Mintz, Levin, Cohn, Ferris, Glovsky and Popeo, P.C.
Planarization methods for patterned media disks
A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.
Hitachi Global Storage Technologies Netherlands, B.V.
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G11B G11B Y10T B82Y G11B Y10T Y10T G11B
inventional inventional additional inventional inventional additional additional inventional
Zvonimir Z. Elizabeth Ann Jui-Lung Henry Hung
Bandic Dobisz Li Yang