Kilpatrick Townsend & Stockton LLP
Low contact resistance semiconductor structure and method for manufacturing the same
A semiconductor device includes a bottom substrate, a sacrificial layer on the bottom substrate and including a first opening exposing a first portion of the bottom substrate and a second opening exposing a second portion of the bottom substrate, a top substrate on the sacrificial layer and on the second opening forming a cavity, a first metal layer on the top substrate and/or on the exposed first portion of the bottom substrate, an adhesive layer on the first metal layer, and a second metal layer on the adhesive layer defining one or more pads. The pad includes a stack-layered structure of a first metal layer on the bottom substrate, an adhesive layer on the first metal layer, and a second metal layer on the adhesive layer. The thus formed structure reduces the pad contact resistance.
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
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Wei Chao
Wang Zheng