Wenderoth, Lind & Ponack, L.L.P.
Substrate processing unit and substrate processing apparatus
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.
Ebara Corporation
H H H H C C C C H
H01L H01L H01L H01L C23C C23C C23C C23C H01L
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Toshio Kenichi Seiji Ryo Masahiko Kenichi Teruyuki
Yokoyama Kobayashi Katsuoka Kato Sekimoto Suzuki Watanabe