Cooper & Dunham LLP
Liquid drop ejecting head, image forming device, and method of manufacturing liquid drop ejecting head
A liquid drop ejecting head includes a a nozzle plate to form nozzles, a liquid chamber substrate including one surface bonded to the nozzle plate and forming liquid chambers provided for the nozzles and communicating with the nozzles, a diaphragm bonded to the other surface of the liquid chamber substrate to form a part of each liquid chamber, and a pressure generating unit giving pressure oscillation to the diaphragm in accordance with a liquid drop eject signal to exert pressure on a liquid in each liquid chamber through the diaphragm. In the liquid drop ejecting head, a protection film is formed on an inner side wall of each liquid chamber by a chemical reaction of fluorocarbon and silicon fluoride oxide of a by-product formed on the inner side wall of the liquid chamber with the formation of the liquid chambers in the liquid chamber substrate.
RICOH COMPANY, LTD.
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Kohzoh Manabu Kouji
Urasaki Nishimura Ohnishi