Dummy patterns
A semiconductor layout pattern includes a device layout pattern, a plurality of rectangular first dummy patterns having a first size, a plurality of rectangular second dummy patterns having second sizes, and a plurality of bar-like third dummy patterns having varied third sizes. The pattern densities are smartly equalized by positioning the second dummy patterns.
UNITED MICROELECTRONICS CORP.
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Hsiang Jian-Cheng Chen-Hua Yao-Jen Heng-Kun Chin-Yueh
Yang Chen Tsai Fan Chen Tsai