Crowell & Moring LLP
Conductive interface system between vacuum chambers in a charged particle beam device
An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.
Hitachi High-Technologies Corporation
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Takaaki Katsuya Masashi Katsunori Seiichi Masahiro
Nishimori Aibara Fujita Onuki Shindo Tsunoda