Haynes and Boone, LLP
Cut-mask patterning process for fin-like field effect transistor (FinFET) device
A method for patterning a plurality of features in a non-rectangular pattern, such as on an integrated circuit device, includes providing a substrate including a surface with a plurality of elongated protrusions, the elongated protrusions extending in a first direction. A first layer is formed above the surface and above the plurality of elongated protrusions, and patterned with an end cutting mask. The end cutting mask includes two nearly-adjacent patterns with a sub-resolution feature positioned and configured such that when the resulting pattern on the first layer includes the two nearly adjacent patterns and a connection there between. The method further includes cutting ends of the elongated protrusions using the pattern on the first layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ho Wei Ching-Yu Ming-Feng Kuei-Liang
De Chang Shieh Lu