Fitzpatrick, Cella, Harper & Scinto
Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus
A polishing apparatus that can effectively and efficiently remove potassium and other alkaline metals comprises integrally a polishing unit for polishing an object by means of a polishing agent and a cleaning unit for cleaning the polished object. The polishing unit and the cleaning unit have means for isolating the internal atmosphere from the external atmosphere and the cleaning unit has a means for cleaning the polished object by bringing hot pure water or steam of pure water into contact with the polished object. With a cleaning method hot pure water is brought into contact with the polished object without drying it after having been polished by such a polishing apparatus.
Canon Kabushiki Kaisha
B B H B Y B B
B08B B24B H01L B08B Y10T B08B B24B
inventional inventional inventional inventional additional additional inventional
Mikichi Matsuomi Osamu Kazuo
Ban Nishimura Ikeda Takahashi