Womble Bond Dickinson (US) LLP
High frequency power supply device and high frequency power supplying method
A high frequency power supply device and power supplying method are disclosed, which can rapidly and accurately control power used for generation of plasmas. The device includes a first high frequency power supply, providing power at frequency f1, and a second high frequency power supply providing power at frequency f2 (f1>f2). The first power supply includes: a first high frequency oscillator, which excites the high frequency power at the first frequency and has a variable frequency; a first power amplification block, which amplifies the power of the high frequency oscillator; a heterodyne detection block, which performs heterodyne detection of a reflected wave; and a first control block, which receives a signal after detection of the heterodyne detection block and a traveling wave signal, and controls an oscillating frequency of the first high frequency oscillating block and an output of the first power amplification block.
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI PEARL KOGYO CO., LTD.
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Yasunori Hiroshi Jinyuan Takeshi Eiich
Maekawa Iizuka Chen Nakamura Hayano