JCIPRNET
Manufacturing method of circuit substrate and mask structure and manufacturing method thereof
A manufacturing method of a circuit substrate is provided. A substrate is provided. A positive photoresist layer is coated on the substrate. Once exposure process is performed on the positive photoresist layer disposed on the substrate so as to simultaneously form concaves with at least two different depths.
Unimicron Technology Corp.
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Jui-Jung Yu-Hua Pu-Ju Shih-Lian Wei-Tse Cheng-Ta
Chien Chen Lin Cheng Ho Ko