Antonelli, Terry, Stout & Kraus, LLP.
Measuring/inspecting apparatus and measuring/inspecting method enabling blanking control of electron beam
Technique capable of achieving shortening of settling time, which is caused by ringing, etc. of a blanking control signal is provided. A measuring/inspecting apparatus is configured to have a main blanking unit and a correction blanking control unit as a high-speed switching control unit of an electron beam. During the period of switching of a main blanking control signal from ON to OFF, a correction blanking control signal is applied in real time in synchronization with the switching. The ringing caused by the main blanking are corrected so as to be cancelled out by that, the settling time is shortened as a result.
Hitachi High-Technologies Corporation
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inventional additional additional inventional additional
Hisafumi Wen Hiroyuki Hajime
Imura Li Takahashi Kawano