Westman, Champlin & Koehler, P.A.
Support stage
A support stage comprises a body; at least one pin hole disposed in the body; a lift pin which is received in the pin hole and movable upwards or downwards; at least one groove disposed on a hole wall of the pin hole; and balls which are accommodated in the groove and capable of freely rolling in the groove, wherein the groove is disposed around the lift pin, and is shaped and sized such that each ball is capable of rolling in the groove and a part of each ball projects beyond the hole wall of the pin hole even when the each ball is pressed by the lift pin. With the support stage according to the embodiment of the present invention, the balls are disposed in the groove of the pin hole. In this way, generation of the particles can be alleviated.
Beijing BOE Display Technology Co., Ltd. BOE Technology Group Co., Ltd.
G G H
G03F G02F H01L
inventional inventional inventional
Zhenyong Peng Xinghuo Guo Yajun Tao
Ding Wang Li Chen Han Wang