Thomas, Kayden, Horstemeyer & Risley
Method for forming micromachined structure
The invention provides a method of fabricating a micromachined structure, and in particular to a method of forming a micro-electro-mechanical system (MEMS) structure. A thin silicon cantilevered or suspended structure used to make micromachined structures is first formed from a SOI wafer or a bulk silicon wafer, followed by formation of the micromachined structures by semiconductor manufacturing techniques.
Taiwan Semiconductor Manufacturing Co., Ltd.
B
B81C
inventional
Chia-Hua Hua-Shu
Chang Wu