Hogan Lovells US LLP
Laser system and laser light generation method
A laser system in this disclosure may include: a master oscillator configured to output pulsed laser light, a coherence reduction optical system configured to reduce coherence of the pulsed laser light from the master oscillator, and a controller configured to control the coherence reduction optical system so that a speckle of the pulsed laser light varies.
Gigaphoton, Inc.
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Osamu Shuntaro Takashi
Wakabayashi Watanabe Onose