Millen, White, Zelano & Branigan, P.C.
Dendritic polymers and making method
A dendritic or hyperbranched polymer having a weight average molecular weight of 500-10,000,000 is prepared by polymerizing a hydroxystyrene derivative, adding a branching monomer midway in the polymerization step to introduce branch chains, and repeating the polymerizing and branching steps. The polymer is advantageously used as the base resin of resist material because the size of the polymer can be reduced while maintaining strength.
Shin-Etsu Chemical Co., Ltd.
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inventional inventional inventional
Jun Toshinobu Jun Osamu Takanobu Tomohiro
Watanabe Ishihara Hatakeyama Watanabe Takeda Kobayashi