Birch, Stewart, Kolasch & Birch, LLP
Test structure and method of step coverage for optical waveguide production
Test structure and method of step coverage for optical waveguide production are disclosed. It combines the steps of producing the optical waveguide and the testing structure by forming the optical waveguide components on the chip and the test structure in the surrounding areas, so the optical waveguide and the test structure have the same upper covering layer. Etching solution is used for the etch testing of the test structure, and the step coverage of the upper covering layer for the optical waveguide is extrapolated by the etching result.
Industrial Technology Research Institute
G G
G02B G02B
additional inventional
Jing-Hung Yuh-Wen Po-Hao Kai-Hsiang Wen-Jiun
Chiou Lee Tsai Yen Liu