Cantor Colburn LLP
Substrate separation apparatus and method
An apparatus for separating a first substrate and a second substrate which are in contact with each other, includes an upper transfer part which fixes the first substrate and transfers the first substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part which is disposed under the upper transfer part with a gap therebetween and fixes and transfers the second substrate, wherein the lower transfer part comprises a first transfer section which transfers the second substrate in the positive X-axis direction, and a second transfer section which transfers the second substrate in the positive X-axis direction as well as a negative Y-axis direction.
SAMSUNG DISPLAY CO., LTD.
B G Y Y Y H B H H B B Y G H Y H B
B32B G02F Y10T Y10T Y10T H05K B32B H01L H01L B32B B32B Y10T G02F H01L Y10T H05K B32B
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Seung Jun Joon Hyung Young Woo
Lee Kim Lee