Myers Bigel, P.A.
EUV light generator apparatus having a droplet generator configured to control a droplet position using a magnetic field
Described is an extreme ultraviolet (EUV) light generator apparatus. The EUV light generator apparatus includes a droplet nozzle, a central electromagnet including a central coil wound around the droplet nozzle, and a droplet generator including side electromagnets around the central electromagnet.
Samsung Electronics Co., Ltd.
H H
H05G H05G
inventional inventional
Insung Seungkoo
Kim Lee