Volentine & Whitt, PLLC
Organic aluminum precursor and method of forming a metal wire using the same
An organic aluminum precursor includes aluminum as a central metal, and borohydride and trimethylamine as ligands. In a method of forming an aluminum layer or wire, the organic aluminum presursor is introduced onto a substrate, and then thermally decomposed. The aluminum decomposed from the organic aluminum precursor is deposited on the substrate.
Samsung Electronics Co., Ltd.
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Tae-Sung Dong-Jun Youn-Joung Jung-Ho Kyoo-Chul Mi-Ae Jung-Sik Jun-Hyun
Kim Lee Cho Lee Cho Kim Choi Cho