Scully, Scott, Murphy & Presser
Coaxial probe with cantilever and scanning micro-wave microscope including the same
A coaxial probe includes a coaxial cable including an electrical conductor extending therethrough and projecting therefrom at an end thereof, a planar waveguide on which the electrical conductor projecting from the coaxial cable is mounted, and a sensor electrically connected to the electrical conductor through the planar waveguide. The planar waveguide may be comprised of a substrate, and a strip line formed on the substrate, the strip line being electrically connected at one end to the sensor and at the other end to the electrical conductor. The sensor may be comprised of a cantilever supported at a distal end thereof on the planar waveguide, and a probe mounted on a free end of the cantilever.
NEC Corporation
G B
G01Q B82Y
inventional inventional
Norio Hiroaki Yuichi Noriyuki
Ookubo Kikuchi Naitou Kodama