Zilka-Kotab, PC
Method for manufacturing a magnetoresistive sensor having a flat shield
A method for manufacturing a magnetoresistive sensor that results in the sensor having a very flat top magnetic shield. The process involves depositing a plurality of sensor layers and then depositing a thin high density carbon CMP stop layer over the sensor layers and forming a mask over the CMP stop layer. An ion milling is performed to define the sensor. Then a thin insulating layer and magnetic hard bias layer are deposited. A chemical mechanical polishing is performed to remove the mask and a reactive ion etching is performed to remove the remaining carbon CMP stop layer. Because the CMP stop layer is very dense and hard, it can be made very thin. This means that when it is removed by reactive ion etching, there is very little notching over the sensor, thereby allowing the upper shield to be very thin.
Hitachi Global Storage Technologies Netherlands B.V.
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Ning Quang Thomas L. Hicham M. Shin Jui-Lung Chang-Man
Shi Le Leong Sougrati Funada Li Park