Test keys structure for a control monitor wafer
A test keys structure comprises a plurality of test keys in scribe lines of a control monitor wafer. Between 50 and 400 test keys are formed on the control monitor wafer, and each of the plurality of test keys has an area of at least 1E6μm2.
Taiwan Semiconductor Manufacturing Company, Ltd.
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H01L
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Yu-Chang Tien-Tzu Ming-Shuo Woan Tyng Hsien-Tsong Shion-Feng Chang
Chen Wen Yen Hwang Chen Chien