Womble Bond Dickinson (US) LLP
Plasma confinement apparatus, and method for confining a plasma
A plasma confinement apparatus, and method for confining a plasma are described and which includes, in one form of the invention, a plurality of electrically insulated components which are disposed in predetermined spaced relation, one relative to the others, and surrounding a processing region of a plasma processing apparatus, and wherein a plurality of passageways are defined between the respective insulated components; and at least one electrically conductive and grounded component forms an electrical field shielding for the processing region.
ADVANCED MICRO-FABRICATION EQUIPMENT, INC. CHINA
H H H C C
H01J H05H H01J C23C C23C
inventional inventional inventional inventional inventional
Ye Tuqiang Jinyuan Yuehong Qing Zhaoyang Xusheng
Wang Ni Chen Fu Qian Xu Zhou