Optical proximity correction verification system and verification method thereof
The optical proximity correction verification method includes loading a layout data to be verified to a processor, loading a reference layout data to the processor. The processor performs a first stage Boolean operation on the layout data to be verified to generate first verified data. The processor performs a layout versus layout verification on the first verified data to generate second verified data by using the reference layout data. If the layout versus layout verification is successfully performed, the processor performs a second stage Boolean operation on the second verified data to generate third verified data. By using the reference layout data, the processor performs a Boolean check on the third verified data to generate fourth verified data.
UNITED MICROELECTRONICS CORP.
G G
G03F G03F
inventional inventional
Chao-Yao Kuo-Hsun Chung-Chih
Chiang Huang Chang