SoCal IP Law Group LLP
Transversely-excited film bulk acoustic resonator
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. A direction of acoustic energy flow of the primary acoustic mode is substantially orthogonal to the front and back surfaces of the diaphragm. The diaphragm is contiguous with the piezoelectric plate around at least 50% of a perimeter of the cavity.
Resonant Inc.
H H H H H H H H H H H H
H03H H03H H03H H03H H03H H03H H03H H03H H03H H03H H03H H03H
inventional inventional additional inventional inventional inventional inventional inventional inventional inventional inventional additional
Jesson Ventsislav Robert B. Soumya Patrick Bryant Viktor
John Yantchev Hammond Yandrapalli Turner Garcia Plesski