Maschoff Brennan
Semiconductor structure
A semiconductor structure includes a substrate, a dielectric layer, a metal layer, and a tungsten layer. The dielectric layer is on the substrate and has a recess feature therein. The metal layer is in the recess feature. The metal layer has an oxygen content less than about 0.1 atomic percent. The tungsten layer is in the recess feature and in contact with the metal layer.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chun-Yuan Chung-Chiang Hsueh-Wen Ming-Hsing Cheng-Yen Chia-Ching Da-Yuan
Chou Wu Tsau Tsai Tsai Lee Lee