Eschweiler & Potashnik, LLC
Wave guide filter for semiconductor imaging devices
In some embodiments, an image sensor is provided. The image sensor includes a photodetector disposed in a semiconductor substrate. A wave guide filter having a substantially planar upper surface is disposed over the photodetector. The wave guide filter includes a light filter disposed in a light filter grid structure. The light filter includes a first material that is translucent and has a first refractive index. The light filter grid structure includes a second material that is translucent and has a second refractive index less than the first refractive index.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Keng-Yu Cheng Yu Chih-Kung Wen-Chien Kazuaki Chien-Hsien Chun-Hao Ting-Cheng Wen-Hau Wei-Chieh
Chou Huang Chang Yu Hashimoto Tseng Chuang Chang Wu Chiang