Westerman, Hattori, Daniels & Aridan, LLP
Method of preparing substrate
A substrate is prepared by polishing a surface of the substrate using a polishing pad while feeding a slurry. The polishing pad has a porous nap layer which comes in contact with the substrate surface and is made of a base resin comprising at least three resins, typically an ether resin, ester resin, and polycarbonate resin. The polished substrate has a highly flat surface with a minimal number of defects.
SHIN-ETSU CHEMICAL CO., LTD.
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Atsushi Masaki Harunobu Shuhei Daijitsu
Watabe Takeuchi Matsui Ueda Harada