The Webb Law Firm
Continuous coating apparatus
Provided is a continuous coating apparatus which can supply a liquid coating material (a molten metal) to a levitation-heating space through various paths, and can easily control a supply flow rate of the liquid coating material, and has a simplified structure. The continuous coating apparatus includes: a vacuum chamber unit through which a coating target passes; a levitation-heating unit disposed in the vacuum chamber unit and generating an evaporation vapor by vaporizing a supplied coating material; and a liquid coating material supply unit connected so that a liquid coating material is supplied to at least one of an upper portion and a lower portion of the levitation-heating unit, and communicating with the outside of the vacuum chamber unit.
POSCO
H C C H H C C
H01L C23C C23C H01L H05B C23C C23C
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Woo-Sung Tae-Yeob Dong-Yoeul Sang-Hoon Kyung-Hoon Mun-Jong Young-Jin Kyoung-Bo Sang-Cheol Yong-Hwa
Jung Kim Lee Park Nam Eom Kwak Kim Lee Jung