Heating and cooling device
A heating and cooling device including: an airtight processing chamber openable to load a member-to-be-processed in the airtight processing chamber; a transfer apparatus to adjust a distance between the member-to-be-processed and a cooling unit that cools the member-to-be-processed, by moving the member-to-be-processed and/or the cooling unit; an induction heating apparatus to heat the member-to-be-processed, including a induction heating coil; a cooling apparatus to cool the member-to-be-processed by cooling the cooling unit; a temperature sensor to determine a temperature of the member-to-be-processed; and a controller to control the induction heating apparatus and the cooling apparatus based on the temperature determined by the temperature sensor.
FUJI ELECTRIC CO., LTD.
B H B H H H H H H B H H H H H H B H H H H H H H B H
B23K H01L B23K H01L H01L H01L H01L H01L H01L B23K H01L H01L H01L H01L H01L H01L B23K H01L H01L H05K H01L H01L H01L H01L B23K H01L
inventional additional inventional additional inventional additional additional additional additional additional additional additional inventional inventional inventional additional inventional inventional additional additional additional additional additional additional inventional inventional
Takenori Masahiro Takeshi Shoji Yoshio Masahiro Masaki Mitsuhiro Hiroaki
Wada Momose Matsushita Yokoyama Igarashi Kikuchi Takeuchi Naruse Nakahara