Sughrue, Mion, Zinn, Macpeak & Seas
Monitor mechanism for use with a scanning optical apparatus with composite drawing a monitoring beams
 A monitor mechanism for use with a scanning optical apparatus in which the direction of polarization is utilized to separate a source laser light beam into a pattern drawing and a monitor beamlet and to synthesize them again into a single after passing through a scanning lens and beam deflector. The two beamlets can thus be controlled so as to project towards the deflector and scanning lens in the same direction, which is effective in reducing the offset between the pattern drawing and monitor beams that may occur on account of such factors as variations in lens performance. 
Asahi Kogaku Kogyo Kabushiki Kaisha
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H04N H04N G02B H04N H04N
additional additional inventional additional inventional
Hideyuki Akira Tamihiro Akira Yasushi Mitsuo Hiroaki Satoru Yuji Michio Masatoshi Toshitaka Jun Hidetaka Takashi
Morita Ohwaki Miyoshi Morimoto Ikeda Kakimoto Andoh Tachihara Matsui Ohshima Iwama Yoshimura Nonaka Yamaguchi Okuyama