McDermott Will & Emery LLP
Chip structure
A semiconductor chip includes first, second and third metal interconnects and an insulating layer over a semiconductor substrate. First, second and third openings in the insulating layer are over first, second and third contact points of the first, second and third metal interconnects, respectively. A fourth metal interconnect over the insulating layer connects the first and second contact points. The fourth metal interconnect includes a first metal layer and a second metal layer. The first metal layer is under but not at a sidewall of the second metal layer. The semiconductor chip includes a metal bump connected to the third contact point through the third opening, and a dielectric layer over the fourth metal interconnect and the insulating layer. No opening is in the dielectric layer on the fourth metal interconnect, and the metal bump has a top higher than a top surface of the dielectric layer.
Megica Corporation
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Mou-Shiung Chiu-Ming Hsin-Jung Chien-Kang
Lin Chou Lo Chou