Collard & Roe, P.C.
Thin film transistor and manufacturing method thereof, display substrate and display device
A thin film transistor and a manufacturing method thereof, a display substrate and a display device are provided. The method of manufacturing the thin film transistor comprises forming an active layer (4) having characteristics of crystal orientation of C-axis on a substrate (1) by using indium gallium zinc oxide (InGaO3(ZnO)m), where m≧2. The active layer fabricated with InGaO3(ZnO)m has a good electron mobility, and the quality of the fabricated active layer is improved.
BOE Technology Group Co., Ltd.
H C C H H H H C H C H C H C C H H H H C H H H
H01L C23C C23C H01L H01L H01L H01L C23C H01L C23C H01L C23C H01L C23C C23C H01L H01L H01L H01L C23C H01L H01L H01L
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Dongfang Jiangbo
Wang Chen