Foley & Lardner LLP
Thermal spray powder and film that contain rare-earth element, and member provided with film
A thermal spray powder of the present invention contains a rare earth element and a diluent element that is not a rare earth element or oxygen, which is at least one element selected, for example, from zinc, silicon, boron, phosphorus, titanium, calcium, strontium, and magnesium. A sintered body of a single oxide of the diluent element has an erosion rate under specific etching conditions that is no less than 5 times the erosion rate of an yttrium oxide sintered body under the same etching conditions.
TOKYO ELECTRON LIMITED FUJIMI INCORPORATED
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Junya Yoshiyuki Hiroaki
Kitamura Kobayashi Mizuno