Duane Morris LLP
Stocker utilization self-balancing system and method
A method for operating a plurality of stockers, comprises the steps of: monitoring utilization of the plurality of stockers, each stocker capable of storing a plurality of wafer, LCD or reticle containers; and automatically transferring a first wafer, LCD or reticle container from a first one of the stockers to a second one of the stockers if the utilization of the first stocker is greater than a predetermined thereshold.
Taiwan Semiconductor Manufacturing Co., Ltd.
G H G G G Y Y H
G05B H01L G05B G05B G05B Y02P Y10S H01L
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Yu-Chi Wei-Yu Yung-Chang
Chen Lai Peng