Ladas & Parry LLP
Apparatus and method for extreme ultraviolet spectrometer calibration
Disclosed are herein an apparatus and method for extreme ultraviolet (EUV) spectroscope calibration. The apparatus for EUV spectroscope calibration includes an EUV generating module, an Al filter, a diffraction grating, a CCD camera, a spectrum conversion module, and a control module that compares a wavelength value corresponding to a maximum peak among peaks of the spectrum depending on the order of the EUV light converted from the spectrum conversion module with a predetermined reference wavelength value depending on an order of high-order harmonics to calculate a difference value with the closest reference wavelength value, and controls the spectrum depending on the order of the EUV light converted from the spectrum conversion module to be moved in a direction of wavelength axis by the calculated difference value. Thus, it is possible to accurately measure a wavelength of a spectrum of EUV light used in EUV exposure technology and mask inspection technology.
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
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G01J G01J G01J G01J G01J
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Min Ah Young Min Taik Jin Sun Ho Seok Jae Hun Yong Soo Young Tae Deok Ha Min-Chul Joon Mo
Seo Jhon Lee Kim Lee Kim Kim Byun Woo Park Ahn