Harness, Dickey & Pierce, P.L.C.
Nanocrystalline graphene and method of forming nanocrystalline graphene
Provided are nanocrystalline graphene and a method of forming the nanocrystalline graphene through a plasma enhanced chemical vapor deposition process. The nanocrystalline graphene may have a ratio of carbon having an sp2 bonding structure to total carbon within the range of about 50% to 99%. In addition, the nanocrystalline graphene may include crystals having a size of about 0.5 nm to about 100 nm.
Samsung Electronics Co., Ltd.
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Changseok Seungwon Hyeonjin Keunwook Eunkyu Hyunjae Kyungeun Changhyun
Lee Lee Shin Shin Lee Song Byun Kim