Birch, Stewart, Kolasch & Birch, LLP
Method and apparatus for generating periodic patterns by step-and-align interference lithography
The present invention provides a method and an apparatus for generating periodic patterns by step-and-align interference lithography, wherein at least two coherent light beams with a pattern are controlled to project onto a substrate to be exposed to form an interference-patterned region on the substrate. Thereafter, by means of moving the substrate or the light beams stepwisely, a patterned region with a large area can be formed on the substrate. According to the present invention, the optical path and exposure time may be shortened to reduce defect formation during lithographic processing and to improve the yield.
Industrial Technology Research Institute
G
G03F
inventional
Jer-Haur Yung-Pin Shuo-Hung Lon Chih-Sheng
Chang Chen Chang Wang Jao