Myers Bigel, P.A.
Semiconductor device having positive fixed charge containing layer
A semiconductor device can include a substrate including a plurality of active regions having a long axis in a first direction and a short axis in a second direction, the plurality of active regions being repeatedly and separately positioned along the first and second directions, an isolation film defining the plurality of active regions, a plurality of word lines extending across the plurality of active regions and the isolation film, and a positive fixed charge containing layer covering at least a portion of the plurality of word lines, respectively.
Samsung Electronics Co., Ltd.
H H
H01L H01L
inventional inventional
Dong-Soo Se-myeong Jun-Soo
Woo Jang Kim