Crowell & Moring LLP
Charged particle beam device for moving an aperture having plurality of openings and sample observation method
A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. A charged particle beam device having: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).
Hitachi High-Technologies Corporation
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Toshie Hideki Hirokazu Takashi Keitaro Yoshifumi Akinari
Yaguchi Kikuchi Tamaki Dobashi Watanabe Taniguchi Hanawa