Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Substrate processing method, computer storage medium and substrate processing system
In the present invention, when dense and sparse resist patterns are formed above a substrate, respective resist pattern dimensions are measured, and a correction value for a first processing unit is calculated based on the dimension measurement result of the dense resist pattern and a correction value for a second processing unit is calculated based on the dimension measurement result of the sparse resist pattern. Based on these calculation results, processing conditions in the first processing unit and the second processing unit are changed, and thereafter processing in these processing units are implemented under these changed conditions.
Tokyo Electron Limited
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Takahisa
Otsuka