Locke Lord LLP
Process for producing an amorphous carbon film
The process for producing an amorphous carbon film of the present invention is a process for producing an amorphous carbon film comprising contacting a surface of a substrate S with bubbles B which have been formed in a liquid L containing an organic compound and inside which plasma has been generated, so as to form an amorphous carbon film on the surface of the substrate S, and the liquid L contains one or more selected from phenols and alcohols having a carbon number of from 1 to 12. According to the present invention, a hard amorphous carbon film can be formed easily.
Kabushiki Kaisha Toyota Jidoshokki Ehime Univeristy
B B H H B C B H
B01J B01J H05H H05H B01J C23C B01J H05H
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Hiromichi Toshihisa Makoto Shinfuku Hitotoshi Hiroshi
Toyota Shimo Kuramoto Nomura Murase Yamashita