Maschoff Brennan
Fault detection and classification matching
Raw data from chambers is received. Based on received raw data, if a fault exists in operations of the chambers is detected. The detecting includes at least one of operations outlined below. Sigma values respectively corresponding to the chambers are generated based on the raw data of the chambers. A determination is made to determine whether a sigma ratio corresponding to the sigma values is smaller than a threshold value. Mean outlier indexes respectively corresponding to the chambers is generated by executing a mean matching process for the chambers in a condition that the sigma ratio is smaller than the threshold value. One of the chambers, which has a worst first mean outlier index of the first mean outlier indexes, is identified as a target chamber having fault operation.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Yi-Ting Jo-Ling Chia-Jen Yu-Jhen
Tsai Pan Chou Liu