Flehr Hohbach Test Albritton & Herbert LLP
Method for processing a plurality of micro-machined mirror assemblies
 A method for processing a plurality of mirror assemblies formed together from a silicon wafer. The method includes the steps of exposing the mirror assemblies to an acid release etch to produce released mirror assemblies and rinsing the released mirror assemblies to produce washed mirror assemblies. The washed mirror assemblies are dried to produce dried mirror assemblies and the dried mirror assemblies are mounted onto a mounting tape to produce mounted mirror assemblies. The mounted mirror assemblies are diced or scribed to produce a plurality of separated mirror assemblies, which are separated from the mounting tape so as to produce a plurality of discrete mirror assemblies. 
Seagate Technology, Inc.
B G G G G G G
B82Y G11B G11B G11B G11B G11B G02B
inventional inventional additional inventional inventional inventional inventional
Kathy J. John H. Joseph D.
Jackson Jerman Drake