Choate, Hall & Stewart
Semiconductor device having a test pattern same as conductive pattern to be tested and method for testing semiconductor device for short-circuit
A semiconductor random access memory device has stacked capacitor electrodes and test conductive pieces laid on the same pattern as the stacked capacitor electrodes, and the test conductive pieces are alternately isolated from and connected to a ground line, wherein the test conductive pieces are scanned with an electron beam to see whether or not any one of the conductive pieces generates secondary electrons different in intensity from those radiated from the other conductive pieces for detecting a short-circuit, whereby an analyst investigates the stacked capacitor electrodes for a possible short-circuit.
NEC Corporation
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Hiroaki
Kikuchi