Christie, Parker & Hale, LLP
Back contacting solar cell having P-doped regions and N-doped regions at the same layer and manufacturing method thereof
A method for forming doped regions in a solar cell includes preparing a first and second surface of a substrate, forming a first doped region doped with a first dopant in a part of the first surface, forming a silicon oxide layer on the first surface, the silicon oxide layer including a first silicon oxide layer on the first doped region and having a first thickness, and a second silicon oxide layer on a portion of the first surface not doped by the first dopant and having a second thickness that is less than the first thickness, implanting a second dopant from outside the first surface into the first silicon oxide layer and the second silicon oxide layer, and forming a second doped region adjacent the first doped region by performing heat treatment on the first silicon oxide layer, the second silicon oxide layer, and the substrate.
Samsung SDI Co., Ltd.
H Y
H01L Y02E
inventional additional
Young-Jin Won-Gyun Sang-Jin Sang-Won Hee-June
Kim Kim Park Seo Kwak