Nixon & Peabody LLP
Semiconductor device and method for manufacturing the same
A technique of manufacturing a semiconductor device in which etching in formation of a contact hole can be easily controlled is proposed. A semiconductor device includes at least a semiconductor layer formed over an insulating surface; a first insulating layer formed over the semiconductor layer; a gate electrode formed over the first insulating layer; a second insulating layer formed over the gate electrode; and a conductive layer formed over the second insulating layer connected to the semiconductor layer via an opening which is formed at least in the semiconductor layer and the second insulating layer and partially exposes the insulating surface. The conductive layer is electrically connected to the semiconductor layer at the side surface of the opening which is formed in the semiconductor layer.
Semiconductor Energy Laboratory Co., Ltd.
H H H H H H
H01L H01L H01L H01L H01L H01L
inventional inventional additional inventional inventional additional
Motomu Shunpei Shinya Hideomi
Kurata Yamazaki Sasagawa Suzawa