Sughrue Mion, PLLC
MEMS device and fabrication method of the same
A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
Samsung Electro Mechanics Co., Ltd
G G B B B G
G02B G02B B81B B81B B81B G02B
inventional inventional additional inventional additional inventional
Jun-o Hee-moon Jin-woo Yong-hwa Seok-mo
Kim Jeong Cho Park Chang