Burr & Brown
Ceramic laminated article, a method of producing the same and a ceramic laminate
The present invention provides a ceramic structure for improving the resistance against a corrosive substance and to diffuse and supply a fluid over a larger area of the structure. A ceramic laminated article has a ceramic sintered body, and a ceramic film provided on the sintered body by means of chemical vapor deposition. A hollow surrounded by the sintered body and film, and holes in communication with the hollow and the outside are formed in the article. A filling material is filled in the recess of the sintered body and the holes are formed. The thus obtained assembly is heat treated to dissipate and remove the filling material through the communicating holes, so that the recess is left as the hollow.
NGK Insulators, Ltd.
C Y C B Y Y B C C C C C C C B C
C04B Y10T C04B B32B Y10S Y10T B32B C04B C04B C04B C04B C04B C04B C04B B32B C04B
additional additional additional inventional additional additional additional additional additional additional additional additional inventional additional additional additional
Hirotake Toshio Hiromichi
Yamada Oda Kobayashi