Marger Johnson & McCollom, P.C.
Spinning apparatus
In an embodiment, a spinning apparatus includes a spin table on which an object to be etched is placed, a rotation unit rotating the spin table, and a nozzle unit including a center nozzle, disposed on the central portion of the spin table, and at least one side nozzle, disposed on an edge of the spin table. Etching uniformity is improved over the conventional art because an etching chemical is distributed more evenly by the nozzle unit as the object to be etched is rotated. An embodiment may also include an exhaust to remove excess etching chemical.
Samsung Electronics Co., Ltd.
C H
C03C H01L
inventional inventional
Ho-Jin Yong-Mok Ju-Bae Byoung-Jin
Choi Kim Kim Lee