Fox Rothschild LLP
Systems and methods for real time measurement of surface curvature and thermal expansion of small samples
Systems and methods for measuring a curvature radius of a sample. The methods comprise: emitting a light beam from a laser source in a direction towards a beam expander; expanding a size of the light beam emitted from the laser source to create a broad laser beam; reflecting the broad laser beam off of a curved surface of the sample; creating a plurality of non-parallel laser beams by passing the reflected broad laser beam through a grating mask or a biprism; using the plurality of non-parallel laser beams to create an interference pattern at a camera image sensor; capturing a first image by the camera image sensor; and processing the first image by an image processing device to determine the curvature radius of the sample.
RUTGERS, THE STATE UNIVERSITY OF NEW JERSEY
Torgny Leonard C. Alexei Xiuyan Eric
Gustafsson Feldman Ermakov Li Garfunkel