McDermott Will & Emery LLP
Wafer surface observing method and apparatus
A wafer surface observing apparatus for inspecting a peripheral portion of an object has (A) a lens system and a CCD camera for taking images of the peripheral portion of the object, (B) storage for storing image data about the taken images, and (C) display for displaying the image data stored in the storage device. In particular, the present apparatus can have functions of rotating the object placed on a prealignment portion, recording images of one full outer periphery of an end portion of the object by the lens system and CCD camera into the location where the orientation flat portions or notched portions of the object are placed in position, accepting the images into the storage device, and displaying the images on a CRT.
Hitachi High-Technologies Corporation
G G
G01N G01N
inventional inventional
Tetsuya Kenji Hiroshi
Watanabe Aiko Higashi