Metal gate forming process
A metal gate forming process includes the following steps. A first metal layer is formed on a substrate by at least a first step followed by a second step, wherein the processing power of the second step is higher than the processing power of the first step.
UNITED MICROELECTRONICS CORP.
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Ching-Yun Kuo-Chih Hsiang-Chieh Yang-Ju Shih-Min Chi-Mao Yun-Tzu Yen-Chen Min-Chuan Nien-Ting
Chang Lai Yen Lu Chou Hsu Chang Chen Tsai HO