Marger Johnson & McCollom, P.C.
Semiconductor device and method for manufacturing the same
A semiconductor device and a method for forming the same. A dielectric layer is formed on a semiconductor substrate or on a lower electrode of a capacitor. Vacuum annealing is performed on the dielectric layer. Thus, impurities remaining in the dielectric layer can be effectively removed, and the dielectric layer can be densified. As a result, the electrical characteristics of the semiconductor device are improved. For example, the leakage current characteristics of the dielectric layer are improved and capacitance is increased.
Samsung Electronics Co., Ltd.
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Young-Sun Yun-Jung Ki-Yeon Seok-Jun In-Sung Sung-Tae Ki-Vin Jae-Hyun
Kim Lee Park Won Park Kim Im Yeo