Muncy, Geissler, Olds & Lowe, P.C.
Resonance structure of bulk acoustic wave resonator
A resonance structure of bulk acoustic wave resonator comprises a bottom electrode, a dielectric layer and a top electrode, wherein the dielectric layer is formed on the bottom electrode; the top electrode is formed on the dielectric layer. A resonance area is defined by the overlapping area of the projection of the bottom electrode, the dielectric layer and the top electrode. The resonance area has a contour. The contour includes at least three curved edges and is formed by connecting the at least three curved edges. Each curved edge is concave to a geometric center of the contour.
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Re Ching Chih-Feng Yung-Chung Chia-Ta
Lin Chiang Chin Chang