Lexyoume IP Meister, PLLC
Method of manufacturing stamp for plasmonic nanolithography apparatus and plasmonic nanolithography apparatus
There is provided a method of manufacturing a stamp for a plasmonic nanolithography apparatus. The method includes forming metal patterns on a substrate, coating a hydrophobic thin film on external surfaces of the metal patterns to hydrophobic processing the external surfaces of the metal patterns, selectively hydrophilic processing only the external surfaces of the metal patterns, laminating a buffer layer on the substrate and the metal patterns, and transcribing the metal patterns and the buffer layer from the substrate to a base formed of light transmission material to be combined with the base.
Korea Institute of Machinery & Materials
B B B B B G G G
B81C B32B B81C B82Y B82Y G03F G03F G03F
inventional inventional additional inventional inventional inventional inventional inventional
Eung-Sug Joo Yun Jae Won Jun Hyuk
Lee Jung Hahn Choi