Maschoff Brennan
Composite etch stop layers for sensor devices
A device and method for fabricating the same is disclosed. For example, the device includes a sensor having a front side and a back side, a metal interconnect layer formed on the front side of the sensor, an anti-reflective coating formed on the back side of the sensor, a composite etch stop mask layer formed on the anti-reflective coating wherein the composite etch stop mask layer includes a hydrogen rich layer and a compressive high density layer, and a light filter formed on the composite etch stop mask layer.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chao-Ching Yen-Ting Cheng-Hsien Sheng-Chan Yi-Ming Cheng-Han Yen-Chang
Chang Chou Chou Li Lin Lin Chen