Jones Day
Method and manufacturing system
A method is provided. The method includes: assigning a buffer to a first wafer lot comprising a plurality of wafers according to a first trigger event associated with an equipment; and assigning a transporter to a second wafer lot comprising a plurality of wafers according to a second trigger event associated with the equipment.
Taiwan Semiconductor Manufacturing Company Limited
G C C C G C C C C Y G C G C C
G05B C07D C07D C07D G05B C07D C07D C07D C07D Y02P G05B C07D G05B C07D C07D
additional inventional inventional inventional additional inventional inventional inventional inventional additional inventional inventional inventional inventional inventional
Wei-Cheng Bing-Yuan Wen-Chi Wei-Pin Feng-Ning
Wang Cheng Chien Huang Lee