Slater and Matsil, L.L.P.
Capacitor for interposers and methods of manufacture thereof
Capacitor designs for substrates, such as interposers, and methods of manufacture thereof are disclosed. In an embodiment, a capacitor is formed between a through via and a lower level metallization layer. The capacitor may be, for example, a planar capacitor formed on the substrate or on a dielectric layer formed over the substrate.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chun Hua Wen-Chih Der-Chyang Shang-Yun Shin-Puu
Chang Chiou Yeh Hou Jeng