Sughrue Mion, PLLC
Process for producing a laminated ink-jet recording head
 A process for producing a laminated ink-jet recording head including the steps of forming a titanium layer across a surface of a diaphragm, and forming a layer of a piezoelectric material on the titanium layer by a hydrothermal method. 
Seiko Epson Corporation
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Minoru Masami Tsutomu Masato Kouji
Usui Murai Nishiwaki Shimada Sumi