Fitzpatrick, Cella, Harper & Scinto
Process for forming a deposited film from two mutually reactive active species
 A process for forming a deposited film on a substrate which comprises introducing plural kinds of precursors formed in activation spaces (B), as starting materials for a deposited film and an active species formed in an activation space (C) which is to react with at least two kinds among said plural kinds of precursors respectively at different reaction rates into a deposition space (A) for forming a deposited film on a substrate, wherein the precursor having a property of reacting with said active species at a lower reaction rate is mixed with said active species at an upper stream position as compared with the precursor having a property of reacting with said active species at a higher reaction rate. 
Canon Kabushiki Kaisha
C G
C23C G03G
inventional inventional
Shunichi Masafumi Hisanori Masahiro
Ishihara Sano Tsuda Kanai