McDermott Will & Emery LLP
Plasma doping method and plasma doping apparatus
A plasma doping method, even though a plasma doping treatment is repeated, can make a dose from a film to a silicon substrate uniform for each time. The method includes preparing a vacuum chamber having a film containing an impurity formed on an inner wall thereof such that, when the film is attacked by ions in plasma, the amount of an impurity to be doped into the surface of a sample by sputtering is not changed even though the plasma containing the impurity ions is repeatedly generated in the vacuum chamber; placing the sample on the sample electrode; and irradiating the plasma containing the impurity ions so as to implant the impurity ions into the sample, and doping the impurity into the sample by sputtering from the film containing the impurity fixed to the inner wall of the vacuum chamber.
Matsushita Electric Industrial Co., Ltd.
H C H
H01J C23C H01L
inventional inventional inventional
Tomohiro Hiroyuki Bunji Katsumi Yuichiro
Okumura Ito Mizuno Okashita Sasaki