Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including side-to-side short configured fill cells, and the second DOE including chamfer short configured fill cells
An IC includes first and second designs of experiments (DOES), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of side-to-side shorts, and the second DOE contains fill cells configured to enable NC detection of chamfer shorts.
PDF Solutions, Inc.
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Carl Marci Kimon Sheng-Che Nobuharu Jonathan Christopher Hideki Dennis Simone John Vyacheslav Tomasz Indranil Rakesh Kelvin Conor Larg Hans Markus Andrzej Stephen Jeremy Timothy Sherry Marcin
Taylor Liao Michaels Lin Yokoyama Haigh Hess Matsuhashi Ciplickas Comensoli Kibarian Rovner Brozek De Vallishayee Doong O'Sullivan Weiland Eisenmann Rauscher Strojwas Lam Cheng Fiscus Lee Strojwas