Davis Wright Tremaine LLP
Metal indentation to increase inter-metal breakdown voltage
A first depression and a second depression are formed in an upper surface of a first metal layer. A dielectric layer is formed over the first metal layer. Subsequently, a wide trench is formed in the dielectric layer, the wide trench extending deeper in a first outer region and in a second outer region than in a central region located between the first outer region and the second outer region, the first outer region overlying the first depression and the second outer region overlying the second depression.
SanDisk Technologies LLC
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Noritaka Masami Shunsuke Kiyokazu Yuji Takuya Katsuo
Fukuo Uozaki Watanabe Shishido Takahashi Futase Yamada