Wilson & Ham
Apparatus and method for processing substrates using one or more vacuum transfer chamber units
An apparatus and method for processing substrates uses one or more vacuum transfer chamber units to transfer some of the substrates between at least one load lock chamber unit and at least one vacuum process chamber unit.
Arcus Technology, Inc.
H C H H H
H01L C23C H01L H01L H01L
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Samuel S. Christopher C.
Pak Chang