Rossi, Kimms & McDowell LLP
Optical element holding apparatus and exposure apparatus
A holding apparatus for holding an optical element includes a driving part configured to move the optical element, and a measuring part configured to measure a coordinate of the optical element, wherein number of coordinates measured by the measuring part among a degree of freedom of the optical element is greater than a driving degree of freedom of the driving part.
Canon Kabushiki Kaisha
G G G G G
G03F G03F G02B G02B G03F
inventional inventional additional inventional inventional
Kenji Kenichi Ichiro Jun
Yoshida Kobayashi Onuki Ota