Haynes and Boone, LLP
Mask haze early detection
Detecting haze formation on a mask by obtaining an optical property of the mask and determining progress of the haze formation based on the obtained optical property.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G
G03F G03F
inventional inventional
Wen-Chuan Tsai-Sheng Shy-Jay Wei-Yu Chih-Ming Chin-Hsiang Heng-Hsin Te-Chih
Wang Gau Lin Su Ke Lin Liu Huang