Pillsbury Madison & Sutro LLP
Semiconductor pressure sensor having strain gauges and stress balance film
 In a semiconductor pressure sensor having a diaphragm portion and strain gauges on the diaphragm portion, Al stress balance films are provided around the diaphragm portion to balance changes in stress of the strain gauges, which are produced by a change in temperature. As a result, sensor output is prevented from varying due to the change in temperature. 
Denso Corporation
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Yasutoshi Inao Hiroaki
Suzuki Toyoda Tanaka