McClure, Qualey & Rodack, LLP
Mems device with dynamic valve layer
A micro-electro-mechanical system (MEMS) device is provided. The MEMS device includes a substrate, a backplate disposed on a side of the substrate, a diaphragm, and a dynamic valve layer. The substrate forms an opening. The diaphragm is disposed on the side of the substrate and extends across the opening of the substrate, wherein the diaphragm forms a vent hole. The dynamic valve layer is disposed on the side of the substrate and includes a flap portion, wherein the flap portion covers at least a part of the vent hole when viewed in a direction perpendicular to the diaphragm, and the flap portion deforms when air flows through the vent hole.
FORTEMEDIA, INC.
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inventional additional inventional inventional additional inventional
Jien-Ming Wen-Shan Feng-Chia Nai-Hao Chih-Yuan
Chen Lin Hsu Kuo Chen