Epitaxial system
 An epitaxial system is provided for performing an epitaxial growth of IIIA-VA compound on the wafer substrate. The epitaxial system includes a first reaction region for providing a plasma of a first reactant, a second reaction region for epitaxially reacting the plasma of the first reactant with a second reactant on a wafer, and a guiding medium disposed between the first reaction region and the second reaction region for passing therethrough the second reactant and the first reactant plasma to the second reaction region. 
National Science Council
C Y C
C30B Y10T C30B
inventional additional inventional
Shih-Hciung Wei-Chi Jan-Dar Jian-Shihn Chun-Yen
Chan Lai Guo Tsang Chang