Lorenz & Kopf, LLP
Integrated circuits and methods for their fabrication
Integrated circuits and methods for producing the same are provided. In accordance with one embodiment a method of producing an integrated circuit includes forming a trench defined by a first material. The trench is filled with a second material to produce a gap defined within the second material, where the second material is in a solid state. The second material is reflowed within the trench to reduce a volume of the gap, and the second material is then solidified within the trench.
GLOBALFOUNDRIES, INC.
H H H H H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional inventional inventional inventional inventional additional inventional additional inventional inventional additional inventional inventional inventional inventional inventional inventional inventional
Shishir Bharat Jinping
Ray Krishnan Liu