Patterson & Sheridan, LLP
Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated
The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
Applied Materials, Inc.
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John M. Michel R. Soo Young Asaf Robert Z. Tzay-Fa (Jeff) Yong-Kee Srujal (Steve) Teresa Choi (Gene) Shuran Yacov Penchala N. Jeffrey S. Liwei Nicholas G. J. Eric A. David Charles Wing Hoo (Hendrick) Tae K. James Craig Stephen P. Matthew J. B. Fang Parris Brice Danny Cam Toan
White Frei Choi Schlezinger Bachrach Su Chae Patel Trowbridge Ho Sheng Elgar Kankanala Sullivan Li De Vries Englhardt Tanner Gay Lo Won Hunter Murphy Saunders Mei Hawkins Walker Lu