McClure, Qualey & Rodack, LLP
Device and method for positioning and calibrating a wafer transportation apparatus
In accordance with some embodiments, a positioning calibration device arranged within a transfer buffer is provided. The positioning calibration device includes at least one target element and at least three positioning modules. The at least one target element is arranged on a wafer transportation apparatus within the transfer buffer. The transportation apparatus is utilized to transfer a wafer. The at least three positioning modules are utilized to detect the positions of the at least one target element by wireless communications for generating position information of the wafer transportation apparatus. The heights which each of the at least three positioning modules arranged at are not the same.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
H H H H G
H01L H01L H01L H01L G01S
inventional inventional inventional inventional inventional
Chi-Wei Woo-Guan
Chang Chiong