Servilla Whitney LLC
Physical vapor deposition processing systems target cooling
Physical vapor deposition target assemblies and methods of cooling physical vapor deposition targets are disclosed. An exemplary target assembly comprises a flow pattern including a plurality of rows and bends fluidly connected to an inlet end and an outlet end.
APPLIED MATERIALS, INC.
C H C C H
C23C H01J C23C C23C H01J
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Vishwas Kumar Kartik Wei W.
Pandey Shah Wang