Patterson & Sheridan, LLP
Method for front end of line fabrication
A method for removing native oxides from a substrate surface is provided. In at least one embodiment, the method includes supporting the substrate surface in a vacuum chamber and generating reactive species from a gas mixture within the chamber. The substrate surface is then cooled within the chamber and the reactive species are directed to the cooled substrate surface to react with the native oxides thereon and form a film on the substrate surface. The substrate surface is then heated within the chamber to vaporize the film.
Applied Materials, Inc.
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Joel M. Son Yu Xiaoxiong (John) Xinliang Jing-Pei (Connie) Sal Wei W. Mei Chien-Teh See-Eng Chiukin (Steven)
Huston Trinh Chang Yuan Lu Chou Umotoy Wang Chang Kao Phan Lai