Westerman, Hattori, Daniels & Adrian, LLP
Method for manufacturing electronic grade synthetic quartz glass substrate
An electronic grade synthetic quartz glass substrate having a recess, channel or step is manufactured by machining at least one surface of a synthetic quartz glass substrate having a maximum birefringence of up to 3 nm/cm in its entirety to form a recess, channel or step, and removing the residual stress due to machining.
Shin-Etsu Chemical Co., Ltd.
C B B B
C03C B24B B24B B24B
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Hiroyuki Masaki Daiyu
Yamazaki Takeuchi Okafuji