Janah & Associates, P.C.
Substrate cleaning chamber and components
A substrate cleaning chamber comprises various components, such as for example, a consumable ceramic liner, substrate heating pedestal, and process kit. The consumable ceramic liner is provided for connecting a gas outlet channel of a remote gas energizer to a gas inlet channel of a substrate cleaning chamber. The substrate heating pedestal comprises an annular plate having a substrate receiving surface with a plurality of ceramic balls positioned in an array of recesses. A process kit comprises a top plate, top liner, gas distributor plate, bottom liner, and focus ring.
Applied Materials, Inc.
H H H H H H H Y H H H H H
H01L H01J H01J H01J H01J H01J H01L Y10T H01J H01J H01L H01J H01J
inventional additional additional additional additional inventional inventional additional inventional inventional inventional inventional inventional
Martin Wei W.
Riker Wang