CKC & Partners Co., Ltd.
Semiconductor device and method of manufacturing the same
A semiconductor device includes a substrate, a channel layer, a barrier layer, a source and a drain, a p-type nitride layer and a strain gate. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer. The source and the drain are respectively disposed at two sides of the barrier layer. The p-type nitride layer is disposed on the barrier layer. The strain gate is disposed over the p-type nitride layer for tuning a first strain of the channel layer and a second strain of the barrier layer.
National Taiwan Normal University
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Chun-Yen Yu-Chien Chun-Hu
Chang Chiu Cheng