Greer, Burns & Crain, Ltd.
Waste liquid treating apparatus
A waste liquid treating apparatus includes a waste liquid accommodating unit for waste water discharged from a processing apparatus. A waste liquid filter unit filters the waste liquid in that tank to purify the waste liquid into fresh water. A fresh water reservoir tank reserves the fresh water obtained by filtering the waste liquid by the waste liquid filter unit. A pure water producing unit purifies the fresh water reserved in the fresh water reservoir tank into pure water, and a temperature control unit controls the pure water obtained by purifying the fresh water by the pure water purifying unit to a predetermined temperature. A bubble water seal type pump sucks at least bubbles generated in the waste liquid filter unit, and a sealing water reservoir tank reserves the bubbles sucked by the bubble water seal type pump as a waste liquid.
DISCO CORPORATION
C H C B C C C C B B C B Y
C02F H01L C02F B01D C02F C02F C02F C02F B01D B01D C02F B01D Y02P
inventional additional additional inventional additional additional inventional additional additional inventional additional inventional additional
Masaru Tadaomi
Saito Matsumoto