Thomas, Kayden, Horstemeyer & Risley
Water soluble negative tone photoresist
In accordance with the objectives of the invention a new water soluble negative photoresist is provided for packing-and-unpacking (PAU) processing steps.
Taiwan Semiconductor Manufacturing Co., Ltd.
G G G G
G03F G03F G03F G03F
inventional inventional additional inventional
Yusuke Ping-Hung Jian-Hong Bang-Chein
Takano Lu Chen Ho