Foley & Lardner
Semiconductor device with vertical transistors connected in series between bit lines
 A semiconductor device connected between first and second wiring lines comprises a semiconductor substrate, a first semiconductor column formed by etching the substrate by a predetermined depth, a second semiconductor column formed by etching the substrate by a predetermined depth, with a predetermined distance set from the first semiconductor column, a first gate electrode formed around a side wall of the first semiconductor column with an insulating layer interposed, a second gate electrode formed around a side wall of the second semiconductor column with an insulating layer interposed, a first diffusion layer functioning as one of a source and a drain, the first diffusion layer being formed at a top portion of the first semiconductor column and connected to the first wiring line, a second diffusion layer functioning as another of the source and the drain, the second diffusion layer being formed at a top portion of the second semiconductor column and connected to the second wiring line, and a diffusion layer functioning as one of a source and a drain, the diffusion layer being formed at bottom portions and peripheral portions of the bottom portions of the first and second semiconductor columns and shared by the first and second semiconductor columns. 
Kabushiki Kaisha Toshiba
H H
H01L H01L
inventional inventional
Shigeyoshi
Watanabe