JCIPRNET
Wafer container and method for holding wafer
Provided is a wafer container including a frame and at least a pair of the stents. The frame has opposite sidewalls. The at least a pair of the stents is respectively disposed on the sidewalls of the frame, wherein the at least a pair of the stents is configured to provide at least three supporting points to support at least one wafer. A method for holding at least one wafer is also provided.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Wei-Kang Jui-Ming Wan-Ting Chi-Chung
Liu Huang Liao Jen