Muncy, Geissler, Olds & Lowe, PLLC
Method and device of ion source generation
An implanter is equipped with an ion beam current detector, a temperature sensor, a temperature controller and a cooling system to increase the ratio of a specific ion cluster in the ion source chamber of the implanter. Therefore, the implanting efficiency for a shallow ion implantation is increased consequently.
Advanced Ion Beam Technology, Inc. Advanced Ion Beam Technology, Inc.
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Linuan Nai-Yuan Junhua Tienyu Cheng-Hui Jiong Yun-Ju
Chen Cheng Hong Sheng Shen Chen Yang