Rabin & Berdo, PC
Highly sensitive defect detection method
A highly sensitive defect detection method is disclosed. A medium with a refractive index greater than 1 is formed on a sample. As a result, incident light projected by a defect detecting system attenuates less when reaching the bottom defects. The detection sensitivity of the defect detecting system is enhanced accordingly.
Promos Technologies Inc.
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inventional additional inventional
Ferris Chung-I
Liu Chang