Scully, Scott, Murphy & Presser, P.C.
Detecting combined tool incompatibilities and defects in semiconductor manufacturing
A system, a method and a computer program product for identifying incompatible manufacturing tools. The system receives measurements of products that were subject to a manufacturing process involving a plurality of manufacturing tools. The measurements pertain to a performance characteristic of each product. The system evaluates whether each manufacturing tool implemented in a sequential manufacturing process individually performs normally based on the received measurements. In response to evaluating each manufacturing tool implemented in said manufacturing process individually performs normally, the system evaluates whether a first combination of the manufacturing tools together in sequential manufacturing process perform normally based on the received measurements. The system further evaluates performance of products generated by all other combinations of tools in the sequential manufacturing process not including the first combination of tools, and, using objective measures, identifies a combination of tools that perform optimally.
International Business Machines Corporation
G Y
G05B Y02P
inventional additional
Robert J. Sholom M. Fateh A.
Baseman Weiss Tipu