McClure, Qualey & Rodack, LLP
Deposition device structure
A deposition device structure is provided. The deposition device structure includes a heater in a chamber. The deposition device structure also includes a shower head over the heater. The shower head includes holes extending from a top surface of the shower head to a bottom surface of the shower head. The bottom surface of the shower head faces the heater. The bottom surface of the shower head has a first section and a second section. The second section of the bottom surface is rougher than the first section of the bottom surface.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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inventional inventional inventional
Yi-Fang Ding-I Kai-Shiung Huan-Chieh Keith Kuang-Kuo Chin-Feng Po-Hsiung Yen-Chan
Lai Liu Hsu Chen Koai Sun Leu Lo