Abelman, Frayne & Schwab
Liquid processing apparatus having switchable nozzles
Provided is a liquid processing apparatus that selectively supplies processing liquids with a switching operation to the surface of a substrate to perform a liquid processing. The liquid processing apparatus includes a first processing liquid supply unit including a first nozzle block that selectively supplies an acidic chemical liquid and a rinse liquid, and a second processing liquid supply unit including a second nozzle block that selectively supplies an alkaline chemical liquid and a rinse liquid. When a chemical liquid is supplied to the substrate from one of the first and second nozzle blocks, the other of the first and second nozzle blocks is retreated to a retreat position. When the rinse liquid is supplied to the substrate from one of the first and second nozzle blocks, the other of the first and second nozzle blocks is moved to a processing position.
Tokyo Electron Limited
B H H H
B08B H01L H01L H01L
inventional inventional inventional inventional
Takahisa Hirotaka Kazuyuki Nobuhiro
Otsuka Maruyama Kudo Ogata