McDermott Will & Emery LLP
Charged particle beam equipment
Charged particle beam equipment has a processing unit for calibrating dimension values of an enlarged specimen image, and means for changing the amount by which a charged particle beam is scanned. Also, a specimen stand has a mechanism for holding a specimen having a periodical structure or a specimen simultaneously having a periodical structure and a non-periodical structure, and a storage device for automatically changing a magnification for an enlarged specimen image, and storing measured values at all magnifications.
Hitachi High-Technologies Corporation
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Shun-ichi Mitsugu Satoshi Hiromi Shigeto Atsushi Hiroyuki
Watanabe Sato Yamaguchi Inada Isakozawa Takane Tanaka