Duane Morris LLP
Frame cell for shot layout flexibility
A method includes establishing an initial shot layout in which a number of shots are arranged in vertically aligned columns and horizontally aligned rows to cover a semiconductor wafer. At least one of a row of shots or a column of shots is shifted relative to an adjacent row or column of shots to establish at least one additional shot layout that differs from the initial shot layout in that shots in the at least one shifted row or column of shots are not aligned with the shots in the adjacent row or column of shots with which they were aligned in the initial shot layout. One of the initial shot layout and the at least one additional shot layout is selected as a final shot layout. The wafer is exposed to light using the final shot layout.
Taiwan Semiconductor Manufacturing Co., Ltd.
G
G03F
inventional
Chin-Hsiang Chin-Ming Yung-Cheng Chia-hung Chih-Wei Chi-Ming
Lin Lin Chen Huang Lin Yang