Beyer Weaver Thomas & Nguyen
Temperature sensing system for use in a radio frequency environment
 The invention relates to a temperature sensing system that accurately measures temperatures of articles or areas using a contact sensor even in a high radio frequency environment. The temperature sensing system includes a sensor probe that contacts with an article or area that is to have its temperature monitored, and a control circuit to amplify signals from the sensor probe. When significant amounts of radio frequency (RF) interference are present, the temperature sensing can be provided with RF shielding, RF filtering, isolated amplifying and/or multiple stages of low pass filtering that suppress the RF interference. The temperature sensing system is particularly well suited for monitoring and measuring temperatures within semiconductor manufacturing equipment, such as etching, deposition, and other processing chambers. 
Lam Research Corporation
G
G01K
inventional
William S. Jian Janson
Kennedy Chen