Volentine & Whitt, PLLC
Spin-on glass composition, method of preparing the spin-on glass composition and method of forming a porous silicon oxide layer using the spin-on glass composition
A spin-on glass composition includes a solvent, about 3 to about 20 percent by weight of a porogen, and about 3 to about 20 percent by weight of a silsesquioxane oligomer represented by formula (1),where, in the formula (1), Y1 and Y2 independently represent a hydrolyzable alkoxy group, R represents a lower alkyl group, and n and m independently represent an integer in a range of one to nine both inclusive.
Samsung Electronics Co., Ltd.
H H C H C H
H01L H01L C09D H01L C03C H01L
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Jung-Ho Jun-Hyun Jung-Sik Mi-Ae
Lee Cho Choi Kim