Birch, Stewart, Kolasch & Birch
Poly(para-T-butoxycarbonyloxystyrene) and method of making
 Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: ##STR1## which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution and development, meeting the requirements of resist materials. The method allows for simple preparation of such polymers. 
Shin-Etsu Chemical Co., Ltd.
C
C08F
inventional
Tomoyoshi Motoyuki Toru Fujio Osamu
Furihata Yamada Nakanishi Yagihashi Watanabe