Muir Patent Law, PLLC
Semiconductor device and method of manufacturing the same
A substrate structure may include a base substrate, a plurality of unit substrate regions arranged on the base substrate in one or more rows and one or more columns and spaced apart from one another, and dummy substrate regions between the unit substrate regions. In a row direction or a column direction, a first pitch between central points of two adjacent unit substrate regions among the unit substrate regions and a second pitch between central points of two adjacent second unit substrate regions among the unit substrate regions are different from each other.
SAMSUNG ELECTRONICS CO., LTD.
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additional additional additional additional inventional additional inventional additional additional additional additional additional inventional inventional additional additional additional additional additional additional additional inventional additional inventional additional inventional inventional additional additional inventional additional additional inventional inventional inventional additional additional additional additional additional additional additional additional additional additional additional additional additional additional additional additional additional
Yu-duk Da-hee Shle-ge Kyong-soon
Kim Park Lee Cho