Fitzpatrick, Cella, Harper & Scinto
Semiconductor element having microcrystalline semiconductor material
 In a semiconductor element comprising microcrystalline semiconductor, a semiconductor junction is provided within a microcrystal grain. Further, in a semiconductor element comprising microcrystalline semiconductor, microcrystal grains of different grain diameters are provided as a mixture to form a semiconductor layer. Thereby, discontinuity of a semiconductor junction is lessened to thereby improve the characteristics, durability, and heat resisting properties of a semiconductor element. Distortion in a semiconductor layer is also reduced. 
Canon Kabushiki Kaisha
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Keishi Masafumi
Saito Sano