Birch, Stewart, Kolasch & Birch, LLP
Semiconductor device with negative capacitance structure and method for forming the same
A semiconductor device structure is provided. The semiconductor device structure includes a substrate having a fin structure that includes a negative capacitance (NC) material. The semiconductor device structure also includes a gate electrode layer, a gate dielectric structure, a source feature, and a drain feature. The gate dielectric structure covers the top surface and the opposing sidewall surfaces of the fin structure. The gate electrode layer is formed over the gate dielectric structure. The source feature and the drain feature are formed in and protrude from the fin structure, and separated from each other by the gate electrode layer.
Taiwan Semiconductor Manufacturing Co., Ltd.
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Bo-Feng Chih-Yu Chi-On Sai-Hooi Chih-Hao
Young Chang Chui Yeong Wang