Patterson + Sheridan, LLP
Light-emitting device and manufacturing method thereof
An LED manufacturing method includes steps of: providing a substrate including a first surface; forming a first portion of a first semiconductor layer on the first surface in a first atmosphere including a first carrier gas; and forming a second portion of the first semiconductor layer on the first portion in a second atmosphere including a second carrier gas; wherein a plurality of first cavities is formed on a surface of the first portion during forming the first portion; and wherein the plurality of first cavities is transformed to a plurality of second cavities during forming the second portion, and one of the second cavities includes a first inclined surface and a second inclined surface above the first inclined surface.
EPISTAR CORPORATION
H H
H01L H01L
inventional inventional
Hung Chih Yi Lin Chi Hung Chi Ling Chen Wei Han
Yang Guo Wu Lee Ou Wang