Patterson & Sheridan, LLP
Semiconductor device
A semiconductor device includes a superjunction structure. The influence of external charge on device performance is suppressed using a shield electrode, field plate electrodes, and cover electrodes in various configurations. Optional embodiments include placing an interconnection film between certain electrodes and the upper surface of the superjunction structure. Cover electrodes may also be connected to various potentials to limit the effects of external charge on device performance.
Kabushiki Kaisha Toshiba
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Hiroaki Hiroshi Syotaro Masaru
Yamashita Ohta Ono Izumisawa