WPAT, P.C., Intellectual Property Attorneys
Semiconductor device and manufacturing method thereof
A semiconductor device includes a plurality of semiconductor dies stacked vertically to have a vertical height and a dielectric surrounding the stacked semiconductor dies. The semiconductor device further has a conductive post external to the stacked semiconductor dies and extending through the dielectric. In the semiconductor device, a height of the conductive post is greater than the vertical height.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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Yu-Jen Hsien-Wei Der-Chyang
Chen Chen Yeh