SoCal IP Law Group LLP
Solidly-mounted transversely-excited film bulk acoustic resonator
Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a substrate and a single-crystal piezoelectric plate having parallel front and back surfaces. An acoustic Bragg reflector is sandwiched between a surface of the substrate and the back surface of the single-crystal piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface. The IDT is configured to excite shear acoustic waves in the piezoelectric plate in response to a radio frequency signal applied to the IDT.
Resonant Inc.
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Ventsislav Bryant Jesson Patrick Viktor Soumya Robert B.
Yantchev Garcia John Turner Plesski Yandrapalli Hammond