Marshall, Gerstein & Borun LLP
Method for forming thin films of semiconductor devices
Methods for forming thin films of semiconductor devices, and more specifically, methods for forming thin films of semiconductor devices, wherein the semiconductor substrate is subjected to a thin film formation process in a thin film formation apparatus containing a chamber, a susceptor vertically movable in the chamber and a heater disposed within the susceptor, the method comprising a preheating process for stabilizing the internal temperature of the chamber by vertically moving the susceptor a predetermined number of times prior to the thin film formation process.
Hynix Semiconductor Inc.
C
C23C
inventional
Sung Jae Seok Kiu
Joo Lee