Scully, Scott, Murphy & Presser, P.C.
Fabrication method of all solid-state thin-film battery
A method of forming an all solid-state thin-film battery that can be scaled down and be integrated into a CMOS process is provided. The method includes a lift-off process in which battery material layers formed upon a patterned sacrificial material are removed from a bottom electrode, while battery material layers that are formed directly on a surface of the bottom electrode remain after performing the lift-off process. In some embodiments, a solid-state lithium based battery can be formed that includes a thin lithiated cathode material layer (thickness of less than 200 nm) composed of LiCoO2. Such a solid-state lithium based battery exhibits enhanced battery performance in terms of charge rate and specific charge capacity.
International Business Machines Corporation
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Yun Seog Kunal Joel P. Devendra K.
Lee Mukherjee de Souza Sadana