Fish & Richardson P.C.
Porous template and imprinting stack for nano-imprint lithography
An imprint lithography template or imprinting stack includes a porous material defining a multiplicity of pores with an average pore size of at least about 0.4 nm. A porosity of the porous material is at least about 10%. The porous template, the porous imprinting stack, or both may be used in an imprint lithography process to facilitate diffusion of gas trapped between the template and the imprinting stack into the template, the imprinting stack or both, such that polymerizable material between the imprinting stack and the template rapidly forms a substantially continuous layer between the imprinting stack and the template.
Canon Nanotechnologies, Inc.
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inventional additional inventional inventional
Frank Y. Anshuman Byung Jin Niyaz Weijun Sidlgata V. Kosta S. Edward Brian
Xu Cherala Choi Khusnatdinov Liu Sreenivasan Selinidis Fletcher