Slater & Matsil, L.L.P.
Preventing contamination in integrated circuit manufacturing lines
A semiconductor manufacturing line includes an inert environment selected from the group consisting essentially of an inert airtight wafer holder, an inert wafer transport channel, an inert production tool, an inert clean room, and combinations thereof.
Taiwan Semiconductor Manufacturing Company, Ltd.
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H01L H01L H01L H01L Y10S
inventional inventional inventional inventional additional
Henry Jia-Ren Chen-Hua Chien-Ming Simon Kewei Jean
Lo Chen Yu Sung Wang Zuo Wang