Mattingly & Malur, P.C.
Electric charged particle beam microscope and electric charged particle beam microscopy
The electric charged particle beam microscope includes an electric charged particle source; a condenser lens converging electric charged particles emitted from the electric charged particle source on a specimen; a deflector scanning the converged electric charged particles over the specimen; a control unit of the deflector; a specimen stage on which the specimen is mounted; a detector detecting the electric charged particles; a computer forming an image from a control signal from the deflector and an output signal from the detector; and a display part connected with the computer. The control unit of the deflector can change the scan rate of the electric charged particles. A first rate scan image is obtained at a first rate and a second rate scan image is obtained at a second rate slower than the first rate.
Hitachi High-Technologies Corporation
H H H H
H01J H01J H01J H01J
inventional additional inventional additional
Hideki Ruriko
Kikuchi Tsuneta