Birch, Stewart, Kolasch & Birch, LLP
Method of reducing charge loss for nonvolatile memory
A method of reducing charge loss for nonvolatile memory. First, a semiconductor substrate having a semiconductor device thereon is provided. Next, a dielectric layer is formed on the entire surface of the semiconductor substrate, and a thermal treatment is performed in an atmosphere containing a reactive gas, and the reactive gas reacts with free ions remaining on the semiconductor substrate from prior manufacturing processes. Finally, a metal layer is formed on the dielectric layer.
Macronix International Co., Ltd.
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Hung-Yu Ching-Yu Uway Wenpin
Chiu Chang Tseng Lu