Boyle Fredrickson S.C.
Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode
An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.
Bruker Nano, Inc.
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Chunzeng Ji Weijie Stephen C. Lin Chanmin Shuiqing Jianli Henry Yan
Li Ma Wang Minne Huang Su Hu He Mittel Hu