Banner & Witcoff, Ltd.
Substrate retaining carrier, method for retaining and separating substrate and method for evaporation
A substrate retaining carrier, a method for retaining and separating the substrate, and a method for evaporation are provided. The substrate retaining carrier includes a substrate stage and a movable substrate retaining support device, the substrate retaining support device comprises multiple probes and a probe holder, wherein a first end of each of the probes is provided with a substrate retaining member, and a second end of each of the probes is secured onto the probe holder; the substrate stage is provided with through holes for passage of the probes therein.
BOE Technology Group Co., Ltd. Hefei Xinsheng Optoelectronics Technology Co., Ltd.
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Chia Hao Xuequan
Chang Jin