Knobbe Martens Olson & Bear LLP
Thin-film transistor array substrate, display device including the same, and method of manufacturing the thin-film transistor array substrate
A method of manufacturing a thin film transistor (TFT) array substrate is disclosed. In one aspect, the method includes forming an active layer on a substrate, forming a first insulating layer on the substrate to cover the active layer, and forming a first gate electrode on the first insulating layer in an area corresponding to the active layer, doping the active layer with ion impurities, forming a second insulating layer on the first insulating layer to cover the first gate electrode, performing an annealing process on the active layer, forming a lower electrode of a capacitor on the second insulating layer, forming a third insulating layer on the second insulating layer to cover the lower electrode, wherein the third insulating layer has a dielectric constant that is greater than those of the first and second insulating layers, and forming an upper electrode of the capacitor on the third insulating layer.
Samsung Display Co., Ltd.
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inventional inventional inventional
Il-Jeong Wang-Woo Seung-Min Jung-Kyu Ju-Won Jeong-Ho Su-Yeon Choong-Youl
Lee Lee Lee Lee Yoon Lee Sim Im