Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including tip-to-tip short configured fill cells, and the second DOE including chamfer short configured fill cells
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of tip-to-tip shorts, and the second DOE contains fill cells configured to enable NC detection of chamfer shorts.
PDF Solutions, Inc.
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Vyacheslav Christopher Hideki Kelvin Jonathan Andrzej Nobuharu Carl Stephen Marcin Jeremy John Markus Kimon Rakesh Sherry Simone Indranil Timothy Dennis Conor Marci Tomasz Hans Sheng-Che Larg
Rovner Hess Matsuhashi Doong Haigh Strojwas Yokoyama Taylor Lam Strojwas Cheng Kibarian Rauscher Michaels Vallishayee Lee Comensoli De Fiscus Ciplickas O'Sullivan Liao Brozek Eisenmann Lin Weiland