Lowe Hauptman & Ham, LLP
Method of and apparatus for active energy assist baking
An Active Energy Assist (AEA) baking chamber includes an AEA light source assembly and a heater pedestal. The AEA baking chamber further includes a controller for controlling a power input to the AEA light source assembly and a power input to the heater pedestal. A method of forming interconnects on a substrate includes etching a substrate and wet cleaning the etched substrate. The method further includes active energy assist (AEA) baking the substrate after the wet-cleaning. The AEA baking includes placing the substrate on a heater pedestal in an AEA chamber, exposing the substrate to light having a wavelength equal to or greater than 400 nm, wherein said light is emitted by a light source and controlling the light source and the heater pedestal using a controller.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chia Cheng Chung-Chi Keng-Chu Shwang-Ming Mei-Ling Joung-Wei
Chou Ko Lin Jeng Chen Liou