Duane Morris LLP
Method and structure for automated inert gas charging in a reticle stocker
At least a first reticle is stored in a housing of a stocker. A first gas is delivered to the housing. At least one reticle pod having an additional reticle is delivered into a enclosure within the housing of the stocker. A second gas different from the first gas is delivered to the enclosure. The reticle pod is automatically retrieved from the enclosure. The delivery and retrieval of the reticle pod and delivery of the first gas and the second gas are automatically controlled.
Taiwan Semiconductor Manufacturing Co., Ltd.
G G G Y G
G05B G05B G05B Y02P G03F
additional additional inventional additional inventional
Chih-Wei Wen-Chieh Yung-Ho Wei-Cheng
Huang Tsou Chen Wang