WPAT, P.C. Intellectual Property Attorneys
Apparatus for cleaning semiconductor equipment
An apparatus includes a first support member coupled to a casing and constructed to move along a first axis through the casing and rotate around the first axis, a second support member coupled to the first support member and constructed to move along a second axis perpendicular to the first axis, and an arm pivotally coupled to the second support member and constructed to rotate around a third axis perpendicular to the first axis and the second axis. The apparatus also includes a cleaning head attached to the arm and constructed to rotate around a longitudinal axis of the arm.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
H B B H B B B H
H01L B08B B08B H01L B08B B08B B08B H01L
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Shih-Kuo Keith Kuang-Kuo Ming-Chuan Wai Hong Chia-Hsun
Liu Koai Hung Cheah Chang