Sheridan Ross, PC
Surface treating apparatus and surface treatment method
In a flow down type surface treating apparatus, a scattering amount of a processing solution Q is reduced.A honeycomb member 60 is provided vertically below a transport hanger 16. The honeycomb member 60 consists of a plurality of tubular members with hexagonal holes connected together. When the processing solution Q falls in a vertical direction (in the direction of an arrow α), the processing solution Q passes through through-holes of the honeycomb member 60. When the processing solution Q hits liquid level H, a part of it is reflected. Since a part of the reflected processing solution Q is reflected obliquely, it collides with an inner wall of the through-hole of the honeycomb member 60. As a result, the amount of the treatment liquid Q that emerges again on an upper surface of the through-holes is reduced. Thereby, the honeycomb member 60 exhibits a scattering prevention function.
C. Uyemura & Co., Ltd.
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C23C B05C C23C B05C C23C C23C
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Masaharu Masayuki
Takeuchi Utsumi