Scully, Scott, Murphy & Presser, P.C.
Programmable electrical fuse
The present invention relates to e-fuse devices, and more particularly to a device and method of forming an e-fuse device, the method comprising providing a first conductive layer connected to a second conductive layer, the first and second conductive layers separated by a barrier layer having a first diffusivity different than a second diffusivity of the first conductive layer. A void is created in the first conductive layer by driving an electrical current through the e-fuse device.
International Business Machines Corporation
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H01L H01L
inventional additional
Michael J. William Tom C. Robert J. Souvick Christopher S. Junjun
Abou-Khalil Tonti Lee Gauthier, Jr. Mitra Putnam Li