Beveridge, DeGrandi, Weilacher & Young
Heat treatment apparatus
 A heat treatment apparatus having a heat treatment boat with a plurality of wafers held thereon, which is to be loaded in a reaction vessel which has one end opened. Once loaded, the boat effects a seal of the reaction vessel, in preparation for subjecting the wafers to heat treatment. The boat also has a heat-insulator disposed on its lower end for heat-insulating the interior of the reaction vessel during the heat-treatment. The heat-insulator includes composite plates having a metal film layer on an upper surface for reflecting heat rays generated during the heat treatment of the reaction vessel, and a cylinder enclosing the composite plates. Thus, sufficient heat-insulating effect for the heat treatment can be obtained, and stable heat-treatment can be conducted with the sufficient heat-insulating effect secured. Furthermore, the generation of particles can be suppressed, and yields of the heat treatment can be improved. 
Tokyo Electron Kabushiki Kaisha
C C H C C
C23C C30B H01L C23C C30B
inventional inventional inventional inventional inventional
Yuuichi Katsushin Katsuya Shingo
Mikata Miyagi Okumura Watanabe