Greenblum & Bernstein, P.L.C.
Piezoelectric element, ink jet head, and ink jet recording device
A piezoelectric element includes a pressure chamber member that has an opening communicating with a nozzle, a vibrating plate that is disposed on the pressure chamber member so as to cover the opening, a lower electrode that is disposed on the vibrating plate, a piezoelectric body that is disposed on the lower electrode, an upper electrode that is disposed on the piezoelectric body and in a region opposed to the opening, and a lead electrode that is disposed on the piezoelectric body, that extends from the upper electrode, and that has a width smaller than that of the upper electrode. The piezoelectric body includes a groove portion that is disposed in a predetermined region along an edge portion of the opening and an inactive region (piezoelectric inactive region) that is a region other than the groove portion, that is disposed along the edge portion of the opening, and that does not substantially serve as a piezoelectric element. The lead electrode is disposed in the piezoelectric inactive region.
Panasonic Corporation
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H01L H01L B41J B41J B41J B41J B41J B41J B41J B41J B41J B41J B41J B41J B41J
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Shintarou Eiji Kazumi Hideaki Osamu
Hara Fujii Sadamatsu Horio Watanabe