Fitzpatrick, Cella, Harper & Scinto
Method of producing a thin film field effect transistor
 A method of producing a thin film field effect transistor. An insulating thin film layer is formed on a gate electrode subsequent to the gate electrode being formed on a substrate. A multilayer structure is formed on the insulating thin film layer subsequent to the insulating thin film layer being formed on the gate electrode by alternately laminating a number of non-monocrystalline semiconductor material layers and a number of non-monocrystalline material layers. 
Canon Kabushiki Kaisha
H H Y Y H
H01L H01L Y10S Y10S H01L
inventional inventional additional additional inventional
Masafumi Katsuji Yutaka Hisanori
Sano Takasu Hirai Tsuda