Hauptman Ham, LLP
MEMS scanner
The present invention relates to a micro electro mechanical systems (MEMS) scanner, and more particularly, to an MEMS scanner for implementing stable driving while increasing a driving angle between a fixed electrode and a driving electrode using an MEMS process. The MEMs scanner comprises a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion.
KOREA OPTRON CORP.
G G B H B G H B B H G
G02B G03B B81B H04N B81C G02B H02N B81B B81B H02N G02B
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Junil Jonghyun Seunghwan Kyungsu
Kim Lee Moon Kim