Crowell & Moring LLP
Charged particle beam device
Provided is a multifunctional charged particle beam device capable of inclining a beam with little aberration. The aberration is corrected by forming a local divergent field with a multipole, parallel current lines, or the like, matching the beam axis with the local divergent field via a conventional rotationally symmetric lens, deflector or astigmatism corrector, and counteracting an aberration occurring from another rotationally symmetric convex lens field.
Hitachi High-Technologies Corporation
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Yuko Hiroyuki
Sasaki Ito