Holzer Patel Drennan
Two-degree-of-freedom heterodyne grating interferometry measurement system
A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.
BEIJING U-PRECISION TECH CO., LTD. TSINGHUA UNIVERSITY
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Leijie Weinan Fuzhong Rong Yu Jinchun Ming Xin
Wang Ye Yang Cheng Zhu Hu Zhang Li