Apex Juris, pllc.
Roll-to-roll sputtering process with hybrid target and product thereof
The present invention provides a roll-to roll sputtering process with a hybrid target comprising: unwinding a flexible polymer substrate from an unwinding axis; sputtering a hybrid target to the flexible polymer substrate for forming a first metal film, and a second metal film; and rewinding the flexible polymer substrate to a rewinding axis, and further comprising the following steps of: using laser to form a first electrode section and a second electrode section on the first metal film and the second metal film; and disposing a detecting substance layer on the second electrode section. Moreover, a product made by the roll-to-roll sputtering process is provided. Compared to the prior art, the hybrid target of the present invention is formed by multiple metals and can be sputtered to the substrate for forming multiple metal thin films. The present invention has an advantage of shortening the processing time and saving cost.
Ace Medical Technology Co., Ltd.
H G C C A H A C H C C G B A C A C
H01J G01N C23C C12Q A61B H01J A61B C23C H01J C12Q C23C G01N B32B A61B C23C A61B C23C
inventional inventional inventional inventional additional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional
Ching-Yu Chien-Fa
Chang Liao