Anova Law Group, PLLC
Static random access memory and fabrication method thereof
An SRAM includes a substrate containing a plurality of first substrate regions and a plurality of second substrate regions, a plurality of pull-down transistors formed in the first substrate regions with each pull-down transistor including a first gate structure, and a plurality of pass-gate transistors formed in the second substrate regions with each pass-gate transistor including a second gate structure. A portion of the first substrate region under each first gate structure is doped with first doping ions and a portion of the second substrate region under each second gate structure is doped with second doping ions. Moreover, the concentration of the first doping ions is less than the concentration of the second doping ions, and the work function of the first work function layer in the first gate structures is greater than the work function of the second work function layer in the second gate structures.
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
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Jian Hua Yong Xiao Lei
Ju Li Yang