Lowe Hauptman & Ham, LLP
Metal gate electrode of a field effect transistor
An integrated circuit fabrication is disclosed, and more particularly a field effect transistor with a low resistance metal gate electrode is disclosed. An exemplary structure for a metal gate electrode of a field effect transistor comprises a lower portion formed of a first metal material, wherein the lower portion has a recess, a bottom portion and sidewall portions, wherein each of the sidewall portions has a first width; and an upper portion formed of a second metal material, wherein the upper portion has a protrusion and a bulk portion, wherein the bulk portion has a second width, wherein the protrusion extends into the recess, wherein a ratio of the second width to the first width is from about 5 to 10.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Cheng-Hao Da-Yuan Kuang-Yuan Peng-Soon Chun-Yuan Fan-Yi Xiong-Fei Jian-Hao
Hou Lee Hsu Lim Chou Hsu Yu Chen