Minder Law Group
Methods for extracting and recycling hydrogen from MOCVD process exhaust gas by FTrPSA
The present invention discloses methods for extracting and recycling hydrogen in an MOCVD process by FTrPSA. Through pretreatment, fine deamination, PSA hydrogen extraction, deep dehydration and hydrogen purification procedures, ammonia-containing waste hydrogen from an MOCVD process is purified to meet the electronic-level hydrogen (the purity is greater than or equal to 99.99999% v/v) standard required by the MOCVD process, to implement resource reuse of exhaust gases, where the hydrogen yield is greater than or equal to 75-86%. The present invention solves the technical problem that atmospheric-pressure or low-pressure waste hydrogen from MOCVD processes cannot be returned to the MOCVD processes for use after being recycled, and fills the gap in green and circular economy development of the LED industry.
Zhejiang Tiancaiyunji Technology Co., Ltd.
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Lanhai Yuming Yueming Jincai Yun Yaling
Wang Zhong Cai Tang Chen Zhong