Blakely, Sokoloff, Taylor & Zafman LLP
Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same
A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern. The support structure also supports the hinge pattern and mirror pattern such that a bottom surface of the center mirror component in a stationary non-rotating position is capable of exceeding a height of 50 &mgr;m above the electrodes.
Calient Networks, Inc.
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G02B B81B B81B
inventional inventional additional
Seung Bok Charles Noel Robert Kehl John Edward Roger Jonathan
Lee Corbalis MacDonald Sink Bowers Helkey