Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device
A manufacturing apparatus for a semiconductor includes a reaction chamber into which a wafer is introduced, gas supply unit for supplying a gas to the reaction chamber, gas exhaust unit for exhausting the gas from the reaction chamber, a holder for holding the wafer at an outer circumferential part of the wafer, a first heater for heating the wafer from below, a reflector provided above the holder, and a drive mechanism for driving the reflector.
NuFlare Technology, Inc.
C H C C C
C23C H01L C23C C30B C30B
inventional inventional inventional inventional inventional
Shinichi Hideki Hironobu
Mitani Ito Hirata