Banner & Witcoff, Ltd.
Patterning method and method for manufacturing array substrate
A patterning method and a method for manufacturing an array substrate are provided, and the patterning method includes: forming a photolithography auxiliary film and a positive photoresist film in turn on a base substrate provided with a layer to be patterned; subjecting the photolithography auxiliary film and the positive photoresist film to a photolithography process to form a photolithography auxiliary layer pattern and a positive photoresist pattern; patterning the layer to be patterned; and UV irradiating the photolithography auxiliary layer pattern and the positive photoresist pattern and then removing the photolithography auxiliary layer pattern and the positive photoresist pattern.
BOE Technology Group Co., Ltd. Hefei Xinsheng Optoelectronics Technology Co., Ltd.
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Bin Ning Yang Wei Jun Yingbin
Zhou Liu Zhang Li Liu Hu