Thomas, Kayden, Horstemeyer & Risley
Electrostatic chuck assembly having disassembling device
A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.
Taiwan Semiconductor Manufacturing Co,, Ltd.
H C C
H01L C23C C23C
inventional inventional inventional
Ching-Sun Cheng-Yua Yen-Bo Jen Chian-Kuo Neo-Feng Huan-Wen Cheng-Liang Ray Chi-Ching
Lee Chuang Huang Wei Huang Chiou Lai Chang Chuang Lo