Knobbe, Martens, Olson & Bear LLP
DC bias voltage measurement circuit and plasma CVD apparatus comprising the same
A circuit for measuring DC bias voltage occurring in an ungrounded electrode of a plasma processing apparatus, includes: a first terminal connected between the ungrounded electrode and the RF power source; a second terminal for determining a value of the DC bias voltage; a first resistance connected between the first terminal and the second terminal; a second resistance connected between the second terminal and a ground; and a condenser disposed in parallel to the second resistance between the second terminal and the ground. The sum of the first resistance value and the second resistance value is about 50 MΩ or greater.
ASM Japan K.K.
G H H H
G01R H01J H01J H01J
inventional inventional inventional inventional
Yasuaki Mitsutoshi
Suzuki Shuto