Mask pellicle remove tool
 A mask pellicle removal methods for separating a mask pellicle from a glass reticle to which it is bonded by prying against its releasable bond. The methods includes a table support for nesting the glass reticle and for supporting a manually operated prying mechanism having only the necessary degrees of freedom for prying free the mask pellicle without damaging the glass reticle. 
Taiwan Semiconductor Manufacturing Company, Ltd.
G Y Y
G03F Y10T Y10T
inventional additional additional
Hsieh-Mei Meng-Chun
Liu Li