Micro-opto-electro-mechanical system (MOEMS)
A MEMS-based adjustable mirror module allows faster, lower cost, and easier alignment of optical fibers in substrates. Movable mirrors formed on the substrate allow adjustment of the light path after the optical fiber is attached, after which the mirrors are affixed in place to prevent misalignment.
Xerox Corporation
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Joel A. Decai Jingkuang
Kubby Sun Chen