Drinker Biddle & Reath LLP
Interference observation device and interference observation method
An interference observation apparatus includes a light source which outputs incoherent light, a beam splitter, a sample holding table, an objective lens, a reference mirror, a lens, an aberration correction plate, a piezo element, a tube lens, a beam splitter, an imaging unit, a photodetector, an image acquisition unit, and a control unit. The control unit obtains an interference intensity of combined light on the basis of a detection signal output from the photodetector, and adjusts an interference optical system to increase the interference intensity.
HAMAMATSU PHOTONICS K.K.
Hidenao Toyohiko
Yamada Yamauchi