Sughrue Mion, PLLC
Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus
A liquid-jet head and a manufacturing method thereof are provided. The liquid-jet head includes a channel substrate which has pressure generation chambers formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode, and disposed on one surface of the channel substrate via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric element are covered with an insulating film formed of an inorganic insulating material.
Seiko Epson Corporation
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Masato Tsutomu Masataka Akihito Shiro
Shimada Nishiwaki Yamada Tsuda Yazaki