Westerman, Hattori, Daniels & Adrian, LLP.
Method for forming metal oxide film and method for forming secondary electron emission film in gas discharge tube
According to the present invention, there is provided a method for forming a metal oxide film comprising, when a metal oxide film is formed by conducting a thermal treatment on a coating film containing an organic metal compound formed on an inner wall of a tube, performing an ultraviolet irradiation treatment or an ozone treatment on the coating film prior to or simultaneously with the thermal treatment.
Fujitsu Limited
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Manabu Hitoshi Kenji Akira Tsutae Akira
Ishimoto Yamada Awamoto Tokai Shinoda Nakazawa