Huse IP Law
Visualization of three-dimensional semiconductor structures
A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structure based on measurements collected during the inspection. The computer system renders an image of the model that shows a 3D shape of the model and provides the image to a device for display.
KLA Corporation
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Antonio Liequan Aaron J. Abhi Andrei Thaddeus G. Yin Houssam John Jonathan Kaiwen
Gellineau Lee Rosenberg Gunde Veldman Dziura Xu Chouaib Hench Iloreta Xu