Trop, Pruner & Hu, P.C.
Optical heterodyne surface plasma wave detecting method and apparatus
In an optical heterodyne surface plasma wave detecting method and apparatus, light that contains correlated P1 and P2 wave components (TM waves) is directed to a total reflective component such that two surface plasma waves are generated at an interface of a metal film and a test object. Light reflected from the total reflective component is detected to obtain an optical heterodyne test signal that is compared with an optical heterodyne reference signal to determine changes in at least one of amplitude and phase of the optical heterodyne signal relative to the optical heterodyne reference signal.
G
G01N
inventional
Wen-Chuan Chen
Kuo Chou