Haynes and Boone, LLP
Contact via formation
Semiconductor devices and methods of forming the same are provided. In one embodiment, a semiconductor device includes an active region including a channel region and a source/drain region and extending along a first direction, and a source/drain contact structure over the source/drain region. The source/drain contact structure includes a base portion extending lengthwise along a second direction perpendicular to the first direction, and a via portion over the base portion. The via portion tapers away from the base portion.
Taiwan Semiconductor Manufacturing Co., Ltd.
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Cheng-Chi Li-Zhen Kuan-Lun Chih-Hao Chia-Hao Lin-Yu
Chuang Yu Cheng Wang Chang Huang