Patterson + Sheridan, LLP
Apparatus and method of generating a pulsed waveform
Embodiments of this disclosure describe a feedback loop that can be used to maintain a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate. The system described herein consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
Applied Materials, Inc.
H H H H H H H H H H
H01J H01J H01J H01J H01J H01L H01J H01L H01J H05H
inventional inventional additional inventional inventional additional inventional inventional inventional inventional
Olivier Viacheslav Leonid James Rajinder Evgeny
Luere Plotnikov Dorf Rogers Dhindsa Kamenetskiy