McClure, Qualey & Rodack, LLP
Edge-dominant alignment method in exposure scanner system
An edge-dominant alignment method for use in an exposure scanner system is provided. The method includes the steps of: providing a wafer having a plurality of shot areas, wherein each shot area has a plurality of alignment marks; determining a first outer zone of the wafer, wherein the first outer zone includes a first portion of the shot areas along a first outer edge of the wafer; determining a scan path according to the shot areas of the first outer zone; and performing an aligning process to each shot area of the first outer zone according to the scan path and an alignment mark of each shot area of the first outer zone.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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inventional inventional additional inventional inventional inventional
Yi-Ping Heng-Hsin Yung-Yao Ying-Ying
Hsieh Liu Lee Wang