Miles & Stockbridge, P.C.
Charged particle beam control device
Provided is a charged particle beam control device having improved signal detection accuracy. The charged particle beam control device (detection block) includes: a detector provided in a charged particle beam device, and configured to detect secondary electrons emitted from a sample by irradiating the sample with a charged particle beam and output an electric signal based on the detected secondary electrons; a signal wiring configured to transmit the electric signal; a noise detection wiring configured to detect a noise signal generated in the charged particle beam device; and an arithmetic circuit configured to generate a signal obtained by subtracting the noise signal from the electric signal.
HITACHI HIGH-TECH CORPORATION
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Akio Shinichi Makoto Shunsuke Wen
Yamamoto Murakami Suzuki Mizutani Li