Burns & Levinson LLP
Inspection system utilizing solid immersion lenses
An inspection system including a lens. In one instance, the lens is a solid immersion lens. The inspection system includes a component or components for providing a self aligning solid immersion lens arrangement in order to allow at most a small distance between the solid immersion lens and a device under test and components or components for constraining a force exerted on the device under test. The inspection system may include a “purge” port, or a thermal isolation configuration or an anti-contamination component. The inspection system may include software and hardware to prevent crashing of the lens. The inspection system may also include a method for ensuring that various objective lenses can be replaced while maintaining the intended spacing between lenses.
Infrared Laboratories, Inc.
G
G02B
inventional
Yullin Ron Ken Gary Kris David M. Douglas
Kim DeWitt, Jr. Salvestrini Fancher Tumidajski Dozor Holt