Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
Semiconductor memory including forming beams connecting the capacitors
A semiconductor memory incorporates cylinder-type stacked capacitors. Each capacitor has a lower electrode and an upper electrode facing each other via a dielectric film. The lower electrode of each capacitor is supported by a beam-like insulator at a side portion of the electrode, the side portion being apart from a lower edge of the lower electrode.
Kabushiki Kaisha Toshiba
H H H
H01L H01L H01L
inventional additional inventional
Hitoshi Eiji
Ito Ito