Patterson + Sheridan LLP
Method of controlling ion energy distribution using a pulse generator with a current-return output stage
Embodiments of this disclosure describe an electrode biasing scheme that enables maintaining a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate that consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
APPLIED MATERIALS, INC.
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Olivier Anurag Kumar Leonid Sunil James Rajinder
Luere Mishra Dorf Srinivasan Rogers Dhindsa