Smith, Gambrell & Russell, LLP
Earthquake damage spread reducing method and earthquake damage spread reducing system for use in semiconductor manufacturing apparatus
An earthquake damage spread reducing method and an earthquake damage spread reducing system, for use in a semiconductor manufacturing apparatus, which can predict occurrence of an earthquake and prevent fall down of a boat, thus minimizing damage by the earthquake. An earthquake damage spread reducing system includes a receiving unit for receiving urgent earthquake information, based on preliminary tremors, distributed via a communication network, or alternatively, includes a preliminary tremors detection unit for directly detecting the preliminary tremors. A control unit performs a first step of stopping operation of a semiconductor manufacturing apparatus, based on the urgent earthquake information received or on the preliminary tremors detected, as well as performs a second step of holding a boat in order to prevent fall of the boat, in which objects to be processed are loaded in a multistage fashion.
Tokyo Electron Limited
H F H F
H01L F27D H01L F27B
inventional inventional inventional inventional
Yudo Hiroshi
Sugawara Kikuchi