Slater & Matsil, L.L.P.
Wafer alignment system and method
A system and method for mitigating annealing fingerprints in semiconductor wafers is provided. An embodiment comprises aligning the semiconductor wafers prior to each annealing step. This alignment generates similar or identical fingerprints in each of the semiconductor wafers manufactured. With the fingerprint known, a single compensation model for a subsequent photoresist may be utilized to compensate for the fingerprint in each of the semiconductor wafers.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chung-Chun Sen-Hong Shiang-Bau Pu-Fang
Ho Syue Wang Chen