J.C. Patents
Semiconductor device
A structure of semiconductor device includes a substrate, having a dielectric layer on top. The structure further includes at least two metal elements being adjacent, disposed in the dielectric layer, wherein an air gap is existing between the two metal elements. A porous dielectric layer is disposed over the substrate, sealing the air gap. An inter-layer dielectric layer disposed on the porous dielectric layer.
UNITED MICROELECTRONICS CORP.
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Chich-Neng Da-Jun Bin-Siang
Chang Lin Tsai