Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Plasma processing method
A plasma processing method includes a step of preparing a process subject having an organic layer on a surface thereof, and a step of irradiating the process subject with H2 plasma to improve plasma resistance of the organic layer.
Tokyo Electron Limited
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Takashi Kiwamu Akiteru Hiroharu Tomoyo Takashi Akinori Kazuya Masanobu
Fuse Fujimoto Koh Ito Yamaguchi Enomoto Kitamura Nagaseki Honda