Haynes and Boone, LLP
System and method for data mining and feature tracking for fab-wide prediction and control
System and method for data mining and feature tracking for fab-wide prediction and control are described. One embodiment is a system comprising a database for storing raw wafer manufacturing data; a data mining module for processing the raw wafer manufacturing data to select the best data therefrom in accordance with at least one of a plurality of knowledge-, statistic-, and effect-based processes; and a feature tracking module associated with the data mining module and comprising a self-learning model wherein a sensitivity of the self-learning model is dynamically tuned to meet real-time production circumstances, the feature tracking module receiving the selected data from the data mining module and generating prediction and control data therefrom; wherein the prediction and control data are used to control future processes in the wafer fabrication facility.
Taiwan Semiconductor Manufacturing Company, Ltd.
G G G Y
G05B G05B G05B Y02P
additional additional inventional additional
Hui-Yun Po-Feng Jong-I Jui-Long Chia-Tong
Chao Tsai Mou Chen Ho