Lee & Morse, P.C.
Methods of manufacturing capacitor structures and methods of manufacturing semiconductor devices using the same
A capacitor structure includes a plurality of lower electrodes on a substrate, the lower electrodes having planar top surfaces and being arranged in a first direction to define a lower electrode column, a plurality of lower electrode columns being arranged in a second direction perpendicular to the first direction to define a lower electrode matrix, a plurality of supports on upper sidewalls of at least two adjacent lower electrodes, a dielectric layer on the lower electrodes and the supports, and an upper electrode on the dielectric layer.
Samsung Electronics Co., Ltd.
H H H H H H
H01G H01G H01L H01G H01L H01L
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Yun-Sung Nam-Jung Yong-Il Dae-Ik
Lee Kang Kim Kim