Birch, Stewart, Kolasch & Birch, LLP
Semiconductor device having field plate disposed on isolation feature and method for forming the same
The invention provides a semiconductor device, including a buried oxide layer disposed on a substrate. A semiconductor layer is disposed on the buried oxide layer. A first well is disposed in the semiconductor layer. A second well and a third well are disposed to opposite sides of the first well and separated from the first well. An isolation feature covers the first well and the third well. A poly field plate is disposed on the isolation feature and over the semiconductor layer between the first well and the third well. A first anode doped region is disposed on the second well. A second anode doped region and a third anode doped region are disposed on the second well. The second anode doped region is positioned directly on the third anode doped region. A first cathode doped region is coupled to the third well.
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
H H H H H H H H H H H H H H
H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L H01L
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Hsiung-Shih Chia-Hao Jun-Wei Manoj Pei-Heng
Chang Lee Chen Kumar Hung