Hauptman Ham, LLP
Method for overhead cross-system transportation
A method comprises transferring a wafer carrier to or from an overhead hoist transfer (OHT) system using a conveyor. The method also comprises transferring the wafer carrier between the conveyor and an overhead shuttle (OHS) system using a cross-system transport apparatus. The method further comprises generating control signals using a controller to control at least one of the cross-system transport apparatus, the conveyor, or the loading or unloading of the wafer carrier at the OHT or the OHS. The cross-system transport apparatus comprises a lifting device configured to raise or lower the wafer carrier. The transferring of the wafer carrier between the conveyor and the OHS system comprises one or more of lifting or lowering the wafer carrier.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H H
H01L H01L
inventional inventional
Wei-Cheng Feng-Ning
Wang Lee