Westerman, Hattori, Daniels & Adrian, LLP
Synthetic quartz glass substrate polishing slurry and manufacture of synthetic quartz glass substrate using the same
In polishing of synthetic quartz glass substrates, a polishing slurry is used comprising (i) an oligopeptide comprising recurring units of pentapeptide: -[valine-proline-glycine-valine-glycine]- and having a molecular weight of 800-150,000 or a copolymer of the pentapeptide with another monomer, and (ii) a colloidal solution.
SHIN-ETSU CHEMICAL CO., LTD.
C C C B C
C09G C09K C03C B24B C09K
inventional inventional inventional inventional inventional
Masaki Harunobu Daijitsu
Takeuchi Matsui Harada