Lowe Hauptman & Ham, LLP
Method and pellicle mounting apparatus for reducing pellicle induced distortion
An apparatus for mounting a pellicle onto a mask is provided. In one embodiment, the apparatus comprises a base provided with a track; a dummy plate holder coupled to the base, the dummy plate holder for receiving a dummy plate having an elevated portion on one side thereof; a mask holder for receiving a mask, the mask holder slidably coupled to the base; a pellicle holder for receiving a pellicle frame, the pellicle holder slidably coupled to the base; and drive means being adapted to drive the pellicle holder along the track towards the dummy plate holder, wherein during operation when the pellicle frame is mounted onto the mask causing the mask to contact the dummy plate, the mounting pressure in the mask is distributed by way of the elevated portion in the dummy plate, thus reducing distortion in the mask.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G G G
G03F G03F G03B G03F
inventional inventional inventional inventional
Jong-Yuh Cheng-Ming Chia-Wei Boming Chien-Chao
Chang Lin Chang Hsu Huang