Saile Ackerman LLC
Laminated plasmon generator with cavity process
A plasmon generator (PG) is disclosed with a laminated structure of non-planar X and Y layers formed between a waveguide and write pole. Each X layer is made of a noble metal such as Au while each Y layer is a non-noble metal or dielectric material to improve durability. As a result, the PG has a peg portion at an air bearing surface with improved reliability compared with pegs made entirely of a noble metal. Non-planarity of X and Y layers improves diffusion of Y material between X grains thereby minimizing X grain growth to enhance thermal stability. The laminated PG is formed by a process sequence that involves forming and filling a cavity, and concludes with a chemical mechanical polish process to form a planar top PG surface that faces a write pole leading side.
Headway Technologies, Inc.
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Shigeki Yoshitaka Xuhui Hiroyuki
Tanemura Sasaki Jin Ito