Armstrong, Westerman, Hattori, McLeland & Naughton
Method for rinsing plate-shaped articles
 A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid. 
Fujitsu Limited
H H H B Y B
H01L H01L H01L B08B Y10S B08B
inventional inventional inventional inventional additional inventional
Ken Yuka Masanori
Yamazaki Hayami Kobayashi