Womble Carlyle Sandridge & Rice LLP
Method for measuring temperature of film in reaction chamber
A method for measuring a temperature of a film in a reaction chamber is provided. The method includes: obtaining reflectivity sampling data R of a sampling point set in a detection area of the film for light with a wavelength λ, and thermal radiation value sampling data E of the sampling point set; obtaining a first correction factor α and a second correction factor γ according to values of at least two sampling data groups, wherein 0<α≦1, 0≦γ≦1; obtaining a blackbody radiation value Lb of the detection area of the film for the light with the wavelength λ according to the first correction factor α, the second correction factor γ and the values of the at least two sampling data groups; obtaining a temperature T of the detection area by looking up a table according to the blackbody radiation value Lb and the wavelength λ.
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
G
G01J
inventional
Lu Steven Zhehao Yanzhong Chaoqian Yousen
Chen Tianxiao Lee Chen Ma Zhang Li