Haynes and Boone, LLP
Beam monitoring device, method, and system
A beam monitoring device, method, and system is disclosed. An exemplary beam monitoring device includes a one dimensional (1D) profiler. The 1D profiler includes a Faraday having an insulation material and a conductive material. The beam monitoring device further includes a two dimensional (2D) profiler. The 2D profiler includes a plurality of Faraday having an insulation material and a conductive material. The beam monitoring device further includes a control arm. The control arm is operable to facilitate movement of the beam monitoring device in a longitudinal direction and to facilitate rotation of the beam monitoring device about an axis.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chih-Hong Chi-Ming Nai-Han Chun-Lin Chin-Hsiang
Hwang Yang Cheng Chang Lin