Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Transfer mechanism for target object to be inspected
A transfer mechanism for a target object includes at least two insulating wire materials disposed spaced from each other to transverse a mounting table, at least two pairs of supporting bodies horizontally disposed at outsides of the mounting table, for stretching said at least two wire materials in parallel with a mounting surface of the mounting table, and at least two grooves formed on the mounting surface of the mounting table to respectively receive therein said at least two wire materials by said at least two pairs of supporting bodies. The transfer mechanism further includes a first elevation driving mechanism for vertically moving said wire materials between said grooves and above of the mounting surface through said pairs of supporting bodies, wherein the target object is transferred between a carrying mechanism and the mounting table through said at least two wire materials.
Tokyo Electron Limited
G H H
G01R H01L H01L
inventional inventional inventional
Yutaka Tomoya Hiroshi
Akaike Endo Yamada