Baker & Hostetler LLP
Exhaust gas abatement apparatus
A vacuum pump has a discharge port coupled to an abatement chamber for treating an exhaust gas discharged from a chamber of a manufacturing apparatus to make the exhaust gas harmless. The vacuum pump is coupled to a heat exchanger configured to heat an inert gas by using heat generated when the exhaust gas is treated to be made harmless in the abatement part. The inert gas heated by the heat exchanger is introduced into the vacuum pump.
Ebara Corporation
C B Y F B F B F
C23C B01D Y02C F04B B01D F23G B01D F04B
inventional inventional additional inventional additional inventional inventional inventional
Takashi Tetsuro Kohtaro Seiji Hideo Toyoji Toshiharu Yasuhiko Keiichi
Kyotani Sugiura Kawamura Kashiwagi Arai Shinohara Nakazawa Suzuki Ishikawa