JCIPRNET
Apparatus for on-line monitoring particle contamination in special gases
An apparatus for on-line monitoring particle contamination in special gas includes a single particle inductively coupled plasma mass spectrometry (sp-ICPMS) and a gas exchange device (GED). The gas exchange device is coupled to the sp-ICPMS. The gas exchange device includes a corrosion resistant outer tube and a polytetrafluoroethylene (PTFE) inner tube. A gap is formed between the corrosion resistant outer tube and the PTFE inner tube. The length of the PTFE inner tube is 1 meter or more. The argon gas flows in the gap, and the special gas flow in the PTFE inner tube.
Industrial Technology Research Institute
G G G G H H
G01N G01N G01N G01N H01J H01J
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I-Hsiang Fang-Hsin Chun-Ling Yi-Hung
Hsu Lin Chang Liu