Muir Patent Law, PLLC
Semiconductor devices including resistor structures
A semiconductor device is provided including a resistor structure, the semiconductor device including a substrate having an upper surface perpendicular to a first direction; a resistor structure including a first insulating layer on the substrate, a resistor layer on the first insulating layer, and a second insulating layer on the resistor layer; and a resistor contact penetrating the second insulating layer and the resistor layer. The tilt angle of a side wall of the resistor contact with respect to the first direction varies according to a height from the substrate. The semiconductor device has a low contact resistance and a narrow variation of contact resistance.
SAMSUNG ELECTRONICS CO., LTD.
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Tae-yeol Hyon-wook Jun-soo Chung-hwan Seo-bum
Kim Ra Kim Shin Lee