Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATECNT-short-related failure mode, and one TS-short-related failure mode.
PDF Solutions, Inc.
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Sheng-Che Rakesh Hideki Andrzej Dennis Nobuharu Marcin Carl Hans Timothy Christopher Marci Jeremy John Kimon Indranil Sherry Larg Stephen Jonathan Kelvin Vyacheslav Conor Markus Tomasz Simone
Lin Vallishayee Matsuhashi Strojwas Ciplickas Yokoyama Strojwas Taylor Eisenmann Fiscus Hess Liao Cheng Kibarian Michaels De Lee Weiland Lam Haigh Doong Rovner O'Sullivan Rauscher Brozek Comensoli