Sughrue Mion Pllc.
Semiconductor probe with high resolution resistive tip and method of fabricating the same
A semiconductor probe with a high-resolution tip and a method of fabricating the same are provided. The semiconductor probe includes: a cantilever doped with a first impurity; a resistive convex portion projecting from an end portion of the cantilever and lightly doped with a second impurity opposite in polarity to the first impurity; and first and second electrode regions formed on either side of the resistive convex portion and heavily doped with the second impurity.
Samsung Electronics Co., Ltd. Seoul National University Industry Foundation
G G B
G01Q G01Q B82Y
inventional inventional inventional
Seung-bum Jun-soo Ju-hwan Hyung-cheol
Hong Kim Jung Shin