Tutunjian & Bitetto, P.C.
Surface nitridation in metal interconnects
Conductive contacts include a first conductor disposed within a first dielectric layer, the first conductor having a recessed area in least one surface. A second dielectric layer is formed over the first dielectric layer, comprising a trench positioned over the first conductor. A second conductor is formed in the trench and the recessed area to form a conductive contact with the first conductor.
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Lawrence A. Terry A. Chih-Chao Wei Roger A.
Clevenger Spooner Yang Wang Quon