Central California IP Group, P.C.
Thermal treatment system and method of performing thermal treatment and method of manufacturing CIGS solar cell using the same
Disclosed is a thermal treatment system which enables a uniform temperature distribution and a uniform concentration distribution of reaction gas in an entire reaction space for a thermal treatment process, a method of performing a thermal treatment, and a method of manufacturing a CIGS solar cell using the same, wherein the thermal treatment system may include a reaction chamber with a reaction space, an external chamber surrounding the reaction chamber, a door chamber provided to open or close the reaction space of the reaction chamber, and an air flow adjusting apparatus for circulation of an flow inside the reaction space of the reaction chamber, wherein the air flow adjusting apparatus includes a driving axis, an air flow suction unit connected with the driving axis, and an air flow discharging unit connected with the air flow suction unit.
Avaco Co., Ltd.
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Deok Woo Seok Jin Bong Cheol Min Hwan Jae Gun Jin Yeong Hee Chul Ki Young Suk Jin Jin U In Ha Jong Youb Sung Hwan
Han Lee Kim Kang Hwang Do Yang Jung Kim Seo Lee Jung Paeng