Maschoff Brennan
Photonic device and fabrication method thereof
A method for fabricating a photonic device is provided. The method includes forming an optical coupler and a waveguide structure connected to the optical coupler over a semiconductor substrate; forming a metal-dielectric stack over the optical coupler and the waveguide structure; etching a hole in the metal-dielectric stack and vertically overlapping the optical coupler; and forming a protection layer on a sidewall and a bottom of the hole.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Chien-Chang Chen-Hao Chien-Ying Yueh-Ying Chia-Ping Sui-Ying
Lee Huang Wu Lee Lai Hsu