Miles & Stockbridge PC
Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen
The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
Hitachi High-Technologies Corporation
G Y H H Y H H G
G01B Y10T H01J H01J Y10T H01J H01J G01N
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Takafumi Yoshinobu Natsuki Yoichi Eiko Mami Shunya
Miwa Kimura Tsuno Ose Nakazawa Konomi Watanabe