Westerman, Hattori, Daniels & Adrian, LLP
Method of preparing synthetic quartz glass substrate
A synthetic quartz glass substrate is prepared by immersing a starting substrate in an aqueous solution of a nonionic surfactant and precision polishing the substrate with a colloidal silica water dispersion. A synthetic quartz glass substrate having a few defects and low surface roughness is obtained while the polishing rate is improved and the polishing time is reduced.
SHIN-ETSU CHEMICAL CO., LTD.
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C03C B24B C03C
additional inventional inventional
Daijitsu Harunobu Masaki
Harada Matsui Takeuchi