Birch, Stewart, Kolasch & Birch, LLP
Micro-electromechanical device and manufacturing method thereof
A micro-electromechanical device includes a substrate, a first patterned conductive layer, a second patterned conductive layer and a first patterned blocking layer. The first patterned conductive layer is disposed on the substrate. The second patterned conductive layer is disposed on the first patterned conductive layer. The first patterned blocking layer is connected with the first patterned conductive layer and the second patterned conductive layer. In addition, a method of manufacturing the micro-electromechanical device is also disclosed.
Delta Electronics Inc.
B
B81C
inventional
Hsieh-Shen Huang-Kun Cheng-Chang Chao-Jui Tai-Kang Horng-Jou Zong-Ting
Hsieh Chen Lee Liang Shing Wang Yuan