Westerman, Hattori, Daniels & Adrian, LLP
Nanoimprint-mold release agent, surface treatment method, and nanoimprint mold
A nanoimprint-mold release agent including an alkoxysilane compound represented by general formula (1) is providedwherein Rf and Rf′ are each independently a fluoroalkyl group of 1 to 10 carbon atoms; R1 is a hydrogen atom or an aliphatic monovalent hydrocarbon group of 1 to 6 carbon atoms; R2 and R3 are each independently methyl group or ethyl group; X and Y are each independently an ether linkage or an ester linkage; a and b are each 0 or 1; m, n, and p are each an integer of 0 to 6; q is an integer of 1 to 6 and r is an integer of 0 to 2.
SHIN-ETSU CHEMICAL CO., LTD.
C C B C C C B C C
C07F C03C B29C C03C C07F C03C B82Y C03C C03C
inventional additional inventional additional inventional additional inventional additional inventional
Hiroyuki Masaki Takayuki Daijitsu Ayumu Tohru
Yamazaki Takeuchi Honma Harada Kiyomori Kubota