Fish & Richardson P.C.
Imaging optical unit and projection exposure apparatus for projection lithography, having such imaging optical unit
An imaging optical unit for imaging an object field in an image field is disclosed. The imaging optical unit has an obscured pupil. This pupil has a center, through which a chief ray of a central field point passes. The imaging optical unit furthermore has a plurality of imaging optical components. A gravity center of a contiguous pupil obscuration region of the imaging optical unit lies decentrally in the pupil of the imaging optical unit.
Carl Zeiss SMT GmbH
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G03F G02B G03F G03F G03F
inventional inventional inventional inventional inventional
Alexander Hans-Juergen Ralf
Epple Rostalski Mueller