Muir Patent Law, PLLC
Test chamber and test apparatus having the same
Disclosed are a test chamber and a test apparatus having the same. The test chamber includes a test compartment configured to support a plurality of test boards, each being configured to secure a test object. The test chamber applies a test signal to the test object. The test chamber includes an inlet side and a discharge side, and a supply duct vertically extending along a height of the test compartment. The supply duct supplies the inlet side of the test compartment with the test fluid. The test chamber includes a fluid controller to uniformly control a distribution of a test fluid in the supply duct and uniformly supply the test compartment with the test fluid. The disclosed test chamber and test apparatus provide a uniform test temperature and thereby improve a test reliability of a test object such as a semiconductor or semiconductor package.
SAMSUNG ELECTRONICS CO., LTD. KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
G G
G01R G01R
inventional inventional
Gilho Seon-Mi Sung Jin Jonghyun Jae-Hyun Ja-Hwan Dahm
Lee Lee Kim Lim Kim Ku Yu