Baker & Hostetler LLP
Method for fabrication of patterned micro/nano architectures using directional photo-fluidization of polymer
Disclosed is a method for fabrication of a patterned micro-architectural array by directional photo-fluidization of a polymer, which includes a process for formation of a micro-architectural array, the method comprising preparing a micro-fluidic device by bonding a rubber mold having a micro-pattern to a substrate, introducing a polymer solution to the micro-fluidic device, drying the polymer to form a polymer line array corresponding to a pattern of a micro-fluidic tube, inducing directional photo-fluidization by light radiation to control shape and size of the micro-architectural array, and applying metal to the polymer array having controlled structure by directional photo-fluidization then selectively removing the polymer, in order to transfer the shape of the polymer onto the micro-architectural array. Precisely controlled and various micro-architectures having different sizes as well as regular alignment shapes may be fabricated in large scale and parallel mode by transferring the foregoing controlled template onto the architecture.
Korea Advanced Institute of Science & Technology
Y B
Y10T B81C
additional inventional
Jung-Ki Seungwoo Jihye
Park Lee Lee