Venable LLP
Shaft sealing assembly for vacuum processing apparatus
Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (μm).
Teijin Seiki Co., Ltd.
Y F F F F F F H
Y10S F16J F16J F16J F16J F16J F16J H01L
additional inventional inventional inventional inventional inventional inventional inventional
Chohei Hiroki Tetsuya
Okuno Mori Watanabe