Anova Law Group, PLLC
Electrostatic discharge protection device and method for forming the same
The present disclosure provides a method for forming an electrostatic discharge (ESD) protection device, including: providing a substrate including an input region; forming a plurality of fins on the substrate in the input region; forming a well region, doped with first-type ions, in the plurality of fins and in the substrate; and forming an epitaxial layer on each fin in the input region. The method further includes: forming a drain region, doped with second-type ions, in a top portion of each fin and in the epitaxial layer; forming an extended drain region, doped with the second-type ions, in a bottom portion of each fin to connect to the drain region and in a portion of the substrate, in the input region; and forming a counter-doped region, doped with the first-type ions, in a portion of the substrate between two adjacent fins to insulate adjacent extended drain regions.
Semiconductor Manufacturing International (Shanghai) Corporation Semiconductor Manufacturing International (Beijing) Corporation
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Yong
Li