J.C. Patents
Plasma excitation module
A plasma excitation module including a chamber, a plurality of coils and a multi-duct gas intake system is provided. The chamber has a dielectric layer. The coils are disposed at an outer side of the dielectric layer, and the coils are separated from each other by an interval and in parallel connection. The multi-duct gas intake system surrounds the dielectric layer and is communicated with the chamber.
Industrial Technology Research Institute
H H H
H01J H05H H01J
inventional inventional additional
Ming-Hsien Chun-Hao Tung-Ying Hui-Ta
Ko Chang Lin Chen