Microfluidic device with thin-film electronic devices
A microfluidic device for analysis of a sample. The microfluidic device includes a substrate portion that at least partially defines a chamber for receiving the sample. The substrate portion includes a substrate having a surface. The substrate portion also includes a plurality of thin-film layers formed on the substrate adjacent the surface. The thin-film layers form a plurality of electronic devices. Each of at least two of the electronic devices is formed by a different set of the thin-film layers. The at least two electronic devices may include 1) a temperature control device for controlling the temperature of fluid in the chamber, and 2) an other electronic device configured to sense or modify a property of fluid in the chamber.
Hewlett-Packard Development Company, L.P.
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Douglas A. Winthrop D. Grant Paul David John Stephen Adam L
Sexton Childers Pease Crivelli Tyvoll Dunfield Ghozeil