Nixon Peabody LLP
Multi-station plasma reactor with multiple plasma regions
A plasma chamber is constructed to have a chamber body defining therein a plurality of process stations. A plurality of rotating substrate holders are each situated in one of the process stations and a plurality of in-situ plasma generation regions are each provided above one of the substrate holders. A plurality of quasi-remote plasma generation regions are each provided above a corresponding in-situ plasma generation region and being in gaseous communication with the corresponding in-situ plasma generation region. An RF energy source is coupled to each of the quasi-remote plasma generation regions.
Advanced Micro-Fabrication Equipment, Inc. Asia
H H C C H C H
H01J H01J C23C C23C H01J C23C H01J
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Yijun Henry Jinyuan Gerald Aihua Tuqiang Lee
Liu Ho Chen Yin Chen Ni Luo