Oliff PLC
Magnetic head including spin torque oscillator and manufacturing method for the same
A manufacturing method for a magnetic head includes the steps of: forming a main pole; forming a spin torque oscillator; and forming a trailing shield. The step of forming the spin torque oscillator includes: a step of forming a layered film; a step of forming an interposition layer; a step of forming a mask; a first etching step of etching a portion of the interposition layer using the mask; a second etching step of etching a portion of the layered film using the mask and the interposition layer as an etching mask; a step of removing the interposition layer and the mask; and a patterning step of patterning the layered film into the spin torque oscillator.
HEADWAY TECHNOLOGIES, INC.
G G C G
G11B G11B C23F G11B
inventional additional additional inventional
Atsushi Kazuki Yoji Hiroyuki Yoshitaka Hironori Tetsuya Shigeki
Yamaguchi Sato Nomura Ito Sasaki Araki Roppongi Tanemura