The PL Law Group, PLLC
Wafer container with air-tight device
A wafer container is provided. The wafer container includes a housing, a door and an air-tight device. The housing has a room with an opening formed therein, and a door frame surrounding the opening. The door fits in the door frame to close the opening. The air-tight device is disposed around the door, located between the door and the door frame, and having a protruding part extending toward the room. The protruding part has an early-stage pressure-adjusting element configured to exhaust a first gas from the room by pumping a second gas into the room when the door is closed.
GUDENG PRECISION INDUSTRIAL CO., LTD.
H
H01L
inventional
Chih-Ming Jui-Ken Chen-Hao
Lin Kao Chang