Hauptman Ham, LLP
Liquid supply system with improved bubble venting capacity
A system for dispensing a liquid includes a filter adapted to filter a liquid and to provide a filtered liquid at a liquid outlet of the filter, and a tank having a liquid inlet coupled to the liquid outlet of the filter via a first pipe. The tank includes an upper portion having a first lateral dimension and a lower portion having a second lateral dimension less than the first lateral dimension. The upper portion of the tank is above the liquid inlet of the tank.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Chin-Kun Y. L. Li-Jen Yu Kai
Fang Huang Wu Chen