Oliff & Berridge, PLC
Method of manufacturing plasmon generator
A method of manufacturing the plasmon generator includes the steps of: forming a base part made of a dielectric material; forming a metal film that is to later become the plasmon generator; and forming a filler layer made of a dielectric material. The base part includes a base surface and a protruding part that protrudes from the base surface. The protruding part has a top surface that is different in level from the base surface, and a first sidewall connecting the top surface of the protruding part to the base surface. The metal film includes an adhesion part adhering to the first sidewall. The filler layer has a second sidewall disposed such that the adhesion part is interposed between the first sidewall and the second sidewall.
Headway Technologies, Inc.
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additional additional inventional inventional
Kazuki Kazumasa Shigeki Hiroyuki Hironori Yoshitaka
Sato Yasuda Tanemura Ito Araki Sasaki