Jones Day
Method and manufacturing system
A method for transporting a group of semiconductor wafers and a manufacturing system are provided. A semiconductor processing facility is provided. The semiconductor processing facility includes a first destination, a second destination, and a transport system configured to transport a group of semiconductor wafers from the first destination to the second destination. Real time information is collected, where the real time information includes information on a current process executing in the semiconductor processing facility and information on a transfer time. The information on the transfer time includes data that indicates an amount of time required to transport the group of semiconductor wafers from the first destination to the second destination. A request is issued to the transport system to effect the transportation of the group of semiconductor wafers from the first destination to the second destination. A timing of the request is based on the first and second data.
Taiwan Semiconductor Manufacturing Company Limited
G G G G G Y
G05B G05B G05B G05B G05B Y02P
additional additional inventional inventional additional additional
Yuh-Dean Wei-Pin Wen-Chi Wei-Cheng Bing-Yuan
Tsai Huang Chien Wang Cheng