Hauptman Ham, LLP
Image sensor having conductive layer and protective layer
An image sensor includes a substrate having a first region and a second region. The image sensor further includes a dielectric layer over the substrate. The image sensor further includes a conductive layer over the dielectric layer, wherein in the first region the conductive layer has a grid shape and in the second region a portion of the conductive layer is concave toward the substrate. The image sensor further includes a protective layer, wherein the protective layer is over the conductive layer in the first region, and over a top surface and along sidewalls of the conductive layer in the second region.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Cheng-Yi Chin-Szu Yi-Ming C. H. Min-Hui Chao-Ching Chun-Chih Jian-Shin Y. T. Wen-Shan
Wu Lee Lin Chen Lin Chang Lin Tsai Tsai Chang