Lee & Morse, P.C.
Method of monitoring a manufacturing-process and manufacturing-process monitoring device
A method of monitoring a manufacturing process includes generating a measurement data by analyzing emission intensity of plasma emission light using a measurement device, the plasma emission light being generated when a plasma gas of a manufacturing process device is changed from an energy level corresponding to a high energy state to an energy level corresponding to a low energy state, generating a compensated value based on the measurement data, the compensated value being generated by offsetting a sensitivity change that is caused due to pollution of the manufacturing process device and the measurement device or measurement locations of the measurement device, and monitoring the manufacturing process based on the compensated value.
SAMSUNG DISPLAY CO., LTD.
H H
H01J H01J
inventional inventional
Young-Jae
Jung