Lowe Hauptman Ham & Berner LLP
Sensor structure and method of fabricating the same
Provided is a sensor structure comprising a heater and a temperature sensor at the center of a membrane having a well structure, allowing a temperature to be rapidly controlled with low power, and the object is analyzed using a conductivity change measured at two or more substrate temperatures with a pair of detecting electrode and a detecting layer implemented on the heater, wherein the sensing layer can include a conductive particle and a non-conductive organic composite.
Electronics and Telecommunications Research Institute
G
G01N
inventional
Seung Chul Yoon Seok Yong Shin Young Jun Hae Sik Yun Tae
Ha Yang Kim Kim Yang Kim