Birch, Stewart, Kolasch & Birch, LLP
Microimprint/nanoimprint device
A microimprint/nanoimprint device includes a mold, a substrate and an energy transferring module. The substrate is disposed oppositely to the mold and at least has a molding material layer. The energy transferring module includes an energy transferring member and at least one energy source, wherein the energy transferring member is connected to the substrate or the mold, and the energy source provides imprint energy to the substrate or the mold, such that at least part of the imprint energy goes through the energy transferring member to the substrate or the mold for performing imprint molding.
Industrial Technology Research Institute
G B B B B B B
G03F B29C B29C B82Y B29C B82Y B29C
inventional additional additional inventional additional inventional inventional
Jen-Hua Chuan-Feng Shou-Ren Yu-Lun Lai-Sheng Wei-Han
Wu Chen Chen Ho Chen Wang