Orrick, Herrington & Sutcliffe LLP
Method of fabricating a radio frequency (RF) microelectromechanical system (MEMS) asymmetrical switch
The methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrodes over a transmission line. A first insulator can be located between one of the electrodes and the deflectable member to form a capacitive element. The deflectable member can be deflectable between an up-state and a down-state, the down-state capacitively coupling the deflectable member with the transmission line. The degree by which the deflectable member overlaps the first insulator can be adjusted to adjust the capacitance of the capacitive element and the resulting resonant frequency.
The Regents of the University of California
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Bedri A. Franco Guann-Pyng Hung-Pin Mark Jiangyuan
Cetiner DeFlaviis Li Chang Bachman Qian