Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATECNT-short-configured, and metal-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATECNT-short-related failure mode, and one metal-short-related failure mode.
PDF Solutions, Inc.
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Tomasz Indranil Hans Nobuharu Jeremy Marcin Larg Simone Andrzej Conor Rakesh Stephen Timothy Christopher Hideki John Carl Sheng-Che Kelvin Vyacheslav Markus Dennis Kimon Sherry Jonathan Marci
Brozek De Eisenmann Yokoyama Cheng Strojwas Weiland Comensoli Strojwas O'Sullivan Vallishayee Lam Fiscus Hess Matsuhashi Kibarian Taylor Lin Doong Rovner Rauscher Ciplickas Michaels Lee Haigh Liao