Norris McLaughlin, P.A.
Piezoelectric wafer, piezoelectric vibration piece, and piezoelectric vibrator
This piezoelectric wafer has: a piezoelectric vibration piece; a frame portion that supports the piezoelectric vibration piece; and a coupling portion that couples the piezoelectric vibration piece to the frame portion. A pair of first and second metal bumps is formed in juxtaposition on the piezoelectric vibration piece. The coupling portion has slits extending in its width direction except in a bridge, i.e., a part of the coupling portion in its width direction. An end in the width direction of the bridge is distantly spaced from the first and second metal bumps both in a direction perpendicular to the width direction of the coupling portion with no overlap with these metal bumps.
Daishinku Corporation
H H H H H H H H H H H
H01L H03H H03H H01L H03H H03H H03H H03H H03H H01L H03H
inventional inventional inventional inventional inventional inventional inventional additional inventional inventional additional
Tomo Satoru Tadataka Yoshinari Kozo Kazuki
Fujii Ishino Koga Morimoto Shibutani Otani