Patterson + Sheridan, LLP
Heat shield ring for high growth rate EPI chamber
A heat shield assembly for an epitaxy chamber is described herein. The heat shield assembly has a heat shield member and a preheat member. The heat shield member is disposed on the preheat member. The heat shield member has a cutout portion that exposes a portion of the preheat member. The preheat member has a recessed portion to receive the heat shield member.
Applied Materials, Inc.
C C C
C30B C30B C23C
inventional inventional inventional
Yuji Shinichi Yoshinobu
Aoki Oki Mori