Oliff PLC
Method of manufacturing a near-field light generator including a waveguide and a plasmon generator
In a method of manufacturing a near-field light generator, a structure including a core and a polishing stopper layer disposed on the top surface of the core is formed on a first cladding layer. Next, a cladding material layer is formed to cover the first cladding layer and the structure. The cladding material layer is then polished until the polishing stopper layer is exposed. Next, the polishing stopper layer is removed so that the cladding material layer has a protruding portion protruding upward to a higher level than the top surface of the core. The cladding material layer is then polished so as to remove the protruding portion and thereby make the cladding material layer into a second cladding layer. Then, a third cladding layer and a plasmon generator are formed.
Headway Technologies, Inc.
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G11B G11B G11B
inventional inventional additional
Seiichiro Shigeki Hironori Yoshitaka Hiroyuki Kazumasa
Tomita Tanemura Araki Sasaki Ito Yasuda