Antonelli, Terry, Stout and Kraus, LLP.
Method of inspecting a semiconductor device and an apparatus thereof
A method of inspecting a sample in which the sample is inspected under a plurality of inspection conditions and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.
Hitachi High-Technologies Corporation Hitachi, Ltd.
G G G G G G G G
G01N G06T G01N G06T G01N G06T G01N G06T
additional inventional additional additional inventional additional inventional inventional
Kenji Tetsuya Akira Kenji Yoshimasa Maki Takanori Minori Yoshio Hidetoshi
Watanabe Watanabe Hamamatsu Oka Ohshima Tanaka Ninomiya Noguchi Morishige Nishiyama