Muncy, Geissler, Olds & Lowe, P.C.
Pressure sensor and manufacturing method of the same
A pressure sensor and a manufacturing method of the same are provided. The pressure sensor includes a substrate, a dielectric oxide layer, a first electrode, a dielectric connection layer, and a second electrode. The dielectric oxide layer is formed on the substrate. The first electrode is formed on the dielectric oxide layer. The dielectric connection layer is formed on the first electrode. The second electrode is formed on the dielectric connection layer. The second electrode comprises a patterned conductive layer and a dielectric layer. The patterned conductive layer has a plurality of holes, and the dielectric layer is formed on the patterned conductive layer and covers the inner walls of the plurality of holes. The first electrode, the dielectric connection layer, and the second electrode define a first chamber between the first electrode and the second electrode.
Industrial Technology Research Institute
G G H B B B B H H B
G01L G01L H04R B81B B81B B81B B81B H04R H04R B81B
inventional additional inventional inventional additional additional inventional inventional additional additional
Yu-Sheng Jien-Ming Chin-Wen Chin-Hung Jing-Yuan
Hsieh Chen Huang Wang Lin