Ryan, Mason & Lewis, LLP
Fuse element resistance enhancement by laser anneal and ion implantation
A method for fabricating an electronic fuse includes forming a recess within a film material to define opposed contact segments and a central fuse segment interconnecting the contact segments and altering the material of the central fuse segment of the film material to increase electrical resistance characteristics of the central fuse segment. The central fuse segment may include defects such as voids created by directing a laser at the central fuse segment as a component of a laser annealing process. Alternatively, and or additionally, the central fuse segment may include dopants implementing via an ion implantation process to increase resistance characteristics of the central fuse segment.
International Business Machines Corporation
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Michael Liying Chih-Chao Juntao Yi
Rizzolo Jiang Yang Li Song