Keating & Bennett, LLP
Piezoelectric resonator, manufacturing method for the same, piezoelectric filter, manufacturing method for the same, duplexer, and electronic communication device
A piezoelectric resonator includes a substrate and a plurality of vibrating portions constructed such that a thin film portion having a piezoelectric thin film of one or more layers is sandwiched by at least a pair of upper electrodes and a lower electrode, which are opposed to each other, on the upper and lower surfaces of the thin film portion. The vibrating portions are separated by at least a distance equal to about &lgr;/2, where &lgr; represents the vibration wavelength, from elements affecting the vibration characteristics.
Murata Manufacturing Co., Ltd.
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Yoshihiko Hajime Masaki Tadashi
Goto Yamada Takeuchi Nomura