Birch, Stewart, Kolasch & Birch, LLP
Laser pattern mask and method for fabricating the same
The present invention relates to a laser pattern mask, and a method for fabricating the same, which can prevent a laser pattern mask from being damaged by coating a protective film on a surface of a laser pattern mask for patterning an entire layer on a mother substrate at a time by laser ablation. The laser pattern mask includes a base substrate, a laser shielding pattern formed of a non-transparent metal on the base substrate to define laser pass through regions, and a protective film formed on an entire surface of the base substrate including the laser shielding pattern.
LG Display Co., Ltd.
Y C C G
Y10T C23C C23C G03F
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Sun-Ju Jun-Ho
Ku Choi