Hauptman Ham, LLP
Mask storage device for mask haze prevention
A mask storage device for storing a mask used in lithography comprises a desiccant retainer for receiving a desiccant, the desiccant retainer comprising one or more passages. The mask storage device also comprises a first shell and a second shell, the second shell removably attached to the first shell and arranged to form a sealed space with the first shell in a closed state. The desiccant retainer is positioned in the sealed space. The mask storage device also comprises a gasket positioned between the first shell and the second shell. The gasket is configured to create a sufficiently airtight seal between the first shell and the second shell in the closed state. The one or more passages of the desiccant retainer comprise one or more membranes.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
B B H H B B B B B B
B65B B65D H01L H01L B63C B65B B65D B65D B65B B65D
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Chih-Wing Yung-Chih
Chang Chang