Fay, Sharpe, Beall, Fagan, Minnich & McKee
Method and apparatus for carrying a variety of products
 An apparatus for carrying a variety of products for effectively processing and carrying plural kinds of works such as semiconductor wafers includes a plurality of processing stations for processing plural kinds of works, a carriage system for carrying plural kinds of works, and a transfer system for delivering works between the carriage system and a processing station. A method for carrying a variety of products is realized in which the carriage system simultaneously carries plural kinds of works between the plurality of processing stations and stops at a predetermined position of the transfer system, whereas the transfer system identifies and delivers the desired kind of work to and from the carriage system. 
Hitachi, Ltd.
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Toyohide Hiroto Minoru Hiroshi Sadao Hiroyuki Takemasa
Hamada Nagatomo Ikeda Kikuchi Shimoyashiro Kawaji Iwasaki