Slater Matsil, LLP
High dielectric constant dielectric layer forming method, image sensor device, and manufacturing method thereof
A method for forming a high dielectric constant (high-κ) dielectric layer on a substrate including performing a pre-clean process on a surface of the substrate. A chloride precursor is introduced on the surface. An oxidant is introduced to the surface to form the high-κ dielectric layer on the substrate. A chlorine concentration of the high-κ dielectric layer is lower than about 8 atoms/cm3.
Taiwan Semiconductor Manufacturing Co., Ltd.
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Yung-Lung Kuo-Cheng Hsin-Chieh Horng-Huei Chun-Hao Tsung-Han Yun-Wei
Hsu Lee Huang Tseng Chou Tsai Cheng