Maschoff Brennan
Image sensor having isolation structure
A device including a semiconductive substrate having opposite first and second surfaces, a light-sensitive element in the semiconductive substrate, an isolation structure extending at least from the second surface of the semiconductive substrate to within the semiconductive substrate, and a color filter over the second surface of the semiconductive substrate. The isolation structure includes a dielectric fill and a first high-k dielectric layer wrapping around the dielectric fill.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H H H H H
H01L H01L H01L H01L H01L
additional inventional inventional inventional inventional
Yun-Wei Chun-Hao Kuo-Cheng Chun-Wei Hsun-Ying
Cheng Chou Lee Chia Huang