Oblon, McClelland, Maier & Neustadt, L.L.P.
Inspecting apparatus and inspecting method
According to one embodiment, an inspecting apparatus is provided with a contact position obtaining unit and an inspection status determining unit. The contact position obtaining unit obtains, by using an inspection result of whether there is a particle on an inspection surface of a holding object and coordinate information of a convex portion in an electrostatic chuck holding mechanism, a contact position of the inspection surface with the convex portion. The inspection status determining unit determines whether a size of the particle adhering to a contact region with the convex portion of the inspection surface is within an allowable range by using a first determining criterion value and determines whether the size of the particle adhering to a non-contact region with the convex portion of the inspection surface is within an allowable range by using a second determining criterion value larger than the first determining criterion value.
Kabushiki Kaisha Toshiba
G G G G G
G03F G03F G01N G01N G01N
inventional inventional inventional additional inventional
Masaru Hiroyuki
Suzuki Mizuno