Birch, Stewart, Kolasch & Birch, LLP
Sputtering target
Provided is a sputtering target that is less likely to cause abnormal discharge. The sputtering target has a sputtering surface in which a lightness L in a Lab color system is more than 27 and 51 or less.
SUMITOMO CHEMICAL COMPANY, LIMITED
H C B H H C C H C
H01J C23C B24B H01L H01J C23C C23C H01J C23C
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Koji Hiroyuki Masahiro
Nishioka Tsukada Fujita