Locke Lord LLP
Device for adjusting specific resistance value and method for adjusting specific resistance value
A resistivity adjustment device includes: a hollow fiber membrane module that is divided by a hollow fiber membrane into a liquid phase side area; a liquid supply pipe that communicates with the liquid phase side area; a liquid discharge pipe that communicates with the liquid phase side area; a gas supply pipe that communicates with the gas phase side area; a gas discharge pipe that communicates with the gas phase side area; a bypass pipe that communicates with the liquid supply pipe and the liquid discharge pipe to bypass the hollow fiber membrane module; and a first on-off valve that is connected to the gas discharge pipe and opens or closes a first passage inside the gas discharge pipe, wherein the first on-off valve opens the first passage to discharge water accumulated in the gas phase side area.
DIC Corporation
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Naoki Masato Kazumi
Hada Saito Oi