Crowell & Moring LLP
Water-repellent protective film, and chemical solution for forming protective film
A surface treatment was conducted by using a liquid chemical containing a water-repellent protective film forming agent represented by the following general formula [1], subsequent to a step of cleaning a metal-based wafer and prior to a step of drying the wafer.(R1 represents a C1-C18 monovalent hydrocarbon group the hydrogen elements of which may partially or entirely be replaced with a fluorine element(s). R2 mutually independently represents a monovalent organic group having a C1-C18 hydrocarbon group the hydrogen elements of which may partially or entirely be replaced with a fluorine element(s). “a” is an integer of from 0 to 2.)
Central Glass Company, Limited
C H C C C C C C C C C H
C11D H01L C09D C11D C11D C11D C09K C11D C09D C11D C11D H01L
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Takashi Soichi Shinobu Masanori
Saio Kumon Arata Saito