Innovation Counsel LLP
Thin film transistor and method of manufacturing the same
A thin film transistor includes a gate electrode formed on a substrate, a semiconductor pattern overlapped with the gate electrode, a source electrode overlapped with a first end of the semiconductor pattern and a drain electrode overlapped with a second end of the semiconductor pattern and spaced apart from the source electrode. The semiconductor pattern includes an amorphous multi-elements compound including a II B element and a VI A element or including a III A element and a V A element and having an electron mobility no less than 1.0 cm2/Vs and an amorphous phase, wherein the VI A element excludes oxygen. Thus, a driving characteristic of the thin film transistor may be improved.
Samsung Display Co., Ltd.
H H
H01L H01L
inventional inventional
Jae-Woo Seong-Jin Yeon-Hong Je-Hun
Park Lee Kim Lee