Maschoff Brennan
Tool monitoring device and method of monitoring tool
In some embodiments, a system for monitoring a tool is provided. The system includes a tool monitoring device, a transporting system and an external apparatus. The tool monitoring device is configured to monitor an environmental parameter of a load port of a tool. The tool monitoring device includes a wafer pod and a monitoring module disposed in the wafer pod. The monitoring module includes at least one sensor, a computer coupled to the at least one sensor, a power supply electrically coupled to the at least one sensor and the computer, and a wireless unit coupled to the computer. The transporting system is configured to transfer the tool monitoring device from one load port to another load port. The external apparatus is coupled to the tool monitoring device.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Yi-Ting Chi-Ying Jih-Churng Feng-Yu Chin-Yun Hom-Chung
Chang Chang Twu Chen Chen Lin