F. Chau & Associates, LLC
Measurement device and semiconductor manufacturing system including the same
A measurement device includes an emitter configured to emit an electromagnetic signal to an object to be measured. A first detector is disposed to measure a first portion of the electromagnetic signal that is reflected by the object to be measured. A second detector is disposed to measure a second portion of the electromagnetic signal that is transmitted through the object to be measured. The emitter is configured to emit the electromagnetic signal in a direction substantially perpendicular to a surface of the object to be measured.
SAMSUNG ELECTRONICS., LTD.
G G H H G
G01N G01N H01L H01L G01N
inventional inventional inventional inventional inventional
Seung-Hwan Sang-Soo Jun-Woo Yun-Young Sung-Kyu
Kim Kim Park Kim Park