Sughrue Mion, PLLC
Sterilization system comprising independent pump module and sterilization method thereof
A sterilization system comprises a chamber module and an independent pump module that is external to the chamber module in an independent form, is connected to the chamber module, and has a built-in pump, wherein the chamber module comprises a chamber built in the chamber module and storing a target object and a vaporizer built in the chamber module and connected to the chamber to supply a vaporized sterilant, wherein the chamber built in the chamber module is connected to the pump built in the independent pump module and exhausted.
PLASMAPP CO., LTD.
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Seunghun Youbong Junyoung Jungik
Lee Lim Kim Ko