Hauptman Ham, LLP
Microscope apparatus and method for phase image acquisition
A microscope apparatus includes an electromagnetic wave source configured to generate an illuminating electromagnetic wave, a first beam splitter configured to split the illuminating electromagnetic wave into a first component along a first path and a second component along a second path, a movable reflector module configured to adjust a portion of the second path, and a second beam splitter configured to recombine the first component and the second component. An observing device is configured to receive the recombined first component and second component and the microscope apparatus is configured acquire a phase image from the observing device based on positioning of the movable reflector module and representative of an electric field distribution near an object located along the first path between the first beam splitter and the second beam splitter.
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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G02B G02B G02B
inventional inventional additional
Chih-Shiang Yan-Ying Yu-Po Fu-Sheng
Chou He Tang Chu