Zilka-Kotab, PC
Method to fabricate side shields for a magnetic sensor
A method for fabricating magnetic side shields for an MR sensor of a magnetic head. Following the deposition of MR sensor layers, a first DLC layer is deposited. Milling mask layers are then deposited, and outer portions of the milling mask layers are removed such that a remaining central portion of the milling mask layers is formed having straight sidewalls and no undercuts. Outer portions of the sensor layers are then removed such that a relatively thick remaining central portion of the milling mask resides above the remaining sensor layers. A thin electrical insulation layer is deposited, followed by the deposition of magnetic side shields. A second DLC layer is deposited and the remaining mask layers are then removed utilizing a chemical mechanical polishing (CMP) liftoff step. Thereafter, the first DLC layer and the second DLC layer are removed and a second magnetic shield layer is then fabricated thereabove.
Hitachi Global Storage Technologies Netherlands B.V.
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B82Y G11B G11B Y10T G11B Y10T Y10T G11B
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Robert Stanley Howard Gordon Jui-Lung Quang David John Wipul Pemsiri Satoru Marie-Claire
Beach Zolla Li Le Seagle Jayasekara Araki Cyrille