Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Heat treatment apparatus, heat treatment method, and recording medium storing computer program carrying out the same
An experiment is conducted in advance, for finding a temperature of a cooling plate attained as a result of balancing between a temperature of a substrate after heat treatment and a temperature of the cooling plate at the time of cooling of the substrate. Then, before heat treatment of a first substrate, the cooling plate is moved to a position above a hot plate, the cooling plate is heated to that temperature, and thereafter heat treatment of the substrate is started.
Tokyo Electron Limited
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inventional inventional inventional
Masami Shinji Hikaru
Yamashita Okada Ito