Lowe Hauptman & Ham, LLP
Mask storage device for mask haze prevention and methods thereof
A mask storage device and a method of preventing defect formation on a mask are provided. The method includes providing a mask storage device comprising a first and second shell configured to form a sealed space in a closed state and a desiccant positioned within the mask storage device. The method further includes placing a mask inside the mask storage device and sealing the mask storage device with the mask and desiccant inside the sealed space.
Taiwan Semiconductor Manufacturing Company, Ltd.
B B B H B B B H B B
B65B B65B B65D H01L B65D B65B B63C H01L B65D B65D
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Chih-Wing Yung-Chih
Chang Chang