Pearne & Gordon LLP
Probe card attaching method
A probe card attaching method makes it easy to attach/detach a probe card to/from a transfer stage. In a wafer inspection apparatus 10, a reference position is determined by moving a transfer stage 18 to align a stage-side camera 28 with a tester-side camera 16 in a tester 15, a first distance from the reference position to a center of a pogo frame 19 in the tester 15 is determined by checking a pin mark 24 in the tester 15 with the stage-side camera 28, a second distance from the reference position to a center of a probe card 20 is determined by checking a target mark 32 in the probe card 20 with the tester-side camera 16. Then, the transfer stage 18 is moved to allow the probe card 20 to face the pogo frame 19 based on the reference position, the first distance, and the second distance.
TOKYO ELECTRON LIMITED
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inventional inventional inventional inventional
Hiroki Hiroshi
Obi Yamada