MKG, LLC
Dummy pattern filling method
A dummy pattern filling method, including: Step I, determining the rule of filling dummy patterns, in accordance with required DR values and isolation rules of patterns; Step II, finding out blank Fields within said layout that need to be filled with dummy patterns; Step III, by following said rule of filling dummy patterns, filling dummy patterns within blank Fields on layouts. Implementing a Smart Dummy Pattern Filling, which enables the Data Ratio (DR) of dummy patterns to come infinitely close the required DR value after completing the filling of dummy patterns.
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
G G H
G06F G06F H01L
inventional inventional inventional
Hualun Weiran
Chen Kong