Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including via open configured fill cells, and the second DOE including metal island open configured fill cells
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of via opens, and the second DOE contains fill cells configured to enable NC detection of metal island opens.
PDF Solutions, Inc.
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Andrzej Stephen Larg Kelvin Carl Markus Jeremy Hideki Conor Sheng-Che Timothy Hans Nobuharu Kimon Indranil Simone Christopher Jonathan Marci Sherry Marcin Tomasz Dennis Rakesh Vyacheslav John
Strojwas Lam Weiland Doong Taylor Rauscher Cheng Matsuhashi O'Sullivan Lin Fiscus Eisenmann Yokoyama Michaels De Comensoli Hess Haigh Liao Lee Strojwas Brozek Ciplickas Vallishayee Rovner Kibarian