Anderson, Kill & Olick, P.C.
Process for the preparation of aluminum oxide film using dialkylaluminum alkoxide
 An aluminum oxide film is economically and conveniently deposited on a substrate by a process which comprises vaporizing a dialkylaluminum alkoxide compound at a temperature ranging from 0 to 25.degree. C. and contacting the resulting vapor with said substrate heated to a temperature ranging from 300 to 600.degree. C. 
Korea Research Institute of Chemical Technology
C
C23C
inventional
Won-Yong Su-Jin Yun-Soo
Koh Ku Kim