Weingarten, Schurgin, Gagnebin & Lebovici LLP
Process for making an electronic device having a multilevel structure
A process includes the steps of selectively and non-porously anodizing a metal film on a substrate to form a dense non-porous oxide layer on a first exposed area of the metal film, and selectively and porously anodizing the metal film and the dense non-porous oxide layer to convert the dense non-porous oxide layer and the metal film at a second exposed area into a porous oxide layer.
Cosmos Vacuum Technology Corporation
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Chung-Lin
Chou