Thomas|Kayden
Low-pressure process apparatus
A low-pressure process apparatus for processing a substrate comprises a base, a stage, a housing and at least one first roller set. The stage is disposed on the base for supporting the substrate. The housing is detachably disposed on the base moving between a first position and a second position, wherein when the housing is in a first position, the housing and the base form a chamber to receive the stage. When the housing is detached, the first roller set contacts and supports the housing to facilitate movement thereof in a first horizontal direction.
Au Optronics Corp.
Y B H H H Y Y B H
Y10T B41N H01L H01L H01L Y10T Y10T B23P H01L
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Ting-Hui
Huang