Sterne, Kessler, Goldstein & Fox P.L.L.C.
Piezoelectric actuator, ink-jet type recording head, manufacturing method therefor, and ink-jet printer
A piezoelectric actuator, comprising a stacked structure consisting of a top electrode 5, a piezoelectric film 4, and a bottom electrode 3, wherein the piezoelectric film comprises a first group 42 of piezoelectric ceramic particles and a second group 43 of piezoelectric ceramic particles. A distinctive feature is that the particles constituting the first group of piezoelectric ceramic particles are larger than the jingo particles constituting the second group of piezoelectric ceramic particles, and the first group of piezoelectric ceramic particles and the second group of piezoelectric ceramic particles have mutually different compositions. The piezoelectric actuator can thus be manufactured by an application method in a low-temperature environment, and a thicker piezoelectric film can be obtained. In addition, a highly practical piezoelectric film can be provided by combining the advantages of a plurality of material types.
Seiko Epson Corporation
Y H H B B B B B H B
Y10T H01L H01L B41J B41J B41J B41J B41J H01L B41J
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Hong Koji Tsutomu Haruo
Qiu Sumi Nishiwaki Nakamura