Bacon & Thomas, PLLC
Method for manufacturing a microstructure by using a high energy light source
A method for manufacturing a microstructure by using an X-ray includes the steps of selectively exposing a portion of a photosensitive material to the high energy light source, the selectively exposing step being carried out by using a photomask for defining a pattern of the microstructure and performing a heat-treatment for melting and deforming only an upper portion of the exposed portion of the photosensitive material, the upper portion of the exposed portion of the photosensitive material being exposed at an energy level between about 1 kJ/cm3 and about 20 kJ/cm3, when being exposed to the X-ray.
Postech Foundation
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G03F G03F G03F Y10S Y10S
inventional inventional inventional additional additional
Sung-Keun Kwang-Cheol Seung Seob
Lee Lee Lee