Lowe Hauptman & Ham, LLP
Method and device for increasing fin device density for unaligned fins
A method of generating a layout for a device includes receiving a first layout including a plurality of active regions, each active region of the plurality of active regions having sides. The method further includes defining a plurality of elongate mandrels that each extend in a first direction and are spaced apart from one another in a second direction perpendicular to the first direction. The method further includes for each adjacent pair of partially-parallel active regions of the plurality of active regions having a minimum distance less than a specified minimum spacing, connecting at least a portion of nearest ends of pairs of elongate mandrels, each mandrel of a pair from a different active region. The method further includes generating a second layout including a plurality of elongate mandrels in the plurality of active regions, and connective elements between active regions of at least one adjacent pair of active regions.
Taiwan Semiconductor Manufacturing Company, Ltd.
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H01L G06F G03F G06F
inventional inventional inventional inventional
Ming-Feng Yi-Tang Chien-Hsun Chih-Sheng
Shieh Lin Wang Chang