Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Polishing pad, and method for manufacturing polishing pad
It is an object of the present invention to provide a polishing pad that is resistant to scratching and also has excellent flattening performance. One aspect of the present invention is a polishing pad, comprising a fiber-entangled body formed from fiber bundles made up of ultrafine fibers in which the average cross sectional area is between 0.01 and 30 μm2, and a macromolecular elastomer, wherein part of the macromolecular elastomer is present inside the fiber bundles, whereby the ultrafine fibers are bundled, the number of fiber bundles per unit of surface area present in a cross section in the thickness direction is at least 600 bundles per square millimeter, and the volumetric ratio of a portion excluding voids is between 55 and 95%.
Kuraray Co., Ltd.
B B B
B24B B24D B24D
inventional inventional inventional
Hirofumi Jiro Mitsuru Nobuo Kimio
Kikuchi Tanaka Kato Takaoka Nakayama