WPAT, P.C., Intellectual Property Attorneys
Semiconductor structure and method for operating the same
An integrated circuit (IC) and a method for operating the IC are provided. The IC comprises a device under test and a first heater. The first heater is located at a first side of the device and provides heat to control a temperature of the device. The first heater comprises a semiconductor device having a first doped region and a second doped region having a conductivity type opposite to that of the first doped region, the first doped region interfacing with the second doped region.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
G G G
G01R G01R G01R
inventional inventional inventional
Jiaw-Ren Shih-Hsin Jen-Hao Jhong-Sheng Ting-Sheng
Shih Chen Lee Wang Huang