Thomas, Kayden, Horstemeyer & Risley
Floating gate with unique profile by means of undercutting for split-gate flash memory device
A split-gate flash memory device has a floating gate with a lateral recess at its bottom sidewall by adding an undercutting step. The split-gate flash memory device has a floating gate with a lateral recess on a substrate, an integrated dielectric layer lining the substrate, the sidewall and the lateral recess of the floating gate; a control gate on the integrated dielectric layer and covering at least part of the floating gate; and a dielectric spacer in the lateral recess between the integrated dielectric layer and the control gate.
Taiwan Semiconductor Manufacturing Co., Ltd.
H H
H01L H01L
inventional inventional
Chia-Shiung Shih-Chang Chi-Wei Chi-Hsin
Tsai Liu Ho Lo