Tutunjian & Bitetto, P.C.
Surface nitridation in metal interconnects
A conductive interface includes a first conductor having a recessed area in least one surface. A dielectric layer has a trench positioned over the first conductor. A nitridized layer is formed on a top surface of the first conductor around the recessed area, to a depth on the first conductor that is shallower than a depth of the recessed area. A second conductor is formed in the trench and the recessed area to form a conductive contact with the first conductor.
INTERNATIONAL BUSINESS MACHINES CORPORATION
H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional additional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional
Terry A. Roger A. Chih-Chao Wei Lawrence A.
Spooner Quon Yang Wang Clevenger