Burr & Brown
Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members
A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.
NGK Insulators, Ltd.
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Hirotake Shigenori Yuji Masashi Masaaki Tsuneaki Hiroyuki
Yamada Ito Katsuda Harada Masuda Ohashi Iwasaki