Drinker Biddle & Reath LLP
Free abrasive slurry composition and a grinding method using the same
The present invention relates to a free abrasive slurry composition which is advantageously used in uniform grinding of a composite material composed of a plurality of materials each having different hardness, without causing selective grinding. The free abrasive slurry composition contains abrasive particles, an anti-abrasion agent as an anti-selective grinding agent and a dispersion medium and the anti-abrasive agent is a compound containing one or both of sulfur and phosphorus or hydroxyl group(s) in the molecular chain.
TDK Corporation Tokyo Magnetic Printing Co., Ltd.
C C
C09K C09G
inventional inventional
Masao Yasuyuki Isao Tomohiro Masahiro Yasutoshi Kazuya
Yamaguchi Suzuki Saito Kaku Sasaki Fujita Orii