Fish & Richardson P.C.
Nanoimprint lithography adhesion layer
A compound of Formula A-1: where n is an integer and R is C1-10 alkyl. In some cases, n is an integer of 1 to 20 or 5 to 15. R may be substituted or unsubstituted. An adhesive composition may include a compound of Formula A-1. The adhesive composition may include at least one of a crosslinker, a catalyst, and a solvent. An imprint lithography stack may include a substrate and an adhesion layer adhered to the substrate, where the adhesion layer includes a compound of Formula A-1. Forming an adhesion layer on an imprint lithography substrate includes disposing an adhesive composition on the imprint lithography substrate and polymerizing the adhesive composition to yield the adhesion layer on the substrate, where the adhesive composition includes a compound of Formula A-1, where n is an integer and R is C1-10 alkyl. 
Canon Kabushiki Kaisha
B C G B B G G
B29C C08G G03F B29L B29C G03F G03F
inventional inventional inventional additional inventional inventional inventional
Fen Weijun Timothy Brian
Wan Liu Stachowiak