Fitzpatrick, Cella, Harper & Scinto
Capacitive transducer and method of manufacturing the same
The present inventions provide a capacitive transducer that can reduce film damage on a substrate surface on a vibration film side due to a difference in thermal expansion coefficient between a through wiring and a substrate and a method of manufacturing the same. The capacitive transducer consists of a plurality of cells with each cell comprising a first electrode and a vibration film on a first surface side of a substrate having a through wiring that penetrates the substrate from a first surface to a second surface of the substrate, the vibration film including a second electrode that is formed with a gap from the first electrode. A holding member that holds a leading end of the through wiring is provided on the first surface side of the substrate.
CANON KABUSHIKI KAISHA
B B B G G B B G B
B81B B81B B81B G01N G01N B81B B81B G01N B06B
additional inventional additional inventional inventional additional additional inventional inventional
Shinichiro Shinan
Watanabe Wang