Christie, Parker & Hale, LLP
Crucible heating apparatus and deposition apparatus including the same
A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucible, through contact parts; a thermocouple coupled to the band; a housing to house the crucible and the band; and a heater disposed inside the housing, to heat the deposition material.
Samsung Mobile Display Co., Ltd.
C C
C23C C23C
inventional inventional
Jin-Wook Seung-Mook Sok-Won Sun-Hoe Jin-Woo Tae-Min Myung-Jong Sang-Bong
Seong Lee Noh Kim Park Kang Jung Lee