Lowe Hauptman & Ham, LLP
Method and device for increasing fin device density for unaligned fins
A method for generating a layout for a device having FinFETs from a first layout for a device having planar transistors is disclosed. A plurality of elongate mandrels is defined in a plurality of active regions. Where adjacent active regions are partially-parallel and within a specified minimum spacing, connective elements are added to a portion of the space between the adjacent active regions to connect the mandrel ends from one active region to another active region.
Taiwan Semiconductor Manufacturing Company, Ltd.
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inventional inventional inventional inventional
Yi-Tang Ming-Feng Chih-Sheng Chien-Hsun
Lin Shieh Chang Wang