Nixon & Vanderhye P.C.
Plasma generation apparatus with a conductive connection member that electrically connects the power source to the electrode
A plasma generation apparatus includes a high-frequency power source section; a reaction container to which a material gas is to be supplied; a pair of electrodes that are provided in the reaction container so as to be opposed to each other to generate plasma in between when supplied with high-frequency power by the high-frequency power source section; a conductive connection member that is part of an outer wall of the reaction container and that has, on one side, at least one power source connecting point that is connected to the high-frequency power source section and has, on the other side, at least one electrode connecting point that is connected to the one of the pair of electrodes; and high-frequency current transmitting means provided in the conductive connection member in the vicinity of the at least one power source connecting point, for adjusting impedance between the at least one power source connecting point and the at least one electrode connecting point.
Sharp Kabushiki Kaisha
H H
H01J H01J
inventional inventional
Takanori Hiroshi
Nakano Taniguchi