Park, Vaughan, Fleming & Dowler LLP
Hybrid integration of edge-coupled chips
A technique for fabricating a hybrid optical source is described. During this fabrication technique, a III-V compound-semiconductor active gain medium is integrated with a silicon-on-insulator (SOI) chip (or wafer) using edge coupling to form a co-planar hybrid optical source. Using a backside etch-assisted cleaving technique, and a temporary transparent substrate with alignment markers, a III-V compound-semiconductor chip with proper edge polish and coating can be integrated with a processed SOI chip (or wafer) with accurate alignment. This fabrication technique may significantly reduce the alignment complexity when fabricating the hybrid optical source, and may enable wafer-scale integration.
ORACLE INTERNATIONAL CORPORATION
G G
G02B G02B
inventional inventional
Ivan Guoliang Ashok V. Xuezhe Ying
Shubin Li Krishnamoorthy Zheng Luo