Thomas, Kayden, Horstemeyer & Risley
System and method for multi-project wafer shuttle service
A system and method for MPW shuttle service. The system includes at least a first MPW shuttle reserving for a first group of device designs, a second MPW shuttle reserving for a second group of device designs, and a checking unit. The checking unit determines whether mask data for the first group has been provided by a cut off date for the first MPW shuttle, and exchanges a first target device design from the first group with a second target device design from the second group if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
Taiwan Semiconductor Manufacturing Co., Ltd.
G G G G
G06F G03F G06F G03F
inventional inventional additional inventional
Jen-Lin Chin Yung
Chao Chang