Birch, Stewart, Kolasch & Birch, LLP
Semiconductor piezoresistive sensor and operation method thereof
A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to and around the diaphragm. The piezoresistive element is formed in the diaphragm and is electrically connected with the circuit. The conductive layer is electrically connected with the diaphragm.
Delta Electronics, Inc.
G
G01L
inventional
Hsieh-Shen Tai-Kang Cheng-Chang Chao-Jui Heng-Chung Huang-Kun
Hsieh Shing Lee Liang Chang Chen