Martine Penilla Group, LLP.
Methods and apparatus for wafer area pressure control in an adjustable gap plasma chamber
In a plasma processing chamber, a method and an arrangement to stabilize pressure are provided. The method includes providing coarse pressure adjustments in an open-loop manner and thereafter providing fine pressure adjustments in a closed-loop manner. The coarse pressure adjustments are performed by rapidly re-position confinement rings employing an assumed linear relationship between the conductance and the confinement rings position to bring the pressure in the plasma generating region quickly to roughly a desired set point. The fine pressure adjustments are performed by at least employing mechanical vacuum pump(s), turbo pump(s), confinement ring positioning and/or combinations thereof to achieve a derive pressure set point.
Lam Research Corporation
H H H
H01J H01J H01J
inventional inventional inventional
Rajinder James H.
Dhindsa Rogers