Slater Matsil, LLP
Semiconductor device and method of manufacturing
A semiconductor device includes a substrate, a trench in the substrate, the trench having an inclined sidewall, a reflective layer over the inclined sidewall, a grating structure over the substrate, and a waveguide in the trench. The waveguide is configured to guide optical signals between the grating structure and the reflective layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ying-Hao Tien-Yu
Kuo Huang