Duane Morris LLP
System and method for ring frame cleaning and inspection
A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a ring frame processing system includes: a cleaning station configured to remove a first tape on a first surface of a ring frame using a first blade, clean first adhesive residues from the first tape on the first surface of the ring frame using a first wheel brush, and remove second adhesive residues from a second tape on a second surface of the ring frame using a second blade; and an inspection station, wherein the inspection station comprises an automated optical inspection system configured to determine the cleanness of the first and second surfaces of the ring frame after cleaning.
Taiwan Semiconductor Manufacturing Co., Ltd.
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Chien-Fa Jian-Hung Hsuan Hsu-Shui Jiun-Rong Meng-Chen Shou-Wen Boris Chung-Hsin
Lee Chen Lee Liu Pai Lin Kuo Huang Chien