Fay Sharpe LLP
Surface micromachining process of MEMS ink jet drop ejectors on glass substrates
Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.
Xerox Corporation
Y B
Y10T B81C
additional inventional
Feixia Joel A. James B. Chingwen Jingkuang
Pan Kubby Boyce Yeh Chen