McDermott Will & Emergy LLP
Hard mask removal scheme
A method for hard mask layer removal includes dispensing a chemical on a hard mask layer, in which the chemical includes an acidic chemical. The chemical is drained from a chamber after hard mask removal. Using chemical including acidic chemical for hard mask layer removal is cheaper and the resource can be easily generated by equipment. Thus the chemical for hard mask layer removal can be drained directly and need not be recycled.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chi-Ming Yu-Ming Ying-Hsueh
Yang Lee Changchien