Wenderoth, Lind & Ponack, L.L.P.
Apparatus and method of obtaining field by measurement
Above a sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image using a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a distance d, and a difference between them is divided by the distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field.
Kyoto University
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Kei Hirofumi Akifumi Takashi Kenjiro Kazumi Nobuo
Kobayashi Yamada Nakai Horiuchi Kimura Matsushige Satoh