Cantor Colburn LLP
3D micro lithography-printing system using tilting and rotational UV-LED
Provided is a 3D micro lithography-printing system using tilting and rotational UV-LEDs, in which a lithography module provided with LED lens for irradiating ultraviolet light for lithography is provided rotatable or revolvable in a left and right horizontal direction, and a substrate stage with a lithography object mounted thereto is provided movable forward and backward, changeable in forward and backward angles, and horizontally rotatable left and right, and thus, by changing the irradiation direction of ultraviolet light in a three-dimensional manner, a high-aspect ratio pillar and a 3D structure can be formed. In addition, various types of 3D structure can also be formed through a multi-layer lithography to a lithography object, and micro-forming within a range of approximately 5 μm is also possible.
KANSAS STATE UNIVERSITY RESEARCH FOUNDATION SAMIL TECH CO., LTD.
G G
G03F G03F
inventional inventional
Jungkwun Jong Eun
Kim Kim