Slater Matsil, LLP
Methods for forming STI regions in integrated circuits
A first Fin Field-Effect Transistor (FinFET) and a second FinFET are adjacent to each other. Each of the first FinFET and the second FinFET includes a semiconductor fin, a gate dielectric on sidewalls and a top surface of the semiconductor fin, and a gate electrode over the gate dielectric. The semiconductor fin of the first FinFET and the semiconductor fin of the second FinFET are aligned to a straight line. An isolation region is aligned to the straight line, wherein the isolation region includes a portion at a same level as the semiconductor fins of the first FinFET and the second FinFET. A continuous straight semiconductor strip is overlapped by the semiconductor fins of the first FinFET and the second FinFET. A Shallow Trench Isolation (STI) region is on a side of, and contacts, the semiconductor strip. The isolation region and the first STI region form a distinguishable interface.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Clement Hsinjen Jyh-Cherng Yi-Tang Chih-Yu Wei-Chun Chih-Sheng Chi-Yuan
Wann Sheu Lin Hsu Tsai Chang Shih