Birch, Stewart, Kolasch & Birch, LLP.
Treatment of synthetic quartz glass substrate
A synthetic quartz glass substrate having a resist film coated thereon is treated by immersing it in a terpene-containing solvent until the resist film is released, and rinsing the substrate with water.
Shin-Etsu Chemical Co., Ltd.
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G03F Y10T B32B G03F G03F H01L G03F
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Harunobu Ryouhei Masaki
Matsui Hasegawa Takeuchi