Kenyon & Kenyon LLP
Optical position-measuring device
In an optical position-measuring device for recording the relative position of a scanning unit and a measuring standard, the scanning unit includes a light source, first annular scanning graduation, reflector element, beamsplitter element, and detection unit. A beam emitted by the light source impinges on the measuring graduation and is split into at least two partial beams of rays. The partial beams propagate toward the scanning unit, impinge the first scanning graduation on the reflector element, are reflected through the first scanning graduation toward the measuring graduation, impinge the measuring graduation, propagate toward the scanning unit and undergo superposition, and are deflected by the beamsplitter element toward the detection unit. There, a plurality of positionally dependent, phase-shifted scanning signals can be recorded. The first scanning graduation focuses the partial beams from the measuring graduation at the reflector element, thereby recollimating the partial beams to be reflected toward the measuring graduation.
Dr. Johannes Heidenhain GmbH
G
G01D
inventional
Wolfgang
Holzapfel