Pad conditioning tool
A pad conditioning tool includes a sapphire chip having a side surface defining a polishing surface and a plurality of sapphire grains formed on the polishing surface in an integral manner. Each of the sapphire grains had a three-dimensional geometric structure. The sapphire grains are arranged on the polishing surface in a specific form so as to possess a specific pattern.
TERA XTAL TECHNOLOGY CORPORATION
B B B B
B24B B24B B24D B24B
inventional inventional inventional inventional
Chuan-Lang Jun-Wen Tzu-Hsuan Kuang-Ling Wen-Yen
Lu Chung Dai Wei Shen