WPAT, P.C., Intellectual Property Attorneys
System for a semiconductor fabrication facility and method for operating the same
An apparatus for a semiconductor fabrication facility (FAB) is provided. In one embodiment, the apparatus includes a maintenance tool and a transporting tool configured to transport at least one customized. The maintenance tool includes a first track at a first horizontal plane, at least one maintenance crane movably mounted on the first track, and a plurality of first sensors on the first track. The first sensors are configured to define at least a danger zone and to detect a location of the maintenance crane. The transporting tool includes a second track at a second horizontal plane, at least one overhead hoisting transporting (OHT) vehicle movably mounted on the second track, and at least one second sensor on the OHT vehicle. The second horizontal plane is different from the first horizontal planes. The first horizontal plane and the second horizontal plane at least partially overlap each other from a plane view.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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G03F G05B B66C G03F G05B B66C B66C H01L G05B G03F H01L H01L G03F G03F G03F H01L H01L H01L G03F B66C H01L G05B
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Hsiang Yin Guancyun Fu-Hsien Chi-Feng Sheng-Kang
Shen Li Li Tung Yu