J.C. Patents
Ion beam blocking component and ion beam blocking device having the same
An ion beam blocking component suitable for blocking an ion beam generated by an ion source of an ion implanter is provided. The blocking component includes a front plate, a back plate, and a plurality of side plates. The front plate has at least one opening. The back plate is behind the front plate, and has a plurality of grooves formed on one surface thereof facing the front plate. The side plates are connected between the front plate and the back plate, and a receiving space is formed between these plates.
United Microelectronics Corp.
G
G21F
inventional
Chih-Ming Chung-Jung Chien-Kuo Cheng-Hung Jui-Fang
Yang Chen Ko Chang Chen