Harness, Dickey & Pierce, P.L.C.
Thin film structure, capacitor, and methods for forming the same
A thin film structure and a capacitor using the film structure and methods for forming the same. The thin film structure may include a first film formed on a substrate using a first reactant and an oxidant for oxidizing the first reactant. A second film may be formed on the first film to suppress crystallization of the first film. A capacitor may include a dielectric layer, which may further include the first thin film and the second thin film.
Samsung Electronics Co., Ltd.
C H H C C
C23C H01L H01L C23C C23C
inventional inventional inventional inventional inventional
Seung-Hwan Young-Sun Dae-Sik Han-Mei Ki-Yeon Sung-Tae Cha-Young Kyoung-Ryul
Lee Kim Choi Choi Park Kim Yoo Yoon