Rothwell, Figg, Ernst & Manbeck, P.C.
Plasma processing apparatus, and maintenance method and assembling method of the same
A plasma processing apparatus includes a processing chamber that converts a processing gas introduced from a gas supply source into plasma and performs plasma processing on a target object, an exhaust chamber that communicates with the inside of the processing chamber to exhaust a gas converted into plasma from the processing chamber, and a blocking cover that is provided in the exhaust chamber to block communication between the inside of the processing chamber and the inside of the exhaust chamber.
Tokyo Electron Limited
Y H H
Y10T H01J H01J
additional inventional inventional
Masashi
Saito