Cannon U.S.A., Inc., IP Division
Manufacturing method of an electromechanical transducer
A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
Canon Kabushiki Kaisha
Y H Y Y
Y10T H04R Y10T Y10T
additional inventional additional additional
Ayako Chienliu
Kato Chang