Schwegman Lundberg & Woessner, P.A.
Multi-ray-source accelerator and inspection method
Embodiments of the disclosure provide a multi-ray-source accelerator and an inspection method. The multi-ray-source accelerator includes: a plurality of acceleration tubes, each acceleration tube of the plurality of acceleration tubes including an acceleration tube body that defines at least one cavity, the plurality of acceleration tubes being arranged in at least one row along a straight line or an arc and connected in series with each other; and a microwave unit configured to provide a microwave field to the plurality of acceleration tubes. The plurality of acceleration tubes are arranged to allow the microwave unit to provide the microwave field from an acceleration tube at one end of the plurality of acceleration tubes so as to accelerate electron beams in cavities of all the acceleration tubes.
Tsinghua University Nuctech Company Limited
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G01V H05H G01V H05H H05H
inventional inventional additional inventional inventional
Hao Huaibi Yuanjing Kejun Yaohong Chuanxiang Liang
Zha Chen Li Kang Liu Tang Zhang