Kinney & Lange, P.A.
Developing method and developing device
A developing device includes a spraying assembly and a concentration regulating assembly. A developing method usable in the developing device includes: spraying developing agents by a spraying assembly onto respective developing regions on a substrate to be developed; and spraying a regulating liquid by a concentration regulating assembly onto a target developing region on the substrate to be developed to change concentration of the developing agents.
BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. BOE TECHNOLOGY GROUP CO., LTD.
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G03F H01L B05B B05B G03G G03F
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Wei Xiaoxiang Huishuang Zengbiao Liping Mingxuan
Li Zhang Liu Sun Luo Liu