Wenderoth, Lind & Ponack, L.L.P.
Optical probe array head device
Provided is an optical probe array head device in which a single optical detector or a plurality of optical detectors are disposed to each of the optical probes constituting an optical probe array having a plurality of apertures. The optical detectors are arranged to surround the aperture so as to be able to efficiently detect scattering of a feeble near-field light enabling similtaneous detection of a multipilicity of optical signals. In this device, an optical lens system necessary for optical detection can be omitted by integrating the optical probe array and the optical detectors. In addition, the output signals from the optical detectors can be utilized for conducting position control of the optical probe array head.
Agency of Industrial Science and Technology
G H G H G G Y G G G H B G
G11B H01L G11B H01L G01Q G11B Y02E G11B G11B G11B H01L B82Y G11B
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Takashi Junji Nobufumi Masashi
Nakano Tominaga Atoda Kuwahara