Oblon, Spivak, McClelland, Maier & Neustadt
Method for cleaning closed spaces with ultraviolet rays
 Cleaning a closed space such as safety cabinets, clean boxes, safes and wafer storage spaces are performed by irradiating a photoelectron emitting member with ultraviolet rays and/or other forms of radiation to emit photoelectrons into the closed space, electrically charging the fine particles in the closed space with the emitted photoelectrons, and removing the charged fine particles from the closed space. 
Ebara Research Co., Ltd.
B
B03C
inventional
Kazuhiko Hidetomo Naoaki Toshiaki
Sakamoto Suzuki Ogure Fujii