Integrated circuit including NCEM-enabled, snake-configured fill cells, with NCEM pads formed from at least three conductive stripes positioned between adjacent gates
An integrated circuit, in the form of a wafer, die, or chip, includes multiple standard cell-compatible fill cells, configured to enable non-contact electrical measurements. Such fill cells include mesh pads that contain at least three conductive stripes disposed between adjacent gate stripes. Such fill cells further include geometry to enable non-contact evaluation of snake opens and/or resistances.
PDF Solutions, Inc.
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Stephen Larg Simone Vyacheslav Jeremy Kimon Jonathan Rakesh Kelvin Christopher Nobuharu Hans Tomasz Marci Hideki Conor Indranil Carl Marcin John Markus Timothy Sheng-Che Andrzej Sherry Dennis
Lam Weiland Comensoli Rovner Cheng Michaels Haigh Vallishayee Doong Hess Yokoyama Eisenmann Brozek Liao Matsuhashi O'Sullivan De Taylor Strojwas Kibarian Rauscher Fiscus Lin Strojwas Lee Ciplickas