IP Strategy Group, P.C.
Apparatus for the removal of an edge polymer from a substrate and methods therefor
An apparatus generating a plasma for removing an edge polymer from a substrate is disclosed. The embodiment includes a powered electrode assembly, including a powered electrode, a first dielectric layer, and a first wire mesh disposed between the powered electrode and the first dielectric layer. The embodiment also includes a grounded electrode assembly disposed opposite the powered electrode assembly so as to form a cavity wherein the plasma is generated, the first wire mesh being shielded from the plasma by the first dielectric layer when the plasma is present in the cavity, the cavity having an outlet at one end for providing the plasma to remove the edge polymer.
Lam Research Corporation
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inventional inventional inventional inventional
Hyungsuk Alexander Yunsang Jason A. Andrew D.
Yoon Kim Ryder Bailey, III