Lee & Morse, P.C.
Method of manufacturing a dielectric film in a capacitor
A method of manufacturing a dielectric layer for a capacitor including sequentially supplying and purging a first and a second precursor material for a first and a second predetermined amount of time, respectively, in an initial cycle, sequentially supplying and purging the first and the second precursor materials for a third predetermined amount of time, which is shorter than the first and/or second predetermined amount of time, in a post cycle, which follows the initial cycle, and repeating the initial and post cycles to form a dielectric layer having a predetermined thickness.
Samsung Electronics Co., Ltd.
H H H H C H C
H01L H01L H01L H01L C23C H01L C23C
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Young-min Jung-hee Jong-bom Jae-hyoung Sung-ho Seog-min
Kim Chung Seo Choi Kang Lee