Finch & Maloney PLLC
Techniques for co-integrating transition metal dichalcogenide (TMDC)-based and III-N semiconductor-based transistor devices
Techniques are disclosed for co-integrating transition metal dichalcogenide (TMDC)-based p-channel transistor devices and III-N semiconductor-based n-channel transistor devices. In accordance with some embodiments, a p-channel transistor device configured as described herein may include a layer of TMDC material such as, for example, tungsten diselenide, tungsten disulfide, molybdenum diselenide, or molybdenum disulfide, and an n-channel transistor device configured as described herein may include a layer of III-V material such as, for example, gallium nitride, aluminum nitride, aluminum gallium nitride, and indium aluminum nitride. Transistor structures provided as described herein may be utilized, for instance, in power delivery applications where III-N semiconductor-based n-channel power transistor devices can benefit from being integrated with low-leakage, high-performance p-channel devices providing logic and control circuitry. In some cases, a TMDC-based transistor provided as described herein may exhibit p-channel mobility in excess of bulk Si and thus may exhibit faster performance than traditional Si-based p-channel transistors.
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Sansaptak Marko Han Wui
Dasgupta Radosavljevic Then