Perkins IP Law Group LLC
Apparatus and method for manufacturing fine pattern using interferogram of optical axis direction
The fine pattern manufacturing apparatus, which can improve height direction resolution in a laser irradiation method. More specifically, the invention relates to a fine pattern manufacturing apparatus using interference and a fine pattern manufacturing method using the manufacturing apparatus, in which a height direction interference generation unit is included to interfere laser beams respectively having a different plane direction width, and height direction line width can be improved by irradiating an interference laser beam having an interference fringe direction of height direction on a photosensitive film.
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
G G G B
G03F G03F G03F B29C
inventional inventional inventional inventional
Yun Woo Hyug-Gyo
Lee Rhee