Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Developer solution and edge bead remover composition
A developer solution and edge bead remover. composition includes:(A) water;(B) at least a basic compound; and(C) a non-ionic surfactant having the structure (I): &#8195;wherein:R1, R2, R3, R4 and R5 are selected from the group consisting of hydrogen, alkyl, aryl, aralkyl and halogen, and at least two of R1, R2, R3, R4 and RS are selected from the group consisting of aralkyl and aryl, R6 is selected from the group consisting of ethylene, propylene, and butylene, R7 is selected from the group consisting of hydrogen, acetyl, alkyl, and aryl, and n is an integer ranging from 6 to 23.
Chi Mei Optoelectronics Corporation Chi Mei Corporation
G
G03F
inventional
Bo-Hsuan Yuan-Pin Chih-Neng Pei-Hua Chun-Hsien
Lin Lee Chang Sheng Li