Gates & Cooper LLP
Planar nonpolar m-plane group III nitride films grown on miscut substrates
A nonpolar III-nitride film grown on a miscut angle of a substrate, in order to suppress the surface undulations, is provided. The surface morphology of the film is improved with a miscut angle towards an a-axis direction comprising a 0.15° or greater miscut angle towards the a-axis direction and a less than 30° miscut angle towards the a-axis direction.
The Regents of the University of California
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Makoto Shuji James S. Kenji Hisashi Steven P. Asako Zhongyuan
Saito Nakamura Speck Iso Yamada DenBaars Hirai Jia