WPAT, PC
Tilting adjustable surface profilometer
The invention relates to a tilting adjustable surface profilometer, comprising an apparatus capable of adjusting an image acquiring angle. The apparatus includes two types of frameworks. One is a translation-stage-type tilting adjustable surface profilometer, which is enabled by the translations of two translation stage with the rotation of a rotary rack, a surface profile with an omni-directional angle of a sample can be obtained. The other framework is a surface profilometer with an arc-trajectory tilting apparatus, which is enabled by guiding the surface profilometer to slide along the arc rails with the rotations of the rotary rack, a surface profile with an omni-directional angle of a sample can be obtained.
Industrial Technology Research Institute
G
G01B
inventional
Ching-Ming Shih-Hsuan Hung-Ming Jin-Liang Shih-Fang
Yeh Kuo Tai Chen Lee