Fish & Richardson P.C.
Catadioptric projection objective
A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane;
Carl Zeiss SMT AG
G G G G G G G
G03F G02B G02B G02B G02B G02B G02B
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Alexander Hans-Juergen Wilhelm Rudolf David Aurelian
Epple Mann Ulrich Von Buenau Shafer Dodoc