F. Chau & Associates, LLC
Thin film transistor array panel and method for manufacturing the same
A thin film transistor array panel includes an insulating substrate. A gate line is formed on the insulating substrate and has a gate electrode. A gate insulating layer is formed on the gate line. A semiconductor layer is formed on the gate insulating layer and overlaps the gate electrode. Diffusion barriers are formed on the semiconductor layer and contain nitrogen. A data line crosses the gate line and has a source electrode partially contacting the diffusion barriers and a drain electrode partially contacting the diffusion barriers and facing the source electrode. The drain electrode is on the gate electrode. A pixel electrode is electrically connected to the drain electrode.
Samsung Electronics Co., Ltd.
H H
H01L H01L
inventional inventional
Xin-Xing O-Sung Chang-Oh Do-Hyun Dong-Hoon
Li Seo Jeong Kim Lee