Adams & Wilks
Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same
A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.
Riken & SII NanoTechnology Inc.
H H H H H H H
H01J H01J H01J H01J H01J H01J H01J
inventional additional inventional additional additional additional additional
Yoshinobu Kunji Toshiaki Kazuhito Minuru Masao Alekber Yu
Aoyagi Shigeto Fujii Tsukagoshi Kawamura Abe Kasumov