Adams & Wilks
Electron microscope and specimen analyzing method
An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A backscattered electron detector is positioned relative to the focused ion beam column so that the direction normal to a detection plane of the backscattered electron detector is substantially perpendicular to the direction of the focused ion beam. The backscattered electron detector is configured and positioned to detect backscattered electrons released in a spread of at least about 70 degrees in width from the surface of the section by irradiation of the section with the electron beam 1a. 
SII NanoTechnology Inc.
H G
H01J G01N
inventional inventional
Toshiaki Masakatsu Atsushi Junichi
Fujii Hasuda Uemoto Tashiro