Kinney & Lange, P.A.
Display substrate and method of preparing the same, and display device
A display substrate and a method of preparing the same, and a display device are provided, the method including: providing a substrate; forming a switching thin film transistor precursor and a driving thin film transistor precursor on the substrate, each including a semiconductor layer, a gate insulating material layer and a gate metallic layer stacked sequentially above the substrate; forming a photoresist layer above the switching thin film transistor precursor and the driving thin film transistor precursor, and forming an etching mask from the photoresist layer, a first portion of the etching mask at the switching thin film transistor precursor and a second portion of the etching mask at the driving thin film transistor precursor having different shapes; and forming a switching thin film transistor and a driving thin film transistor, by etching processing the switching thin film transistor precursor and the driving thin film transistor precursor with the etching mask.
BOE TECHNOLOGY GROUP CO., LTD. HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
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Wei Ning Jun Bin Luke Liangchen
Li Liu Liu Zhou Ding Yan