Hauptman Ham, LLP
Array substrates and optoelectronic devices
Disclosed is a method of forming array substrates having a peripheral wiring area and a display area. The method is processed by only three lithography processes with two multi-tone photomasks and one general photomask. In the peripheral wiring area, the top conductive line directly contacts the bottom conductive line without any other conductive layer. The conventional lift-off process is eliminated, thereby preventing a material (not dissolved by a stripper) from suspending in the stripper or remaining on the array substrate surface.
INNOLUX CORPORATION
H H G H
H01L H01L G02F H01L
inventional inventional inventional inventional
Cheng-Hsu
Chou