Studebaker & Brackett PC
Device for emitting extreme ultraviolet light
An extreme ultraviolet light source device includes two discharge electrodes, two plasma raw material containers associated with the discharge electrodes, respectively, and two supply units associated with the containers, respectively. The supply units supply the plasma raw materials from the containers onto the discharge electrodes upon rotations of the discharge electrodes. The light source device also includes an energy beam irradiating unit configured to irradiate the plasma raw material on a circumferential surface of one of the discharge electrodes with an energy beam to vaporize the plasma raw material such that electric discharge takes place between the discharge electrodes to generate the plasma. The light source device also includes two film thickness regulating units associated with the discharge electrodes, respectively. Each film thickness regulating unit is configured to regulate a thickness of the plasma raw material on the circumferential surface of the associated discharge electrode to a predetermined film thickness.
USHIO DENKI KABUSHIKI KAISHA
H H
H05G H05G
inventional inventional
Hideyuki Akihisa Yusuke
Urakami Nagano Teramoto