Intellectual Valley Law, P.C.
Method of fabricating thin film transistor, thin film transistor, and display apparatus
The present application discloses a method of fabricating a thin film transistor. The method includes forming an active layer having a channel region, a source electrode contact region, and a drain electrode contact region, on a base substrate; forming a first photoresist layer on a side of the active layer distal to the base substrate, the first photoresist layer is formed in a region outside that corresponding to the channel region; forming an insulating material layer on a side of the first photoresist layer distal to the base substrate; forming a first conductive metal material layer on a side of the insulating material layer distal to the first photoresist layer; and removing the first photoresist layer, the insulating material layer, the first conductive metal material layer, in the region outside that corresponding to the channel region by a lift-off method.
BOE TECHNOLOGY GROUP CO., LTD.
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Wei Zhen Guoying
Li Song Wang