Bacon & Thomas
Mask pattern for defining a floating gate region
The invention is a mask pattern comprising a first region that is strip-shaped and has two long sides and two short sides, and two second regions that are strip-shaped with each region having two long sides and two short sides, in which the short sides of the second regions are shorter than the sides of the first region, and the second regions extend in a lengthwise direction from the two short sides of the first region, respectively, with the short sides of the second regions adjacent to the short sides of the first region. The mask pattern is used to define a floating gate region in a flash memory.
Taiwan Semiconductor Manufacturing Company, Ltd.
G H
G03F H01L
inventional inventional
Paul Jiaren Shiou-han Calvin Yau-feng Maxwell
Chuang Chen Liaw Wu Lo Lai