Sughrue Mion, PLLC
Test map classification method and fabrication process condition setting method using the same
A test map classification method includes modifying test data by converting to a test map including a wafer identifier, a coordinate, and data on whether a predetermined failure item occurs; calculating similarities of wafer pairs in the test map; performing similarity filtering to reset all the similarities, except for at least one similarity, on the basis of a predetermined wafer; determining whether there are similar wafers by comparing the filtered similarities with a reference value; and classifying spatial patterns using a similar relationship between the wafer pairs when there are similar wafers.
Samsung Electronics Co., Ltd.
H H
H01L H01L
inventional additional
Junghee Sunjae Jungyoon
Kim Lee Hwang