Nixon Peabody LLP
Method for producing mixed gas and gas mixing device
This gas mixing device includes a main gas flow path, an additive gas flow path, a mixing section, and a flow rate control unit. A pilot type pressure regulating unit configured to regulate pressure of a main gas based on a pressure in the additive gas flow path and a mass flow meter configured to detect the flow rate of the main gas flow path are provided on the main gas flow path. An additive gas flow rate regulator configured to regulate a flow rate of an additive gas is provided on the additive gas flow path. The flow rate control unit controls the flow rate of the additive gas using the additive gas flow rate regulator based on a flow rate of the main gas detected by the mass flow meter.
Nissan Tanaka Corporation
B B G B
B01F B01F G05D B01F
inventional inventional inventional inventional
Takashi Kazuhiko
Miyoshi Takamisawa