Wenderoth, Lind & Ponack
Method of making a cantilever stylus for use in an atomic force microscope
 A cantilever stylus suited for use in an atomic force microscope is made in the following processes: forming a first film on a substrate; forming a second film of metallic material on an external surface of the first film; forming a photoresist film on an external surface of the second film by making use of a photolithography technique; performing etching with respect to the second film with only a portion thereof covered with the photoresist film left on the first film; and further performing etching with respect to the first film with the second film being used as a resist film so that the first film may be configured into a cantilever stylus. 
Matsushita Electric Industrial Co., Ltd. Agency of Industrial Science and Technology
G
G01Q
inventional
Hirofumi Hiroyuki Nobuhiro Takao
Yamada Kado Tsuda Tohda