Harding, Earley, Follmer & Frailey
Method for producing microcomponents
Micro-components having at least one individual layer are produced according to the method, which have functional layers 3 on the walls of inner structures, for example of flow channels. The micro-components are intended to be suitable for a large number of different applications in chemical reaction technology, for heat exchanging, for mixing substances or for evaporating liquids. In particular, the micro-components are intended to have no problems in respect of leaks in the flow channels. The method has the following method steps: A. producing the at least one individual layer by: a. producing a first metal layer or a metal foil 1; b. forming the inner structures in and/or on the first metal layer or metal foil 1 by suitable etching methods and/or metal deposition methods; and c. forming the functional layers 3 solely on the walls of the inner structures and thereafter B. stacking up and joining the one individual layer to a segment terminating the inner structures, or a plurality of individual layers to one another and to the terminating segment.
Atotech Deutschland GmbH
Y B C B B G B B B B B B B H Y F F
Y02E B01J C40B B81B B01J G03F B32B B81C B01J B01J B81B B81B B01J H01M Y02P F28F F28F
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Heinrich Andreas Konrad
Meyer Thies Cramer