Volentine & Whitt, PLLC
Methods of fabricating a semiconductor device including a self-aligned cell diode
A method of fabricating a semiconductor device includes forming a conductive layer on a semiconductor substrate, forming an insulating layer on the conductive layer, forming a word line and isolation trenches by patterning the insulating layer and the conductive layer, forming an isolation layer that fills the isolation trenches, forming a cell contact hole in the insulating layer such that the cell contact hole is self-aligned with the word line and exposes the word line, and forming a cell diode in the cell contact hole.
Samsung Electronics Co., Ltd.
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Jung-In Jae-Hyun Yong-Tae Jae-Hee Sung-Ho Seung-Pil
Kim Park Oh Oh Eun Ko