Blakely, Sokoloff, Taylor & Zafman LLP
Block contact architectures for nanoscale channel transistors
A contact architecture for nanoscale channel devices having contact structures coupling to and extending between source or drain regions of a device having a plurality of parallel semiconductor bodies. The contact structures being able to contact parallel semiconductor bodies having sub-lithographic pitch.
Intel Corporation
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Uday Jack Brian S. Suman Justin K. Marko Amlan Robert S. Mark L.
Shah Kavalieros Doyle Datta Brask Radosavljevic Majumdar Chau Doczy