Morgan, Lewis & Bockius LLP
2,2,4,4-tetrasilylpentasilane and its compositions, methods and uses
A compound that is 2,2,4,4-tetrasilylpentasilane, chemical compositions comprising same, methods of making and purifying 2,2,4,4-tetrasilylpentasilane, the purified 2,2,4,4-tetrasilylpentasilane prepared thereby, and methods of forming silicon-containing materials using 2,2,4,4-tetrasilylpentasilane as a precursor.
JIANGSU NATA OPTO-ELECTRONIC MATERIALS CO. LTD.
H H C C H B H C H H C C C
H01L H01L C23C C23C H01L B05D H01L C01B H01L H01L C23C C07F C09D
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Xiaobing
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