Birch, Stewart, Kolasch & Birch, LLP
Exhaust system and mini-exhaust static pressure controlling apparatus thereof
An exhaust system and a mini-exhaust static pressure controlling apparatus thereof for controlling a process area. The mini-exhaust static pressure controlling apparatus has an exhaust chamber and an auto release damping device. The exhaust chamber has an air inlet connected to the process area receiving air exhaust from the process area, and an air outlet venting the air exhaust. The auto release damping device has a diaphragm pre-stressed in an arc shape with a coefficient of elasticity and an adjusting device for applying a stress on the diaphragm to maintain the arc shape of the diaphragm, and is disposed on the exhaust chamber to control static pressure of the air exhaust in the exhaust chamber.
Taiwan Semiconductor Manufacturing Co., Ltd.
H F H Y Y Y F F
H01L F24F H01L Y10T Y10T Y10T F24F F24F
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Ming-Tsong Yung-Dar Dar-Rung Po-Sung Ming-Chien
Wang Chen Kuo Kuo Wen