Rossi, Kimms & McDowell LLP
Imprint apparatus and method of manufacturing article
The present invention provides an imprint apparatus that performs an imprint process of forming a pattern of an imprint material on a processing target region on a substrate by using a mold, including a digital mirror device including two-dimensionally arrayed mirror elements and configured to irradiate the substrate with light reflected by the mirror elements, a measurement unit configured to measure, for each of a plurality of segments obtained by dividing a region in which the mirror elements are arrayed so as to include a plurality of the mirror elements, a light amount of light emitted from each segment, and a control unit configured to control the mirror elements included in each segment based on a measurement result of the measurement unit.
CANON KABUSHIKI KAISHA
B G B G B B H B B H B H
B29C G03F B29C G02B B29K B29K H01L B29C B29L H01L B81C H01L
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Kenji
Yoshida