Schmeiser, Olsen & Watts, LLP
Device for measuring distribution of thermal field in crucible
A device for measuring distribution of thermal field in a crucible comprises a crucible comprising an upper lid, a body, a growth chamber and a material source zone; a thermally insulating material disposed outside the crucible; a movable heating component for heating the crucible; a plurality of thermocouples enclosed by insulating, high temperature resistant material and disposed in the crucible after being inserted into a plurality of holes on the upper lid to measure distribution of thermal field in the crucible. The thermocouples enclosed by insulating, high temperature resistant material are effective in measuring and adjusting temperature distribution in the crucible to achieve optimal temperature distribution for crystal growth in the crucible.
NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
C F C F C Y G H
C30B F27D C30B F27D C30B Y10T G01K H01L
inventional additional inventional inventional inventional additional inventional inventional
Cheng-Jung Tsao-Chun Bang-Ying Dai-Liang Chih-Wei Ying-Cong
Ko Peng Yu Ma Kuo Zhao