Maschoff Brennan
Method of controlling chemical concentration in electrolyte and semiconductor apparatus
A method of controlling chemical concentration in electrolyte includes measuring a chemical concentration in an electrolyte, wherein the electrolyte is contained in a tank; and increasing a vapor flux through an exhaust pipe connected to the tank when the measured chemical concentration is lower than a control lower limit value.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Yu-Chi Chu-Ting Yung-Chang You-Fu
Tsai Chang Huang Chen