Slater Matsil, LLP
Chemical dispense system with reduced contamination
An apparatus includes a production tool and a pipe connected to the production tool. The pipe includes an inner pipe formed of a metal-free material, an outer pipe encircling the inner pipe, and an inlet connected to a channel between the inner pipe and the outer pipe. The apparatus further includes a chemical supply system connected to the pipe. The chemical supply system is configured to supply a chemical through a channel encircled by the inner pipe to the production tool.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Heng-Yi Rong-Shyan Chih-Chiang Yung-Long Shao-Yen
Tzeng Pan Tseng Chen Ku