Canon U.S.A., Inc. IP Division
Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.
Canon Kabushiki Kaisha
H B Y B H Y H B
H04R B06B Y10T B81B H04R Y10T H04R B81C
additional inventional additional additional inventional additional inventional inventional
Chienliu
Chang