Sughrue, Mion, Zinn, Macpeak & Seas
Apparatus for correcting scanning beams on basis of tilting of surface segments of polygonal mirror used in scanning pattern drawing apparatus
 An apparatus for correcting a scranning beam produced by a polygonal mirror tilting in small surface segments in each mirror surface segment caused by uneven mirror surfaces of the polygonal mirror. Data indicative of the amount of tilting in each of the surface segments is stored in a memory, which is addressed by a data signal indicative of the present scanning position of the polygonal mirror. Output data from the memory is applied to an acousto-optical modulator disposed in the beam path between the light source and the polygonal mirror. 
Asahi Kogaku Kogyo K.K.
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Mitsuo Hideyuki Jun Michio Akira Hiroaki Takashi Akira Toshitaka Yuji Tamihiro Hidetaka Yasushi Satoru Masatoshi
Kakimoto Morita Nonaka Ohshima Morimoto Andoh Okuyama Ohwaki Yoshimura Matsui Miyoshi Yamaguchi Ikeda Tachihara Iwama