Huse IP Law
Visualization of three-dimensional semiconductor structures
A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structure based on measurements collected during the inspection. The computer system renders an augmented-reality or virtual-reality (AR/VR) image of the model that shows a 3D shape of the model and provides the AR/VR image to an AR/VR viewing device for display.
KLA Corporation
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Aaron J. Abhi Kaiwen Houssam Jonathan John Antonio Yin Thaddeus G. Andrei Liequan
Rosenberg Gunde Xu Chouaib Iloreta Hench Gellineau Xu Dziura Veldman Lee