Myers Bigel Sibley & Sajovec, PA
Preparation process of chemically amplified resist composition
Provided are a preparation method of a resist composition which enables stabilization of a dissolution performance of a resist film obtained from the resist composition thus prepared; and a resist composition obtained by the preparation process and showing small lot-to-lot variations in degradation over time. The process of the present invention is for preparing a chemically amplified resist composition containing a binder, an acid generator, a nitrogenous basic substance and a solvent and it has steps of selecting, as the solvent, a solvent having a peroxide content not greater than an acceptable level, and mixing constituent materials of the resist composition in the selected solvent.
Shin-Etsu Chemical Co., Ltd.
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inventional inventional inventional
Osamu Satoshi Ryuji Tamotsu Keiichi Takanobu
Watanabe Watanabe Koitabashi Watanabe Masunaga Takeda