Fay, Sharpe, Beall, Fagan, Minnich & McKee
Surface defect inspection device and shading correction method therefor
 A surface defect inspection device according to the present invention is provided with an average value calculating means in which an article corresponding to an object to be inspected having a multiplicity of substantially uniformly distributed standard particles deposited thereon is scanned in a main scanning direction as a defect inspection object, detection values of the standard particles at every detecting pixel are obtained based on detection signals obtained from an optical sensor at respective scanning positions while assuming the standard particles as being defects and average values of every detecting pixel with regard to the detection values obtained at the respective scanning positions are calculated, and a shading correction means in which detection values of every detecting pixel obtained when the object to be inspected is inspected are subjected to shading correction for every detecting pixel based on the calculated average values of every detecting pixel. 
Hitachi Electronics Engineering Co., Ltd.
G
G01N
inventional
Tetsuya Hisato Yoshio
Watanabe Nakamura Morishige