Bacon & Thomas, PLLC
Cadmium tin oxide multi-layer laminate and producing method thereof
A cadmium tin oxide (Cd1−xSnxO) multi-layer laminate is disclosed. The laminate comprises: a substrate; and a layer of Cd1−xSnxO which is not an epitaxial structure; wherein, the composition of Sn/(Cd+Sn) is 1˜20%. The method for producing the Cd1−xSnxO multi-layer laminate is also described here. The method comprises steps of: (a) providing metal or oxide targets for sputtering films of Cd1−xSnxO; and (b) sputtering films of Cd1−xSnxO from the targets onto the substrate; wherein the composition of Sn/(Cd+Sn) is 1˜20%.
Toth Information System, Inc. Industrial Research Technology Institute
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John R. Jassy Shian-Jy Shu-Hei Hung-Chiao Wen-Hsuan Lih-Ping Ren-Jye Tien-Heng
Rodgers Wang Wang Cheng Chao Wang Wu Huang