Haynes and Boone, LLP
Priming material for substrate coating
A coating technique and a priming material are provided. In an exemplary embodiment, the coating technique includes receiving a substrate and identifying a material of the substrate upon which a layer is to be formed. A priming material is dispensed on the material of the substrate, and a film-forming material is applied to the priming material. The priming material includes a molecule containing a first group based on an attribute of the substrate material and a second group based on an attribute of the film-forming material. Suitable attributes of the substrate material and the film-forming material include water affinity and degree of polarity and the first and second groups may be selected to have a water affinity or degree of polarity that corresponds to that of the substrate material and the film-forming material, respectively.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
H B G B G C H H B H
H01L B05D G03F B05D G03F C09D H01L H01L B05D H01L
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Ching-Yu Chen-Yu
Chang Liu