Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least chamfer-short-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of short-circuit failure modes, including at least one chamfer-short-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one TS-short-related failure mode.
PDF Solutions, Inc.
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Carl Tomasz Nobuharu Hideki Sheng-Che Markus Conor Simone Hans Kelvin Indranil Timothy Larg John Marcin Jeremy Marci Sherry Rakesh Dennis Andrzej Kimon Christopher Vyacheslav Stephen Jonathan
Taylor Brozek Yokoyama Matsuhashi Lin Rauscher O'Sullivan Comensoli Eisenmann Doong De Fiscus Weiland Kibarian Strojwas Cheng Liao Lee Vallishayee Ciplickas Strojwas Michaels Hess Rovner Lam Haigh