Lee & Morse, P.C.
Apparatus and method for measuring deposition rate
An apparatus for measuring a deposition rate includes a light source unit in a deposition region between a deposition source and a substrate in a vacuum chamber, the light source unit emits a monochromatic light toward a deposition material released from the deposition source, a photosensor unit that measures at least one of light absorption, scattering, and emission in the deposition region when light emitted from the light source unit passes through the deposition region, and a multi-pass forming unit defining a multi-pass path between the light source unit and the photosensor unit.
Samsung Display Co., Ltd.
G C G
G01N C23C G01F
inventional inventional inventional
Seung Mook Tae Min Young Suk
Lee Kang Cho