F. Chau & Associates, LLC
Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same
An optical measuring method includes generating a Bessel beam, filtering the Bessel beam to generate a focused Bessel beam, vertically irradiating the focused Bessel beam onto a substrate in which an opening is formed, and detecting light reflected from the substrate to obtain an image of a bottom surface of the opening.
SAMSUNG ELECTRONICS CO., LTD.
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Chung-Sam Young-Hoon Yu-Sin Yun-Jung Min-Ho Jung-Soo
Jun Sohn Yang Jee Rim Kim