Slater & Matsil, L.L.P.
Methods for cleaning membranes used for filtering chemicals
A method includes performing a first cleaning step to clean a membrane, wherein during the first cleaning step, a first solvent passes through the membrane. After the first cleaning step, a second cleaning step is performed to clean the membrane. During the second cleaning step, a second solvent passes through the membrane. The first solvent and the second solvent are in different groups among three solvent groups, wherein the three solvent groups include a non-polar solvent group, a polar aprotic solvent group, and a polar protic solvent group.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Ya-Ling Ching-Yu
Cheng Chang