Groove structure employed for printing film formation and manufacture method thereof
The present invention provides a groove structure employed for printing film formation, wherein the groove structure is located on a substrate, comprises a dam and a groove formed by the dam surrounding, and the dam comprises at least two layers of branch dam layers, which are stacked up, and material of the branch dam layers is silicon nitride or silicon oxide, and material of a top side branch dam layer is silicon oxide, wherein the inclined circumferential surface of the groove, which is surrounded by the branch dam layer manufactured with silicon oxide and the upper surface of the top side branch dam layer are hydrophobic surfaces, and an inclined circumferential surface of the groove, which is surrounded by the branch dam layer manufactured with silicon nitride, is a hydrophilic surface.
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
Y H H H H H H H H H Y
Y02P H01L H01L H01L H01L H01L H01L H01L H01L H01L Y02E
additional inventional inventional inventional inventional additional inventional inventional inventional additional additional
Xingyu Weijing
Zhou Zeng