Maschoff Brennan
Laser source device, extreme ultraviolet lithography device and method
A device includes a laser source, an amplifier, an optical sensor and a spectrometer. The laser source is configured to produce a seed laser beam. The amplifier includes gain medium and a discharging unit. The discharging unit is configured to pump the gain medium for amplifying power of the seed laser beam. The optical sensor is coupled to the amplifier and configured for sensing an optical emission generated in the amplifier while the gain medium is discharging. The spectrometer is coupled with the optical sensor and configured to measure a spectrum of the optical emission.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Henry Yee-Shian Hsin-Liang Cheng-Chieh Louis Chun-Lin Li-Jui Wen-Chih Po-Chung Jeng-Yann
Tong Chen Chen Chang Chen Wang Cheng Tsay