Slater & Matsil, L.L.P.
Semiconductor devices and methods of manufacture thereof
Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes providing a workpiece including an insulating material layer disposed thereon. The insulating material layer includes a trench formed therein. The method includes forming a barrier layer on the sidewalls of the trench using a surface modification process and a surface treatment process.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Yu-Ming Ying-Hsueh Chang Chi-Ming Man-Kit
Lee Chien Yang Leung