Lex IP Meister, PLLC
Method for manufacturing a molybdenum sputtering target for back electrode of CIGS solar cell
A method for manufacturing a molybdenum sputtering target for a back electrode of a CIGS solar cell is provided to minimize thermal activating reaction by employing an electric discharge plasma sintering process. The method for manufacturing a molybdenum sputtering target for a back electrode of a CIGS solar cell comprises the steps of: charging molybdenum powder in a mold of graphite material, mounting the mold in a chamber of an electric discharge sintering apparatus, making a vacuum in the chamber, forming the molybdenum powder to the final target temperature while maintaining constant pressure on the molybdenum powder, heating the molybdenum powder in a predetermined heating pattern when reaching the final target temperature, maintaining the final target temperature for 1 to 10 minutes, and cooling the inside of the chamber while maintaining a constant pressure.
KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
B B B B Y H B C Y C B H
B22F B22F B22F B22F Y02P H01L B22F C22C Y02E C23C B22F H01L
additional inventional additional additional additional inventional additional inventional additional inventional additional inventional
Hyun Kuk Seung Min Ik Hyun Jun Mo
Park Lee Oh Yang