F. Chau & Associates, LLC
Method of forming a conductive pattern and method of manufacturing an organic light-emitting display including the same
A conductive material layer for forming a conductive pattern is formed on a substrate. A photosensitive organic material layer is formed on the conductive material layer. The photosensitive organic material layer is irradiated through a halftone mask. The halftone mask includes a first mask region having a boundary corresponding to an edge of the conductive pattern, a second mask region, and a third mask region disposed between the first mask region and the second mask region. A first pattern including a first region corresponding to the first mask region and a second region corresponding to the third mask region is formed by removing the photosensitive organic material layer. The conductive material layer is etched using the first pattern as a hard mask to form the conductive pattern having exposed lateral surfaces. A second pattern is formed that covers the lateral surfaces of the conductive pattern by reflowing the first pattern.
SAMSUNG DISPLAY CO., LTD.
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Seungmin Jungkyu Taehyun Sangho
Lee Lee Kim Park