Greer Burns & Crain, Ltd.
Constant temperature water supply system
A constant temperature water supply system that adjusts water from a water supply source to a constant temperature by a constant temperature water supply apparatus and supplies the water to a processing apparatus. The constant temperature water supply apparatus is provided with water temperature adjusting units that adjust processing water and cooling water to predetermined temperatures and temperature adjustment control units that reset predetermined temperatures of the water temperature adjusting units. The processing apparatus is provided with water temperature detectors that detect the water temperatures of the processing water and the cooling water and water temperature managing units that each calculate the temperature difference between the water temperature detected by the water temperature detector and a desired temperature set in advance.
DISCO CORPORATION
B G G B G
B23Q G05D G01K B23Q G01K
inventional inventional inventional additional inventional
Tadaomi Masaru
Matsumoto Saito