Structure and method for a microelectromechanic cylindrical reflective diffraction grating spectrophotometer
A tunable microelectromechanical (MEMS) spectrophotometer with a rotating cylindrical reflective diffraction grating is integrated with a photodetector and an optical fiber light source on a Rowland circle on a monolithic silicon substrate.
Xerox Corporation
G G G G
G01J G01J G01J G01J
inventional inventional inventional inventional
Jingkuang Joel A. Patrick Y. Decai Alex T.
Chen Kubby Maeda Sun Tran