Dugan & Dugan
Scrubber operation
Methods and apparatuses are provided that remove a scrubber brush from contact with a wafer surface prior to slowing down the scrubber brush's rotational rate. The scrubbing method may include rotating a scrubber brush at a non-reduced rate, while the scrubber brush is in contact with the wafer and removing the scrubber brush from contact with the wafer while rotating the scrubber brush at the non-reduced rate. The scrubbing apparatus has a controller programmed to perform the scrubbing method.
Applied Materials, Inc.
B H B
B08B H01L B08B
inventional inventional inventional
Yufei Brian J. Madhavi David G.
Chen Brown Chandrachood Andeen