F. Chau & Associates, LLC
Method of manufacturing a dual-gate thin film transistor
A thin film transistor includes: a substrate, a semiconductor layer disposed on the substrate, a first gate electrode and a second gate electrode disposed on the semiconductor layer, a gate insulating layer disposed between the semiconductor layer and the first and second gate electrodes and having a first through hole between the first and second gate electrodes and a capping layer covering the first gate electrode and contacting the semiconductor layer via the first through hole. The capping layer includes a conductive material.
SAMSUNG DISPLAY CO., LTD.
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Yul-Kyu Kyu-Sik Sun
Lee Cho Park