Fitzpatrick, Cella, Harper & Scinto
Structure having plural conductive regions and process for production thereof
A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.
Canon Kabushiki Kaisha
B B
B81B B81B
additional inventional
Makoto Atsushi Chienliu
Takagi Kandori Chang