Calfee, Halter & Griswold LLP
Laser pulse delay system and laser annealing system
The present disclosure discloses a laser pulse delay system and a laser annealing system. The laser pulse delay system comprises: a beam splitter, a first reflective unit and a delay unit. The beam splitter is configured to split a laser beam emitted by a laser into a first beam and a second beam, such that the first beam is transmitted to the first reflective unit and the second beam is transmitted to the delay unit. The first reflective unit is configured to reflect the first beam it receives, such that the reflected first beam is transmitted to a component to be irradiated. The delay unit is configured to delay the second beam it receives, such that the delayed second beam is transmitted to the component to be irradiated.
BOE TECHNOLOGY GROUP CO., LTD.
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G02B H01S G02B B23K B23K B23K H01L B23K B23K G02B G02B H01S
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Xiaolong Liangjian Xiaowei
Li Li Xu