McKenna Long & Aldridge LLP
Apparatus and method for etching insulating film
An apparatus and a method for etching insulating film prevents generation of spots by spraying etchant on a lower surface of the substrate as well as the upper surface.
LG Display Co., Ltd.
H H H
H01L H01L H01L
additional inventional inventional
Seok Won Sang Min Sang Kyu
Lee Jang Kim