Ion source with tubular cathode
Provided herein are approaches for increasing efficiency of ion sources. In some embodiments, an apparatus, such as an ion source, may include a chamber housing having a first end wall and a second end wall, and an extraction plate coupled to at least one of the first end wall and the second end wall. The extraction plate may include an extraction aperture. The apparatus may further include a tubular cathode extending between the first end wall and the second end wall.
Applied Materials, Inc.
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Christopher A. Peter Ajdin Nunzio Bon-Woong Frank You Chia Svetlana
Rowland Ewing Sarajlic Carbone Koo Sinclair Li Radovanov