Maschoff Brennan
Wafer container and method for holding wafer
A wafer container includes at least one shelf and a frame. The shelf is capable of holding at least one wafer, and has at least one opening therein. The opening is at least partially exposed by the wafer when the wafer is hold by the shelf. The frame carries the shelf and allows access to the shelf.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Hung-Wen Yan-Hong Wen-Han Po-Hsun
Chen Liu Tan Tseng