Hamre, Schumann, Mueller & Larson, P.C.
Group 5 metal compound, method for preparing the same, precursor composition for depositing layer containing the same, and method for depositing layer using the same
The present disclosure relates to a novel Group 5 metal compound, a method for preparing the Group 5 metal compound, a precursor composition for depositing a Group 5 metal-containing layer containing the Group 5 metal compound, and a method for depositing a Group 5 metal-containing layer using the precursor composition for depositing a Group 5 metal-containing layer.
UP CHEMICAL CO., LTD.
C H H C C C H C C H C C H
C23C H01L H01L C07F C23C C07F H01L C23C C23C H01L C23C C23C H01L
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Jun Hwan Won Seok Dae-Young Myeong-Ho
Choi Han Kim Park