Systems and methods for forming ultra-shallow junctions
A method for forming a junction on a substrate includes removing a native oxide layer of a bulk material; doping an outer layer of the bulk material with molecular hydrogen to create a hydrogen-doped outer layer; and nano-doping the hydrogen-doped outer layer using one of boron or phosphorous to a target junction depth to create a nano-doped layer.
LAM RESEARCH CORPORATION
H H H H
H01L H01L H01L H01L
inventional inventional inventional inventional
Ivan Yunsang YounGi
Berry Kim Hong