Integrated circuit containing first and second DOEs of standard cell compatible, NCEM-enabled fill cells, with the first DOE including via open configured fill cells, and the second DOE including merged-via configured fill cells
An IC includes first and second designs of experiments (DOEs), each comprised of at least two fill cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The first DOE contains fill cells configured to enable non-contact (NC) detection of via opens, and the second DOE contains fill cells configured to enable NC detection of merged-via opens.
PDF Solutions, Inc.
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Rakesh Larg Markus Conor Indranil Carl Kelvin Christopher Timothy Kimon Andrzej Jeremy John Vyacheslav Sherry Simone Marci Nobuharu Dennis Stephen Jonathan Sheng-Che Hideki Tomasz Marcin Hans
Vallishayee Weiland Rauscher O'Sullivan De Taylor Doong Hess Fiscus Michaels Strojwas Cheng Kibarian Rovner Lee Comensoli Liao Yokoyama Ciplickas Lam Haigh Lin Matsuhashi Brozek Strojwas Eisenmann