Sterne, Kessler, Goldstein & Fox P.L.L.C.
Method for manufacturing piezoelectric material
When a piezoelectric material is manufactured by hydrothermal method, the proper amount of lead contained in the piezoelectric film can be ensured and decreases in piezoelectric characteristics can be prevented. A method for manufacturing a piezoelectric material expressed by the formula ABO3, containing an element &#8220;a&#8221; as the element expressed by A above, and having a perovskite crystal structure, comprises a first step of producing an oxide containing an element &#8220;a&#8242;&#8221;, and a second step of producing a piezoelectric material by subjecting the oxide produced in the first step to a hydrothermal processing using an aqueous solution containing the element &#8220;a&#8221;, wherein the amount of the element &#8220;a&#8221; contained in the piezoelectric material produced in the second step is increased over the amount of the element &#8220;a&#8221; contained in the oxide produced in the first step.
Seiko Epson Corporation
H B H B B H B B B
H01L B41J H01L B41J B41J H01L B41J B41J B41J
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Tsutomu Zhiqiang Hong Koji Masanori
Nishiwaki Wei Qiu Sumi Okuyama