WPAT, P.C., Intellectual Property Attorneys
Semiconductor structure and manufacturing method thereof
A semiconductor structure includes a first substrate, a second substrate, a first sensing structure over the first substrate, and between the first substrate and the second substrate, a via extending through the second substrate, and a second sensing structure over the second substrate, and including an interconnect structure electrically connected with the via, and a sensing material at least partially covering the interconnect structure.
TAIWAN SEMICONDUCTOR MANUFACTRUING COMPANY LTD.
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Chin-Min Chen Hsiung Cheng San
Lin Yang Chou