Harness, Dickey & Pierce, P.L.C.
Pressure sensor device and method of sensing pressure
A pressure sensor device comprises a device package (110) arranged to define a cavity (116) having an opening for fluid communication with an internal volume thereof. The cavity (116) comprises a side wall (114, 115). An elongate pressure sensor element (100) is provided and has a proximal end (120) and a distal end (122). The side wall (114, 115) is arranged to hold fixedly the proximal end (120) of the pressure sensor element (100) therein so that the pressure sensor element (100) is cantilever-suspended from the side wall (114, 115) within the cavity (116).
MELEXIS TECHNOLOGIES NV
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inventional inventional inventional inventional inventional
Laurent Appolonius Jacobus Jian
Otte Van Der Wiel Chen