Morgan, Lewis & Bockius LLP
Sputtering apparatus and method of preventing damage thereof
A sputtering apparatus includes a container; a plate for supporting the container; a first attachment for attaching the container to the plate; and a second attachment for less tightly attaching the container to the plate than through the first attachment.
LG Display Co., Ltd.
H H C H C C
H01J H01J C23C H01J C23C C23C
inventional additional inventional inventional inventional inventional
Munik Jaehoon Jinhee Kagkyu Kyoungshik Seunglyul Jaekwang Sanghyo Junhyung
Na Choi Yun Jung Kim Lee Kim Park Park