Plasma developable photoresist composition with polyvinyl formal binder
 A photosensitive composition useful as a photoresist which may be completely processed by dry techniques, especially by means of an oxygen plasma. The composition includes an N-vinylmonomer and an organic hydrogen compound in a binder which contributes significantly to the utility of the composition in the fabrication of micro-electronic devices. 
Horizons Research Incorporated
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Eugene F. James M.
McInerney Lewis