Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Susceptor, semiconductor manufacturing apparatus, and semiconductor manufacturing method
A susceptor includes a first step portion on which a wafer is placed; and a convex portion placed on a bottom surface of the first step portion, wherein a void is formed between a top surface of the convex portion and a rear surface of the wafer in a state in which the wafer is placed on the top surface of the convex portion.
NuFlare Technology, Inc.
C C C H H
C23C C23C C30B H01L H01L
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