Scanning probe having micro-tip, method and apparatus for manufacturing the same
The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.
NATIONAL INSTITUTE OF METROLOGY, CHINA
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Zhen-Dong Si-Tian Wei
Zhu Gao Li