Kilpatrick Townsend & Stockton LLP
Method of manufacturing of a liquid jet head, method of manufacturing of a piezoelectric element and a liquid jet apparatus
In a step of forming a piezoelectric precursor film, an application solution is applied onto each of flow passage forming substrate wafers to form piezoelectric precursor films one by one on each of the plurality of flow passage forming substrate wafers constituting a flow passage forming substrate wafer group, and an order of the flow passage forming substrate wafers for starting the application of the application solution to be turned into each of the piezoelectric precursor films is varied by the predetermined number of wafers of the flow passage forming substrate wafer group.
Seiko Epson Corporation
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Xin-shan
Li