Sughrue Mion, PLLC
Micro optical bench structure
A micro optical bench structure and a method of manufacturing a micro optical bench structure are provided. The micro optical bench structure includes: a lower substrate; an upper substrate which is bonded to the lower substrate, and has a through-hole for exposing the lower substrate; and a first optical device which is installed at the lower substrate, and units relating to the first optical device.
Samsung Electronics Co., Ltd.
H H G H G G
H01L H01S G11B H01S G11B G11B
additional additional inventional inventional inventional inventional
Yong-sung Seok-whan Woong-lin Hyung Jao-ho
Kim Chung Hwang Choi You