WPAT, P.C., Intellectual Property Attorneys
Semiconductor structure having multiple dielectric waveguide channels and method for forming semiconductor structure
A semiconductor structure includes a first dielectric waveguide, a second dielectric waveguide, a first inter-level dielectric (ILD) material, a first transmitter coupling structure and a second transmitter coupling structure. The first and second dielectric waveguides are disposed one over the other. The first dielectric waveguide is configured to guide a first electromagnetic signal. The second dielectric waveguide is configured to guide a second electromagnetic signal. The first and second electromagnetic signals have different frequencies. The first ILD material is disposed between the first and second dielectric waveguides. The first transmitter coupling structure is configured to couple a first driver signal generated by a transmitter die to the first dielectric waveguide, and accordingly produce the first electromagnetic signal. The second transmitter coupling structure is configured to couple a second driver signal generated by the transmitter die to the second dielectric waveguide, and accordingly produce the second electromagnetic signal.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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Wen-Shiang Huan-Neng
Liao Chen