Pillsbury Winthrop Shaw Pittman LLP
Methods for defect validation
A method of defect validation for a device manufacturing process, the method including: obtaining a first image of a pattern processed into an area on a substrate using the device manufacturing process under a first condition; obtaining a metrology image from the area; aligning the metrology image and the first image; and determining from the first image and the metrology image whether the area contains a defect, based on one or more classification criteria.
ASML Netherlands B.V.
G G G G
G03F G06T G06T G06T
inventional inventional additional inventional
Stefan Xinjian Marinus Rafael Vivek Kumar
Hunsche Zhou Jochemsen Aldana Laso Jain