Hollingsworth Davis, LLC
Removing aluminum nitride sections
Approaches for substantially removing bulk aluminum nitride (AlN) from one or more layers epitaxially grown on the bulk AlN are discussed. The bulk AlN is exposed to an etchant during an etching process. During the etching process, the thickness of the bulk AlN can be measured and used to control etching.
Palo Alto Research Center Incorporated
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Brent S. Christopher L. Thomas Bowen Noble M.
Krusor Chua Wunderer Cheng Johnson