Rothwell, Figg, Ernst & Manbeck, P.C.
Plasma processing apparatus and upper electrode assembly
A plasma processing apparatus includes supporting members, connecting members and a sliding member. Each of the supporting members is partially disposed in a disc-shaped cooling plate and configured to support an upper electrode in a direction of gravity. Each of the connecting members is partially disposed in the cooling plate and extends in a diametrical direction of the cooling plate to be engaged with the corresponding supporting member. The sliding member is configured to slide the connecting members inward in the diametrical direction of the cooling plate, thereby pushing upward the supporting member and lifting the upper electrode to the cooling plate.
TOKYO ELECTRON LIMITED
H H C H
H01J H01J C23C H01J
inventional inventional inventional inventional
Shin Jun Young
Matsuura Chung