Kilpatrick Townsend & Stockton LLP
Parylene-C as a piezoelectric material and method to make it
A parylene C polymer that is electrically poled such that it is piezoelectric is presented. Methods for manufacturing the piezoelectric parylene C polymer with an optimal piezoelectric coefficient d33 are also disclosed. Actuators formed with piezoelectric parylene C are disclosed as well as sensor devices that incorporate piezoelectric parylene C using charge integrator circuits in which the integration time is longer than likely adiabatic temperature transients.
California Institute of Technology
C H H Y Y H C G H H C
C08G H01L H01L Y10T Y10T H01L C08G G01L H01L H01L C08L
additional inventional inventional additional additional inventional additional inventional inventional inventional inventional
Justin Young Hyun Yu-Chong Austin
Kim Tai Cheng