Blakely Sokoloff Taylor & Zafman
Non-contact scanning apparatus using frequency response scheme and scanning method thereof
An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.
Electronics and Telecommunications Research Institute
B G
B82Y G01Q
inventional inventional
Eun Kyoung Sung Q Kang Ho Ki Bong Jun Ho Kyi Hwan Woo Sub
Kim Lee Park Song Kim Park Youm