Tutunjian & Bitetto, P.C.
Forming gates with varying length using sidewall image transfer
A chip includes multiple first transistors in a first region and multiple second transistors in a second region. A gap between adjacent first transistors has a same width as a gap between adjacent second transistors. Gates of the second transistors have a length substantially the same as twice a length of two adjacent first transistors plus the distance between said two adjacent first transistors.
INTERNATIONAL BUSINESS MACHINES CORPORATION
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Juntao Kangguo Geng Qintao
Li Cheng Wang Zhang