Ryan, Mason & Lewis, LLP
Method and structure of fabricating I-shaped silicon germanium vertical field-effect transistors
A method for manufacturing a semiconductor device includes forming a first semiconductor layer having a first concentration of germanium on a semiconductor substrate, a second semiconductor layer having a second concentration of germanium on the first semiconductor layer, and a third semiconductor layer having a third concentration of germanium on the second semiconductor layer. The method also includes patterning the first, second and third semiconductor layers into at least one fin, and reducing a width of the second semiconductor layer of the at least one fin. In the method, a bottom source/drain region is grown from the substrate adjacent a base portion of the at least one fin, a gate structure is formed on and around the second semiconductor layer, and a top source/drain region is grown from the third semiconductor layer.
International Business Machines Corporation
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Juntao Kangguo ChoongHyun Peng
Li Cheng Lee Xu