Arent Fox LLP
Resonance device and manufacturing method therefor
A resonance device that includes a lower cover formed from non-degenerate silicon; a resonator having a degenerate silicon substrate with a lower surface facing the lower cover, and including first and second electrode layers laminated on the substrate with a piezoelectric film formed therebetween and having a surface opposing an upper surface of the substrate. Moreover, the lower surface of the substrate has an adjustment region where a depth or height of projections and recesses formed on the surface is larger than that in another region of the lower surface of the substrate or is a region where an area of the projections and recesses is larger than that in the other region of the lower surface of the substrate.
MURATA MANUFACTURING CO., LTD.
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Takehiko Keiichi Masakazu Hiroshi
Kishi Umeda Fukumitsu Yamada