Semiconductor device and manufacturing method thereof
A packaged semiconductor device is manufactured by a simplified manufacturing process, and is reduced in cost, in thickness and in size. A device component and a pad electrode connected with the device component are formed on a semiconductor substrate. A supporter is bonded to a top surface of the semiconductor substrate through an adhesive layer. Then, there is formed a protection layer that has an opening at a location corresponding to the pad electrode and covers a side surface and a back surface of the semiconductor substrate. A conductive terminal is formed on the pad electrode at the location corresponding to the opening formed in the protection layer. No wiring layer or conductive terminal is formed on the back surface of the semiconductor substrate. A conductive terminal is formed on a periphery of the supporter outside of and next to the side surface of the semiconductor substrate.
Semiconductor Components Industries, LLC
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Noboru Hiroshi Shinzo Yuichi Katsuhiko Kazuo Hiroyuki Shigeki Takashi
Okubo Yamada Ishibe Morita Kitagawa Okada Shinogi Otsuka Noma