IC with test structures and e-beam pads embedded within a contiguous standard cell area
An IC that includes a contiguous standard cell area with a 4×3 e-beam pad that is compatible with advanced manufacturing processes and an associated e-beam testable structure.
PDF Solutions, Inc.
H H H H G H H H H H H H H H G H H H H G H H H H H H G H H G
H01L H01L H03K H01L G06F H01J H01L H01L H01L H01L H01L H01L H01L H01L G06F H01L H01L H01L H01L G01R H01L H01L H01J H01L H01L H01L G01R H01L H01L G06F
inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional additional inventional inventional additional inventional inventional additional inventional additional inventional inventional inventional additional inventional additional additional inventional additional inventional inventional
Marcin Tomasz Simone Hans Vyacheslav Kimon Jeremy Larg Indranil Dennis Hideki Carl Timothy Christopher Marci Kelvin Sherry Jonathan Rakesh Andrzej Matthew John Nobuharu Markus Sheng-Che Stephen Conor
Strojwas Brozek Comensoli Eisenmann Rovner Michaels Cheng Weiland De Ciplickas Matsuhashi Taylor Fiscus Hess Liao Doong Lee Haigh Vallishayee Strojwas Moe Kibarian Yokoyama Rauscher Lin Lam O'Sullivan