McDermott, Will & Emery
Transporting apparatus for semiconductor device
 A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost. 
Mitsubishi Electric Engineering Co., Ltd. Mitsubishi Denki Kabushiki Kaisha
G
G01R
inventional
Mitsuru Kunio Hiromichi Sekio Hiroyuki Jiro Shinji Eiri Shinji
Yamazaki Kobayashi Yamada Ito Shinmen Takamura Semba Yuhara Sogabe