Slater Matsil, LLP
Reticle transfer system and method
A method comprises transporting semiconductor devices between a global system and a local system, wherein an input terminal of the local system is connected to the global system, and wherein the global system comprises a plurality of stockers and a global transportation system connected to the stockers and the local system comprises a first service area, an internal buffer, a second service area and a plurality of lithography apparatuses and transporting a semiconductor device from the first service area to a lithography apparatus in the second service area.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Ching-Jung
Chang