Slater Matsil, LLP
Semiconductor strips with undercuts and methods for forming the same
An integrated circuit device includes a semiconductor substrate, and a semiconductor strip extending into the semiconductor substrate. A first and a second dielectric region are on opposite sides of, and in contact with, the semiconductor strip. Each of the first dielectric region and the second dielectric region includes a first portion level with the semiconductor strip, and a second portion lower than the semiconductor strip. The second portion further includes a portion overlapped by the semiconductor strip.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chao-Cheng Ming-Hua Chih-Tang Chia-Wei Tze-Liang Hao-Ming Tai-Chun
Chen Yu Peng Chang Lee Lien Huang