JCIPRNET
Stocking system
A stocking system is provided. The stocking system includes a wafer carrier, a stocking unit, a plurality of pod stoppers and at least one positioning pin. The stocking unit is configured to store the wafer carrier, and includes a carrying plate for carrying the wafer carrier. The pod stoppers stand on an edge of the carrying plate. The at least one positioning pin is disposed on a front portion of the carrying plate, such that the wafer carrier leans against the at least one positioning pin and is tilted toward a back portion of the carrying plate.
Taiwan Semiconductor Manufacturing Company, Ltd.
B H
B65G H01L
inventional inventional
Hsiang-Yin Guan-Cyun Chi-Feng Fu-Hsien
Shen Li Tung Li