Sughrue Mion PLLC
Piezoelectric element, liquid-jet head and liquid-jet apparatus
Disclosed are a piezoelectric element, which has a high withstand voltage and a longer durability life, a liquid-jet head and a liquid-jet apparatus. The piezoelectric element includes a lower electrode provided above a substrate, a piezoelectric layer provided above the lower electrode, and an upper electrode provided above the piezoelectric layer, and an electric resistivity of the piezoelectric layer is not lower than 20 MΩ·cm.
Seiko Epson Corporation
B H H B B B B B H B B
B41J H01L H01L B41J B41J B41J B41J B41J H01L B41J B41J
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Xin-Shan
Li