Harness, Dickey & Pierce, P.L.C.
Method of manufacturing an epitaxial semiconductor substrate and method of manufacturing a semiconductor device
In an example embodiment of the method of manufacturing an epitaxial semiconductor substrate, a gettering layer is grown over a semiconductor substrate. An epitaxial layer may then be formed over the gettering layer, and a semiconductor device may be formed on the epitaxial layer.
Samsung Electronics Co., Ltd.
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Hwa-Sung DongSuk Seung-Hwan Tetsuji Ho
Rhee Shin Lee Ueno Lee