Substrate transfer chamber and container connecting mechanism with lid opening mechanisms
A substrate transfer chamber for unloading the substrates from the containers includes a housing-shaped main body and a plurality of container connecting mechanisms to which the containers are connected. In the main body, some of the container connecting mechanisms are arranged on top of one another in a height direction of the main body.
Tokyo Electron Limited
H B H
H01L B65G H01L
inventional additional inventional
Shinji Keisuke Sensho
Wakabayashi Kondoh Kobayashi