Bacon & Thomas
Alicyclic compound
An alicyclic compound of the formula (1) is disclosed: wherein R1 and R2 each independently is a hydroxyl group, a C1-8 hydroxyalkyl group, or a C3-8 hydroxycycloalkyl group; R3, R4 and R5 each independently is a hydrogen, a C1-8 hydroxyalkyl group, a C1-6 carboxylic acid or a C3-8 carboxylic acid ester; k is an integer of 0, 1, 2, 3, 4, 5 or 6. The compound of the formula (1) can be applied to dissolution inhibitors for preparing positive photoresist composition.
Everlight USA, Inc.
C C G C C C C G G G
C08F C07C G03F C07C C08F C07C C07C G03F G03F G03F
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Shang-Wern Shang-Ho Yen-Cheng Wen-Chieh
Chang Lin Li Wang