Haynes Boone, LLP
Method and system for smart vehicle route selection
In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system (“MES”) for providing lot information; a material control system (“MCS”) for providing dynamic traffic information; an automated material handling system (“AMHS”) for providing static route information; and a real-time dispatching (“RTD”) system to select a destination and a route for a wafer carrier in response to a transfer request. In another aspect a method of transferring a wafer lot within a wafer fabrication facility (“fab”) using a factory automation system is provided. The method comprises: receiving a transfer request to move the wafer lot from a first position to a second position within the fab; obtaining lot information, dynamic traffic information, and static traffic information; using the information to select a route between the first position and the second position; and executing the transfer using the selected route.
Taiwan Semiconductor Manufacturing Company
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Ren-Chyi Chih-Wei Hui-Yi Chuh-Yuan
Yu Huang Chen Yu