Muncy, Geissler, Olds & Lowe, P.C.
Method of growing diamond thin film
The present invention is directed to a method of growing thin film diamond. Since there are micro-grooves formed between internal grains of the heterogeneous substrate during lateral epitaxy growth, diamond seeds are allowed to be embedded in the micro-grooves; surface damage caused by scratching method or seeding method also can be prevented. As a result, a continuous diamond thin film with uniform thickness and high quality can be obtained.
NATIONAL CHIAO TUNG UNIVERSITY
C C C C C C
C30B C30B C30B C30B C30B C30B
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Jr-Yu Yu-Chang Li
Chen Chen Chang