Cantor Colburn LLP
Method of forming a nanosheet transistor
A sacrificial gate stack for forming a nanosheet transistor includes a substrate. first, second and third silicon channel nanosheets formed over the substrate, and a first sandwich of germanium (Ge) containing layers disposed between the substrate and first silicon channel nanosheet. The stack also includes a second sandwich of Ge containing layers disposed between the first silicon channel nanosheet and the second silicon channel nanosheet; and a third sandwich of Ge containing layers disposed between the second silicon channel nanosheet and the third silicon channel nanosheet. Each sandwich includes first and second low Ge containing layers surrounding a silicon germanium (SiGe) sacrificial nanosheet that has a higher Ge concentration than the first and second low Ge containing layers.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Peng Kangguo Juntao Choonghyun
Xu Cheng Li Lee