Birch, Stewart, Kolasch & Birch, LLP
Split-gate flash memory cell and method for forming the same
A split-gate flash memory cell is provided. The split-gate flash memory cell includes a semiconductor substrate, a floating gate dielectric on the semiconductor substrate, and a floating gate. The floating gate includes a conductive layer on the floating gate dielectric, and a pair of conductive spacers on a top surface of the conductive layer. The split-gate flash memory cell also includes an inter-gate dielectric covering the floating gate, including sidewalls of the conductive layer and the conductive spacers. The split-gate flash memory cell also includes a control gate on the inter-gate dielectric.
Vanguard International Semiconductor Corporation
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Ankit Chia-Hao Manoj
Kumar Lee Kumar