Mei & Mark LLP
Six-axis four-subdividing interferometer
Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.
Shanghai Micro Electronics Equipment Co., Ltd. Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
G G G G G
G01B G01B G01B G01B G01B
inventional inventional additional inventional inventional
Zhaogu Ya Huijie Feng Jianfang
Cheng Cheng Huang Chi Chen