McClure, Qualey & Rodack, LLP
High-brightness light source
A method for generating high-brightness light sources is provided. The method includes introducing a gaseous material into the target material. The method further includes supplying the target material into a fuel target generator. The method also includes generating targets by forcing the target material with the gaseous material out of the fuel target generator. In addition, the method includes expanding the gaseous material in the targets to transform the targets to target mists. The method also includes focusing a main pulse laser on the target mists to generate plasma emitting high-brightness light.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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H05G H05G H05G G03F
inventional inventional inventional inventional
Chun-Lin Louis Tsiao-Chen
Chang Wu