Slater Matsil, LLP
Filter with seal treatment
In accordance with an embodiment, a filter membrane is sealed with a sealing material prior to using the filter membrane to filter process fluids. The sealing material is a fluorine-based polymer or a polymer with a cross-linking group. Once the sealing material has been placed in contact with the filter membrane, a cross-linking reaction may be initiated using either physical or chemical processes to cross-link the sealing material and to seal the filter membrane within the sealing material, thereby separating the filter membrane from the process fluids, reducing or eliminating leaching of the filter membrane into the process fluid.
Taiwan Semiconductor Manufacturing Company, Ltd.
B B B G B B B
B01D B01D B01D G03F B01D B01D B01D
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Ching-Yu Kuan-Hsin
Chang Lo