Muir Patent Law, PLLC
Three-dimensional semiconductor devices
Three-dimensional (3D) semiconductor devices are provided. The 3D semiconductor device includes a plurality of dummy pillars penetrating each cell pad of an electrode structure and the electrode structure disposed under each cell pad. Insulating patterns of a mold stack structure for formation of the electrode structure may be supported by the plurality of dummy pillars, so transformation and contact of the insulating patterns may be minimized or prevented.
SAMSUNG ELECTRONICS CO., LTD.
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Kyoung-Hoon SeungWoo Taekeun Seok-won Jin-Woo Sunyeong
Kim Paek Cho Lee Park Lee