Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Methods for producing functional films
A method for producing a transparent conductive film composed mainly of an oxide by sputtering using a sputtering target capable of forming a transparent conductive film, wherein intermittent electric power is supplied to the target.
Asahi Glass Company Ltd.
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Hisashi Satoru Takuji Eiichi Junichi Shujiro
Osaki Takaki Oyama Ando Shimizu Watanabe