Canon USA Inc IP Division
Method of fabricating structure having out-of-plane angular segment
A structure fabricating method plastically deforms a target portion of a substrate, to thereby fabricate a structure having an inclined segment that is inclined relative to a principal surface of the substrate. The method includes forming a projection on the target portion to project from the principal surface of the substrate or from an opposing surface of the substrate on the side opposite to the principal surface, and applying a force to the projection to plastically deform the target portion such that the target portion is bent in a direction from one surface of the substrate on the side where the projection is formed, toward another surface on the side opposite to the one surface.
Canon Kabushiki Kaisha
B G Y Y Y Y Y B
B81C G02B Y10T Y10T Y10T Y10T Y10T B81C
inventional inventional additional additional additional additional additional additional
Chienliu Masao Yoshitaka
Chang Majima Zaitsu