Oblon, McClelland, Maier & Neustadt, L.L.P.
Restoration method for plasma processing apparatus
According to one embodiment, a restoration method for a plasma processing apparatus is provided. The method includes performing application of a restoration liquid from a coating part onto a consumed region on a component for serving as a constituent element of the plasma processing apparatus, by controlling positions of the component and the coating part, and an application amount of the restoration liquid; and solidifying the restoration liquid applied on the component.
TOSHIBA MEMORY CORPORATION
H C H C C
H01J C04B H01J C23C C04B
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Hiroyuki
Mizuno