Patterson & Sheridan, L.L.P.
Die separation
Techniques for dicing wafer assemblies containing multiple metal device dies, such as vertical light-emitting diode (VLED), power device, laser diode, and vertical cavity surface emitting laser device dies, are provided. Devices produced accordingly may benefit from greater yields and enhanced performance over conventional metal devices, such as higher brightness of the light-emitting diode and increased thermal conductivity. Moreover, such techniques are applicable to GaN-based electronic devices in cases where there is a high heat dissipation rate of the metal devices that have an original non- (or low) thermally conductive and/or non- (or low) electrically conductive carrier substrate that has been removed.
SemiLEDS Optoelectronics Co., Ltd.
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Chao-Chen Feng-Hsu Chen-Fu Wen-Huang Chuong Anh Trung Tri Jiunn-Yi Hao-Chun Jui-Kang
Cheng Fan Chu Liu Tran Doan Chu Cheng Yen