Birch, Stewart, Kolasch & Birch, LLP
Semiconductor device structure and method for forming the same
A semiconductor device structure is provided. The semiconductor device structure includes a semiconductor substrate and a gate stack positioned over the semiconductor substrate. The semiconductor device structure includes spacers positioned over sidewalls of the gate stack. The semiconductor device structure includes a first protective layer positioned between the gate stack and the spacers and between the spacers and the semiconductor substrate. The semiconductor device structure includes a second protective layer positioned between the spacers and the first protective layer. The first protective layer and the second protective layer include different materials.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
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Chung-Wei Chia-Der Ming-Chang Chung-Tsun Chih-Hung
Hung Chang Lee Sun Lu