Haynes and Boone, LLP
Optical proximity correction convergence control
A method of optical proximity correction (OPC) convergence control that includes providing a lithography system having a photomask and an illuminator. The method further includes performing an exposure by the illuminator on the photomask. Also, the method includes optimizing an optical illuminator setting for the lithography system with a defined gate pitch in a first direction in a first template. Additionally, the method includes determining OPC correctors to converge the OPC results with a target edge placement error (EPE) to produce a first OPC setting for the first template. The first OPC setting targets a relatively small EPE and mask error enhancement factor (MEEF)of the defined gate pitch in the first template. In addition, the method includes checking the first OPC setting for a relatively small EPE, MEEF and DOM consistency with the first template of the defined gate pitch in a second, adjacent template.
Taiwan Semiconductor Manufacturing Company, Ltd.
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inventional inventional
Cheng-Cheng Tsai-Sheng Chih-Wei Kuei Shun Tzu-Chun Hsin-Chang Hua-Tai Wen-Chun Ching-Che Chih-Shiang
Kuo Gau Hsu Chen Lo Lee Lin Huang Tsai Chou