Harness, Dickey & Pierce, P.L.C.
Micro-heaters, methods for manufacturing the same, and methods for forming patterns using the micro-heaters
Example embodiments relate to micro-heaters, micro-heater arrays, methods for manufacturing the micro-heater, and methods for forming a pattern using the micro-heater. A micro-heater according to example embodiments may include a metal pattern formed on a substrate. A support may be formed beneath the metal pattern, the support securing the metal pattern to the substrate while spacing the metal pattern apart from the substrate. A spacer may be formed on the substrate and adjacent to the metal pattern, a first distance from the substrate to the top surface of the spacer being greater than a second distance from the substrate to the top surface of the metal pattern. The distance between the micro-heater and a target substrate positioned above the metal pattern may be controlled by the spacer, thus allowing the formation of a relatively fine pattern on the target substrate.
Samsung Electronics Co., Ltd.
H Y H H
H01L Y10T H05B H05B
additional additional inventional additional
Junhee
Choi