Antonelli, Terry, Stout & Kraus, LLP
Piezoresistive device and fabrication method thereof
 Disclosed is the method of producing a piezo-device utilizing an ultra-thin Mo-C film as a piezoresistive material for a general class of improved piezo-device with the high sensitivity and the weak temperature dependence. 
Electronics and Telecommunications Research Institute
G
G01L
inventional
Min-Cheol Kyoung-Wan Seong-Jae
Shin Park Lee