Greer, Burns & Crain, Ltd.
Metal-assisted chemical etch to produce porous group III-V materials
A thin discontinuous layer of metal such as Au, Pt, or Au/Pd is deposited on a Group III-V material surface. The surface is then etched in a solution including HF and an oxidant for a preferably brief period, as little as a couple seconds to one hour. A preferred oxidant is H2O2. Morphology and light emitting properties of porous Group III-V material can be selectively controlled as a function of the type of metal deposited, doping type, doping level, metal thickness, whether emission is collected on or off the metal coated areas and/or etch time. Electrical assistance is unnecessary during the chemical etching of the invention, which may be conducted in the presence or absence of illumination.
The Board of Trustees of the University of Illinois
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Jonathan V. Xiuling Paul W. Ilesanmi
Sweedler Li Bohn Adesida