Haynes and Boone, LLP
Integrated circuit fabrication system with adjustable gas injector and method utilizing the same
The present disclosure provides a semiconductor fabrication apparatus. The semiconductor apparatus includes a processing chamber; a substrate stage provided in the processing chamber and being configured to secure and rotate a semiconductor wafer; a gas injector configured to inject a chemical to the processing chamber; a window attached to the gas injector; and an adjustable fastening device coupled with the gas injector and the window.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chien-Fang Wai Hong Yung-Shun Ching-Yu Chiao-Kai
Lin Cheah Hsu Chang Chang