Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including merged-via open configured fill cells, and the second DOE including snake open configured fill cells
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of merged-via opens, and the second DOE contains fill cells configured to enable NC detection of snake opens.
PDF Solutions, Inc.
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Marci Indranil Conor Tomasz Andrzej Vyacheslav Stephen Jonathan Marcin Kelvin Hideki Jeremy John Rakesh Nobuharu Dennis Larg Kimon Markus Hans Christopher Sheng-Che Sherry Simone Timothy Carl
Liao De O'Sullivan Brozek Strojwas Rovner Lam Haigh Strojwas Doong Matsuhashi Cheng Kibarian Vallishayee Yokoyama Ciplickas Weiland Michaels Rauscher Eisenmann Hess Lin Lee Comensoli Fiscus Taylor