Blakely, Sokoloff, Taylor & Zafman LLP
Carrier mobility in surface-channel transistors, apparatus made therewith, and system containing same
A surface channel transistor is provided in a semiconductive device. The surface channel transistor is either a PMOS or an NMOS device. Epitaxial layers are disposed above the surface channel transistor to cause an increased bandgap phenomenon nearer the surface of the device. A process of forming the surface channel transistor includes grading the epitaxial layers.
Intel Corporation
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Ravi Gilbert Jack T. Marko Mantu
Pillarisetty Dewey Kavalieros Radosavljevic Hudait