Lewis Roca Rothgerber Christie LLP
System of controlling diameter of single crystal ingot and single crystal ingot growing apparatus including the same
Provides are a system of controlling a diameter of a single crystal ingot and a single crystal ingot growing apparatus including the same. The system of controlling a diameter of a single crystal ingot includes: a diameter measuring sensor measuring a diameter of a single crystal ingot; a Low-Pass Filter (LPF) removing short period noise from measured data from the diameter measuring sensor; and an Automatic Diameter Control (ADC) sensor controlling the diameter of the single crystal ingot through controlling of a pull speed by using data having the noise removed as current data.
LG Siltron Inc.
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Y10T C30B Y10T C30B C30B Y10T Y10T
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Se-Geun Yo-Han Young-Ho
Ha Jung Hong