Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Pressure controlling apparatus
According to one embodiment, there is provided pressure controlling apparatus including a detecting unit, an exhaust pipe, a regulating valve, and a pressure controlling unit. The regulating valve includes a valve port, a changing unit, and a slide valve. The valve port is communicated with the exhaust pipe. The changing unit changes a shape of the valve port to a different shape whose center is located near the central axis of the exhaust pipe. The slide valve regulates an opening degree of the valve port changed by the changing unit. The pressure controlling unit controls changing of a shape of the valve port by the changing unit and regulation of an opening degree of the valve port by the slide valve.
Kabushiki Kaisha Toshiba
Y H Y Y G Y
Y10T H01L Y10T Y10T G05D Y10T
additional inventional additional additional inventional additional
Makoto Nobuyasu Hideo
Saito Nishiyama Eto