Wenderoth, Lind & Ponack
Method of and apparatus for forming multi-layer film
 A method of and an apparatus for forming a multi-layer film, includes: a thickness control device for controlling an optical film thickness or a thickness of each of the layers of the multi-layer film; a multi-layer film monitoring substrate on which the multi-layer film is formed; a measurement device for measuring the optical characteristics of the multi-layer film formed on the multi-layer film monitoring substrate; and a processing device which processes the results obtained by the measurement device so as to feed the processed results back to the thickness control device. 
Matsushita Electric Industrial Co., Ltd.
C G H H H
C23C G01B H01J H01J H01J
inventional inventional additional inventional additional
Hideo Akito Shinji Tsuguhiro
Kurokawa Sawada Uchida Korenaga