Carbon nanotube emitter with triode structure
 An improved cold cathode emitter based on carbon nanotubes has been developed by inserting into the conventional process an extra step in which the diameter of the gate aperture is temporarily reduced by means of a conformally deposited sacrificial layer. This reduced diameter aperture is then used as a mask for the deposition of the catalytic layer. The latter is then converted to a discontinuous layer either by selective etching or by heating until agglomeration occurs. The sacrificial layer is removed, following which carbon nanotubes are grown upwards from the catalytic layer in the normal manner. Because of the greater distance between the tubes and the gate aperture that this process provides, a more reliable product is obtained. 
Industrial Technology Research Institute
H B H Y
H01J B82Y H01J Y10S
inventional inventional additional additional
Wen-Chun Feng-Yu
Wang Chuang