Oblon, McClelland, Maier & Neustadt, L.L.P.
Charged particle beam drawing apparatus and drawing data generation method
In one embodiment, a charged particle beam drawing apparatus includes a drawing unit that draws a pattern in a drawing area on a substrate and a control processing circuitry that controls the drawing unit via a process including receiving drawing data with a hierarchical correction map input to the control processing circuitry. The drawing data with the hierarchical map includes a plurality of files in which division maps are respectively described in files in units of subframes. Each division map includes dose correction information associated with corresponding one of blocks of the drawing area. The process further includes generating shot data by performing a data conversion process on the drawing data, reading a division map corresponding to a block in the area to be drawn from the hierarchical correction map, calculating a dose, and controlling the drawing unit based on the shot data and the calculated dose.
NuFlare Technology, Inc.
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additional inventional inventional additional
Saori Takao Kenichi Hironobu Yasuo Shigehiro Hideo Hiroshi Noriaki Shinji
Gomi Tamura Yasui Matsumoto Kato Hara Tsuchiya Yamashita Nakayamada Sakamoto