Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus
Components of sampled gases are analyzed by a Fourier transform infrared spectrophotometer 28. It is determined whether or not the analyzed gases include at least one kind of specific gases equal to or more than a predetermined quantity. In a case where mixed gases include at least one kind of the specific gases equal to or more than the predetermined quantity, a controller 30 supplies an operation display monitor 31 with a signal indicating leakage of the kind of the specific gases. Hence, it is possible to realize detection by kind of the gases with high accuracy irrespective of the kind of leaked gas.
Tomoe Shokai Co., Ltd. Tokyo Electron Limited
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G01N G01N
inventional additional
Kiyoshi Shinichi Kazunori
Komiyama Watanabe Gotoda