Coating compositions
Developable bottom antireflective coating compositions are provided.
MERCK PATENT GMBH
C G C C G G G C G C C C Y G G Y C Y
C07C G03F C07C C07D G03F G03F G03F C07C G03F C07C C07C C07C Y10S G03F G03F Y10S C07C Y10S
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Alberto Francis Lin Meng
Dioses Houlihan Zhang Li