Burns, Doane, Swecker & Mathis, L.L.P.
Method and system for measuring particles in a liquid sample
 Provided are a method and apparatus for measuring particles in a liquid sample. The method involves introducing a liquid sample into a heat exchanger, thereby cooling the sample to a predetermined temperature. A particle measurement is performed on the cooled sample by introducing the cooled sample into a particle detector. The method and apparatus in accordance with the invention effectively suppress bubbles present in a liquid chemical sample being measured, thereby allowing for accurate particle measurements. The invention has particular applicability in the semiconductor and pharmaceutical manufacturing industries. 
American Air Liquide Inc.
G G
G01N G01N
inventional additional
Weiching Mindi
Li Xu