Tung & Associates
Interlocking lid for wet bench
An interlocking lid which is suitable for a wet bench tank used in the processing of semiconductor wafer substrates. The interlocking lid includes a pair of lid panels typically provided with a clasp having elements for engaging and interlocking with each other when the lid panels are in a closed position. At least one of the lids may further include a beveled lid shoulder which facilitates runoff of liquids from and hinders pooling of liquids on the exterior surface of the lid.
Taiwan Semiconductor Manufacturing Co.
H H
H01L H01L
inventional inventional
Ming-Zhe Yuen-Sheng Yuan-Bang Chi-Shen
Chiang Hua Lee Yang