Brinks Hofer Gilson & Lione
Tunneling magnetic sensing element having free layer containing CoFe alloy
A tunneling magnetic sensing element including an Mg—O insulating barrier which can maintain favorable soft-magnetic properties of a free magnetic layer and can have a high resistance change ratio (ΔR/R) compared to known tunnel magnetic sensing elements is disclosed, and a method of manufacturing such a tunneling magnetic sensing element is also disclosed. An enhance layer (second magnetic layer) composed of Co100-XFeX having a Fe composition ratio X of about 30 to 100 at % is disposed on the Mg—O insulating barrier. With this, the magnetostriction λ of the free magnetic layer can be reduced and the resistance change ratio (ΔR/R) can be increased.
Alps Electric Co., Ltd.
H H G B H H G B H G G B H G
H01F H01L G01R B82Y H01F H01L G01R B82Y H01F G11B G11B B82Y H01F G11B
additional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional inventional
Ryo Naoya Masahiko Masamichi Kazumasa Yosuke
Nakabayashi Hasegawa Ishizone Saito Nishimura Ide