Lumen Intellectual Property Services, Inc.
Phase shift measurement using transmittance spectra
An apparatus and method for determining a physical parameter of features on a substrate by illuminating the substrate with an incident light covering an incident wavelength range Δλ, e.g., from 190 nm to 1000 nm, where the substrate is at least semi-transparent. A response light received from the substrate and the feature is measured to obtain a response spectrum of the response light. Further, a complex-valued response due to the feature and the substrate is computed and both the response spectrum and the complex-valued response are used in determining the physical parameter. A direct approximate phase measurement is provided when the response light is transmitted light.
n&k Technology, Inc.
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inventional inventional inventional additional inventional
Abdul Rahim Guoguang Shuqiang Phillip
Forouhi Li Chen Walsh