Abel Schillinger, LLP
Curing substrate pretreatment compositions in nanoimprint lithography
A nanoimprint lithography method includes disposing a pretreatment composition on a nanoimprint lithography substrate to form a pretreatment coating, and disposing discrete portions of imprint resist on the pretreatment coating, each discrete portion of the imprint resist covering a target area of the nanoimprint lithography substrate. The imprint resist is a polymerizable composition and includes a polymerization initiator. A composite polymerizable coating is formed on the nanoimprint lithography substrate as each discrete portion of the imprint resist spreads beyond its target area. The composite polymerizable coating is contacted with a nanoimprint lithography template. The polymerization initiator is activated, and the composite polymerizable coating is polymerized to yield a composite polymeric layer and an uncured portion of the pretreatment coating on the nanoimprint lithography substrate. After polymerizing the composite polymerizable coating to yield the composite polymeric layer, the uncured portion of the pretreatment coating is polymerized.
CANON KABUSHIKI KAISHA
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inventional inventional additional
Weijun Timothy Brian
Liu Stachowiak