Oliff PLC
Method of manufacturing semiconductor chips
A method of manufacturing semiconductor chips includes: forming grooves on a front face side of a substrate; and forming grooves on a back face side of the substrate as defined herein, and in manufacturing conditions in which a variation range of a top section of the cutting member having a tapered tip end shape with no top face in the groove width direction changes from a range included in the groove on the front face side to a range away from the groove on the front face side as wear of the cutting member advances, the use of the cutting member is stopped before the variation range changes from the range included in the groove on the front face side to the range away from the groove on the front face side.
FUJI XEROX CO., LTD.
B H B H H
B28D H01S B28D H01L H01L
inventional inventional inventional inventional inventional
Tsutomu Kenji Takeshi Michiaki
Otsuka Yamazaki Minamiru Murata