Fitzpatrick, Cella, Harper & Scinto
Thin film mesa transistor of field effect type with superlattice
 A thin film mesa type FET having a gate electrode formed on a substrate. An insulating thin film layer is formed on the gate electrode. A multilayer structure is formed on the insulating thin film layer by alternately laminating a number of non-monocrystalline semiconductor material layers and a number of non-monocrystalline insulating material layers. The thickness of the semiconductor layers is 5 to 500 .ANG.. 
Canon Kabushiki Kaisha
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inventional inventional inventional
Yutaka Masafumi Hisanori Katsuji
Hirai Sano Tsuda Takasu