McClure, Qualey & Rodack, LLP
Production method for an ultra-low-dielectric-constant film, and an ultra-low-dielectric-constant film produced thereby
The present invention relates to a production method for an ultra-low-dielectric-constant film, in which ratios are optimised in a mixed solution having a matrix consisting of a poly (alkyl silsesquioxane) copolymer and a porogen represented by Chemical formula 1, and in which this mixed solution is subjected to ultraviolet curing during a heat treatment. The ultra-low-dieletric-constant film of the present invention can be used as an intermediate insulating film for next generation semiconductors instead of the SiO2 dielectric films currently used, since pores of from 1 to 3 nm are uniformly distributed at from 10 to 30% and a very high degree of mechanical elasticity of from 10.5 to 19 GPa is achieved at a low dielectric constant from 2.12 to 2.4.
Industry-University Cooperation Foundation Sogang University
Y C Y C H H
Y10T C08G Y10T C09D H01B H01B
additional additional additional inventional inventional inventional
Seong-Gyu Bo ra Hyun Sang Bum Suk Hee-Woo
Min Shin Choi Kim Rhee