Lithographic objective having a first lens group including only lenses having a positive refractive power
A projection objective includes a first lens group (G1) of positive refractive power, a second lens group (G2) of negative refractive power and at least one further lens group of positive refractive power in which a diaphragm is mounted. The first lens group (G1) includes exclusively lenses of positive refractive power. The number of lenses of positive refractive power (L101 to L103; L201, L202) of the first lens group (G1) is less than the number of lenses of positive refractive power (L116 to L119; L215 to L217) which are mounted forward of the diaphragm of the further lens group (G5).
Carl Zeiss Semiconductor Manufacturing Technologies AG
G G G G G G
G02B G02B G02B G02B G02B G03F
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Karl-Heinz Alexander
Schuster Epple