Kim & Stewart LLP
Method of manufacturing a semiconductor device, and a semiconductor substrate
According to one embodiment, there is provided a method of manufacturing a semiconductor device which includes forming an alignment mark in a planned cutting line region of a first surface of a semiconductor substrate, forming a stacked structure above the first surface of the semiconductor substrate, removing the portion of the stacked structure present above the alignment mark, aligning the substrate in the lithography process, by causing infrared light to pass through the semiconductor substrate from a second surface thereof which is on a side opposite to the first surface thereof and performing positional alignment for exposure of a resist pattern based on the location of the alignment mark using infrared light reflected from the alignment mark, and exposing the resist, opening a pattern in the exposed resist, and further processing the semiconductor substrate using the resist pattern.
TOSHIBA MEMORY CORPORATION
H B H H H H H H H H H H H
H01L B81C H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
additional additional inventional inventional additional inventional additional inventional inventional additional inventional inventional inventional
Shinya Keisuke
Watanabe Taira