Baker Botts LLP
Method for fabricating thin film transistor including crystalline silicon active layer
The invention provides a method for fabricating a TFT including a crystalline silicon active layer. The inventive method forms a metal offset region between the metal layer used to induce the cystallization of the active layer and the channel region of the TFT without introducing an additional process such as photoresist processing. Therefore, the inventive method improves the performance and manufacturing productivity of TFT and lower its production cost as well.
H H
H01L H01L
inventional inventional
Seung Ki Seok-Woon
Joo Lee