Fitzpartrick, Cella, Harper & Scinto
Method for forming thin films
The present invention provides a method for forming a film of aluminum oxide in which a target containing aluminum is sputtered in a gas containing fluorine atoms.The thin film of aluminum oxide according to the present invention has little optical absorption and high refractive index in the ultraviolet and vacuum ultraviolet regions.
Canon Kabushiki Kaisha
C C
C23C C23C
inventional inventional
Minoru Yasuyuki Hidehiro Masaaki Ryuji Kenji
Otani Suzuki Kanazawa Matsushima Biro Ando