Loeb & Loeb LLP
Focused ion beam optical axis adjustment method and focused ion beam apparatus
 To provide a focused ion beam optical axis alignment method and a focused ion beam apparatus which make axis alignment work of for example when replacing an ion source of a focused ion beam apparatus easy. A method for adjusting the optical axis of a focused ion beam apparatus having an ion source part 3 made up of an ion source 1 for producing an ion beam and a pullout electrode 2, a monitoring aperture 5 which passes a central part having a high energy density of the ion beam and measures the electric current thereof, a charged particle optical system 9 including a condenser lens 6, an aperture 7 and an objective lens 8, and a deflecting electrode 16 which scans the focused ion beam, wherein while moving the ion source 1 in a direction intersecting orthogonally with the optical axis of the ion beam the current measured by the monitoring aperture 5 and the overall ion beam quantity produced from the ion source are monitored and a voltage impressed on the pullout electrode is controlled so that this current becomes constant and the position of the ion source 1 is adjusted so that the overall ion beam quantity becomes a minimum. 
Seiko Instruments Inc.
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Toshio Munenori Toshiaki Yasuhiko
Doi Tasai Fujii Sugiyama