Duane Morris LLP
Semiconductor manufacturing apparatus
The present invention provides an observation device installed in a chamber that is used for manufacturing semiconductor devices. The observation device includes at least two light-emission sources located at a chamber wall of the chamber, an electric power supplier supplying electric power to the light-emission sources, and a viewer port which is also installed in the chamber wall. The light-emission sources correspond in position to each other in the chamber wall, and emit light downward. The viewer port includes a quartz window so that when the light-emission sources light up the inside of the chamber, an observer can observe a wafer and the chamber inside through the viewer port.
Jusung Engineering Co. Ltd.
H
H01J
inventional
Jung-Sik
Kim