Anderson Kill & Olick
Volatile magnesium alkylaluminum alkoxide and deposition of magnesium aluminate film using same
 Novel magnesium dialkylaluminum alkoxide derivative represented by Mg[(.mu.--OR').sub.2 AlR.sub.2 ].sub.2 wherein R and R' are each a C.sub.1-5 alkyl group and R is not the same as R', preferably magnesium dimethylaluminum isopropoxide, is easily prepared by reacting a trialkylaluminum with an alcohol or an aluminum trialkoxide to obtain a dialkylaluminum alkoxide; reacting the dialkylaluminium alkoxide with an alkali metal alkoxide to obtain an alkali metal dialkylaluminum alkoxide; and reacting the alkali metal dialkylaluminum alkoxide with a magnesium halide. The alkoxide derivative of the present invention can be vaporized at a low temperature, below 70.degree. C. and, therefore, effectively employed in the CVD process of a magnesium aluminate film. 
Korea Research Institute of Technology
C C
C07F C23C
inventional inventional
Su-Jin Won-Yong Yun-Soo
Ku Koh Kim