Crowell & Moring LLP
Adhesive sheet, method for manufacturing semiconductor device using same, method for manufacturing thermal airflow sensor using same, and thermal airflow sensor
Provided is a thermal type airflow volume meter improving measurement accuracy, a method for manufacturing the same, and an adhesive sheet for use therein, the adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less is divided to correspond to a shape of the adherend and generates or increases adhesion or stickiness by external energy.
Hitachi Automotive Systems, Ltd.
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Ryosuke Toshifumi Hiroshi Satoshi Hideki
Doi Sagawa Kikuchi Ikeo Mukuno