Miles & Stockbridge P.C.
Measurement and inspection device
The present invention relates to a measurement and inspection device of a scanning-type electron beam system, and provides a technique for achieving a measuring/inspecting process with high precision in accordance with a scanning speed. A secondary electron signal detection system in the present measurement and inspection device is suitably applicable to a scanning control with a plurality of scanning speeds, and the device is provided with a detector 107 for detecting a secondary electron signal (SE) derived from an irradiation onto a sample 110 with an electron beam by a scanning control process, a preamplifier 30 for current-to-voltage converting and pre-amplifying the output, an analog signal processing and amplifying unit 51 to which the output of the preamplifier 30 is inputted to carry out an analog processing and amplifying process thereon as a secondary electron signal detection unit 50, an ADC 52 for analog-to-digital converting the output thereof, and an image processing unit 205 for generating an image for use in measurements or inspections based upon the output. A control unit 210 carries out a switching control of respective units including an LPF (12) inside the analog signal processing and amplifying unit 51, in accordance with a scanning speed or the like.
Hitachi High-Technologies Corporation
H H H H H H H
H01J H01J H01J H01J H01J H01J H01J
additional additional inventional additional inventional additional inventional
Hajime Wen Hiroyuki Makoto
Kawano Li Takahashi Suzuki