Rankin, Hill & Clark LLP
Probe guide plate having a silicon oxide layer formed on surfaces and on an inner wall of a through hole thereof, and a protective insulating layer formed on the silicon oxide layer, and probe apparatus including the probe guide plate
A probe guide plate includes: a silicon substrate including one surface and the other surface opposite to the one surface; a through hole formed through the silicon substrate to extend from the one surface of the silicon substrate to the other surface of the silicon substrate; a silicon oxide layer formed on the one surface of the silicon substrate, the other surface of the silicon substrate, and an inner wall surface of the through hole; and a protective insulating layer formed on the silicon oxide layer. The protective insulating layer is formed on at least one of the one surface and the other surface of the silicon substrate via the silicon oxide layer, and partially formed on the inner wall surface of the through hole via the silicon oxide layer.
SHINKO ELECTRIC INDUSTRIES CO., LTD. JAPAN ELECTRONIC MATERIALS CORPORATION
G G
G01R G01R
inventional inventional
Yuichiro Kosuke Tomoo Chikaomi
Shimizu Fujihara Yamasaki Mori