McClure, Qualey & Rodack, LLP
MEMS microphone with tunable sensitivity
A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate, a diaphragm, a first insulating protrusion and a plurality of second insulating protrusions. The backplate is disposed on a side of the substrate. The diaphragm is disposed between the substrate and the backplate and is movable relative to the backplate. The first insulating protrusion and the second insulating protrusions are formed on the side of the backplate facing the diaphragm. The first insulating protrusion is connected to and affixed to the diaphragm permanently, and an air gap is formed between the diaphragm and each of the second insulating protrusions.
FORTEMEDIA, INC.
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B81B H04R H04R B81C B81B B81B H04R B81B H04R H04R
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Hsin-Li Wen-Shan Nai-Hao Jien-Ming
Lee Lin Kuo Chen