Haynes and Boone, LLP
Photosensitive material and method of lithography
Methods and materials directed to a photosensitive material and a method of performing a lithography process using the photosensitive material are described. A semiconductor substrate is provided. A layer including an additive component is formed over the semiconductor substrate. The additive component includes a metal cation. One or more bonds are formed to bond the metal cation and one or more anions. Each of the one or more anions is one of a protecting group and a polymer chain bonding component. The polymer chain bonding component is bonded to a polymer chain of the layer. The layer is exposed to a radiation beam.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chien-Wei An-Ren Ching-Yu
Wang Zi Chang