Low cost programmable multi-state device
A one time programmable (OPT) and multiple time programmable (MTP) structure is constructed in a back end of line (BEOL) process using only one, two or three masks. The OTP/MTP structure can be programmed in one of three states, a pre-programmed high resistance state, and a programmable low resistance state and a programmable very high resistance state. In the programmable low resistance state, a barrier layer is broken down during an anti-fuse programming so that the OTP/MTP structure exhibits resistance in the hundred ohm order of magnitude. In the very high resistance state a conductive fuse is blown open during programming so that the OTP/MTP structure exhibits resistance in the mega-ohm order of magnitude. The OTP/MTP structure may include a magnetic tunnel junction (MTJ) structure or a metal-insulator-metal (MIM) capacitor structure.
QUALCOMM Incorporated
G H G H H G G H G G H H G G H
G11C H01L G11C H01L H01L G11C G11C H01L G11C G11C H01L H01L G11C G11C H01L
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional inventional inventional
Seung H. Xia
Kang Li