Fitzpatrick, Cella, Harper & Scinto
Element array with a plurality of electromechanical conversion devices
An element array comprises a plurality of elements having a first electrode and a second electrode with a gap therebetween; the first electrode is separated for each of the elements by grooves, an insulating connection substrate is bonded to the first electrode, and wirings are provided from the respective first electrodes through the connection substrate to the side opposite to the first electrodes.
Canon Kabushiki Kaisha
B H B H H H H
B06B H01L B81B H01L H01L H01L H01L
inventional inventional additional additional additional inventional inventional
Chienliu Takahiro Kenji Yasuhiro
Chang Ezaki Tamamori Soeda