TraskBritt
Spacer fabrication for flat panel displays
A multi-layered structure, and method for producing same, which may include at least one glass layer anodically bonded to an intermediate layer. The intermediate layer may function as an anodic bonding layer, an etch stop layer, and/or a hard mask layer. A template may be formed of the multi-layered structure by forming a desired pattern of openings therein by way of, for example, etching. Such a template may, for example, be used in the alignment and adherence of spacer structures to an electrode plate during the fabrication of flat panel displays. When used in this context, the construction of such a template results in more precise control of the patterning and sizing of the holes formed therein which thereby allows for more precise placement of spacer structures as well as the use of spacer structures exhibiting relatively higher aspect ratios during the fabrication of flat panel displays.
Micron Technology, Inc.
Y H Y Y H H H Y H H H
Y10T H01J Y10T Y10T H01J H01J H01J Y10T H01J H01J H01J
additional additional additional additional inventional inventional inventional additional inventional inventional inventional
Robert J. Won-Joo Gary A. Jim J. Seungwoo David H.
Hanson Kim Evans Browning Lee Chun