Brinks Gilson & Lione
Thin-film transistor and manufacturing method thereof
A manufacturing method of a thin-film transistor is provided. The method include: forming a gate pattern layer on a substrate; forming a gate insulating layer covering the gate pattern layer; depositing semi-conductive oxide material on the gate insulating layer to form an active pattern layer on the gate insulating layer; depositing reducing material on the active pattern layer to form a reducing pattern layer; and forming a source pattern layer and a drain pattern layer on the reducing pattern layer. A thin-film transistor is further provided.
Shenzhen China Star Optoelectronics Technology Co., Ltd.
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Qianyi
Zhang