Ladas & Parry LLP
Method for determining properties of a film, and apparatus for realizing the method
A method for determining properties or a thin film includes the steps of: providing a piezoelectric substrate; providing a slanted finger interdigital transducer unit that includes a transmitter port and a receiver port on the piezoelectric substrate; forming the thin film on the piezoelectric substrate between the transmitter port and the receiver port; applying an input signal to the transmitter port; and measuring a phase difference, which corresponds to the input signal, from the receiver port. Accordingly, properties of the thin film are determined based on the measured phase difference. An apparatus for realizing the method is also disclosed.
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Tsung-Tsong Guo-Tsai Pei-Zen Yung-Yu
Wu Huang Chang Chen