Cushman Darby & Cushman IP Group of Pillsbury Madison & Sutro LLP
Method for manufacturing semiconductor device
 A method for manufacturing a semiconductor device comprises the steps of extracting an optimal working condition by accumulatively averaging accumulated working conditions of lots previously performed in an expectation process to be currently performed in the manufacturing equipment, extracting a correction condition by extracting information for an alignment state of a lower layer performed by the expectation process, and setting the working condition by adding the correction condition to the optimal working condition. 
Samsung Electronics Co., Ltd.
G G
G03F G03F
inventional inventional
Hyo-Seok Dong-Heui Sun-Yong Young-Chul
Choi Jang Lee Jang