Finnegan, Henderson, Farabow, Garrett & Dunner
Mode size converter for a planar waveguide
A process for forming a mode size converter with an out-of-plane taper formed during deposition with a shadow mask is disclosed. Mode-size converters according to the present invention can have any number of configurations. Measured coupling efficiencies for waveguides with mode size converters according to the present invention show marked improvement.
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G02B G02B G02B C23C
additional inventional inventional inventional
Richard E. Rajiv Tao Yu Yong Jin
Demaray Pethe Pan Chen Xie