Ladas & Parry LLP
Array substrate having spacer, method for manufacturing the same, and display panel
A method for manufacturing an array substrate includes steps of: forming a pattern which includes a scanning line and a gate on a base substrate (301); forming a gate insulating layer on the pattern which includes the scanning line and the gate; forming a pattern which includes an active layer, a data line and a spacer matrix on the gate insulating layer; forming a passivation layer on the pattern which includes the active layer, the data line and the spacer matrix; dry etching the passivation layer to form a via hole which exposes the spacer matrix; under effect of an electric field generated between the spacer matrix exposed from the via hole and an etching gas, products obtained during the etching is induced to be deposited on the exposed surface of the spacer matrix so as to form a spacer. An array substrate and a display pane are further provided.
BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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Jian Jiantao
Guo Liu