Keating & Bennett, LLP
Method for making ferroelectric thin-film, sensor and the ferroelectric thin-film element
A ferroelectric thin-film element has a Si substrate and a thin-film laminate formed on the Si substrate, the thin-film laminate being a buffer layer epitaxially grown on the Si substrate, a metallic thin film lower electrode epitaxially grown on the buffer layer, a ferroelectric thin film orientationally grown or epitaxially grown on the lower electrode, and an upper electrode formed on the ferroelectric thin film. A portion of the thin-film laminate may be supported by air.
Murata Manufacturing Co., Ltd.
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Katsuhiko Xiao-min
Tanaka Li