Millen, White, Zelano, & Branigan, P.C.
Polysiloxane compounds and positive resist compositions
 The invention provides a novel polysiloxane compound, typically polyhydroxybenzylsilsesquioxane, having some hydroxyl groups replaced by acetal groups and optionally acid labile groups. The polysiloxane compound is useful as an alkali soluble polymer for positive resist material. 
Shin-Etsu Chemical Co., Ltd.
C C G
C09D C08G G03F
inventional inventional inventional
Toshinobu Osamu Katsuya Junji
Ishihara Watanabe Takemura Tsuchiya