Nixon Peabody LLP
Plasma confinement apparatus, and method for confining a plasma
A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.
Advanced Micro-Fabrication Equipment, Inc. Asia
C H H H C
C23C H01J H05H H01J C23C
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Ye Tom Zhaoyang Jinyuan Yuehong Qing Xusheng
Wang Ni Xu Chen Fu Qian Zhou