High performance silicon condenser microphone with perforated single crystal silicon backplate
A silicon condenser microphone is described. The silicon condenser microphone of the present invention comprises a perforated backplate comprising a portion of a single crystal silicon substrate, a support structure formed on the single crystal silicon substrate, and a floating silicon diaphragm supported at its edge by the support structure and lying parallel to the perforated backplate and separated from the perforated backplate by an air gap.
Institute of Microelectronics
Y H
Y10T H04R
additional inventional
Hanhua Qingxin Zhe
Feng Zhang Wang