Semiconductor structure with capacitor landing pad and method of making the same
A semiconductor structure with a capacitor landing pad includes a substrate. A capacitor contact plug is disposed on the substrate. A capacitor landing pad contacts and electrically connects the capacitor contact plug. A bit line is disposed on the substrate. A dielectric layer surrounds the capacitor landing pad. The dielectric layer includes a bottom surface lower than a top surface of the bit line.
Fujian Jinhua Integrated Circuit Co., Ltd. UNITED MICROELECTRONICS CORP.
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inventional inventional inventional
Yu-Ching Ying-Chiao Hui-Ling Kuei-Hsuan Chien-Ting Shih-Fang Li-Wei
Chen Wang Chuang Yu Ho Tzou Feng