Method for producing a thin film transistor
A method for producing a thin film transistor includes providing a glass substrate; disposing a positive photosensitive coating on the glass substrate; providing a transparent molding plate having a plurality of ladder opaque protrusions that are arranged in accordance with a predetermined pattern and that have at least two different depths; pressing the transparent molding plate into the positive photosensitive coating without contacting the glass substrate; exposing a part of the positive photosensitive coating which is unshielded under the ladder opaque protrusions, with a UV light; separating the transparent molding plate from the glass substrate after the step of exposing; and removing the part of the positive photosensitive coating, which is unshielded under the ladder opaque protrusions and not cured, using a chemical solvent, whereby the thin film transistor is formed in a pattern having more than two different depths.
Taiwan TFT LCD Association Chi Mei Optoelectronics Corp. Toppoly Optoelectronics Corp. Industrial Technology Research Institute Hannstar Display Corp. Chunghwa Picture Tubes, Ltd. AU Optronics Corp.
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Wen-Tung Lin-En Chia-Hao
Wang Chou Tsai