Morgan, Lewis & Bockius LLP
Electrochemical removal of aluminum nitride substrates for electronic and optoelectronic devices
In various embodiments, an electrochemical process is utilized to remove at least a portion of a substrate from multiple singulated or unsingulated electronic-device or optoelectronic-device dies. The dies may be attached to a submount for the removal process, and the dies may be immersed in or non-immersively contact an electrolyte during the removal process.
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Ken Jianfeng Leo J.
Kitamura Chen Schowalter