Anova Law Group, PLLC
Vertical tunneling field effect transistor device and fabrication method thereof
A VTFET device and fabrication method is provided. The method includes: forming a first doped layer on a semiconductor substrate. Vertical nanowires are formed on the first doped layer. Dummy gate layers are formed on the first doped layer, and a first interlayer dielectric layer is formed on a top surface of the first doped layer exposed by dummy gate layers. Grooves are formed in the first interlayer dielectric layer, by removing a portion of the first interlayer dielectric layer and removing a partial thickness of the vertical nanowires. A second doped layer is formed in each groove. Openings are formed by etching the first interlayer dielectric layer between adjacent vertical nanowires, to expose the dummy gate layers. The dummy gate layers are removed through the openings to form cavities and each cavity includes the opening and a space provided by the removed dummy gate layers.
Semiconductor Manufacturing International (Shanghai) Corporation Semiconductor Manufacturing International (Beijing) Corporation
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Yong
Li