McDermott Will & Emery LLP
System and method for controlling ion implanter
A system, a method, and a non-transitory computer readable storage medium for controlling an ion implanter are disclosed herein. The system includes a sample module and a control module. The sample module is configured to generate a summarized value from process data of the ion implanter, and the process data correspond to a control parameter. The control module is configured to tune a control parameter, and the control module performs an ion implantation by releasing tools of the ion implanter in accordance with the control parameter when the summarized value meets a predetermined stability requirement.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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inventional additional inventional additional
Jo-Fei Sheng-Wei Po-Feng Jong-I Chia-Hsing Chia-Tong
Wang Lee Tsai Mou Liao Ho