Wenderoth, Lind & Ponack, L.L.P.
Method for treating exhaust gas containing fluorine-containing compound
The present invention aims to provide exhaust gas treatment processes and systems capable of efficiently treating perfluoro-compounds (PFCs) for a long period. It also aims to provide exhaust gas treatment processes and systems capable of efficiently treating oxidizing gases such as F2, Cl2 and Br2; acidic gases such as HF, HCl, HBr, SiF4, SiCl4, SiBr4 and COF2; and CO in addition to PFCs.In order to attain these objects, an exhaust gas treatment process of the present invention is a process for treating an exhaust gas containing a fluorine-containing compound with a catalyst after solids in said exhaust gas have been separated, said catalyst being a &ggr;-alumina having a crystal structure showing diffraction lines having an intensity of 100 or more at the following five diffraction angles 2&thgr;: 33&deg;&plusmn;1&deg;, 37&deg;&plusmn;1&deg;, 40&deg;&plusmn;1&deg;, 46&deg;&plusmn;1&deg; and 67&deg;&plusmn;1&deg; measured by an X-ray diffractometer. An exhaust gas treatment process according to a preferred embodiment of the present invention is characterized in that at least one decomposition-assisting gas selected from H2, O2 and H2O is further added to the exhaust gas.
Ebara Corporation
B Y Y B
B01D Y02P Y02C B01J
inventional additional additional inventional
Yoichi
Mori