Anderson Kill & Olick
Volatile organometallic compound containing a divalent metal and a group 13 metal, process for preparing same, and process for preparing a heterometallic oxide film using same
 A novel organometallic compound of formula M[(.mu.-OR').sub.2 M'R.sub.2 ].sub.2 can be vaporized at a low temperature and advantageously employed in the CVD of a heterometallic oxide film of the MM'.sub.2 O.sub.4 type, wherein M is a divalent element such as Be, Mg, Zn or Cd; M' is a Group 13 element such as Al or Ga; and R and R' are each independently a C.sub.1-10, alkyl group, with the proviso that if M is Mg, M' is not Al. 
Korea Research Institute of Chemical Technology
C C C
C07F C23C C07F
inventional inventional inventional
Kyu-Sang Chang-Gyoun Su-Jin Yun-Soo Won-Yong
Yu Kim Ku Kim Koh