Posz Law Group, PLC
Transfer system
In a transfer system, at least one of a plurality of process apparatuses is connected to a station as a connected process apparatus. A station control unit controls a transfer device provided in the station through a communication with a process apparatus control unit to load the processing object to the connected process apparatus from the station and to unload the processing object from the connected process apparatus to the station. The station control unit controls the transfer device to begin unloading of the processing object from the connected process apparatus to the station after receiving a signal indicative of a presence of the processing object to be unloaded from the process apparatus control unit.
DENSO CORPORATION MURATA MACHINERY, LTD.
H G G H G G Y
H01L G05B G05B H01L G05B G05B Y02P
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Kenji Masaaki Toshihiro Keisuke
Ota Kuroyanagi Okumura Yoshida