Kinney & Lange, P.A.
Method of producing metal electrode, array substrate and method of producing the same, display device
The present disclosure relates to a metal electrode, an array substrate and a method of producing the same, and a display device. In an embodiment, the method includes: forming a protection layer on a metal layer; patterning the protection layer to form a protection pattern, a profile of the protection pattern being the same as a profile of a predetermined pattern of the metal electrode; and etching a part of the metal layer not covered by the protection pattern to form the metal electrode, the metal electrode being covered by the protection pattern, wherein an etching anisotropy of the protection layer is larger than an etching anisotropy of the metal layer.
BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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Wenqing Huibin Mingxuan Yongzhi Xiaoxiang Zumou Xiaolong
Xu Guo Liu Song Zhang Wu Li