Myers Bigel Sibley & Sajovec, PA
Measuring device and measuring method
A measuring device may include a housing having an opening where a substrate is carried in; a first sensor including a first light output part emitting first light to the substrate and a first light receiving part sensing the first light reflected from the substrate; a second sensor including a second light output part emitting second light and a second light receiving part sensing the second light, wherein the second light is blocked out by the substrate being carried in the housing; and a controller calculating a vertical displacement of the substrate using the fact that the first light is reflected, calculating a horizontal displacement of the substrate using the fact that the second light is blocked out, and calculating a displacement error of the substrate carried in the housing with respect to a carry-in exact position of the substrate based on the vertical displacement and the horizontal displacement.
Samsung Electronics Co., Ltd.
H G G
H01L G01B G01B
additional inventional inventional
Heonyoung Hoonsik Seung-Joon Kyungsoo KwangJun
Lim Cho Lee Oh Park