Lewis Roca Rothgerber Christie LLP
Device and method for depositing organic material
A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.
Samsung Display Co., Ltd.
H B H H B B
H01L B05B H01L H01L B05B B05B
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Min-Gyu Seung-Ho Sung-Gon Hyun
Seo Choi Kim Choi