Process for making PMR writer with non-conformal side gaps
A process for manufacturing a PMR writer main pole with non-conformal side gaps is provided. The process may include depositing a stitch layer comprising a magnetic material and a second stitch layer material over a substrate, forming an air-bearing surface (ABS) region in a first damascene material, and forming a yoke region in a second damascene material. The first damascene material may include Aluminum Oxide (Al2O3). The second damascene material may include Silicon Dioxide (SiO2). Side gap regions may include SiO2.
Western Digital (Fremont), LLC
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Xiaoyu Zeyu Xiaotian Jinqiu Hai Ming Feng
Yang Ma Zhou Zhang Sun Jiang Liu