Finnegan, Henderson, Farabow, Garrett & Dunner
Method of manufacturing image sensor
 A method of manufacturing an image sensor comprising light-receiving elements, thin film transistor switching elements, and a group of lines, in which the metal electrode portion of each light-receiving element, the source and drain electrode portions of each thin film transistor switching element, and the intermediate ground wiring layer of the group of wiring lines can be formed simultaneously. As a result, the image sensor can be prepared with ease under an efficient process. 
Fuji Xerox Co., Ltd.
H H
H01L H01L
inventional inventional
Hisao Yasumoto
Ito Shimizu