Lerner, David, Littenberg, Krumholz & Mentlik, LLP
Method for producing polymer film
A method for producing a polymer film is disclosed herein. The method is capable of effectively forming a polymer film on a substrate, where the polymer film comprises highly aligned block copolymers without orientation defects, coordination number defects, distance defects, and the like. The method can be applied to production of various patterned substrates.
LG Chem, Ltd.
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Mi Sook Eun Young No Jin Se Jin Jung Keun Je Gwon Sung Soo Hyung Ju
Lee Choi Park Ku Kim Lee Yoon Ryu