Blakely, Sokoloff, Taylor & Zafman LLP
Block contact architectures for nanoscale channel transistors
A contact architecture for nanoscale channel devices having contact structures coupling to and extending between source or drain regions of a device having a plurality of parallel semiconductor bodies. The contact structures being able to contact parallel semiconductor bodies having sub-lithographic pitch.
Intel Corporation
H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L
additional additional inventional additional inventional inventional additional additional
Uday Mark L. Amlan Brian S. Justin K. Jack Robert S. Marko Suman
Shah Doczy Majumdar Doyle Brask Kavalieros Chau Radosavljevic Datta