Ion current measurement device
The invention provides an ion current measurement device for a tool having an ion source. The ion current measurement device comprises an ion collecting cup and a replaceable liner. The ion collecting cup is disposed in the tool and the ion collecting cup possesses a cup opening facing the ion source. The replaceable liner is disposed in the ion collecting cup and the replaceable liner entirely covers a continuous inner sidewall of the ion collecting cup.
United Microelectronics Corp.
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Chung-Jung Chien-Kuo Jui-Fang Cheng-Hung Chi-Chun
Chen Ko Chen Chang Yao