Chen Yoshimura LLP
Semiconductor device
A semiconductor device includes: a semiconductor substrate; and a thin film resistor formed over an upper surface of the semiconductor substrate, the thin film resistor including first thin film resistor units and second thin film resistor units alternately connected in series, each of the first thin film resistor units having an elongated main portion and end portions that are connected to the elongated main portion, the end portions each forming a U-shape together with the elongated main portion in a plan view, and respectively overlapping with two of the second thin film resistor units that are adjacent to and connected to the first thin film resistor unit in series.
FUJI ELECTRIC CO., LTD.
H H H
H01L H01L H01L
inventional inventional inventional
Masaru
Saito