Innovation Counsel LLP
Substrate separation apparatus and method
Provided are a substrate separation apparatus and method. The substrate separation apparatus includes: an upper transfer part which fixes the upper substrate and transfers the upper substrate in a positive X-axis direction in an XY coordinate system composed of an X axis and a Y axis intersecting each other; and a lower transfer part which is installed under the upper transfer part with a gap therebetween and fixes and transfers the lower substrate, wherein the lower transfer part includes: a lower holding unit on which the lower substrate is placed; and a lower guide unit which includes path guides for guiding movement of the lower holding unit, wherein the path guides include a first path guide which is parallel to the X axis and a second path guide which is continuous with the first path guide and contacts a straight line having a negative slope in the XY coordinate system.
Samsung Display Co., Ltd.
Y B B Y Y B B Y B Y B B Y H Y
Y10T B32B B32B Y10T Y10T B32B B32B Y10T B32B Y10T B32B B32B Y10T H01L Y10T
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Seung Jun Joon Hyung
Lee Kim