Fish & Richardson P.C.
Thin film magnetic recording media
A method and apparatus for forming a thin film magnetic recording media, the method comprises generating magnetic nanoclusters from a target of magnetic material, crystallizing the magnetic nanoclusters, and depositing the magnetic nanoclusters onto a substrate to form a thin film of magnetic particles thereon. The magnetic nanoclusters are deposited onto the substrate after crystallized and therefore after the deposition. The apparatus comprises a first chamber, a second chamber connected to the first chamber, and a third chamber connected to the second chamber. The first chamber has a source for generating magnetic nanoclusters. The second chamber is to receive the magnetic nanoclusters and crystallize the magnetic nanocluster. The third chamber is to receive the crystallized magnetic nanoclusters from the second chamber and deposit the crystallized magnetic nanoclusters onto the substrate positioned therein.
Agency for Science, Technology and Research
C C G G G C
C23C C23C G11B G11B G11B C23C
inventional inventional additional inventional inventional inventional
Jian-Ping Jingsheng
Wang Chen