McClure, Qualey & Rodack, LLP
Fin field effect transistor (FinFET) device structure with dual spacers and method for forming the same
A FinFET device structure is provided. The FinFET device structure includes a fin structure formed over a substrate and a first gate structure formed over the fin structure. The FinFET device structure includes a conductive plug formed over the first gate structure, and the conductive plug is electrically connected to the first gate structure. The FinFET device structure includes a first spacer layer formed on a sidewall surface of the conductive plug and a source/drain (S/D) contact structure formed over the fin structure and adjacent to the first gate structure. The FinFET device structure further includes a first insulation layer formed over the S/D contact structure and a second spacer layer formed on a sidewall surface of the first insulation layer. The conductive plug extends from a first position which is above the first spacer layers to a second position which is above the second spacer layer.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Wai-Yi Jia-Chuan Chia-Hao Yu-Ming Chih-Hao
Lien You Chang Lin Wang