Knobbe, Martens, Olson & Bear, LLP
Single crystal diamond and semiconductor element using same
Provided is a single crystal diamond having a lowered dislocation density. The single crystal diamond (10) is provided with single crystal diamond layers (2, 3). One single crystal diamond layer (2) is formed on a diamond substrate (1) and contains point defects. The other single crystal diamond layer (3) is grown on the single crystal diamond layer (2). The single crystal diamond layers (2, 3) have a lower dislocation density than the diamond substrate.
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
H H H H H H C C H H C C H C H C
H01L H01L H01L H01L H01L H01L C30B C23C H01L H01L C30B C30B H01L C23C H01L C30B
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Akiyoshi Shinya Hideaki Yoshiaki
Chayahara Ohmagari Yamada Mokuno