Vacuum chamber for processing substrate and apparatus including the same
A vacuum chamber for processing a substrate includes: a chamber body; and a chamber lid combined with the chamber body, wherein the chamber lid comprises: a frame having a plurality of openings; and a plurality of plates combined with the plurality of openings.
Jusung Engineering Co., Ltd.
H H Y
H01L H01L Y10T
inventional inventional additional
An-Ki Hyun-Bum
Cha Choi