Lowe Hauptman Ham & Berner, LLP
Cantilever-type near-field probe for optical data storage and method of manufacturing the same
Disclosed are a cantilever-type near-field probe capable of easily improving an optical throughput and being applied to a head of an optical data storage and a method of manufacturing the same. An oxide film is formed on a silicon substrate having dielectric films formed as a mask layer on upper and lower portions thereof, and a circular dielectric film formed on the upper mask layer and providing a function of a holder. A distal end of the probe has a parabolic structure by use of an effect of a bird's peak provided due to a difference of growth rate of the oxide film produced by the dielectric film, thereby forming the initial probe. After the dielectric film is removed from the initial probe, a bottom surface of the silicon substrate is removed, thereby providing the probe with the near-field aperture having a high throughput.
Electronics and Telecommunications Research Institute
B H H G G G B G
B82Y H01L H01L G11B G01Q G01Q B82Y G11B
inventional additional additional inventional additional inventional inventional inventional
Eunkyoung Jun Ho Kibong Sung Qyu Kang Ho
Kim Kim Song Lee Park