Lex IP Meister, PLLC
Method of manufacturing wire grid polarizer
A method of manufacturing a wire grid polarizer includes: preparing a stamp having a nanostructure body at one surface and forming a mask layer with anisotropic vapor deposition at the one surface; forming a metal film on a substrate; transferring a mask layer of an upper portion of a nanostructure body in the mask layer onto the metal film; and patterning the metal film into metal lines by removing a portion that is not covered with the mask layer in the metal film with dry etching.
KOREA INSTITUTE OF MACHINERY & MATERIALS
Soon-Hyoung Ji Hye Joo Yun Jun-Ho So Hee Dae-Guen Junhyuk Sang Keun
Hwang Lee Jung Jeong Jeon Choi Choi Sung