JCIPRNET
Method and system for substrate thinning
A method and a system for thinning a substrate are provided. The method includes at least the following steps. A liquid seal is provided at an interface between a chuck and a substrate disposed on the chuck. The substrate is thinned during the liquid seal is provided.
Taiwan Semiconductor Manufacturing Co., Ltd.
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H01L B24B H01L H01L H01L H01L H01L H01L B24B H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
additional inventional inventional additional inventional additional additional inventional inventional additional inventional additional additional additional additional inventional additional inventional inventional inventional additional additional additional additional additional additional additional additional additional inventional additional additional inventional additional
Szu-Wei Chin-Chuan Yi-Chao
Lu Chang Mao