Greenblum & Bernstein, P.L.C.
High frequency device with variable frequency and variable load impedance matching
A high frequency device for supplying a high frequency power to a load, the high frequency device includes: an oscillating unit that can vary an oscillation frequency; a high frequency power supplying unit that serves as a power source by amplifying an oscillation signal output from the oscillating unit for supplying the high frequency power to the load; a reflected-wave information calculating unit that calculates reflected wave information on a reflected wave power, and outputs the reflected wave information; a frequency control unit that controls the oscillation frequency of the oscillating unit so as to lower the reflected wave information; an impedance adjusting unit that is disposed at a downstream of the high frequency power supplying unit in a power supplying direction, and that has at least one variable reactance element which can be controlled; and an element control unit that controls the variable reactance element of the impedance adjusting unit so as to lower the reflected wave information.
Daihen Corporation
H H H H
H03H H01J H01J H01J
inventional inventional inventional inventional
Ryohei Kosuke Hideo Shuji
Tanaka Maeda Ito Omae