Schwartz, Jeffery, Schwaab, Mack, Blumenthal & Evans
Electrostatic chuck
 An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the exposed surfaces of the support body except a portion thereof over which the work is placed. This chuck can not only prevent impure matters from generating from the surfaces of the support body but also prevent damages due to heat. 
Kabushiki Kaisha Tokuda Seisakusho
Y H H
Y10T H01L H01L
additional inventional inventional
Hirosuke Osamu
Ooshio Watanabe