Thomas, Kayden, Horstemeyer & Risley
Method and apparatus of uninterrupted slurry supply
 A method and an apparatus of uninterrupted slurry supply. A plurality of polishers are provided. A slurry supply system comprises a slurry supply source, a plurality of valve boxes having a corresponding number as the polishers, a plurality of pipes to connect the valve boxes and the slurry supply source and the valve boxes and the polishers, a plurality of bypasses to connect between an inlet and an outlet of each of the valve boxes, and a plurality elbow type manually controlled three-way valve at a plurality of joints of the pipes and the bypasses. A slurry is supplied from the slurry supply source. A flowing direction of the slurry is selected by adjusting the three-way valve to supply the polishers for polishing. 
United Silicon Incorporated
B B
B24B B24B
inventional inventional
Kwo-An Yu-Hao Daniel
Chiang Chen Chiu