Burr & Brown, PLLC
Thermal processing apparatus and method of controlling the same
A control unit can select a large-number control zone model in which the number of control zones, which are independently controlled, is large, and a small-number control zone model in which the number of control zones, which are independently controlled, is small. When a temperature is increased or decreased, the control unit can select the small-number control zone model so as to control, based on signals from temperature sensors of the respective control zones C1 . . . C5 whose number is small, heaters located on the respective control zones C1 . . . C5. When a temperature is stabilized, the control unit can select the large-number control zone model so as to control, based on signals from the temperature sensors of the respective control zones C1 . . . C10 whose number is large, the heaters located on the respective control zones C1 . . . C10.
Tokyo Electron Limited
F H H H F F
F27D H01L H01L H01L F27D F27B
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Tatsuya Takanori Koji Wenling
Yamaguchi Saito Yoshii Wang