Silicon carbide, sapphire, germanium, silicon and pattern wafer polishing templates holder
A template for polishing Silicon Carbide, Sapphire, Germanium, Silicon and pattern wafers having a slurry inlet, channels, outlets and pockets for holding said wafers terminating in peripheral vacuum ports in order to facilitate an efficient flow of slurry over the semiconductor wafers during a polishing process.
B B
B24B B24B
inventional inventional
Thang Van Phuong Van
Tran Nguyen