Adams & Wilks
Composite charged particle beam apparatus and sample processing and observing method
There is provided a composite charged particle beam apparatus, in which a first rotation axis of a rotatable stage intersects a beam irradiation axis of a FIB column and a beam irradiation axis of an SEM so as to be substantially perpendicular thereto, respectively, at a sample observing position, the rotatable stage is provided with a supporting member which can be rotated with respect to the first rotation axis, and the supporting member is connected to a movement mechanism which can dispose the sample at the sample observing position.
SII NanoTechnology Inc.
H H H H H H H H H H H
H01J H01J H01J H01J H01J H01J H01J H01J H01J H01J H01J
additional additional additional inventional additional additional additional inventional additional inventional inventional
Haruo Masakatsu
Takahashi Hasuda