Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, TS-short-configured, and AA-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one TS-short-related failure mode, and one AA-short-related failure mode.
PDF Solutions, Inc.
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Andrzej Christopher Jonathan Timothy Kimon Simone Larg Nobuharu John Markus Hideki Tomasz Rakesh Jeremy Sheng-Che Kelvin Sherry Marci Vyacheslav Conor Marcin Indranil Dennis Stephen Hans Carl
Strojwas Hess Haigh Fiscus Michaels Comensoli Weiland Yokoyama Kibarian Rauscher Matsuhashi Brozek Vallishayee Cheng Lin Doong Lee Liao Rovner O'Sullivan Strojwas De Ciplickas Lam Eisenmann Taylor