Muncy, Geissler, Olds & Lowe, P.C.
Levellable mask repository device
A levellable reticle library assembly includes a reticle library assembly (4), a pivot assembly (3) and a frame assembly (2). The reticle library assembly (4) is disposed on the frame assembly (2) so that it is able to be leveled by the pivot assembly (3) via the frame assembly (2), and the reticle library assembly (4) can also be leveled by the frame assembly (2).
Shanghai Micro Electronics Equipment (Group) Co., Ltd.
G G
G03F G03F
inventional inventional
Huaiyang Yongwei
Chen Fan