Lowe, Hauptman & Ham, LLP
Method of lithography
A lithography method of manufacturing integrated circuits is disclosed. A photoalignment layer is formed on a substrate. A treatment is performed to reorganize and align the photoalignment molecules. A photoresist layer may be formed on the photoalignment layer in a bi-layer separate coating or with the photoalignment layer in a bound-bind structure.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Fong-Cheng Ching-Yu
Lee Chang