Arent Fox LLP
Vibration device and manufacturing method of the same
A vibration device that includes a support member, vibration arms connected to the support member and each having an n-type Si layer which is a degenerate semiconductor, and electrodes provided so as to excite the vibration arms, and silicon oxide films containing impurities in contact with a respective lower surface of the n-type Si layers of each vibration arm.
MURATA MANUFACTURING CO., LTD.
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Takehiko Hiroshi Toshio Keiichi
Kishi Yamada Nishimura Umeda