Knobbe, Martens, Olson & Bear, LLP
Technique for high efficiency metalorganic chemical vapor deposition
A technique for more efficiently forming conductive elements, such as conductive layers and electrodes, using chemical vapor deposition. A conductive precursor gas, such as a platinum precursor gas, having organic compounds to improve step coverage is introduced into a chemical vapor deposition chamber. A reactant is also introduced into the chamber that reacts with residue organic compounds on the conductive element so as to remove the organic compounds from the nucleating sites to thereby permit more efficient subsequent chemical vapor deposition of conductive elements.
Micron Technology, Inc.
C H C
C23C H01L C23C
inventional additional inventional
Sam Weimin
Yang Li