Lee & Morse, P.C.
Aluminum precursor, method of forming a thin film and method of forming a capacitor using the same
An aluminum compound is represented by following Formula 1. In Formula 1, X is a functional group represented by following Formula 2 or Formula 3.
ADEKA CORPORATION SAMSUNG ELECTRONICS CO., LTD.
H H H H H
H01G H01G H01L H01L H01G
inventional inventional additional additional inventional
Ji-Na Sang-Chul Naoki Jung-Sik Masako Youn-Joung Atsushi
Kang Youn Yamada Choi Hatase Cho Sakurai