Slater & Matsil, L.L.P.
Rotating curing
A system for and a method of curing a material is provided. A material, such as an underfill material, is rotated during a curing process. The curing system may include a chamber, a holder to support one or more workpieces, and a rotating mechanism. The rotating mechanism rotates the workpieces during the curing process. The chamber may include one or more heat sources and fans, and may further include a controller. The curing process may include varying the rotation speed, continuously rotating, periodically rotating, or the like.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Yu-Chih Jing Ruei Chien-Kuo Wei-Ting Ming-Chung
Liu Lu Chang Lin Sung