Sughrue Mion, PLLC
MEMS device and fabrication method of the same
A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
Samsung Electro-Mechanics Co., Ltd
G B B B G G
G02B B81B B81B B81B G02B G02B
inventional inventional additional additional inventional inventional
Yong-hwa Seok-mo Hee-moon Jin-woo Jun-o
Park Chang Jeong Cho Kim