McDermott Will & Emery LLP
Circuit-pattern inspecting apparatus and method
A circuit pattern inspection apparatus and inspection method facilitate the creation of a recipe and the confirmation of a defect. The apparatus and method employ a dialogue-based operation for the creation of a recipe and the confirmation of a defect. Input items (such as contrast, calibration, etc.) for the recipe creation and their purposes are clarified. Input items (such as clustering, filtering, etc.) for the defect confirmation and their purposes are also clarified. The results obtained on the basis of these inputs are registered in the recipe.
Hitachi High-Technologies Corporation
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G01N G01N G01N
additional inventional additional
Masayoshi Hirokazu
Takeda Ito