Method for manufacturing an infrared sensor array
 An infrared sensor array and manufacturing method thereof is disclosed including a substrate; a supporter having a space portion for adiabatic structure between the substrate and supporter; and a plurality of infrared sensors arranged with a predetermined distance each other on the supporter above the space portion. 
LG Electronics Inc.
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Y02E H01L Y10S H01L
additional inventional additional inventional
Jun Rim
Choi