SEED IP Law Group PLLC
Method of fabricating silver inductor
The present invention relates to a method of fabricating an inductor capable of improving a quality factor and decreasing a series resistance by using as a material of the inductor silver smaller in a specific resistance than aluminum used conventionally. The method of fabricating an inductor according to the present invention includes the following steps. A first step is of forming a first metal layer on a first insulating layer, patterning said first metal layer, and forming a second insulating layer on the resultant structure. A second step is of patterning said second insulating layer to form a via hole and forming a plug in said via hole. A third step is of forming a third insulating layer on the resultant structure and patterning said third insulating layer to form a spiral groove. A fourth step is of forming a second metal layer in said spiral groove to form an inductor. And a fifth step is of forming a fourth insulating layer for protecting said inductor from a mechanical force or materials causing a chemical reaction.
Electronics and Telecommunications Research Institute
Y Y H H
Y10T Y10T H01F H01F
additional additional inventional inventional
Seung-Yun Jin-Yeong
Lee Kang