Memory device peripheral interconnects and method of manufacturing
An integrated circuit memory device, in one embodiment, includes a substrate and first and second inter-level dielectric layers successively disposed on the substrate. One or more contacts in the peripheral extend through the first inter-level dielectric layer to respective components. One or more vias and a plurality of dummy vias extend through the second inter-level dielectric layer in the peripheral area. Each of the one or more peripheral vias extend to a respective peripheral contact. The peripheral dummy vias are located proximate the peripheral vias.
Spansion LLC
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Shenqing Wenmei
Fang Li