Jenkins, Wilson, Taylor & Hunt, P.A.
Substrate supporting units and substrate treating apparatuses including the same
Provided is a substrate supporting unit, which includes a support plate on which a substrate is placed, and a heating member disposed within the support plate to heat the support plate. The heating member includes a plurality of first heating wires disposed in a first region of the support plate, and a plurality of second heating wires disposed in a second region of the support plate, which is different from the first region. The first heating wires are connected to each other through one of a series connection and a parallel connection, and the second heating wires are connected to each other through the other of the series connection and the parallel connection.
Semes Co. Ltd.
H
H01L
inventional
Seungbae Wonhaeng
Lee Lee