Magnetic tunnel junction device and fabrication
A magnetic tunnel junction (MTJ) device and fabrication method is disclosed. In a particular embodiment, a method is disclosed that includes forming a magnetic tunnel junction structure above a bottom electrode. The method also includes forming a diffusion barrier layer above and adjacent to the magnetic tunnel junction structure. The method further includes etching back the diffusion barrier layer, removing the diffusion barrier layer above the magnetic tunnel junction structure. The method also includes connecting a top of the magnetic tunnel junction structure to a conductive layer.
QUALCOMM Incorporated
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Xiaochun Seung H. Xia
Zhu Kang Li