Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
Method for measuring height, non-transitory computer readable medium storing a program for measuring height, and height measuring apparatus
There are provided a method for measuring a height by a height measuring apparatus including: obtaining, in advance, a height correction value depending on an inclination angle of a surface of the object as an angle correction data; obtaining, from the height value of each pixel of the imaging device, the inclination angle of the surface of the object which corresponds to each pixel position of the imaging device; obtaining the height correction value, which corresponds to the inclination angle obtained, from the angle correction data; and correcting the height value of the surface of the object, which corresponds to each pixel of the imaging device, by using the height correction value obtained.
NIKON CORPORATION
G G
G01B G01B
inventional inventional
Masaya Yasuo
Yamaguchi Suzuki