Lee & Sterba, P.C.
Method for fabricating a semiconductor memory device having silicon-on-insulator (SOI) structure
A method for fabricating a SOI semiconductor device including providing a semiconductor substrate; forming a device isolation layer in and on a first surface of the semiconductor substrate to define an active region, including a source/drain region, and an inactive region; forming a first gate electrode on the first surface of the substrate; forming a first insulating layer on the first gate electrode; forming a capacitor, electrically connected to the source/drain region, on the first insulating layer; forming a second insulating layer on the capacitor; forming a third insulating layer on the second surface of the substrate; forming a body contact conductor line, electrically connected to the active region of substrate, on and through the third insulating layer; forming a fourth insulating layer on the body contact conductor line; and forming a bit line on the fourth insulating layer to be electrically connected to the source/drain region of the substrate.
Samsung Electronics Co., Ltd.
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Yun-Gi
Kim