Tung & Associates
Paddle for securely mounting a wafer cassette holder thereto
A platform for securely mounting a wafer cassette holder thereon is provided which includes a wafer cassette holder that has a flat bottom surface and four sidewall panels, a platform that has a flat top surface larger than and for mating to the flat bottom surface of the wafer cassette holder, And a securing device mounted in the flat top surface of the platform juxtaposed to each side of the four sidewalls of the wafer cassette holder for preventing the holder from accidentally slipping off the platform, the securing device may include either a plurality of engagement pins that slidingly engages the wafer cassette holder for securely holding the holder on the platform, or a plurality of side panels mounted along the peripheral edge of the platform for preventing the holder from slipping off the platform.
Taiwan Semiconductor Manufacturing Co., Ltd.
Y H Y
Y10S H01L Y10S
additional inventional additional
Ching-Chiang Pei-Yi Chih-Hung Kuo-Chen Yu-Yen Chung-Yi
Chang Kuo Huang Lin Chang Lee