Tung & Associates
Calibration wafer and kit
A calibration wafer which is suitable for calibrating alignment of a transfer robot blade with respect to wafers in a loadlock chamber or input shuttle. The calibration wafer includes a circular wafer body on which is provided a pair of spaced-apart blade alignment lines which are used to properly align the transfer robot blade. The invention further includes a calibration kit for calibrating alignment of a polishing head with a pedestal, including a base plate for placement on the pedestal; a calibration plate for placement on the base plate; and a calibration circle provided on the calibration plate for aligning the polishing head with the pedestal.
Taiwan Semiconductor Manufacturing Co., Ltd
B H Y B
B24B H01L Y10S B24B
inventional inventional additional inventional
Cheng-Fang Tro-Hsu Tien-Chen Chih-Nan
Chang Lin Hu Chuang