Drinker Biddle & Reath LLP
Interference observation device
An interference observation apparatus includes a light source, a splitting beam splitter, a combining beam splitter, a beam splitter, a mirror, a beam splitter, a mirror, a piezo element, a stage, an imaging unit, an image acquisition unit, and a control unit. An interference optical system from the splitting beam splitter to the combining beam splitter forms a Mach-Zehnder interferometer. The mirror freely moves in a direction perpendicular to a reflecting surface of the mirror. The total number of times of respective reflections of first split light and second split light in the interference optical system is an even number.
HAMAMATSU PHOTONICS K.K.
G G G G G G G G G
G01B G01B G02B G01N G01B G01B G02B G02B G01N
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Hidenao Toyohiko
Yamada Yamauchi