Oblon, McClelland, Maier & Neustadt, L.L.P.
Semiconductor device
A semiconductor device includes: a semiconductor substrate, a first portion and a second portion of an upper layer portion of the semiconductor substrate being conductive; an insulating member electrically isolating the first portion from the second portion; a first stacked body provided in a region directly above the second portion, the first stacked body including first insulating films and electrode films stacked alternately; a semiconductor pillar provided inside the first stacked body and extending in a stacking direction; a charge storage film provided between the semiconductor pillar and the electrode films; a second stacked body provided in a region directly above the first portion, the second stacked body including second insulating films and third insulating films stacked alternately; and two first conductive pillars provided inside the second stacked body extending in the stacking direction, lower ends thereof being connected to the first portion.
TOSHIBA MEMORY CORPORATION
H H H H H H H
H01L H01L H01L H01L H01L H01L H01L
inventional additional inventional inventional inventional additional inventional
Hiroki Shun
Yamashita Shimizu