Sensor and method of use
 A sensor has an electrode (120) that is movable along three mutually perpendicular axes (10, 11, 12). The sensor also has stationary over-travel limiting structures that restrict the movement of the electrode (120) along the three axes (10, 11, 12). 
Motorola, Inc.
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G01P G01P G01P
inventional additional inventional
Juergen A. Paul L. Guang X. Frank A. John E. Muh-Ling
Foerstner Bergstrom Li Shemansky, Jr. Schmiesing Ger