Lee & Sterba, P.C.
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates
A process chamber used in the manufacture of a semiconductor device for etching a material layer on a semiconductor wafer includes an electrostatic chuck for holding the semiconductor wafer, and an annular edge ring which surrounds the side of the semiconductor wafer on the electrostatic chuck to prevent the semiconductor wafer from departing from its original position. The annular edge ring has a first side which faces the side of the semiconductor wafer and contacts firmly with the side of the semiconductor wafer.
Samsung Electronics Co., Ltd.
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Jae-hyun Sun-hoo Sung-bum Shin-woo Jong-wook Young-koo Jeong-hyuck Jin-sung Hee-duk Jang-eun Jung-hun Ju-hyuck
Lee Park Cho Nam Choi Lee Park Kim Kim Lee Cho Chung