Patterson & Sheridan LLP
Waveguide and microwave ion source equipped with the waveguide
A waveguide of the present invention comprises a waveguide main body made of a material selected from a boron nitride or an aluminum oxide, and a thin film made of a titanium nitride to cover an outer peripheral surface of the waveguide main body. The waveguide of the present invention can efficiently guide an electromagnetic wave such as a microwave, and has high physical and chemical durability.
Applied Materials, Inc.
H H H
H01P H01J H01J
inventional inventional additional
Hiroyuki Noriyuki
Ito Sakudo