Morgan, Lewis & Bockius LLP
Al alloy member, electronic device manufacturing apparatus, and method of manufacturing an anodic oxide film coated al alloy member
Provided is an Al alloy member with an excellent mechanical strength that is sufficient for use in large-scale manufacturing apparatuses. The Al alloy member is characterized in that, in mass %, Mg concentration is 5.0% or less, Ce concentration is 15% or less, Zr concentration is 0.15% or less, the balance comprises Al and unavoidable impurities, the elements of the unavoidable impurities are respectively 0.01% or less, and the Vickers hardness of the Al alloy member is greater than 30.
National University Corporation Tohoku University Nippon Light Metal Company, Ltd.
Y H H C C
Y10T H05K H05K C25D C22C
additional inventional additional inventional inventional
Tadahiro Minoru Hisakazu Masafumi Masayuki Kota
Ohmi Tahara Ito Kitano Saeki Shirai