Dugan & Dugan, PC
Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning
In some embodiments, an apparatus for cleaning a substrate is provided that includes (1) a substrate chuck configured to support a substrate with a front side of the substrate accessible; (2) a buff pad assembly configured to support a buff pad having a diameter smaller than a diameter of the substrate; and (3) a swing arm coupled to the buff pad and configured to position and rotate the buff pad along the front side of the substrate, and control an amount of force applied by the buff pad against the front side of the substrate during cleaning. The substrate chuck, buff pad assembly and swing arm are configured to buff clean the substrate. Numerous additional aspects are disclosed.
Applied Materials, Inc.
B H B
B08B H01L B08B
inventional inventional additional
Yufei Yunshuang Jianshe Brian J. Hui Jim K. Clinton P.
Chen Ding Tang Brown Chen Atkinson Sakata