Young & Thompson
Semiconductor device
In a pair of adjacent stack contact and stack contact in the semiconductor device, the plugs and the plugs are disposed so that a center-to-center distance of the plugs extending through a second interlayer insulating film, which is thicker than the first interlayer insulating film, is larger than a center-to-center distance of the plugs extending through the first interlayer insulating film.
Renesas Electronics Corporation
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Akio
Ohno