Armstrong Teasdale LLP
Directional solidification furnace for reducing melt contamination and reducing wafer contamination
A directional solidification furnace includes a crucible for holding molten silicon and a lid covering the crucible and forming an enclosure over the molten silicon. The crucible also includes an inlet in the lid for introducing inert gas above the molten silicon to inhibit contamination of the molten silicon.
MEMC Singapore Pte. Ltd.
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C30B Y10T C30B C30B C30B
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Jihong (John) Lee W. Steven L. Richard G.
Chen Ferry Kimbel Schrenker