Greenblum & Bernstein, P.L.C.
MEMS vacuum sensor based on the friction principle
The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.
Technische Univeristaet Chemnitz Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
G
G01L
inventional
Thomas Steffen Wolfram Karla Christian Dirk
Gessner Kurth Doetzel Hiller Kaufmann Tenholte