Integrated circuit including NCEM-enabled, corner gap-configured fill cells, with NCEM pads formed from at least three conductive stripes positioned between adjacent gates
An integrated circuit, in the form of a wafer, die, or chip, includes multiple standard cell-compatible fill cells, configured to enable non-contact electrical measurements. Such fill cells include mesh pads that contain at least three conductive stripes disposed between adjacent gate stripes. Such fill cells further include geometry to enable non-contact evaluation of corner shorts and/or leakages.
PDF Solutions, Inc.
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Sherry Andrzej Conor Timothy Kimon Rakesh Stephen Jeremy Jonathan Dennis Kelvin Christopher Simone Hans Sheng-Che Markus Indranil Marcin Tomasz John Carl Vyacheslav Marci Hideki Nobuharu Larg
Lee Strojwas O'Sullivan Fiscus Michaels Vallishayee Lam Cheng Haigh Ciplickas Doong Hess Comensoli Eisenmann Lin Rauscher De Strojwas Brozek Kibarian Taylor Rovner Liao Matsuhashi Yokoyama Weiland