Crowell & Moring LLP
Liquid chemical for forming protecting film
Disclosed is a liquid chemical for forming a water-repellent protecting film on a wafer. The liquid chemical is a liquid chemical containing a water-repellent-protecting-film-forming agent for forming the water-repellent protecting film, at the time of cleaning the wafer which has a finely uneven pattern at its surface and contains at least at a part of a surface of a recessed portion of the uneven pattern at least one kind of matter selected from the group consisting of titanium, titanium nitride, tungsten, aluminum, copper, tin, tantalum nitride, ruthenium and silicon, at least on the surface of the recessed portion. The liquid chemical is characterized in that the water-repellent-protecting-film-forming agent is a water-insoluble surfactant. The water-repellent protecting film formed with the liquid chemical is capable of preventing a pattern collapse of the wafer, in a cleaning step.
Central Glass Company, Limited
C H C H H H H C H C C
C11D H01L C11D H01L H01L H01L H01L C11D H01L C11D C11D
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Masanori Shinobu Takashi Yoshinori Soichi Hidehisa
Saito Arata Saio Akamatsu Kumon Nanai