Workman Nydegger
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
A piezoelectric element comprising an electrode film and a piezoelectric layer provided above the electrode film. The electrode film is preferentially oriented with (111) surface and contains platinum as the main component. The electrode film has a rhombohedral system.
Seiko Epson Corporation
H H B
H01L H01L B41J
inventional inventional inventional
Tomotaka
Mori