Pennie & Edmonds LLP
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
 There is disclosed an exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of the first object onto the second object. 
Nikon Corporation
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inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Hiroshi Hiroshi Masaki Masashi Masato Kinya
Shirasu Chiba Kato Tanaka Kumazawa Kato