Crowell & Moring LLP
Curved grating, method for manufacturing the same, and optical device
A technique is provided which enables preparation of a curved grating having a desired curvature, by plastically deforming, along a curved substrate, a flat grating prepared by a semiconductor process on a silicon substrate, and which thus prepares a diffraction grating with high accuracy. A silicon flat grating prepared by a semiconductor process is transferred to an amorphous material, and the amorphous material substrate is curved and mounted on a curved fixed substrate, thus providing a curved grating having a crystalline material in which the generation of a dislocation line is restrained.
Hitachi High-Technologies Corporation
B G G G G G B G B
B29C G01N G02B G02B G02B G02B B29C G02B B29C
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Shigeru Takanori Tetsuya Yoshisada
Matsui Aono Watanabe Ebata