McClure, Qualey & Rodack, LLP
Gas-supply system and method
A gas-supply system includes a gas container filled with gas, a gas flow controller coupled to the gas container via a first tube, and an operation device electrically connected to the gas flow controller. The gas-supply system further includes a pressure transducer installed on a second tube connected to the gas flow controller and configured to generate a pressure signal to the operation device according to the pressure of the gas in the second tube. The operation device is configured to generate a control signal to the gas flow controller according the pressure signal, and the gas flow controller is configured to adjust the flow rate of the gas in the second tube according to the control signal.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
C C C C Y Y
C23C C23C C30B C30B Y10T Y10T
inventional inventional inventional inventional additional additional
Pang-Ping Chun-Feng Yi-Chen Yung-Long Yi-Chao
Lo Hsu Wang Chen Chang