Oblon, Spivak, McClelland, Maier, & Neustadt
Plate-like member conveying apparatus
 A plate-like member conveying apparatus includes five holding arms arranged parallel to each other in one direction and capable of supporting wafers, a link mechanism for connecting said holding arms to each other and for, when at least one holding arm is moved in the one direction, moving the remaining holding arms such that the pitch thereamong is equal, and a nut-screw driving mechanism for moving the at least one holding arm in the one direction. 
Tokyo Electron Sagami Limited
H H
H01L H01L
inventional inventional
Hisashi Takanobu Noboru Susumu
Kikuchi Asano Sato Tanaka