Slater Matsil, LLP
Semiconductor device process filter and method
In accordance with an embodiment, a method of filtering a process fluid such as a negative tone developer is provided. The negative tone developer is introduced to a filter membrane that comprises a fluorine-based polymer. The negative tone developer is then filtered through the filter membrane. By using these materials and methods, polyethylene from the filter membrane will not contaminate the photoresist during development and reduce defects that arise from polyethylene contamination.
Taiwan Semiconductor Manufacturing Company, Ltd.
G H
G03F H01L
inventional inventional
Kuan-Hsin Ching-Yu
Lo Chang