Kilpatrick Townsend & Stockton LLP
Process for etching metal using a combination of plasma and solid state sources
An apparatus configured to remove metal etch byproducts from the surface of substrates and from the interior of a substrate processing chamber. A plasma is used in combination with a solid state light source, such as an LED, to desorb metal etch byproducts. The desorbed byproducts may then be removed from the chamber.
Applied Materials, Inc.
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Subhash He Jingjing Joseph
Deshmukh Ren Liu Johnson