Haynes and Boone, LLP
Reticle transportation container
A transportation container is provided with a container body constructed of a top wall, a bottom wall, a rear wall, and two sidewalls forming a front opening for loading or unloading a reticle pod into or out of the container body; a lid for opening and closing the front opening; and a lift plate above the container body configured to connect to a carrier of an overhead hoist transfer (OHT) system.
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
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Yu-Ching Yu-Piao
Lee Fang