Harness, Dickey & Pierce, P.L.C.
System and method for supplying functional water
A supply system for supplying a functional water to a process unit which treats a substrate using the functional water is provided. In the system, the functional water generated in the functional water generator is supplied to a distributor through a functional water supply pipe. Thereafter, the functional water is supplied to the process unit while the process unit performs a process, and the functional water is returned to the functional water generator through a functional water returning pipe while the process unit does not perform a process. A buffer tank is installed in the functional water supply pipe and the concentration of the functional water is measured in a circulation line connected with the buffer tank. When the measured concentration of the functional water goes out of a set concentration range, the functional water is returned to the functional water generator through functional water returning pipe.
Semes Co., Ltd.
C C Y Y C C C Y
C02F C01B Y10T Y10T C02F C02F C02F Y10T
inventional inventional additional additional inventional additional additional additional
Kwang-Il Doo-Keun Pyong-Soon Jeong-Yong Ju-Won Yong-Nam
Choi An Jung Bae Kim Choi