Antonelli, Terry Stout & Kraus
Method and apparatus for analysis of gases using plasma
 In the analysis of a specimen gas for at least one impurity, the specimen is fed to a microwave-induced plasma and the plasma is analyzed for the impurity. The plasma is formed by gases fed to it via an inner tube and an outer tube around said inner tube. The specimen is fed in undiluted form via the inner tube and a second gas which may be a standard gas is fed via the outer tube. The specimen gas and the second gas have compositions which are the same as to at least 75% by volume, e.g. are both air. A variety of analysis processes is made available. 
Hitachi, Ltd.
H H
H01J H01J
inventional inventional
Toyoharu Katuo Yukio Hiromi Masataka
Okumoto Kawachi Okamoto Yamashita Koga