Contact type prober automatic alignment
 Automatic alignment methods for a membrane prober are disclosed. Alignment patterns are designed and manufactured on both a membrane prober and a wafer under test. The patterns are properly designed for acquiring a first set of measurement data that provide relative position information when the prober contacts the wafer. A second set of measurement data can be obtained by a controlled move between the prober and the wafer. The relative position including the translation offset and the rotation angle can be computed by the information derived from the two sets of measurement data. The second set of measurement data may also be acquired by having two alignment pattern pairs that are made to contact in a single touch. More accurate alignment can be achieved by using more pairs of alignment patterns. 
Industrial Technology Research Institute
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G01R G01R
inventional additional
Jane Huei-Chen Steven J. R. Hsiu-Tsang Chung-Tao
Chang Yang Lee Chang