Slater & Matsil, L.L.P.
Semiconductor devices, methods of manufacture thereof, and methods of forming resistors
Semiconductor devices, methods of manufacture thereof, and methods of forming resistors are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes forming a first insulating material over a workpiece, and forming a conductive chemical compound material over the first insulating material. The conductive chemical compound material is patterned to form a resistor. A second insulating material is formed over the resistor, and the second insulating material is patterned. The patterned second insulating material is filled with a conductive material to form a first contact coupled to a first end of the resistor and to form a second contact coupled to a second end of the resistor.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chia-Yu Shyue-Shyh Chih-Hung Kuo-Feng Jian-Hao Chin-Shan Tung-Heng
Lu Lin Wang Yu Chen Hou Hsieh