Lowenstein Sandler LLP
Multi-layer plasma erosion protection for chamber components
A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
APPLIED MATERIALS, INC.
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Xiao-Ming Cheng-Hsuan Jennifer Y. Dmitry Toan Xiaowei Laksheswar Tae Won
He Chou Sun Lubomirsky Tran Wu Kalita Kim