Brinks Hofer Gilson & Lione
Exchange coupled film having improved current-carrying reliability and improved rate of change in resistance and magnetic sensing element using same
A seed layer having a chromium content in the range of 35 to 60 atomic percent and a thickness of 10 to 200 Å is deposited to have a single phase of the face-centered cubic structure by optimizing the sputtering conditions, etc. The surface of the seed layer maintaining the face-centered cubic structure exhibits improved wettability, and the rate of change in resistance ΔR/R can thereby be improved.
ALPS Electric Co., Ltd.
Y B H Y G B H G H G B H
Y10T B82Y H01F Y10T G01R B82Y H01F G11B H01F G11B B82Y H01F
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Masamichi Naoya
Saito Hasegawa