Suiter Swantz pc llo
Method and system for controlling convective flow in a light-sustained plasma
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a bulb-less gas containment structure, and a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb-less gas containment structure. Further, the plasma is generated within a concave region of the collector element, where the collector element includes an opening through the collector element for propagating a portion of a plume of the plasma from a first region of the bulb-less gas containment structure to a second region of the bulb-less gas containment structure, wherein the first region of the bulb-less gas containment structure and the second region of the bulb-less gas containment structure are at least partially separated by a surface of the collector element.
KLA-Tencor Corporation
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David W. Anant Anatoly Ilya Kenneth P. Matthew Wei Jincheng
Shortt Chimmalgi Shchemelinin Bezel Gross Derstine Zhao Wang