Patterson + Sheridan, LLP
Adjustable extended electrode for edge uniformity control
Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes an edge ring having a top surface and a bottom surface. An adjustable tuning ring is positioned beneath the bottom surface of the edge ring. The adjustable tuning ring has an upper surface and a lower surface. The lower surface is configured to interface with an actuating mechanism configured to move the adjustable tuning ring relative to the edge ring.
Applied Materials, Inc.
H H H H H H H
H01J H01J H01J H01J H01J H01J H01J
inventional inventional inventional additional inventional inventional inventional
Rajinder Leonid James Sunil Denis M. Olivier
Dhindsa Dorf Rogers Srinivasan Koosau Luere