Schwabe, Williamson & Wyatt P.C.
Microelectronic devices having vertical piezoelectric membranes for integrated RF filters
Embodiments of the invention include microelectronic devices, resonators, and methods of fabricating the microelectronic devices. In one embodiment, a microelectronic device includes a substrate and a plurality of cavities integrated with the substrate. A plurality of vertically oriented resonators are formed with each resonator being positioned in a cavity. Each resonator includes a crystalline or single crystal piezoelectric film.
Intel Corporation
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Paul B. Marko Han Wui Sansaptak
Fischer Radosavljevic Then Dasgupta