NSIP Law
Wafer and method of manufactruring wafer
The wafer having a retardation distribution measured with a light having a wavelength of 520 nm, wherein an average value of the retardation is 38 nm or less, wherein the wafer comprises a micropipe, and wherein a density of the micropipe is 1.5/cm2 or less, is disclosed.
SENIC INC.
C G H C H H
C30B G01N H01L C30B H01L H01L
inventional inventional inventional inventional inventional inventional
Jung Woo Sang Ki Myung-Ok Kap-Ryeol Jung-Gyu Byung Kyu Jongmin Jong Hwi
Choi Ko Kyun Ku Kim Jang Shim Park