Banner & Witcoff, Ltd.
Metal oxide film and manufacturing method thereof, thin film transistor and array substrate
A metal oxide film and a manufacturing method thereof, a thin film transistor and an array substrate are provided. The manufacturing method of the metal oxide film includes: forming a metal oxide film on a base substrate; and supplying a negative ion to the metal oxide film for a preset time period by performing a anodization method, to convert a portion of metal ions in the metal oxide film into a metal oxide.
Hefei Xinsheng Optoelectronics Technology Co., Ltd. BOE Technology Group Co., Ltd.
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Heekyu Yuankui Wei Ning Ce Yingbin Wei
Kim Ding Li Liu Zhao Hu Song