Servilla Whitney LLC
Shutter disk
Describes are shutter disks comprising one or more of titanium (Ti), barium (Ba), or cerium (Ce) for physical vapor deposition (PVD) that allows pasting to minimize outgassing and control defects during etching of a substrate. The shutter disks incorporate getter materials that are highly selective to reactive gas molecules, including O2, CO, CO2, and water.
Applied Materials, Inc.
H H H H H C H H H H H H H H H H H C H H H H H H H
H01L H01L H01L H01L H01L C23C H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L C23C H01L H01L H01L H01L H01L H01L H01L
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Ananthkrishna Junqi Sarath Yuichi Zhang Kelvin Yueh Sheng
Jupudi Wei Babu Wada Kang Boh Ow