Sughrue Mion, PLLC
Ammonium salt of organic acid and resist composition containing the same
The present invention provides a novel ammonium salt of an organic acid. When the salt is used as a base additive for a chemically amplified resist, the environmental stability of the resist can be enhanced, and the T-top phenomenon can be effectively prevented. In addition, the line width change caused by acid diffusion can be prevented, and the E0 value of the resist can be decreased.
Everlight Chemical Industrial Corporation Industrial Technology Research Institute
C G G
C07C G03F G03F
inventional inventional additional
Ting-Chun Wen-Yuang Tzu-Yu Jian-Hong Sheng-Yueh
Liu Tsai Lin Chen Chang