Adams & Wilks
Sample processing and observing method
There is provided a sample processing and observing method including irradiating a focused ion beam to a sample to form an observed surface, irradiating an electron beam to the observed surface to form an observed image, removing the surface opposite to the observed surface of the sample, forming a lamella including the observed surface and obtaining a transmission observed image for the lamella.
SII NanoTechnology Inc.
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Yo Toshiaki Xin Junichi Keiichi
Yamamoto Fujii Man Tashiro Tanaka