F. Chau & Associates, LLC
Three-dimensional semiconductor memory device including a penetration region passing through a gate electrode
A three-dimensional semiconductor memory device includes: a base substrate; a gate stack structure disposed on the base substrate, and including gate electrodes stacked in a direction substantially perpendicular to a top surface of the base substrate; a penetration region penetrating through the gate stack structure and surrounded by the gate stack structure; and vertical channel structures passing through the gate stack structure. The lowermost gate electrodes among the gate electrodes are spaced apart from each other, and a portion of at least one of the lowermost gate electrodes has a shape bent toward the penetration region.
SAMSUNG ELECTRONICS CO., LTD.
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Kyoung Taek Si Wan Bong Hyun Jun Hyoung Kwang Soo
Oh Kim Choi Kim Kim