F. Chau & Associates, LLC
Methods for measuring overlays
A method for measuring overlay includes receiving a first image of a first overlay mark captured using light having a first wavelength. The method includes receiving a second image of a second overlay mark captured using light having a second wavelength different from the first wavelength. The method includes measuring a displacement between a central portion of the first image and a central portion of the second image, wherein the first and second overlay marks are disposed on different levels.
SAMSUNG ELECTRONICS CO., LTD.
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Jeongjin Seungyoon Chan
Lee Lee Hwang