Foley & Lardner LLP
Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element
To provide a film forming apparatus capable of using an expensive organic EL raw material without waste and uniformly forming an organic EL film over a long period of time and a jig therefor.A plurality of ejection vessels are provided for a single raw material container section. A switcher is provided for carrying out switching from a piping system, which evaporates an organic EL raw material in the raw material container section and supplies it along with a carrier gas to one of the ejection vessels, to a piping system for another ejection vessel. In this manner, by supplying the organic EL raw material from the single raw material container section to the plurality of ejection vessels by switching, the use efficiency of the organic EL raw material can be improved.
Tokyo Electron Limited Tohoku University
H C C C H
H01L C23C C23C C23C H01L
inventional inventional inventional inventional additional
Hironori Takaaki Shozo Tadahiro
Ito Matsuoka Nakayama Ohmi