Hamilton, Brook, Smith & Reynolds, P.C.
Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
An optical fiber sensor can be used to measure pressure with high sensitivity and fine resolution. As a cavity at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not suffer from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.
Univeresity of Massachusetts
Y Y B A G B B B A G
Y10T Y10T B23K A61B G01L B23K B23K B23K A61B G02B
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Nan Kai Wenhui Xingwei Vivian
Wu Sun Wang Wang