Sterne, Kessler, Goldstein & Fox, P.L.L.C.
Piezoelectric actuator, ink jet printing head, printer, method for manufacturing piezoelectric actuator, and method for manufacturing ink jet printing head
A piezoelectric actuator, made of a substrate and a piezoelectric film layer resistant to erosion is provided. The area of the piezoelectric actuator can be enlarged, and has a flat top surface. The present invention further provides an ink jet printing head, a printer, a method for manufacturing a piezoelectric actuator, and a method for manufacturing an ink jet printing head. The piezoelectric actuator includes a piezoelectric film disposed between a lower electrode and an upper electrode. Columnar crystal grains of piezoelectric ceramic which compose the piezoelectric actuator are random-oriented in a film thickness direction, and have a mean diameter in the range of 100 nm to 15,000 nm. The method for manufacturing the actuator includes the step of forming precursor films, which are composed of metal and oxygen, over a lower electrode, providing a hydrothermal treatment by dipping the precursor films in an alkaline solution, which as 2 M[mol/l] or less, more preferably 0.1 M[mol/l] or less, concentration of a given alkaline solute, and promoting the crystallization under certain conditions.
Seiko Epson Corporation
B B B H B B H H B
B41J B41J B41J H01L B41J B41J H01L H01L B41J
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Tsutomu Hong Koji Masato Masanori Zhi Quiang
Nishiwaki Qiu Sumi Shimada Okuyama Wei