Christensen Fonder Dardi, PLLC
Method for manufacturing a FinFET device
A method for manufacturing a FinFET device, including providing a substrate; implementing a source/drain doping on the substrate; etching the doped substrate to form a source region and a drain region; forming a fin channel between the source region and the drain region; and forming a gate on the Fin channel. The fin and the gate are formed after the source/drain doping is implemented on the substrate, so that the source/drain doping is done as a doping for a planar device, which ensures the quality of the source/drain coping and improves the property of the FinFET device.
Institute of Microelectronics, Chinese Academy of Sciences
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Yao Guilei Tao Jinbiao Junfeng Qing
Wang Wang Yang Liu Li Liu