Crowell & Moring LLP
Charged particle beam device and optical examination device
In a semiconductor manufacturing process, it is necessary to cut a die close to the edge of a wafer in order to obtain as many dies as possible from one wafer. Accordingly, with respect to a charged particle beam device and an optical inspection device used in a semiconductor manufacturing process, there is a demand for detecting the height of the wafer close to the edge of the wafer with high accuracy, in order to measure or examine close to the edge of the wafer with high accuracy. Further, there is a demand for high speed height-detection in order to realize high throughput for the semiconductor manufacturing process. In the present invention, the foregoing can be achieved by the following configuration: sandwiching a target region on a wafer, a first pattern and a second pattern are projected onto one side and the other side respectively of the target region from an oblique direction with respect to the wafer top-surface, enabling an image of the first pattern and/or second pattern to be used.
Hitachi High-Tech Corporation
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Koichi
Taniguchi