Armstrong, Westerman, Hattori, McLeland & Naughton
Etching liquid for aluminium, method of etching aluminium and etched aluminium product
 Aluminum is etched with an etching liquid comprising an aqueous solution containing a hydrofluoride of an aliphatic primary, secondary or tertiary amine of a formula: EQU R.sub.1 --N(R.sub.3)--R.sub.2 where R.sub.1, R.sub.2 and R.sub.3 each represent H or an alkyl group, provided that at least one of R.sub.1, R.sub.2 and R.sub.3 is an alkyl group and that the total of carbon atoms in R.sub.1, R.sub.2 and R.sub.3 is 12 or less, and an oxidizing agent, to form a fine etched pattern which is not inferior to a pattern to be formed by copper etching. 
Oogi Chemical Industry Co., Ltd. Sharp Kabushiki Kaisha
C C Y
C23F C23F Y10S
inventional inventional additional
Hiroya Ichiro Kiyoshi Hideaki Masakatu
Ito Kohara Kondo Ishitobi Takaishi