Rabin & Berdo, P.C.
Thin film type varistor and a method of manufacturing the same
A thin film type varistor and a method of manufacturing the same are provided. The method includes: a depositing a first zinc oxide thin film at a low temperature through a sputtering method; and a forming a zinc oxide thin film for a varistor by treating the first zinc oxide thin film with heat at a low temperature in an environment in which an inert gas and oxygen are injected. Accordingly, it is possible to lower a processing temperature and simplify a manufacturing process while maintaining a varistor characteristic so as to be applied to a highly integrated circuit.
Electronics and Telecommunications Research Institute
C H H Y C H
C23C H01C H01C Y10T C23C H01C
inventional inventional inventional additional inventional inventional
Jung Wook Sun Jin Hyun Tak Jun Kwan
Lim Yun Kim Kim