Wenderoth, Lind & Ponack, L.L.P.
Substrate holding apparatus, substrate holding method, and substrate processing apparatus
A substrate holding apparatus can meet the request for a smaller-sized compact apparatus while ensuring a sufficient immersion depth of a substrate in a processing liquid. The substrate holding apparatus includes: a substrate holder for supporting a substrate (W) by bringing a peripheral portion of a surface of the substrate (W) into contact with a first sealing member; and a substrate pressing section for lowering relative to the substrate holder so as to press the substrate (W) held by the substrate holder downward, thereby bringing a first sealing member into pressure contact with the substrate (W). The substrate pressing section is provided with a second ring-shaped sealing member which makes pressure contact with an upper surface of a ring-shaped holding section of the substrate holder, thereby sealing the peripheral region of the substrate pressing section.
Ebara Corporation
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H01L H01L H01L
inventional inventional inventional
Naoki Ryo Seiji Takahiro Yasuyuki Masahiko Kenichi Kenichi Teruyuki
Dai Kato Katsuoka Ogawa Motoshima Sekimoto Suzuki Kobayashi Watanabe