Miles & Stockbridge, P.C.
Charged-particle beam system
A charged-particle beam system comprises: a charged-particle beam device containing a detection unit for detecting electrons generated by irradiating a sample with a charged-particle beam released from a charged particle source; and a signal detection unit in which a detection signal from the detection unit is input through a wiring. The signal detection unit comprises: a separation unit for separating into a rising signal and a falling signal the detection signal from the detection unit; a falling signal processing unit for at least eliminating ringing in the falling signal; and a combination unit generating and delivering a combined signal produced by combining the rising signal, which has been separated by the separation unit, with the falling signal wherefrom the ringing has been eliminated by the falling signal processing unit.
HITACHI HIGH-TECH CORPORATION
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Wen Akio Shunsuke Shahedul Hiroyuki Kazuki
Li Yamamoto Mizutani Hoque Takahashi Ikeda