Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Method and apparatus for purifying a gas containing contaminants
A method and an apparatus for purifying a gas containing contaminants are disclosed. The gas is irradiated with an ultraviolet ray and/or a radiation ray so as to produce microparticles of the contaminants. The resultant microparticles of the contaminants are contacted with a photocatalyst. Then, the photocatalyst is irradiated with light so as to decompose the contaminants held in contact with the photocatalyst. Organic compounds, organosilicon compounds, basic gas and the like can be decomposed by the action of the photocatalyst. Even when these species are present at a low concentration, they can be concentrated locally by transforming into microparticles, and hence can be removed.
Ebara Corporation
B B B B B B B
B01D B01D B01D B01D B01D B01D B01D
inventional additional additional inventional additional additional inventional
Toshiaki
Fujii