Huntington IP Consulting Co., Ltd.
Multi-functioned optical measurement device and method for optically measuring a plurality of parameters
The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.
NATIONAL APPLIED RESEARCH LABORATORIES
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Chi-Hung Chun-Li Wei-Chung Jyh-Rou Ming-Hsing
Huang Chang Wang Sze Shen