Oblon, Spivak, McClelland, Maier & Neustadt
Heat treating apparatus
 A heat treating apparatus comprises a reaction tube for receiving a plurality of articles to be treated and a heating unit surrounding at least part of the reaction tube. The reaction tube comprises a first structural section, at least part of which is surrounded by the heating unit and a second structural section, at least part of which extends from the heating unit. The first structural section is made of material having thermal resistivity and thermal conductivity higher than the second structural section. 
Tokyo Electron Sagami Limited Kabushiki Kaisha Toshiba
F C F C C C C
F27D C23C F27B C23C C30B C23C C23C
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Naohiko Akihito Masaharu Shingo Noriyoshi
Yasuhisa Yamamoto Abe Watanabe Mashimo