Dority & Manning, P.A.
Chamber seasoning to improve etch uniformity by reducing chemistry
Processes for surface treatment of a workpiece are provided. In one example implementation, a method can include conducting a pre-treatment process on a processing chamber to generate a hydrogen radical affecting layer on a surface of the processing chamber prior to performing a hydrogen radical based surface treatment process on a workpiece in the processing chamber. In this manner, a pretreatment process can be conducted to condition a processing chamber to increase uniformity of hydrogen radical exposure to a workpiece.
Mattson Technology, Inc. Beijing E-Town Semiconductor Technology Co., Ltd.
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Qi Xinliang Hua
Zhang Lu Chung