Myers Bigel, P.A.
Integrated circuit devices with blocking layers
An integrated circuit device may include a gate dielectric layer on an inner surface of a gate trench of a substrate, a gate structure filling a portion of the gate trench on the gate dielectric layer, and an insulating, capping pattern on an upper surface of the gate structure in the gate trench. The gate structure may include a lower gate line having a first work function, an upper gate line having a second work function lower than the first work function, a first blocking layer between the lower gate line and the upper gate line, and a second blocking layer between the upper gate line and the insulating capping pattern.
Samsung Electronics Co., Ltd.
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Sang Hyun Jun-sik Kyo-suk
Lee Kim Chae