Method of sintering AIN under a methane-containing nitrogen atmosphere
The present method uses a methane-containing nitrogen gas sintering atmosphere to sinter aluminum nitride (AlN) to a high transmittance. The methane gas replaces the solid carbon charge material used in prior art sintering methods as the source of gaseous carbon. The amount of carbon in the methane-containing nitrogen gas is easily controlled by varying the partial pressure of methane in the nitrogen gas. In addition, the methane flow is stopped prior to the end of the sintering cycle to prevent darkening of the sintered part.
Osram Sylvania Inc.
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George C. Harry S.
Wei Mackel