Womble Bond Dickinson (US) LLP
Method and apparatus for gas flow control
A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow.
PIVOTAL SYSTEMS CORPORATION
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Tao Joseph R. Adam J. Jialing
Ding Monkowski Monkowski Chen