XY macro-micro motion stage and control method thereof based on end feedback
An XY macro-micro motion stage and a control method thereof based on end feedback. The XY macro-micro motion stage includes a fine-adjusting assembly, a macro-driving assembly and an XY position detecting device. The macro-driving assembly includes an X-direction macro-driving unit, a Y-direction macro-driving unit, an X-direction mounting plate and a Y-direction mounting plate. The XY position detecting device is configured to obtain its position on the X axis and Y axis.
GUANGDONG UNIVERSITY OF TECHNOLOGY
G B G G
G01B B23Q G01B G01B
inventional inventional inventional inventional
Junlang Jian Yun Lanyu Yunbo Xin
Liang Gao Chen Zhang He Chen