Posz & Bethards, PLC
Method of producing silicon carbide device by cleaning silicon carbide substrate with oxygen gas
In a process of producing a SiC device, a Si layer is formed on the surface of a SiC substrate, and the Si layer is removed from the surface of the SiC substrate by supplying oxygen gas to the Si layer in a high ambient temperature and a low ambient pressure. The pressure is set at 1&times;10&#8722;2 to 1&times;10&#8722;6 Pa. Thus a cleaned surface of the SiC substrate, not contaminated by carbon and the like in atmospheric air, can be provided. Preferably, the oxygen pressure and temperature are set at about 10&#8722;6 Pa and 1000&deg; C. for removing the Si layer. Thereafter, the oxygen is further supplied to raise the pressure to about 104 Pa to form an oxide film on the cleaned SiC substrate. Thus, the SiC substrate is cleaned and then formed with the oxide layer in the same chamber by changing the ambient pressure but without changing the ambient temperature.
Denso Corporation
H C C H H
H01L C30B C30B H01L H01L
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Shinichi Kiyoshige Yoshiyuki Ayahiko Tomohiro Takeshi
Mukainakano Kato Hisada Ichimiya Aoyama Hasegawa