ScienBiziP, P.C.
Photolithography method based on electronic beam
The disclosure relates to a photolithography method based on electronic beam. The method includes: providing an electronic beam; making the electron beam transmit a two dimensional nanomaterial to form a transmission electron beam and a number of diffraction electron beams; shielding the transmission electron beam; and radiating a surface of an object by the plurality of diffraction electron beams. The photolithography method is high efficiency and has low cost.
Tsinghua University HON HAI PRECISION INDUSTRY CO., LTD.
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Wei Peng Chun-Hai Kai-Li Xiao-Yang Duan-Liang Shou-Shan
Zhao Liu Zhang Jiang Lin Zhou Fan