Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Method for detecting tip position of probe, alignment method, apparatus for detecting tip position of probe and probe apparatus
An probe tip position detecting method detects tip positions of a plurality of probes by using a tip position detecting device including a sensor unit for detecting tips of the probes and a movable contact body belonging to the sensor unit, the method used in inspecting electrical characteristics of an object to be inspected by bringing the object supported on a movable mounting table into electrical contact with the probes. The method includes a first step for moving the tip position detecting device by using the mounting table to thereby bring the contact the object into contact with the tips of the probes; a second step for further moving the mounting table to thereby move the contact body toward the sensor unit without causing elastic deformation to the probes; and a third step of determining a movement starting position of the contact body as the tip positions of the probes.
Tokyo Electron Limited
G
G01R
inventional
Masaru Hiroshi
Suzuki Yamada