Christensen O'Connor Johnson Kindness PLLC
Nickel-silicon compound forming method, semiconductor device manufacturing method, and semiconductor device
A nickel-silicon compound forming method is disclosed which comprises forming nickel on at least one of only silicon and a compound containing silicon, and performing stepwise-heating of the nickel together with the at least one of only silicon and the compound containing silicon.
Semiconductor Technology Academic Research Center
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Mitsumasa Jeoung Chill Hiroyuki
Koyanagi Shim Kurino