Lumen Patent Firm
Pre-charged CMUTs for zero-external-bias operation
Capacitive micromachined ultrasonic transducers (CMUTs) having a pre-charged floating electrode are provided. Such CMUTs can operate without an applied DC electrical bias. Charge can be provided to the floating electrode after or during fabrication in various ways, such as injection by an applied voltage, and injection by ion implantation.
The Board of Trustees of the Leland Stanford Junior University
B
B06B
inventional
Min-Chieh Butrus T. Mario
Ho Khuri-Yakub Kupnik