Cantor Colburn LLP
Substrate testing cartridge and method for manufacturing same
The present invention relates to a substrate testing cartridge provided for simultaneously testing multiple substrates for which a substrate treatment process has been finished, and a method for manufacturing same. According to an embodiment of the present invention, a substrate testing cartridge comprises: a chuck member on which a substrate is placed; a probe card which contacts and tests the substrate and is positioned to face the chuck member with reference to the substrate; and coupling members which couple the substrate, the chuck member, and the probe card, wherein each coupling member comprises: a substrate coupling part which couples the substrate and the chuck member; and a chuck coupling part which couples the probe card and the chuck member.
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
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Sang Moo Kwang Hee Seung Joon Kyung Tae Sung Won
Lee Lee Lee Nam Choo