Sughrue Mion, PLLC
Multi-layer waveguide structure having spaced apart first and second signal units of different widths and heights
A waveguide of a multi-layer metal structure and a manufacturing method thereof are provided, the method including applying a plurality of metal layers on a substrate and a plurality of insulating layers respectively between the respective metal layers. Accordingly, it is possible to minimize conductive loss by dispersing current uniformly through wide regions between a signal line and ground lines.
Seoul National University Industry Foundation Samsung Electronics Co., Ltd.
H H Y H
H01P H01P Y10T H01P
inventional inventional additional inventional
Cheol-gyu Jung-han Young-hwan Young-woo Dong-hyun Sung-tae Woo-yeol
Hwang Choi Kim Kwon Lee Choi Choi