Lewis Roca Rothgerber Christie LLP
Electrostatic chuck and electrostatic adsorption apparatus
An electrostatic chuck and an electrostatic adsorption apparatus are provided. According to one or more exemplary embodiments, an electrostatic chuck includes: a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole; a transparent cushion layer on the main body portion and covering the transparent resin portion; an electrode layer on the transparent cushion layer; and a dielectric layer on the electrode layer.
Samsung Display Co., Ltd.
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Tae-Ho Yun Soo Min Ho Byung-Moo
Youn Kim Bae Kim