Bingham McCutchen LLP
Method for creating patterns for producing integrated circuits
To increase the writing speed of masks, context information can be used to distinguish the attributes of portions of the mask that are critical from attributes, and portions, that are less critical. By using this information, which may be derived from the design context of the features, the mask can be written at a higher speed without sacrificing the accuracy of the important attributes or features.
Cadence Design Systems, Inc.
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G06F G03F
inventional inventional
Kenji Robert C. Aki Yoshikuni Louis K.
Yoshida Pack Fujimura Abe Scheffer