Muncy, Geissler, Olds & Lowe, P.C.
Method for fabricating bulk acoustic wave resonator with mass adjustment structure
A method for fabricating bulk acoustic wave resonator with mass adjustment structure, comprising following steps of: forming a sacrificial structure mesa on a substrate; etching the sacrificial structure mesa such that any two adjacent parts have different heights, a top surface of a highest part of the sacrificial structure mesa is coincident with a mesa top extending plane; forming an insulating layer on the sacrificial structure mesa and the substrate; polishing the insulating layer to form a polished surface; forming a bulk acoustic wave resonance structure including a top electrode, a piezoelectric layer and a bottom electrode on the polished surface; etching the sacrificial structure mesa to form a cavity; the insulating layer between the polished surface and the mesa top extending plane forms a frequency tuning structure, the insulating layer between the mesa top extending plane and the cavity forms a mass adjustment structure.
WIN SEMICONDUCTORS CORP.
H H H H H H H H H H H H
H03H H03H H03H H03H H03H H03H H03H H03H H03H H03H H03H H03H
inventional inventional inventional additional inventional inventional additional inventional inventional additional additional additional
Chun-Ju Kuo-Lung Chia-Ta
Wei Weng Chang