Harness, Dickey & Pierce, P.L.C.
Apparatus for transferring substrate and apparatus for processing substrate including the same
The inventive concepts provide apparatuses for transferring a substrate and/or apparatuses for processing a substrate including the same. The substrate transferring apparatus including a chamber, a filter assembly disposed in a chamber to provide external air into the chamber, and an additional assembly including a moisture removing part and a purge gas providing part sequentially stacked on the filter assembly may be provided. The filter assembly may be coupled to the additional assembly.
Samsung Electronics Co., Ltd.
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Yun-Kwang Hyun Sun Taekyun
Jeon Choi Kang