Sughrue, Mion, Zinn Macpeak & Seas
Scanning pattern drawing apparatus
 A scanning pattern drawing apparatus which scans the surface of a workpiece with a light beam so that a pattern is described on the workpiece with the issued light beam being controlled on the basis of pattern drawing data stored in a pattern memory, wherein the pattern drawing apparatus is able to read many pieces of data in a short period of time even if the frequency of the timing pulses is reduced and which therefore is capable of drawing a precise pattern on a workpiece. A scanning pulse generator produces as scanning pulse in response to a predetermined amount of scanning with the light beam. The scanning pulse is converted to a plurality of resulting timing pulses, and successive parallel outputs of the timing pulses are produced after delaying by a predetermined time. The pattern drawing data is read from the pattern memory in response to the delayed timing pulses. 
Asahi Kogaku Kogyo K.K.
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Yasushi Yuji Masatoshi Akira Jun Takashi Toshitaka Tamihiro Hideyuki Akira Mitsuo Hiroaki Satoru Hidetaka Michio
Ikeda Matsui Iwama Morimoto Nonoka Okuyama Yoshimura Miyoshi Morita Ohwaki Kakimoto Andon Tachihara Yamaguchi Ohshima