Kilpatrick Townsend & Stockton LLP
Method of manufacturing liquid jet head, method of manufacturing piezoelectric element and liquid jet apparatus
A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.
Seiko Epson Corporation
B B B Y B B B Y
B41J B41J B41J Y10T B41J B41J B41J Y10T
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Toshinao Kazushige Koji Tsutomu
Shinbo Hakeda Sumi Nishiwaki