Slater Matsil, LLP
Semiconductor devices and methods of manufacture thereof
Semiconductor devices and methods of manufacture thereof are described. In an embodiment, a method of manufacturing a semiconductor device may include: patterning a substrate to have a first region and a second region extending from the first region of the substrate; depositing an isolation layer over a surface of the first region of the substrate; and epitaxially forming source/drain regions over the isolation layer and adjacent to sidewalls of the second region of the substrate.
National Chiao Tung University Taiwan Semiconductor Manufacturing Company, Ltd.
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Samuel C. Chen-Han Chao-Hsin
Pan Chou Chien