Antonelli, Terry, Stout & Kraus, LLP
Vacuum treatment system and its stage
 A stage with an electrostatic attracting means is adapted for use in a wafer treatment at a high temperature in a vacuum treatment system. In a vacuum treatment system having a stage provided in a treatment chamber, which electrostatically attracts an object to the stage in a low pressure atmosphere, and treats the object at high temperature by heating the stage, an electrode member of the stage is made of titanium or a titanium alloy and a dielectric film for electrostatic attraction is formed on the electrode member. In order to bond firmly titanium and alumina ceramics, it is desirable to sandwich a nickel alloy (Ni--Al) between the materials. 
Hitachi, Ltd.
H Y H
H01J Y10S H01L
additional additional inventional
Ryouji Hironobu Motohiko Youichi Kazue Takashi Masanori Saburo
Hamasaki Kawahara Yoshigai Itou Takahashi Fujii Kadotani Kanai