Darby & Darby
Reticle-masking objective with aspherical lenses
A reticle-masking (REMA) objective for imaging an object plane onto an image plane has a condenser portion, an intermediate portion, and a field lens portion. The three portions together have no more than 10 lenses with a combined total of no more than five aspheric lens surfaces. Each of the three portions of the REMA objective has one or two aspheric lens surfaces.
Carl Zeiss SMT AG
G G G G G
G02B G02B G03F G03F G03F
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Alexander Alexander Jurgen Karl-Heinz Johannes Jorg
Epple Sohmer Grunwald, deceased Schuster Wangler Schultz