Device comprising multi-layered thin film having excellent adhesive strength and method for fabricating the same
A device comprises a multi-layered thin film having excellent adhesion due to the method of fabricating the same. More particularly, the device includes a multi-layered thin film consisting of a tantalum nitride layer, a tantalum layer formed on the tantalum nitride layer, and a gold thin film formed on the tantalum layer.
Samsung SDI Co., Ltd. Seoul National University Industry Foundation
H H H
H01L H01L H01L
additional additional inventional
Jae-Jeong Jin-Goo Oh-Joong Ju-Yong Ho-Jin
Kim Ahn Kwon Kim Kweon