J.C. Patents
Hot plate cooling system
A cooling system for a hot plate. The cooling system includes a plurality of pipelines inside the hot plate. Each pipeline has an inlet and an outlet. The inlet permits a cooling fluid to enter and the outlet permits the cooling fluid to leave. The cooling fluid running inside the pipelines picks up heat from the hot plate and carries away so that the hot plate is cooled.
Macronix International Co., Ltd.
H F
H01L F28F
inventional inventional
Ching-Yu I-Pien
Chang Wu