Calfee, Halter & Griswold LLP
LTPS layer, method for fabricating the same, display substrate and display device
A method for fabricating a LTPS layer, a LTPS layer, a display substrate, and a display device are disclosed. The method includes providing a substrate which comprises a driver thin film transistor region and a non-driver thin film transistor region; depositing an amorphous silicon layer on the substrate; and irradiating the amorphous silicon layer with a laser beam to crystalline the amorphous silicon layer, wherein a scanning parameter with which the laser beam irradiates the amorphous silicon layer in the driver thin film transistor region is different from a scanning parameter with which the laser beam irradiates the amorphous silicon layer in the non-driver thin film transistor region. The driver and non-driver thin film transistor regions are processed in a differentiated manner with different scanning parameters. The amorphous silicon layer in the driver thin film transistor region is crystallized into a the grain size.
BOE TECHNOLOGY GROUP CO., LTD.
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Dong Xiaolong Huijuan
Li Li Zhang