Spensley Horn Jubas & Lubitz
Focused ion beam apparatus
 A focussed ion-beam apparatus, to realize the simultaneous observation of both the brighter area and the darker area on the sample, which are generated because of the difference in the generation efficiency of the secondary charged particle due to the ion-beam irradiation. According to the result in the comparison of the output signal from the secondary charged particle detector with the reference voltage, to optimize the signal above as the input signal for the image display. To realize the simultaneous observation of both the brighter area and the darker area of the sample. 
Seiko Instruments Inc.
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H01J H01J H01J
inventional additional inventional
Toshiaki Yasuhiko
Fujii Sugiyama