Saliwanchik, Lloyd & Eisenschenk
Structure and fabrication of a microscale flow-rate/skin friction sensor
A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.
University of Florida Research Foundation, Inc.
G Y G
G01N Y10T G01N
inventional additional additional
David P. Vijay Jeremy Mark
Arnold Chandrasekharan Sells Sheplak