Antonelli, Terry, Stout & Kraus, LLP
Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device
 The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip. 
Hitachi, Ltd.
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H01L H01L G01N G01N
inventional additional inventional inventional
Yuzo Taizo Yutaka Sadao Yuichi Masao Kazuhiko Isao Tsutomu Shuichi Jun Hiroto Seiji Kimio Yuzaburo Osamu
Taniguchi Hashimoto Ebara Shimoyashiro Ohyama Sakata Matsuoka Miyazaki Okabe Hanashima Nakazato Nagatomo Ishikawa Muramatsu Sakamoto Satou