Banner & Witcoff, Ltd.
Film patterning method, array substrate, and manufacturing method thereof
A film patterning method, an array substrate, and a manufacturing method of an array substrate are disclosed. The film patterning method includes: applying photoresist on a film to be patterned; performing exposure and development on the photoresist, a region corresponding to a completely removed portion of the photoresist after the exposure and the development being a first region; post-baking the photoresist, so that the photoresist is melted and collapsed to change the region corresponding to the completely removed portion into a second region, the photoresist after post-baking forms into a mask pattern; and patterning the film by using the mask pattern as a mask.
Hefei Xinsheng Optoelectronics Technology Co., Ltd. BOE Technology Group Co., Ltd.
H G G G G H H
H01L G03F G03F G03F G03F H01L H01L
inventional inventional inventional inventional inventional inventional inventional
Chong Dongfang Guangyao Guangcai Jun
Fang Wang Li Yuan Wang