Scully, Scott, Murphy & Presser, P.C.
Horizontal metal-insulator-metal capacitor
A horizontal metal-insulator-metal capacitor including a first metal spacer and a second metal spacer laterally separated by a dielectric material portion is provided within a single opening within at least one layer of dielectric material. A diffusion barrier material portion laterally separates sidewall surfaces of each metal spacer from a corresponding sidewall surface of the at least one layer of dielectric material provided by the opening. Each diffusion barrier material portion, each metal spacer and the dielectric material portion within the opening containing the horizontal metal-insulator-metal capacitor has a bottommost surface that is in contact with a recessed surface of the at least one layer of dielectric material.
International Business Machines Corporation
H H H
H01L H01L H01L
additional inventional inventional
Juntao Yunpeng Chih-Chao
Li Yin Yang