Global dynamic detection method and system for protective film of photomask
A global dynamic detection method for a protective film of a photomask includes: causing the protective film to undergo broadband oscillation; applying a broadband signal to the protective film undergoing multi-frequency oscillation; transforming an optical time-domain signal reflecting off the protective film to obtain a frequency spectrum with multiple resonance frequencies; and detecting the protective film with the frequency spectrum comprehensively to ensure the quality of the protective film. A global dynamic detection system for use with the global dynamic detection method is further provided.
SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Yu-Ching
Lee