Grossman, Tucker, Perreault & Pfleger, PLLC
Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus
An oxygen detection method, includes: preparing a grid, an ion collector, and a filament in which an oxide are formed on a surface of metal; controlling a filament current flowing to the filament so that an emission current becomes constant; discharging thermionic electrons which are caused by heat generation by applying the filament current, and generating ions by ionizing a gas; capturing the ions with the ion collector; and detecting oxygen being present in a vacuum processing chamber by measuring a filament current value.
Ulvac, Inc.
G G
G01N G01M
inventional inventional
Takeshi Yasushi Toyoaki Hideki Yasufumi
Miyashita Nagata Nakajima Yoshizawa Uchida