Fish & Richardson P.C.
Solvent-assisted layer formation for imprint lithography
A solid layer is formed by applying a multiplicity of discrete portions of a fluid composition onto a surface of an imprint lithography substrate, and allowing the discrete portions of the composition to spontaneously spread on the surface of the substrate to form a substantially continuous layer. The composition includes a solvent and a solid or a solvent and a polymerizable material. The composition can be a solution or a dispersion. At least some of the solvent is evaporated from the composition, and a solid layer is formed (e.g., polymerized or dried) on the substrate. The solid layer is substantially free of interstitial voids.
Molecular Imprints, Inc.
B B G
B82Y B82Y G03F
inventional inventional inventional
Edward Brian Frank Y. Weijun
Fletcher Xu Liu