Seed IP Law Group PLLC
Semiconductor structure, in particular phase change memory device having a uniform height heater
A phase change memory formed by a plurality of phase change memory devices having a chalcogenide memory region extending over an own heater. The heaters have all a relatively uniform height. The height uniformity is achieved by forming the heaters within pores in an insulator that includes an etch stop layer and a sacrificial layer. The sacrificial layer is removed through an etching process such as chemical mechanical planarization. Since the etch stop layer may be formed in a repeatable way and is common across all the devices on a wafer, considerable uniformity is achieved in heater height. Heater height uniformity results in more uniformity in programmed memory characteristics.
STMicroelectronics S.r.l.
H H H H
H01L H01L H01L H01L
inventional inventional inventional inventional
Jinwook Shyam Prasad Yudong Ilya Ming
Lee Teegapuram Kim Karpov Jin