Preparation apparatus for silicon carbide crystals comprising a circular cylinder, a doping tablet, and a plate
A preparation apparatus for uniform silicon carbide crystals comprises a circular cylinder, a doping tablet, and a plate to stabilize and control the supply of dopants. The accessory does not participate in the reaction in the growth chamber but maintains its efficacy during growth. Finally, a single semi-insulating silicon carbide crystal with uniform electrical characteristics can be obtained.
National Chung-Shan Institute of Science and Technology
C C C C C C
C23C C30B C30B C30B C30B C23C
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Bang-Ying Dai-Liang Cheng-Jung Chih-Wei Hsueh-I Chia-Hung Bo-Cheng
Yu Ma Ko Kuo Chen Tai Lin