Jacobson Holman PLLC
Superconductor incorporating therein superconductivity epitaxial thin film and manufacturing method thereof
The present invention utilizes magnesium diboride (MgB2) or (Mg1-xMx)B2 as a superconductivity thin film which can be applied to a rapid single flux quantum (RSFQ) circuit. A method for manufacturing a superconductor incorporating therein a superconductivity thin film, begins with preparing a single crystal substrate. Thereafter, a template film is formed on top of the substrate, wherein the template has a hexagonal crystal structure. The superconductivity thin film of MgB2 or (Mg1-xMx)B2 is formed on top of the template film. If Mg amount in the superconductivity thin film is insufficient, Mg vapor is flowed on the surface of the superconductivity thin film while a post annealing process is carried out at the temperature ranging from 400&deg; C. to 900&deg; C.
Electronics and Telecommunications Research Institute
C C H C
C30B C30B H01L C30B
inventional inventional inventional inventional
Gun Yong Sang Hyeob Jun Ho
Sung Kim Kim