Servilla Whitney LLC
Deposition methods for uniform and conformal hybrid titanium oxide films
Methods for depositing titanium oxide films by atomic layer deposition are disclosed. Titanium oxide films may include a titanium nitride cap, an oxygen rich titanium nitride cap or a mixed oxide nitride layer. Also described are methods for self-aligned double patterning including titanium oxide spacer films.
APPLIED MATERIALS, INC.
H H H H H
H01L H01L H01L H01L H01L
inventional inventional inventional inventional inventional
Rajkumar Ghazal Benjamin C. Pingyan Xuesong Yu Srinivas Benjamin Juno Yu-Ting Xinliang Chien-Teh Yung-Hsin Chikuang Charles
Jakkaraju Saheli Wang Lei Lu Lei Gandikota Schmiege Huang Lu Kao Lee Wang