JMB Davis Ben-David
Chemical mechanical polishing slurry
A chemical mechanical polishing slurry for polishing a stainless steel substrate is provided, which comprises a content 10˜50 wt % of abrasive particles, a content 0.001˜2.0 wt % of a coolant, a content 0.001˜1.0 wt % of an oxidant, a content 10˜5000 ppm of a lubricity improver, and a content 10˜5000 ppm of a foam inhibitor. A particle size of the abrasive particles is in a range of 20˜500 nm. The alkaline polishing slurry according to the present invention is capable of increasing the polishing performance, surface quality, and surface passivation effect after the chemical-mechanical polishing process.
UWIZ TECHNOLOGY CO., LTD.
C C C
C09K C09G C23F
inventional inventional inventional
Song Yuan Ming Hui Wen Cheng Yi Han Ming Che
Chang Lu Liu Yang Ho