Burr & Brown
Ceramic member
A ceramic member, which is usable in a state where at least a part thereof is exposed in a reactor in which halogen plasma is generated, includes a base member containing a first ceramic material, and a coating layer on a surface of the base member containing a second ceramic material more resistant to plasma etching than the first ceramic material. Further, the ceramic member includes a thick portion in a region where an etching rate of the coating layer by the halogen plasma is locally high, and a thickness (tt) of the thick portion and a thickness (tn) of a normal thickness portion other than the thick portion satisfy the following expression (1):tn<tt≦(Ee/En)×tn  (1)where
NGK Insulators, Ltd.
C Y C Y C Y Y C Y C C C C C C C
C04B Y10T C04B Y10T C04B Y10T Y10T C04B Y10T C23C C04B C23C C04B C04B C04B C04B
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Hirotake
Yamada