Schwabe, Williamson & Wyatt, P.C.
Light-absorbing mask for hybrid laser scribing and plasma etch wafer singulation process
Light-absorbing masks and methods of dicing semiconductor wafers are described. In an example, a method of dicing a semiconductor wafer including a plurality of integrated circuits involves forming a mask above the semiconductor wafer. The mask includes a water-soluble matrix based on a solid component and water, and a light-absorber species throughout the water-soluble matrix. The mask and a portion of the semiconductor wafer are patterned with a laser scribing process to provide a patterned mask with gaps and corresponding trenches in the semiconductor wafer in regions between the integrated circuits. The semiconductor wafer is plasma etched through the gaps in the patterned mask to extend the trenches and to singulate the integrated circuits. The patterned mask protects the integrated circuits during the plasma etching.
Applied Materials, Inc.
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Ajay Wenguang Brad Alexander N. James S. Prabhat Wei-Sheng
Kumar Li Eaton Lerner Papanu Kumar Lei