Myers Bigel, P.A.
Semiconductor devices having a supporter and methods of fabricating the same
Provided are semiconductor devices and methods of fabricating the same. The semiconductor devices include an interlayer insulating layer on a semiconductor substrate, contact pads on the semiconductor substrate and penetrating the interlayer insulating layer, a stopping insulating layer on the interlayer insulating layer, storage electrodes on the contact pads, upper supporters between upper parts of the storage electrodes, side supporters between the storage electrodes and the upper supporters, a capacitor dielectric layer on the storage electrodes, the side supporters, and the upper supporters, and a plate electrode on the capacitor dielectric layer.
Samsung Electronics Co., Ltd.
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H01L H01L H01L
inventional inventional inventional
Seung-Jun Young-Seung Kyung-Eun Dae-Ik
Lee Cho Kim Kim