Process for constructing a spectrophotometer
A process for constructing a monolithic spectrophotometer from a monolithic substrate, which includes the steps of etching a grating for dispersing input optical waves in the monolithic substrate, etching a suspended bridge positioned over an undercut cavity in the monolithic substrate, forming photodiode array on the suspended bridge to receive dispersed optical waves from the grating, orienting the suspended bridge to receive dispersed optical waves from the grating, locking the suspended bridge in a oriented position with an anchor, and photolithographically defining signal processing circuitry on the monolithic substrate.
Xerox Corporation
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Jingkuang Joel A.
Chen Kubby