Fitzpatrick, Cella, Harper & Scinto
Manufacturing method of thick film member pattern
A method of manufacturing an image forming apparatus having a plurality of electron-emitting members, with row direction wires and column direction wires, in a matrix, and a dielectric layer between the row and column wires. A resist precursor layer is formed by imparting and drying a first photosensitive paste. A second precursor layer is formed by imparting a second photosensitive paste onto the first precursor layer, and by drying the second paste. A precursor pattern is formed by exposing a layered product of the first layer and the second layer through a mask. The exposed layered product is developed, and the dielectric layer is formed by baking the precursor pattern. A shrinkage ratio of the second layer after the baking to the second layer before the baking is larger than a shrinkage ratio of the first layer after the baking to the first layer before the baking.
Canon Kabushiki Kaisha
H H H H G G
H01J H05K H05K H05K G03F G03F
inventional inventional additional additional inventional inventional
Osamu Masaaki
Watanabe Suzuki