Maschoff Brennan
Formation of copper layer structure with self anneal strain improvement
A copper layer structure includes a first copper layer, a second copper layer and a carbon-rich copper layer. The second copper layer is disposed over the first copper layer. The carbon-rich copper layer is sandwiched between the first copper layer and the second copper layer. A carbon concentration of the carbon-rich copper layer is greater than a carbon concentration of the first copper layer and a carbon concentration of the second copper layer.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
C C C B H C H H
C25D C25D C25D B32B H01L C25D H01L H01L
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Hung-Hsu Jun-Nan Shiu-Ko Chi-Cheng Yu-Sheng
Chen Nian Jangjian Hung Wang