Oblon, Spivak, McClelland, Maier & Neustadt
Vertical type heat treatment system
 A vertical heat treatment system for heat treating a large number of semiconductor wafers housed in a boat at once includes a heat treatment unit having a boat loading/unloading port, a boat section communicating with the heat treatment unit through the boat loading/unloading port, an elevator mechanism for loading/unloading the boat between the boat section and the heat treatment unit through the boat loading/unloading port, a cassette section provided adjacent to the boat section, a wafer transfer mechanism for transferring wafers between a cassette and the boat, a gas supply mechanism for supplying a non-oxidization gas into the boat section, and a gas shower means for blowing the non-oxidization gas to the wafers in the vicinity of the boat loading/unloading port. 
Tokyo Electron Limited Tokyo Electron Tohoku Limited
H
H01L
inventional
Kazunari Isao Hiroki Shingo Masato Hiroyuki
Sakata Furuya Fukushima Watanabe Kadobe Iwai