Seyfarth Shaw LLP
Compound semiconductor transistor and high-Q passive device single chip integration
An integrated compound semiconductor circuit including a high-Q passive device may include a compound semiconductor transistor. The integrated compound semiconductor circuitry may also include a high-Q inductor device. The integrated compound semiconductor may further include a back-end-of-line interconnect layer electrically contacting the high-Q inductor device and the compound semiconductor transistor, the back-end-of-line interconnect layer comprising a gold base layer and a copper interconnect layer.
QUALCOMM Incorporated
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Gengming Bin Xia
Tao Yang Li