Ladas & Parry
High quality factor MEMS silicon hinge and slot-cut resonator for a vibratory gyroscope
A resonant structure comprising at least two coaxial rings, wherein adjacent coaxial rings have adjacent peripheries and are attached together by a plurality of connection structures regularly arranged along said adjacent peripheries; and wherein a first ring has a first ring portion with a first radial thickness and a second ring, portion, in a vicinity of a first connection structure, with a second radial thickness smaller than said first radial thickness.
HRL Laboratories, LLC
G G B
G01C G01C B81B
inventional inventional additional
David T. Hung Logan D. Raviv Chia-Ming “Gavin” Lian X.
Chang Nguyen Sorenson Perahia Chang Huang