Duane Morris LLP
Spacer fabrication process for manufacturing reflective stealth mirrors and other MEMS devices
A method for use in manufacturing a microelectromechanical system, such as a reflective stealth mirror includes the steps of: forming an I-shape mirror structure; forming a spacer layer over the I-shape mirror structure; and patterning the spacer layer to form at least one spacer along a side of the I-shape mirror structure.
Taiwan Semiconductor Manufacturing Co., Ltd.
G
G02B
inventional
Fei-Yun Wei-Ya Shan-Hua Hung-Hsin Sheng-Liang
Chen Wang Wu Liu Pan