Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATE-short-configured, and GATECNT-short-configured, NCEM-enables fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one GATECNT-short-related failure mode.
PDF Solutions, Inc.
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Simone Christopher Hans Nobuharu Andrzej Jonathan Conor Sherry Stephen Jeremy Timothy Dennis Marci Carl Vyacheslav Marcin Rakesh Hideki Markus Larg John Kimon Kelvin Sheng-Che Indranil Tomasz
Comensoli Hess Eisenmann Yokoyama Strojwas Haigh O'Sullivan Lee Lam Cheng Fiscus Ciplickas Liao Taylor Rovner Strojwas Vallishayee Matsuhashi Rauscher Weiland Kibarian Michaels Doong Lin De Brozek