Birch, Stewart, Kolasch & Birch, LLP
Microimprint/nanoimprint uniform pressing apparatus
A microimprint/nanoimprint uniform pressing apparatus is used to provide uniform imprinting pressure to a molding material layer between a substrate and a mold. The uniform pressing apparatus includes a uniform pressing unit for being directly in contact with the mold or the substrate, so as to allow each point to have equal pressure during imprinting and utilize a simple structure to transmit uniform imprinting pressure.
Industrial Technology Research Institute
B B G
B82Y B82Y G03F
inventional inventional inventional
Jen-Hua Wei-Han Chuan-Feng Lai-Sheng Shou-Ren Yu-Lun
Wu Wang Chen Chen Chen Ho