Oblon, Spivak, McClelland, Maier & Neustadt
Vacuum pump
 Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk are cut in annular recesses to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port. The vacuum pump is capable of operating at a high pumping speed. The vacuum pump is able to operate without problems occurring even if solid particles are contained in the gas. 
Osaka Vacuum, Ltd.
F F
F04D F04D
inventional inventional
Tatsuji Keiichi Tetsuro Masashi
Ikegami Yoshida Ohbayashi Iguchi