Mei & Mark LLP
Silicon-based lithium niobate film electro-optic modulator array and integration method thereof
Integration method of a large-scale silicon-based lithium niobate film electro-optic modulator array. By using the method, the difficulty of a fabrication process of a lithium niobate crystal layer is reduced, requirements on precision of bonding lithium niobate and silicon is reduced, and fabrication and bonding of the large-scale array lithium niobate crystal layer can be completed at one time, so that production efficiency of the silicon-based lithium niobate film electro-optic modulator array is greatly improved; through design and optimization of the structure of the silicon crystal layers, light can be naturally alternated and mutually transmitted in silicon waveguides and lithium niobate waveguides, and a high-performance electro-optic modulation effect of the lithium niobate film is achieved.
Shanghai Jiao Tong University
G G G G G G G G G G G G G G
G02B G02B G02B G02B G02B G02B G02B G02B G02F G02B G02F G02B G02F G02F
additional additional additional additional additional additional inventional additional additional additional inventional additional inventional inventional
Jing Weiwen Shaofu Jianping
Wang Zou Xu Chen