Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least chamfer-short-configured, AACNT-short-configured, GATECNT-short-configured, and TS-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of short-circuit failure modes, including at least one chamfer-short-related failure mode, one AACNT-short-related failure mode, one GATECNT-short-related failure mode, and one TS-short-related failure mode.
PDF Solutions, Inc.
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Jonathan Kelvin Timothy Sheng-Che Marcin Jeremy Andrzej Indranil John Stephen Hideki Rakesh Larg Dennis Nobuharu Tomasz Hans Conor Simone Markus Vyacheslav Marci Sherry Carl Christopher Kimon
Haigh Doong Fiscus Lin Strojwas Cheng Strojwas De Kibarian Lam Matsuhashi Vallishayee Weiland Ciplickas Yokoyama Brozek Eisenmann O'Sullivan Comensoli Rauscher Rovner Liao Lee Taylor Hess Michaels