Method to improve device performance for FinFET
A method includes providing a semiconductor structure comprising multiple fins and a gate structure on the fins. The method also includes removing a portion of the fins not covered by the gate structure to form a remaining portion of the fins, performing a first epitaxially growth process to form first epitaxially grown regions on the remaining portion of the fins, performing a first annealing process so that an upper portion of the first epitaxially grown regions is greater than a lower portion, performing a second epitaxially growth process on the annealed first epitaxially grown regions to form second epitaxially grown regions, and performing a second annealing process on the second epitaxially grown regions, so that an upper portion of the second epitaxially grown regions is greater than a lower portion. The second epitaxially grown regions are separated from each other before and after the second annealing process.
Semiconductor Manufacturing International (Beijing) Corporation Semiconductor Manufacturing International (Shanghai) Corporation
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Yong
Li