Scully, Scott, Murphy & Presser, P.C.
Semiconductor substrate, semiconductor element and method for producing semiconductor substrate
A semiconductor substrate includes a single crystal Ga2O3-based substrate and a polycrystalline substrate that are bonded to each other. A thickness of the single crystal Ga2O3-based substrate is smaller than a thickness of the polycrystalline substrate, and a fracture toughness value of the polycrystalline substrate is higher than a fracture toughness value of the single crystal Ga2O3-based substrate.
TAMURA CORPORATION SICOXS Corporation National Institute of Information and Commnications Technology
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Kuniaki Keita Kohei Akito Naoki Shinya Masataka
Yagi Konishi Sasaki Kuramata Hatta Watanabe Higashiwaki