Double hard-mask mill back method of fabricating a near field transducer for energy assisted magnetic recording
A method of forming a near field transducer (NFT) for energy assisted magnetic recording is disclosed. A structure comprising an NFT metal layer and a first hardmask layer over the NFT metal layer is provided A first patterned hardmask is formed from the first hardmask layer, the first patterned hardmask disposed over a disk section and a pin section of the NFT to be formed. An etch process is performed on the NFT metal layer via the first patterned hardmask, the etch process forming the NFT having the disk section and the pin section.
Western Digital (Fremont), LLC
G G G Y
G11B G11B G11B Y10T
inventional inventional additional additional
Guanxiong Yufeng Zhongyan Ge Wei
Li Hu Wang Yi Gao