including a through hole overlapping with at least a portion of the metal layer; and an etch stop layer disposed between the metal layer and the protective layer. The second radiator disposed corresponding to the first radiator. The modulation structure is disposed between the first radiator and the second radiator.
INNOLUX CORPORATION
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Ker-Yih Hung-I Chia-Chi I-Yin Li-Wei Charlene Ming-Yen Kuo-Chun Yi-Hung
Kao Tseng Ho Li Sung Su Weng Lo Lin