Integrated circuit containing DOEs of GATE-snake-open-configured, NCEM-enabled fill cells
Wafers, chips, or dies that contain fill cells with structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). Such NCEM-enabled fill cells may target/expose a variety of open-circuit, short-circuit, leakage, or excessive resistance failure modes, including GATE-snake-open and/or GATE-snake-resistance failure modes. Such wafers, chips, or dies may include Designs of Experiments (“DOEs”), comprised of multiple NCEM-enabled fill cells, in at least two variants, all targeted to the same failure mode.
PDF Solutions, Inc.
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Nobuharu Conor Dennis Marcin Markus Andrzej Carl Hans Christopher Kimon Simone Sheng-Che John Stephen Hideki Rakesh Vyacheslav Sherry Jeremy Timothy Marci Tomasz Indranil Larg Kelvin Jonathan
Yokoyama O'Sullivan Ciplickas Strojwas Rauscher Strojwas Taylor Eisenmann Hess Michaels Comensoli Lin Kibarian Lam Matsuhashi Vallishayee Rovner Lee Cheng Fiscus Liao Brozek De Weiland Doong Haigh