Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Alignment method, tip position detecting device and probe apparatus
An alignment method is used in implementation of electric characteristic inspection of an object to be inspected via electric contact between the object disposed on a movable mounting table and probes. The alignment method includes detecting tip positions of the probes by using the tip position detecting device, detecting the tip positions of the probes, previously detected by the tip position detecting device, by using the second imaging unit, transferring needle marks of the probes onto a soft member provided at the tip position detecting device by allowing the probes to come into contact with the soft member, detecting the needle marks of the probes formed on the soft member by using the first imaging unit, and detecting inspection electrodes of the object corresponding to the probes by using the first imaging unit.
Tokyo Electron Limited
G
G01R
inventional
Tetsuji Hiroshi Masaru Takeshi
Watanabe Yamada Suzuki Kawaji