Birch, Stewart, Kolasch & Birch, LLP
Wafer positioning systems and methods thereof
An wafer positioning system comprises a wafer handling chamber with a vacuum sealable opening catching wafers. At least one processing chamber disposed adjacent to the wafer handling chamber has an opening catching wafers, sealed with a gate. A wafer transfer robot with a tray disposed in the wafer handling chamber transports wafers into the processing chambers. A signal receiver is disposed on the front end of the tray. When the tray passes below a wafer, the signal receiver detects wafer position, generating a wafer position signal. A control module receives the wafer position signal through the signal receiver and compares the wafer position signal with a predetermined position signal to correct any misalignment of the wafer.
Taiwan Semiconductor Manufacturing Co., Ltd.
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H01L H01L Y10S H01L
inventional inventional additional inventional
Chih-Chien Jenn-Shiang
Ho Shieh