Brinks Hofer Gilson & Lione
Cutting method for substrate and cutting apparatus therefor
A cutting method for substrates includes: preparing a substrate which has a predetermined circular cut line set thereon; chucking the substrate on a surface of a chuck table which is rotatably supported around a rotation axis of the chuck table such that the predetermined circular cut line of the substrate is concentric with the chuck table; disposing a disc-shaped cutting blade having a rotation axis so that the cutting blade faces the substrate; and cutting the substrate along the predetermined circular cut line of the substrate by the cutting blade while rotating the substrate by rotating the chuck table. The substrate has two cut points which are set on one side and the other side of the predetermined circular cut line such that a rotation center of the substrate is positioned between the one side and the other side of the predetermined circular cut line. The cutting blade is disposed so that the rotation axis of the cutting blade perpendicularly crosses the rotation axis of the chuck table. The cutting blade is reciprocatably supported along the rotation axis of the cutting blade, and alternately cuts into the two cut points of the substrate.
Disco Corporation
H
H01L
inventional
Shinya
Watanabe