Park, Vaughan, Fleming & Dowler LLP
Disk resonator based on a composite structure
An optical modulator is described. This optical modulator may be implemented using silicon-on-insulator (SOI) technology. In particular, the optical modulator may include a carrier-accumulation-type micro-disk resonator fabricated using optical waveguides having a composite structure. Moreover, the composite structure may embed a metal-oxide semiconductor capacitor in the disk resonator. For example, the composite structure may include polysilicon disposed on an oxide layer, which is disposed on a silicon layer in an SOI platform. The optical modulator may have high modulation efficiency and high-speed operation. In addition, the optical modulator may have a compact footprint with low power consumption.
ORACLE INTERNATIONAL CORPORATION
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Ashok V. Shiyun Ying Xuezhe
Krishnamoorthy Lin Luo Zheng