Innovation Counsel LLP
Cleaner composition for process of manufacturing semiconductor and display
There is provided a cleaner composition for a process of manufacturing a semiconductor and a display. The cleaner composition includes 0.01 to 5.0 wt % of amino acid-based chelating agent, 0.01 to 1.5 wt % of organic acid, 0.01 to 1.0 wt % of inorganic acid, 0.01 to 5.0 wt % of alkali compound, and the balance of deionized water and is based on acidic water with pH levels of 1 to 5. The cleaner composition may enhance metal contaminants removal capability and have a function to remove particles and organic contaminants, and prevent corrosion of copper and reverse adsorption of copper. Thus, cleaner composition may be used for various purposes of etching copper, removing residues, and a cleaner by adjusting an etch rate.
LTCAM CO., LTD. Samsung Display Co., Ltd.
C C C C C C H C
C11D C11D C11D C11D C11D C11D H01L C11D
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Jun Hyuk Dong Eon Jin Ho Seok Ho
Woo Lee Ju Lee