Pillsbury Winthrop LLP
Acceleration sensor with ring-shaped movable electrode
 An acceleration sensor has a ring-shaped movable electrode connected to an anchor part via beams and a fixed electrode facing the ring-shaped movable electrode defining a specific interval, which are disposed on a substrate. The movable electrode is displaced by acceleration approximately in parallel to the substrate and contacts the fixed electrode, so that the acceleration is detected. The fixed electrode is divided into a detecting fixed electrode for contacting the movable electrode and a sensitivity controlling fixed electrode insulated from the detecting fixed electrode. Accordingly, potential differences between the movable electrode and the detecting fixed electrode and between the movable electrode and the sensitivity controlling fixed electrode are independently controlled to control sensitivity of acceleration. 
Denso Corporation
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G01P G01V H01H G01P G01P G01P B81B G01P G01P B81B
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Yoshinori Kazuhiko Inao Yasutoshi Makiko Minoru Minekazu Koji Seiichiro
Ohtsuka Kano Toyoda Suzuki Sugiura Murata Sakai Hattori Ishio