Fitzpatrick, Cella, Harper & Scinto
Polishing apparatus with transfer arm for moving polished object without drying it
 A polishing apparatus that can effectively and efficiently remove potassium and other alkaline metals comprises integrally a polishing unit for polishing an object by means of a polishing agent and a cleaning unit for cleaning the polished object. The polishing unit and the cleaning unit have means for isolating the internal atmosphere from the external atmosphere and the cleaning unit has a means for cleaning the polished object by bringing hot pure water or steam of pure water into contact with the polished object. With a cleaning method hot pure water is brought into contact with the polished object without drying it after having been polished by such a polishing apparatus. 
Canon Kabushiki Kaisha
B B H B B B Y
B24B B08B H01L B08B B08B B24B Y10T
inventional inventional inventional inventional additional inventional additional
Mikichi Kazuo Osamu Matsuomi
Ban Takahashi Ikeda Nishimura