Birch, Stewart, Kolasch & Birch, LLP
Method and material for forming high etch resistant double exposure patterns
The present invention includes a lithography method comprising forming a first patterned resist layer including at least one opening therein over a substrate. A protective layer is formed on the first patterned resist layer and the substrate whereby a reaction occurs at the interface between the first patterned resist layer and the protective layer to form a reaction layer over the first patterned resist layer. The non-reacted protective layer is then removed. Thereafter, a second patterned resist layer is formed over the substrate, wherein at least one portion of the second patterned resist layer is disposed within the at least one opening of the first patterned resist layer. The substrate is thereafter etched using the first and second patterned resist layers as a mask.
Taiwan Semiconductor Manufacturing Co., Ltd.
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G03F G03F
inventional inventional
Ching-Yu Chin-Hsiang
Chang Lin