Sughrue Mion, PLLC
Semiconductor light emitting device and method of manufacturing the same
A method of manufacturing a semiconductor light emitting device is provided. The method includes forming a first region of a lower semiconductor layer on a substrate, etching an upper surface of the first region using at least one gas used in forming the first region, in-situ in a chamber in which a process of forming the first region has been performed, forming a second region of the lower semiconductor layer on the first region, forming an active layer on the lower semiconductor layer, and forming an upper semiconductor layer on the active layer.
SAMSUNG ELECTRONICS CO., LTD.
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Jin Sub Jung Sub
Lee Kim