Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
Template forming method
According to one embodiment, there is provided a template forming method that transfers a pattern from a first template to a to-be-processed substrate and subjects the to-be-processed substrate to a processing process to form a second template by using an imprinting method, includes forming a first resist film on a pattern forming region on the to-be-processed substrate, selectively forming a second resist film on a mark forming region on the to-be-processed substrate, transferring a concavo-convex pattern formed on the first template to the first resist film, and processing the to-be-processed substrate with the first resist film to which the concavo-convex pattern is transferred and the second resist film used as a mask.
Kabushiki Kaisha Toshiba
B G B
B82Y G03F B82Y
inventional inventional inventional
Masato
Saito