Jiang Chyun IP Office
Method for preventing burnt fuse pad from further electrical connection
A method for preventing burnt fuse pads from further electrical connection suitable before the formation of bumps on the wafer. A dielectric layer is formed over the active surface of the wafer covering the bump pads and the fuse pads of the wafer, wherein a central region of the fuse pads is burnt to form a gap which allows the material of the dielectric layer to fill up the gap. Afterwards, either a part of the dielectric layer is removed and the part of the dielectric layer covering the fuse pads remainsor a part of the dielectric layer covering the bump pads is removed. Then, an under ball metallurgy layer is formed on the bump pads of the wafer so that the material of the under ball metallurgy layer does not cover the two sides of the fuse pad at the same time, or fill into the gap. As a result, the electrical isolation still remains.
Advanced Semiconductor Engineering, Inc.
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Jen-Kuang Chao-Fu Chun-Chi Yung-Chi Su Min-Lung Ching-Huei Yu-Chen Ho-Ming Tsung-Hua Jau-Shoung
Fang Weng Lee Lee Tao Huang Su Chou Tong Wu Chen