Young & Thompson
Method of and apparatus for conducting analysis of buried oxides
 A beam of light is projected through an electrolyte to a SOI substrate to scan the surface of the SOI substrate. When the light passes through a pinhole in a buried oxide layer, the light excites a semiconductor layer beneath the buried oxides. An ammeter measures electric charges derived by this light excitation to indicate the presence of pinholes in the buried oxide. 
NEC Corporation
H H
H01L H01L
inventional inventional
Hiroaki
Kikuchi