Harness, Dickey & Pierce, P.L.C.
Electronic device, field effect transistor including the electronic device, and method of manufacturing the electronic device and the field effect transistor
Provided is an electronic device, a field effect transistor having the electronic device, and a method of manufacturing the electronic device and the field effect transistor. The electronic device includes: a substrate; a first electrode and a second electrode which are formed in parallel to each other on the substrate, each of the first electrode and the second electrode comprising two electrode pads separated from each other and a heating element that connect the two electrode pads; a catalyst metal layer formed on the heating element of the first electrode; and a carbon nanotube connected to the second electrode by horizontally growing from the catalyst metal layer; wherein the heating elements are separated from the substrate by etching the substrate under the heating elements of the first and the second electrodes.
Samsung Electronics Co., Ltd.
H Y H B H Y
H01L Y10S H01L B82Y H01L Y10S
inventional additional inventional inventional additional additional
Jun-hee Andrei
Choi Zoulkarneev