Kile Park Reed & Houtteman PLLC
Method for inspecting measurement object
An inspection method for inspecting a device mounted on a substrate, includes generating a shape template of the device, acquiring height information of each pixel by projecting grating pattern light onto the substrate through a projecting section, generating a contrast map corresponding to the height information of each pixel, and comparing the contrast map with the shape template. Thus, a measurement object may be exactly extracted.
Koh Young Technology Inc.
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Seung-Jun Joong-Ki Yu-Jin
Lee Jeong Lee