Slater Matsil, LLP
Substrate resistor and method of making same
A semiconductor structure can include a resistor on a substrate formed simultaneously with other devices, such as transistors. A diffusion barrier layer formed on a substrate is patterned to form a resistor and barrier layers under a transistor gate. A filler material, a first connector, and a second connector are formed on the resistor at the same manner and time as the gate of the transistor. The filler material is removed to form a resistor on a substrate.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Hua Feng Shu-Hui Mu-Chi
Chen Wang Chiang