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Methods for forming graded wurtzite III-nitride alloy layers
A method for forming a semiconductor device comprising a graded wurtzite III-nitride alloy layer, including a wurtzite III-nitride alloy, on a second layer. A polarization doping concentration profile is selected for the graded wurtzite III-nitride alloy layer based on an intended function of the semiconductor device. Based on the selected polarization doping concentration profile for the graded wurtzite III-nitride alloy layer, a composition-polarization change rate of the graded wurtzite III-nitride alloy layer and a grading speed of the graded wurtzite III-nitride alloy layer are determined. The composition-polarization change rate and grading speed are based on a composition of first and second elements of the wurtzite III-nitride alloy. The graded wurtzite III-nitride alloy layer is formed on the second layer having the selected polarization doping concentration profile using the determined composition-polarization change rate and grading speed to adjust the composition of the first and second III-nitride elements of the wurtzite III-nitride alloy based on a current position in the graded wurtzite III-nitride alloy layer from the second layer.
KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Xiaohang Kaikai
Li Liu