WPAT, P.C., Intellectual Property Attorneys
Semiconductor structure having integrated inductor therein
A semiconductor structure includes: a substrate; a first passivation layer over the substrate; a second passivation layer over the first passivation layer; and a magnetic core in the second passivation layer; wherein the magnetic core includes a first magnetic material layer and a second magnetic material layer over the first magnetic material layer, the first magnetic material layer and the second magnetic material layer are separated by a high resistance isolation layer, and the high resistance isolation layer has a resistivity greater than about 1.3 ohm-cm.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
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Cheng-Hsien Sheng-Chau Cheng-Yuan I-Nan Ming-Che
Chou Chen Tsai Chen Lee