Antonelli, Terry, Stout & Kraus, LLP.
System for monitoring foreign particles, process processing apparatus and method of electronic commerce
A system for monitoring foreign matter includes a manufacturing line having plural process processing apparatuses, a production management system which manages the processing of workpieces in the manufacturing line, plural optical heads which monitor foreign matter in relation to at least one of the workpieces, and which provide an output signal indicative thereof, and at least one image signal processing unit provided in a lesser number than a number of the plural optical heads for processing the output signal therefrom.
Hitachi High-Technologies Corporation
G G Y
G01N G01N Y02P
inventional inventional additional
Hidetoshi Tetsuya Minori Takuaki
Nishiyama Watanabe Noguchi Sekiguchi