Soroker Agmon Nordman
Method for manufacturing LTPS array substrate
The present invention provides a manufacturing method of LTPS array substrate, wherein the LTPS array substrate contains at least a metal mask layer, a buffer layer, an active layer, a gate insulating layer and a gate layer. The manufacturing method is to form the gate layer by patterning the gate layer using the metal mask layer as a photomask, and a width of the formed gate layer is smaller than a width of the metal mask layer so that a vertical projection of the gate layer falls within the scope of the metal mask layer. In the present invention, the cost of producing a metal mask for the gate electrode is saved by patterning the gate layer using the metal mask layer as a photomask, so that the cost of producing LTPS is saved and the process of production is simplified.
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
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Chao Yuxia
He Chen