Tracy Jong Law Firm
Method of detecting the cleanliness of a lens using differential flat field correction of pupil incidence
A method for detecting lens cleanliness of a lens in a flat-field optical path, the flat-field optical path includes a light source, the lens, a camera, the light source is a narrow-band multispectral uniform surface light source, the camera's light-sensitive surface is disposed perpendicular to an optical axis of the lens and in the light position of the lens and a pupil interposed between the lens and the light source, the method including collecting the bright-field image data and dark-field image data for a plurality of pupil aperture sizes through the lens; for each pixel, performing a pupil differential flat field correction to yield a plurality of PiPj pupil differentials; and displaying the pupil differentials in the form of a plurality of images to show uniformity of each image, wherein a non-uniform area on each image is determined to have been caused by an impurity of the lens.
MLOptic Corp.
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Wei Weida Teresa Jiang
Zhou Liu Zhang He