Brinks Gilson & Lione
Device for distance measurement
A device for interferential distance measurement that includes a measurement reflector having a surface and a light source emitting a beam parallel to the surface. The device includes a splitter element including a splitter grating that is disposed perpendicular to the surface, wherein the splitter grating receives the beam and splits the beam into a measurement beam and a reference beam, wherein the measurement beam acts at least twice upon the measurement reflector along a path of the measurement beam. The device including a combining element, at which the measurement beam and the reference beam enter into interferential superposition to form interfering measurement and reference beams. The device further includes a detector arrangement, by way of which a scanning signal pertaining to a distance between the measurement reflector and a component of said device in a measuring direction can be generated from the interfering measurement and reference beams.
DR. JOHANNES HEIDENHAIN GMBH
G G G G G G
G01B G01B G01B G01B G01B G01B
inventional inventional additional inventional inventional inventional
Walter Wolfgang Ralph
Huber Holzapfel Joerger