Smith, Gambrell & Russell, LLP
Heat treatment apparatus and controller for heat treatment apparatus and control method for heat treatment apparatus
Temperature control is made without the risk of contaminating object-to-be-processed and with high accuracy. Temperatures are metered out of contact with the objects-to-be-processed, and based on a metered result, estimated temperatures of the objects-to-be-processed are computed. Furthermore, estimation errors of the estimated temperatures are computed to correct the estimated temperatures. Based on a temperature recipe stating relationships between set temperatures and times and the corrected estimated temperatures, a heater is controlled.
Tokyo Electron Limited
C G F C G H H
C30B G05D F27D C30B G05D H05B H01L
inventional inventional additional inventional inventional inventional additional
Youngchul Fujio Koichi Wenling
Park Suzuki Sakamoto Wang