Kenyon & Kenyon LLP
Sensor device having electrode draw-out portions through side of substrate
Provided is a technique for packaging a sensor structure having a contact sensing surface and a signal processing LSI that processes a sensor signal. The sensor structure has the contact sensing surface and sensor electrodes. The signal processing integrated circuit is embedded in a semiconductor substrate. The sensor structure and the semiconductor substrate are bonded by a bonding layer, forming a sensor device as a single chip. The sensor electrodes and the integrated circuit are sealed inside the sensor device, and the sensor electrodes and external terminals of the integrated circuit are led out to the back surface of the semiconductor substrate through a side surface of the semiconductor substrate.
Tohoku University Toyota Jidosha Kabushiki Kaisha Kabushiki Kaisha Toyota Chuo Kenkyusho
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Shuji Ui Masanori Yutaka Masayoshi Sakae Motohiro Takahiro Hitoshi Mitsutoshi
Tanaka Yamaguchi Muroyama Nonomura Esashi Matsuzaki Fujiyoshi Nakayama Yamada Makihata