Fitzpatrick, Cella, Harper & Scinto
Polishing apparatus with slurry screening
A polishing apparatus and a polishing method can effectively prevent large diameter particles from being fed with slurry to an object to be polished. A large-diameter particle screener blocks or disperses large diameter particles from entering the slurry. Then, slurry free from large diameter particles is taken up from a slurry container by an intake pipe and fed to the object to be polished.
Canon Kabushiki Kaisha
B Y B
B24B Y10S B24B
inventional additional inventional
Matsuomi Kyoichi Kazuo
Nishimura Miyazaki Takahashi