Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them
A semiconductor wafer has a bevel contour formed along the periphery thereof, products formed on the wafer, and an ID mark formed on the bevel contour. The ID mark shows at least the properties, manufacturing conditions, and test results of the products.
Kabushiki Kaisha Toshiba
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Hajime Masao Moriya Yukihiro Junji Norihiko Shinichi Soichi Katsujiro Tsunetoshi Yuso Hiroshi Hiroaki Katsuya
Nagano Iwase Miyashita Ushiku Sugamoto Tsuchiya Nitta Nadahara Tanzawa Arikado Udo Matsushita Yamada Okumura