Hauptman Ham, LLP
Method, device and computer program product for integrated circuit layout generation
A method performed at least partially by a processor includes performing an air gap insertion process. The air gap insertion process includes sorting a plurality of nets of a layout of an integrated circuit in an order, and inserting, in accordance with the sorted order of the plurality of nets, air gap patterns adjacent to the plurality of nets. The method further includes generating a modified layout of the integrated circuit. The modified layout includes the plurality of nets and the inserted air gap patterns.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
G G
G06F G06F
inventional inventional
Chia-Ming Wen-Hao Adari Rama Bhadra Kuang-Hung Meng-Kai Ke-Ying Hsien-Hsin Sean
Ho Chen Rao Chang Hsu Su Lee