Hauptman Ham, LLP
Component control in semiconductor performance processing with stable product offsets
A method of making a semiconductor device includes collecting process control parameters during operation of a processing tool processing a product. The method further includes calculating a processing tool offset for the processing tool based on the collected process control parameters and calculating a product offset based on the collected process control parameters. The method further includes determining whether the product offset is stable and calculating an offset time for processing the product using the processing tool based on the calculated processing tool offset if the product offset is stable.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Y G Y G G
Y02P G05B Y02P G05B G05B
additional additional additional inventional inventional
Chia Jung Yu-Hsiu Ching-Hsi
Chang Fu Nan