Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, GATE-short-configured, GATECNT-short-configured, and metal-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one GATE-short-related failure mode, one GATECNT-short-related failure mode, and one metal-short-related failure mode.
PDF Solutions, Inc.
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Nobuharu Jeremy Marci Timothy Sherry Hans Stephen Conor Christopher Kimon Indranil Marcin Andrzej Vyacheslav Dennis Hideki Carl Markus Rakesh Sheng-Che Simone Kelvin Tomasz Larg John Jonathan
Yokoyama Cheng Liao Fiscus Lee Eisenmann Lam O'Sullivan Hess Michaels De Strojwas Strojwas Rovner Ciplickas Matsuhashi Taylor Rauscher Vallishayee Lin Comensoli Doong Brozek Weiland Kibarian Haigh