Oliff & Berridge, PLC
Purge gas unit and purge gas supply integrated unit
To provide a purge gas unit and a purge gas supply integrated unit having a smaller foot space, the purge gas unit comprises an input block for input of purge gas into the purge gas unit, the input block including a purge passage formed through the input block to provide an opening in a side surface of the input block and an input passage formed branching off from the purge passage; an output block for output of the purge gas from the purge gas unit; a communication block connected to the input block and the output block to provide communication between the input block and the output block.
CKD Corporation Tokyo Electron Limited
Y F F
Y10T F15B F16K
additional inventional inventional
Yoji Akihito Tsuneyuki Takeya
Mori Sugino Okabe Inagaki