Wood, Herron & Evans LLP
Metal-insulator-metal capacitors with high capacitance density
Metal-insulator-metal (MIM) capacitors and methods for fabricating MIM capacitors. The MIM capacitor includes an interlayer dielectric (ILD) layer with apertures each bounded by a plurality of sidewalls and each extending from the top surface of the ILD layer into the first interlayer dielectric layer. A layer stack, which is disposed on the sidewalls of the apertures and the top surface of the ILD layer, includes a bottom conductive electrode, a top conductive electrode, and a capacitor dielectric between the bottom and top conductive electrodes.
International Business Machines Corporation
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Anthony K. Christopher S. Junjun Michel J. Robert J. Souvick Tom C.
Stamper Putnam Li Abou-Khalil Gauthier, Jr. Mitra Lee