Harness, Dickey & Pierce, P.L.C.
Variable wavelength interference filter, optical module, optical analysis device, and method for manufacturing variable wavelength interference filter
A variable wavelength interference filter includes a first substrate having a fixed mirror, a second substrate bonded to the first substrate and having a movable portion and a movable mirror fixed to the movable portion, a third substrate bonded to the second substrate on the side opposite to the first substrate, and an electrostatic actuator which displaces the movable portion in a substrate thickness direction, wherein a penetration hole connecting a light exiting-side space between the first substrate and the second substrate and a light incident-side space between the second substrate and the third substrate to a space outside the filter is formed, and the penetration hole is sealed with a sealant which tightly closes each space in a reduced-pressure state.
Seiko Epson Corporation
G B G
G02B B81B G01J
inventional inventional inventional
Hiroshi Katsuji Nozomu
Komatsu Arakawa Hirokubo