Slater & Matsil, L.L.P.
MEMS device structure and methods of forming same
A microelectromechanical system (MEMS) device may include a MEMS structure above a first substrate. The MEMS structure comprising a central static element, a movable element, and an outer static element. A portion of bonding material between the central static element and the first substrate. A second substrate above the MEMS structure, with a portion of a dielectric layer between the central static element and the second substrate. A supporting post comprises the portion of bonding material, the central static element, and the portion of dielectric material.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Bruce C. S. Chang-Chia Chen-Chih
Chou Chang Fan