Lee & Morse, P.C.
Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame
A pellicle frame, including aluminum, aluminum oxide, and a transition metal.
Samsung Electronics Co., Ltd. Fine Semitech Corp.
Y C G C C G Y C C
Y10T C25D G03F C25D C25D G03F Y10T C25D C25D
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Han-shin Jae-hyuck Jung-jin Ik-jun Bum-hyun Jang-dong Sung-wan Chan-uk
Lee Choi Kim Kim An You Kim Jeon