Goodwin Procter LLP
Vertically-integrated waveguide photodetector apparatus and related coupling methods
High-speed optoelectronic devices having a waveguide densely integrated with and efficiently coupled to a photodetector are fabricated utilizing methods generally compatible with CMOS processing techniques. In various implementations, the waveguide consists essentially of single-crystal silicon and the photodetector contains, or consists essentially of, epitaxially grown germanium or a silicon-germanium alloy having a germanium concentration exceeding about 90%.
Massachusetts Institute of Technology
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Donghwan Jurgen Jifeng Lionel C.
Ahn Michel Liu Kimerling