Perkins Coie LLP
Monolithically configured spectroscopic instrument
A spectroscopic instrument includes a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element, the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and having a lateral offset from a rotational axis of the movable MEMS mirror.
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
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Heinrich Tino Jens
Grueger Puegner Knobbe