Banner & Witcoff, Ltd.
Method for processing polysilicon thin film and method for fabricating thin film transistor
A method for processing a polysilicon thin film and a method for fabricating a thin film transistor are provided. The method for processing a polysilicon thin film includes: etching the polysilicon thin film using etching particles. An angle between an incident direction of the etching particles and the polysilicon thin film is larger than 0° and less than 90°.
BOE Technology Group Co., Ltd.
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Xiaolong Dong Zheng Jian Huijuan
Li Li Liu Min Zhang