Birch, Stewart, Kolasch & Birch, LLP
Coating device and method
A method for coating a film with more than two thicknesses in different sections of the film. A substrate is set on a turntable that spins regularly. A mask is set close to the substrate and a film is coated on the substrate by a coating source. The shape of the mask depends on the thickness of the film. The coating source is set opposite the turntable and the mask is set between the coating source and the turntable.
Prodisc Technology Inc.
C
C23C
inventional
An-Hwa Chih-Neng Ming-Hua
Yu Chang Chen