Fitzpatrick, Cella, Harper & Scinto
Inverter manufacturing method and inverter
To provide an enhancement-depletion (E/D) inverter which can be easily manufactured, in the present invention, a method of manufacturing an inverter which is composed of an oxide semiconductor in which a channel layer includes at least one element selected from In, Ga and Zn formed on a same substrate, the inverter being the E/D inverter having plural thin film transistors, is characterized by comprising the steps of: forming a first transistor and a second transistor, the thicknesses of the channel layers of the first and second transistors being mutually different; and executing heat treatment to at least one of the channel layers of the first and second transistors.
Canon Kabushiki Kaisha
H H
H01L H01L
inventional inventional
Masato Katsumi Masafumi Ryo Hideya
Ofuji Abe Sano Hayashi Kumomi