Smith, Gambrell & Russell, LLP
Heat processing apparatus, method of automatically tuning control constants, and storage medium
A heat processing apparatus includes a reaction vessel, a heating unit in the reaction vessel to heat the processing region, a temperature detector that detects temperature in the processing region, and a control part to control the heating unit by PID control. The control part has a rule table, and a performance unit that obtains temperature profiles and calculates differences between actually measured temperatures and target values. It refers to the rule table change the PID constants. The control part also updates relationships between PID constants and predicted temperature change amounts.
Tokyo Electron Limited
H H G
H01L H01L G05D
inventional inventional inventional
Hisashi Wenling Shoichi Goro
Inoue Wang Kanda Takahashi