Millen, White, Zelano & Branigan
P-vinylphenoxydimethylphenylcarbyldimethylsilane homopolymer
 A p-vinylphenoxydimethylphenylcalbyldimethylsilane homopolymer having a molecular weight dispersion narrow enough to ensure high resolution and high developability to resists containing said homopolymer as main component can be manufactured by anionic polymerization of a p-vinylphenoxydimethylphenylcalbyldimethylsilane monomer. 
Shin-Etsu Chemical Co., Ltd.
C G
C08F G03F
inventional inventional
Osamu Minoru Fujio Motoyuki
Watanabe Takamizawa Yagihashi Yamada