United Epitaxxy Company, Ltd.
Interface texturing for light-emitting device
An interface texturing for light-emitting device is formed by utilizing holographic lithography. Two coherent light beams are overlaid to cause constructive and destructive interference and thereby periodical alternative bright and dark lines are formed. A wafer coated with photoresist material is exposed under the interference lines. After developing step, a photoresist pattern with textured surface is formed on the wafer. Thereafter, the textured photoresist pattern is transferred to the wafer by etching process and result in a desired interface texturing.
United Epitaxxy Company, Ltd.
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H01L Y10S H01L
inventional additional inventional
Chih-Sung Holin Tzer-Perng
Chang Chang Chen