Patterson + Sheridan LLP
Gas flow system
A gas flow system is provided, including a gas flow source, one or more gas inlets, one or more gas outlets, a gas flow region, a low pressure region, wherein the low pressure region is fluidly coupled to the one or more gas outlets, a high pressure region, and a gap. The one or more gas inlets are fluidly coupleable to the gas flow source. The gas flow region is fluidly coupled to the one or more gas inlets and the one or more gas outlets. The gap fluidly couples the gas flow region to the high pressure region. The high pressure region near the targets allows for process gas interactions with the target to sputter onto the substrate below. The low pressure region near the substrate prevents unwanted chemical interactions between the process gas and the substrate.
APPLIED MATERIALS, INC.
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C23C C23C C23C H01J C23C H01J H01J H01J B25J H01J C23C
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John J. Alexander Keith A. Wei W.
Mazzocco Erenstein Miller Wang