Jones & Volentine, L.L.P.
Profile thermocouple of a transverse-type diffusion furnace
 A profile thermocouple employs a detachable and heat-resistant fixing assembly. The fixing assembly has a first fixing tube and a second fixing tube assembled with each other. A temperature sensor is inserted in the first fixing tube, and extension wires are inserted in the second fixing tube. The temperature sensor includes a plurality of alloy wires, a plurality of insulators, and a protecting tube. The fixing assembly is made from heat-resistant metal. Therefore, the temperature sensor is prevented from being short-circuited or broken, such that the profile thermocouple more precisely senses the temperature in the transverse-type diffusion furnace. 
Samsung Electronics Co., Ltd.
G
G01K
inventional
Seung-Jin
Lee