Greer, Burns & Crain, Ltd.
Pressure detecting apparatus for measuring pressure based on detected capacitance
 A capacitance-based pressure detecting apparatus detects a pressure applied to a diaphragm based on a capacitance which varies depending on the change in portion of the diaphragm. The pressure detecting apparatus comprises a diaphragm which changes position depending on a differential pressure between a first pressure and a second pressure, a first electrode which is provided opposite a first plane of the diaphragm and forms, together with the diaphragm, a first capacitor, a second electrode which is provided opposite a second plane of the diaphragm and forms, together with the diaphragm, a second capacitor, a third capacitor altering a capacitance according to the first pressure, a detecting unit for detecting the capacitance of the first through third capacitors, and an operation unit for obtaining a pressure applied to the diaphragm based on the capacitance of the first and second capacitors, and amending the obtained pressure based on the capacitance of the third capacitor. 
Fuji Electric Co., Ltd.
G G
G01L G01L
inventional inventional
Michihiko Nobuhisa Takahiro Kimihiro Masato Shuji
Tsuruoka Kato Kudo Nakamura Takahashi Tsukamoto