Multi-sensor system and method of forming same
A method for forming a multi-sensor system includes forming an inertial sensor fixed electrode of an inertial sensor and a movable electrode of a pressure sensor on a first substrate having through silicon vias (TSVs). A second substrate is fusion bonded to a bonding layer on the first substrate. The second substrate and the bonding layer are patterned to form a transducer layer of the inertial sensor and a pressure sensor fixed electrode of the pressure sensor. The first substrate is etched to form a pressure sensor port aligned with the movable electrode.
NXP USA, Inc.
B B B B B G G G
B81B B81B B81B B81B B81C G01P G01P G01L
additional additional inventional additional inventional inventional inventional inventional
Qing
Zhang