NSIP Law
Method of manufacturing optical image stabilizer
A method of manufacturing an optical image stabilizer including providing a silicon-on-insulator (SOI) substrate that includes first and second silicon each provided on an upper surface and a lower surface of the substrate, having an insulator layer therebetween, forming a table, a cantilever arm connected to the table, an anchor connected to the cantilever arm, and an electrode opposite to the cantilever arm by etching the first silicon, allowing the table and the cantilever arm to levitate from the second silicon by removing an insulator layer disposed under the table and the cantilever arm, and mounting an image sensor on the table.
Samsung Electro-Mechanics Co., Ltd.
H H H H B B H G B H G B
H02N H04N H02N H04N B81C B81C H01L G02B B81C H04N G03B B81C
inventional additional additional inventional additional additional inventional inventional additional inventional additional additional
Seung Seoup
Lee