Capacitance sensing for substrate cooling
Described is a cooling system for use in the manufacture of substrates into magnetic disk memory in which cooling plates are positioned dynamically in relation to a substrate to be cooled. This enables positioning the cooling plates closer for more effective cooling. Positioning is controlled by capacitive measurements between the cooling plates and the substrate to be cooled.
Intevac, Inc.
G H H
G11B H01L H01L
inventional inventional inventional
James H. Brian
Rogers Hoffman