JCIPRNET
Conductive wire structure and manufacturing method thereof
A method of manufacturing a conductive wire structure including following steps is provided. A conductive layer is formed on a substrate. A rectangular ring spacer is formed on the conductive layer by a self-aligned double patterning process. A patterned photoresist layer is formed. The patterned photoresist layer exposes a first portion and a second portion of the rectangular ring spacer. The first and second portions are located at two corners on a diagonal of the rectangular ring spacer. The first and second portions are removed by using the patterned photoresist layer as a mask to form a first spacer and a second spacer. The first spacer and the second spacer are L-shaped. The patterned photoresist layer is removed. A pattern of the first spacer and a pattern of the second spacer are transferred to the conductive layer to form an L-shaped first conductive wire and an L-shaped second conductive wire.
Winbond Electronics Corp.
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Huang-Nan
Chen