Crowell & Moring LLP
Silicon wafer cleaning agent
A silicon wafer cleaning agent includes at least a water-based cleaning liquid, and a water-repellent cleaning liquid for providing water-repellent to an uneven pattern at least at recessed portions during a cleaning process. The water-repellent cleaning liquid is a liquid composed of a water-repellent compound containing a reactive moiety which is chemically bondable to Si in the silicon wafer, and a hydrophobic group, or is a liquid wherein 0.1 mass % or more of the water-repellent compound relative to the total quantity of 100 mass % of the water-repellent cleaning liquid and an organic solvent are mixed and contained therein. A cleaning process wherein a pattern collapse is easily induced can be improved by using the cleaning agent.
Central Glass Company, Limited
C C C C C H
C11D C11D C11D C11D C11D H01L
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Masanori Yoshinori Hidehisa Takashi Soichi
Saito Akamatsu Nanai Saio Kumon