Patterson & Sheridan, LLP
Micromechanical device with microfluidic lubricant channel
A micromechanical device assembly includes a micromechanical device enclosed within a processing region and a lubricant channel formed through an interior wall of the processing region and in fluid communication with the processing region. Lubricant is injected into the lubricant channel via capillary forces and held therein via surface tension of the lubricant against the internal surfaces of the lubrication channel. The lubricant channel containing the lubricant provides a ready supply of fresh lubricant to prevent stiction from occurring between interacting components of the micromechanical device disposed within the processing region.
Miradia, Inc.
B H H B G
B81B H01L H01L B81B G02B
inventional additional additional additional inventional
Hung-Nan Dongmin William Spencer
Chen Chen Worley