Lowe Hauptman & Ham, LLP
Method of lithography
A lithography method of manufacturing integrated circuits is disclosed. A combination photoalignment-photoresist layer is formed on a substrate. A treatment is performed on the combination photoalignment-photoresist layer. The combination photoalignment-photoresist layer is exposed to a predetermined pattern. The combination photoalignment-photoresist layer is developed to form a pattern and expose a portion of the substrate.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ching-Yu Fong-Cheng
Chang Lee