Abelman, Frayne & Schwab
Assembling apparatus and assembling method for semiconductor manufacturing apparatus
Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift.
TOKYO ELECTRON LIMITED
H H H B H H H B H H
H01L H01L H01L B23P H01L H01L H01L B23P H01L H01L
inventional additional inventional inventional inventional inventional inventional additional inventional inventional
Hisashi Masahiro Yoshihisa Tamotsu Michihiro Hiroshi Harunari
Inoue Kobayashi Kumagai Hatakeyama Takahashi Kikuchi Hasegawa