Sherr & Jiang, PLLC
Optofluidic lithography system, method of manufacturing two-layered microfluid channel, and method of manufacturing three-dimensional microstructures
An optofluidic lithography system including a membrane, a microfluidic channel, and a pneumatic chamber is provided. The membrane may be positioned between a pneumatic chamber and a microfluidic channel. The microfluidic channel may have a height corresponding to a displacement of the membrane and have a fluid flowing therein, the fluid being cured by light irradiated from the bottom to form a microstructure. The pneumatic chamber may induce the displacement of the membrane depending on an internal atmospheric pressure thereof.
SNU R&DB Foundation
G F B G G F B G B B B
G03F F15B B29C G03F G03B F15B B81C G03F B33Y B81C B29L
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Su Eun SeungAh Wook Sunghoon
Chung Lee Park Kwon