JCIPRNET
Tunable optical device
A tunable optical device including a substrate, at least one support unit, a flexible frame, an elastic component, a first reflector, and at least one actuator is provided. The support unit is fixed onto the substrate. The flexible frame is connected to the support unit and suspended above the substrate. The elastic component is connected to the flexible frame. A stiffness of the elastic component in the Z-axis is smaller than a stiffness of the flexible frame in the Z-axis. The Z-axis direction is parallel to a normal direction of the substrate. The first reflector is connected to the elastic component. The actuator is located between the flexible frame and the substrate or located between the first reflector and the substrate.
Industrial Technology Research Institute
G G
G02B G02B
inventional inventional
Jien-Ming Chun-Kai Yu-Sheng Chia-Jung Jing-Yuan
Chen Mao Hsieh Chang Lin