Westman, Champlin & Koehler, P.A.
Thin-film transistor and method of manufacturing the same, array substrate, and display apparatus
In an embodiment, there is provided a method of manufacturing a thin-film transistor. The method includes steps of: forming a gate, a gate insulator layer and an active layer on a base substrate, wherein, the gate and the active layer are provided at upper and lower sides of the gate insulator layer, respectively, and the active layer contains impurity ions therein; and, while implementing an annealing on the active layer, applying a voltage between the active layer and the gate to generate an electrical field therebetween, a direction of the electrical field being configured such that the impurity ions move from the active layer into the gate insulator layer. Meanwhile, there are also provided a thin-film transistor, an array substrate and a display apparatus.
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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inventional inventional inventional
Tongshang Jun Qinghe Wei Yang Dongfang Leilei Guangcai
Su Liu Wang Li Zhang Wang Cheng Yuan