Method and design of low sheet resistance MEOL resistors
An integrated circuit structure includes: a semiconductor substrate; a shallow trench isolation (STI) region in the semiconductor substrate; one or more active devices formed on the semiconductor substrate; and a resistor array having a plurality of resistors disposed above the STI region; wherein the resistor array comprises a portion of one or more interconnect contact layers that are for interconnection to the one or more active devices.
XILINX, INC.
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Cheang-Whang Nui Ping-Chin Jae-Gyung
Chang Chong Yeh Ahn