Lex IP Meister, PLLC
MEMS microphone with dual-back plate and method of manufacturing the same
Disclosed herein are a microelectromechanical systems (MEMS) microphone with a dual-back plate, and a method of manufacturing the same. The MEMS microphone according to an exemplary embodiment of the present invention includes: a substrate having a first back plate formed at a central portion thereof; a membrane plate disposed on first support parts formed at both sides on the substrate and vibrated depending on external sound pressure; and a second back plate disposed on second support parts formed at both sides of the membrane plate.
KOREA INSTITUTE OF MACHINERY & MATERIALS
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Jun Hyuk Young Hwa Young Do Shin Chang-Hyeon
Kwak Lee Jung Hur Ji