Leydig, Voit & Mayer, Ltd.
Ultrasonic cleaning method and ultrasonic cleaning apparatus
An ultrasonic cleaning method for cleaning an object in a liquid in which a gas is dissolved includes preparing the liquid in which the gas is dissolved and stirring the liquid while irradiating the liquid with the ultrasonic waves so as to realize a state where bubbles containing the gas dissolved in the liquid continue to be generated. The object is cleaned in the state where the bubbles containing the gas continue to be generated.
SILTRONIC AG
H B
H01L B08B
inventional inventional
Teruo Masashi Etsuko Yoshihiro
Haibara Uchibe Kubo Mori