Oliff PLC
Method of manufacturing plasmon generator
A method of manufacturing a plasmon generator includes the steps of: forming an initial film made of a metal polycrystal and including a pre-plasmon-generator portion that later becomes the plasmon generator; heating the initial film with heating light so that a plurality of crystal grains constituting the metal polycrystal grow at least in the pre-plasmon-generator portion; stopping the heating of the initial film; and forming the plasmon generator by processing the initial film after the step of stopping the heating. The step of forming the plasmon generator includes the step of providing the pre-plasmon-generator portion with a front end face that generates near-field light.
HEADWAY TECHNOLOGIES, INC.
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inventional inventional additional additional inventional inventional
Hironori Shigeki Yoshitaka Yukinori Hiroyuki Seiichiro
Araki Tanemura Sasaki Ikegawa Ito Tomita