Konrad Raynes & Victor LLP
Integrated circuit testing with laser stimulation and emission analysis
A diagnostic tool for testing an integrated circuit device directs a beam of laser energy to stimulate at least a portion of the device. In one mode, electromagnetic waves from said device may be detected at the same time in response to the stimulation. A processor collects image data and determines as a function of the collected image data whether the device has a defect. Other embodiments are described and claimed.
Intel Corporation
G
G01R
inventional
Daniel Richard Md Asifur Yuan-Chuan Steven Christopher John
Bockelman Rahman Chen Brookreson