Shapiro and Shapiro
Method for extracting electrode and cantilever for AFM using said method for extracting electrode
 A method for extracting electrodes, comprises the steps of forming an electrode of a dielectric thin film on a first substrate member, forming a small projection on a second substrate member, forming a wiring pattern of an electrode extracting member communicating with the projection on the second substrate member, whereby the electrode extracting member on the projection constitutes a projection portion and the electrode of the first substrate member is brought into contact with the projection portion to the electrode extracting member on the second substrate member, whereby the electrode can be electrically connected to an external unit via the electrode extracting member. 
Nikon Corporation
G B G Y
G01Q B82Y G01Q Y10S
inventional inventional inventional additional
Tetsuo Shunji
Hattori Watanabe