System and method for ventilation in the fabrication of integrated circuits
In the fabrication of semiconductor integrated circuits, a ventilation system is disclosed which includes a sleeve device, a ventilator and a sensor. The sleeve device has at least one aperture thereon for gas transfer. The ventilator is coupled to the sleeve device. The sensor is coupled to the sleeve device. A method of ventilation is also disclosed, which includes a step of sensing a relative movement between a sleeve having at least aperture for gas transfer and a gas outlet connected to a pipeline, and a step of generating a signal to control a ventilator when the relative movement between the sleeve and the gas outlet is sensed.
Taiwan Semiconductor Manufacturing Co., Ltd.
Y Y H H
Y02C Y02P H01J H01L
additional additional inventional inventional
Jia-Rong I-Kai
Chen Lin