Calfee, Halter & Griswold LLP
Method for manufacturing an array substrate, display panel and display device
A method for manufacturing an array substrate, a display panel and a display device are provided. The method includes forming a semiconductor layer, a gate insulating layer, a gate and an inter-layer insulator successively on a base substrate; forming via holes in the inter-layer insulator so as to expose portions of the semiconductor layer; performing plasma bombardment to the portions of the semiconductor layer exposed in the via holes; forming a source electrode and a drain electrode coupled with the semiconductor layer through the via holes respectively on the inter-layer insulator.
BOE TECHNOLOGY GROUP CO., LTD.
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Guoying Jianhua Wei Jiangbo
Wang Du Liu Chen