Thomas, Kayden, Horstemeyer & Risley
Automatic statistical process control (SPC) chart generation apparatus and method thereof
A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
Taiwan Semiconductor Manufacturing Co., Ltd.
G Y G G
G05B Y02P G05B G05B
additional additional inventional additional
Ie-Fun Jian-Hong Chin-Chih Yu-Yi Chon-Hwa Joseph W. L. Yao-Wen Wen-Sheng Tien-Wen Mu-Tsang
Lai Chen Chen Wu Chu Fang Wu Chien Wang Lin