Duane Morris LLP
Method and structure for automated inert gas charging in a reticle stocker
At least a first reticle is stored in a housing of a stocker. A first gas is delivered to the housing. At least one reticle pod having an additional reticle is delivered into a enclosure within the housing of the stocker. A second gas different from the first gas is delivered to the enclosure. The reticle pod is automatically retrieved from the enclosure. The delivery and retrieval of the reticle pod and delivery of the first gas and the second gas are automatically controlled.
Taiwan Semicondutor Manufacturing Co., Ltd.
G G G Y G
G05B G05B G03F Y02P G05B
inventional additional inventional additional additional
Yung-Ho Chih-Wei Wen-Chieh Wei-Cheng
Chen Huang Tsou Wang