Cantor Colburn LLP
Field-effect transistor, biosensor comprising the same, method of manufacturing field-effect transistor, and method of manufacturing biosensor
Provided is a field-effect transistor that can reduce noise, be produced by a simplified manufacturing method, and also have a plurality of active patterns and gate patterns designed to be combinable according to a detection purpose. The field-effect transistor includes a lower silicon layer and a buried oxide layer disposed on the lower silicon layer; an active pattern disposed on the buried oxide layer and including a channel region, a source region, and a drain region; a gate pattern disposed on the active pattern to at least partially overlap the active pattern; a source electrode disposed in direct contact with the source region on the active pattern, and a drain electrode disposed in direct contact with the drain region on the active pattern; and a gate insulating film disposed between the active pattern and the gate pattern.
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
G G H
G01N G01N H01L
inventional inventional inventional
Minhong Sungwook Kwan Hyi Seok Sang Kyung
Jeun Park Lee Lee Kim