Knobbe, Martens, Olson & Bear LLP
Laser mask and sequential lateral solidification crystallization method using the same
A laser mask is disclosed. In one embodiment, the laser mask includes: a mask substrate including i) at least one light transmission portion configured to transmit light therethrough and ii) a plurality of light interruption portions separated by the light transmission portion interposed therebetween. The light interruption portions are configured to block light; and a plurality of protrusion and depression regions positioned on the light interruption portions of the mask substrate. The protrusion and depression regions comprise a plurality of concave portions and a plurality of convex portions which are alternately formed.
Samsung Display Co., Ltd.
G C C C C
G03F C30B C30B C23C C30B
inventional inventional inventional inventional inventional
Chun-Gi Yul-Kyu Sun Jong-Hyun Jin-Hee
You Lee Park Park Kang