Oblon, Spivak, McClelland, Maier & Neustadt
Vertical type heat-treatment apparatus
 A vertical type heat-treatment apparatus of the invention has an adjusting mechanism capable of setting the flow rate of clean air flowing out from a first clean room to a second clean room to be a predetermined value. With this arrangement, the apparatus can be reduced in size and can prevent impurities from adhering to objects to be treated, thereby improving the productivity. 
Tel Sagami Limited
F H Y C
F27D H01L Y10S C30B
inventional inventional additional inventional
Shingo
Watanabe