Kratz, Quintos & Hanson, LLP
Electronic device and method of manufacturing the same
An electronic device includes a substrate, a stationary electrode provided above the substrate, a movable electrode that is provided to face the stationary electrode, a wall portion that is provided on the substrate and surrounds the movable electrode and the stationary electrode, a film member that is fixed to the wall portion and seals space including the movable electrode and the stationary electrode, and a support portion that is provided, on an inner side of the wall portion on the substrate, in addition to the movable electrode and the stationary electrode to support the film member from within the space.
Fujitsu Limited
H H H H B H H B
H01L H01L H01L H01H B81B H01L H01L B81B
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Hitoshi Satoshi Tadashi Hiroaki
Yamada Ueda Nakatani Inoue