Anova Law Group, PLLC
Semiconductor structure and fabrication method thereof
A fabrication method for a semiconductor structure is provided. The method includes: forming a base substrate; forming gate structures on the base substrate where each gate structure includes a first gate portion with first doping ions on the base substrate and a second gate portion on the first gate portion; forming a metal layer on the second gate portions; and forming a metal silicide layer by reacting a portion of the metal layer with each second gate portion through an annealing process. When forming the metal silicide layers, a reaction between the metal layer and the second gate portions has a first reacting rate and a reaction between the metal layer and the first gate portions has a second reacting rate; and the second reacting rate is smaller than the first reacting rate.
Semiconductor Manufacturing International (Beijing) Corporation Semiconductor Manufacturing International (Shanghai) Corporation
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Liang Xiao Yan Xiao Bo Chao Feng
Chen Zhong Li Zhou