Lerner, David, Littenberg, Krumholz & Mentlik, LLP
Block copolymer
The present application can provide a block copolymer and a use thereof. The block copolymer of the present application can have excellent self-assembly properties or phase separation characteristics and excellent etching selectivity, and various other functions as required can be freely imparted thereto.
LG Chem, Ltd.
H C C C C C C C H C G
H01L C09D C08F C08F C08F C08J C08F C08F H01L C08F G03F
inventional inventional inventional inventional additional inventional additional additional inventional inventional inventional
Je Gwon No Jin Mi Sook Hyung Ju Jung Keun Se Jin Eun Young Sung Soo
Lee Park Lee Ryu Kim Ku Choi Yoon