Antonelli, Terry, Stout & Kraus, LLP.
Method of detecting defects on an object
A method for detecting defects on an object includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the object and white-color, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the object and passed through a filter which blocks diffraction light resulting from patterns formed on the object, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the object, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.
Hitachi High-Technologies Corporation Hitachi, Ltd.
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Shunichi Hidetoshi Minori Takanori Hisato Yoshio Shuichi Yoshimasa Tetsuyai Keiji Yukio Takahiro Ryouji
Matsumoto Nishiyama Noguchi Ninomiya Nakamura Morishige Chikamatsu Ohshima Watanabe Sakai Kembo Jingu Matsunaga