Slater and Matsil, L.L.P.
Memory cell layout
A system and method for a memory cell layout is disclosed. An embodiment comprises forming dummy layers and spacers along the sidewalls of the dummy layer. Once the spacers have been formed, the dummy layers may be removed and the spacers may be used as a mask. By using the spacers instead of a standard lithographic process, the inherent limitations of the lithographic process can be avoided and further scaling of FinFET devices can be achieved.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chang-Yun Jhon-Jhy
Chang Liaw