Griffin and Szipl PC
Flow rate range variable type flow rate control apparatus
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1-P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
Fujikin Incorporated National University Corporation Tohuku University Tokyo Electron Ltd.
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Shoichi Tomokazu Masahito Tsuyoshi Ryousuke Kaoru Nobukazu Takashi Kouji Masaaki Hisashi Toshihide Katsuyuki Tadahiro Kazuyuki Tsutomu
Hino Imai Saito Shimazu Dohi Hirata Ikeda Hirose Nishino Nagase Tanaka Yoshida Sugita Ohmi Miura Shinohara