Morgan, Lewis & Bockius LLP
Impurity control during formation of aluminum nitride crystals and thermal treatment of aluminum nitride crystals
In various embodiments, single-crystal aluminum nitride boules and substrates are formed from the vapor phase with controlled levels of impurities such as carbon. Single-crystal aluminum nitride may be heat treated via quasi-isothermal annealing and controlled cooling to improve its ultraviolet absorption coefficient and/or Urbach energy.
CRYSTAL IS, INC.
C C H H H C C C C H
C30B C01B H01L H01L H01L C30B C30B C30B C01P H01L
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Thomas Toru Robert T. Leo J. Keisuke Shichao James R. Jianfeng
Miebach Kimura Bondokov Schowalter Yamaoka Wang Grandusky Chen