Thomas, Kayden, Horstemeyer & Risley
System and method for automated dispatch and transportation of work-in-process
A system and method for transporting wafer lots to desired destinations. The system includes a wafer lot status database unit, status storage, a filtering rule base, and a dispatch control unit. First, status records are input from the wafer lot status database by the dispatch control unit repeatedly for a predetermined period of time. Then, the dispatch control unit inputs a status tree and selects candidate wafer lots using the filtering rule and generates transport commands for candidate wafer lots to the transport unit. Finally, the transport unit transports the candidate wafer lots to the desired destination according to the transport commands.
Taiwan Semiconductor Manufacturing Co., Ltd.
G G
G06Q G06Q
inventional inventional
Chien-Peng Jau-Huang Yao-Hsiung
Ho Chen Chang