Oliff & Berridge PLC
Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and method
An aperture stop that can be used in an exposure apparatus and method includes a central aperture region defined by a circular arc and a peripheral region having a decreased width.
Nikon Corporation
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Masato Kinya Masashi
Kumazawa Kato Tanaka