Harness, Dickey & Pierce, P.L.C.
Semiconductor buffer structure, semiconductor device including the semiconductor buffer structure, and method of manufacturing the semiconductor device using the semiconductor buffer structure
A semiconductor buffer structure includes a silicon substrate, a nucleation layer formed on the silicon substrate, and a buffer layer formed on the nucleation layer. The buffer layer includes a first layer formed of a nitride semiconductor material having a uniform composition rate, a second layer formed of the same material as the nucleation layer on the first layer, and a third layer formed of the same material with the same composition ratio as the first layer on the second layer.
Samsung Electronics Co., Ltd.
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Joo-sung Young-jo Jun-youn Jae-kyun Young-soo Su-hee
Kim Tak Kim Kim Park Chae