Canon U.S.A., Inc., IP Division
Manufacturing method of an electromechanical transducer
A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
Canon Kabushiki Kaisha
Y Y B B Y Y
Y10T Y10T B81C B81C Y10T Y10T
additional additional inventional additional additional additional
Chienliu Ayako
Chang Kato