One LLP
Electronic substrates and interposers made from nanoporous films
An electronic substrate or interposer comprising nanoporous films, such as anodic aluminum oxide, containing vertically etched openings (“vias”) that are filled with a conductive material, forming a high density collection of vertically oriented vias that conduct electricity from one side of the substrate to the other.
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
H H H H H H H H H H H H H H H H H H H H H H H
H01L H01L H01G H01L H01L H01L H01L H01L H01G H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
additional additional additional inventional additional inventional additional additional inventional additional additional inventional additional inventional additional inventional additional inventional inventional inventional inventional additional inventional
Guann-Pyng Mark
Li Bachman