Abelman, Frayne & Schwab
Vertical heat treatment apparatus
Disclosed is a vertical heat treatment apparatus. The apparatus includes: a heat treatment furnace provided with a furnace inlet at a lower end thereof; a cover unit disposed on the furnace inlet of the heat treatment furnace; a cover unit opening/closing mechanism configured to support the cover unit in a cantilever manner from a bottom side of the cover unit; and an auxiliary mechanism configured to press the cover unit from the bottom side of the cover unit when the cover unit is disposed on the furnace inlet. The auxiliary mechanism is provided with a toggle mechanism.
Tokyo Electron Limited
F F F H F
F27B F27D F27D H01L F27D
inventional inventional additional inventional additional
Hiroshi Tsutomu
Kikuchi Wakamori