Alston & Bird LLP
Array substrate and manufacturing method thereof, touch display panel and touch display apparatus
An array substrate, a manufacturing method, a touch display panel, a touch display apparatus are provided. The manufacturing method includes: forming a gate on a substrate; forming a first insulating layer covering the gate; forming an active layer and a sensing resistor; forming a first electrode layer covering the sensing resistor; forming a source and a drain; etching the first doped layer at a part being not overlapped with the source and the drain, reserving the first electrode layer to cover the sensing resistor; forming a second insulating layer covering the source and the drain; etching the second insulating layer at a part being overlapped with the sensing resistor to expose the first electrode layer; forming a second electrode layer, and etching the first/second electrode layer at a part where the first/second electrode layer is overlapped with the sensing resistor to expose the sensing resistor.
SHANGHAI AVIC OPTO ELECTRONICS CO., LTD.
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Zhiqiang Dongliang Jine Feng
Xia Dun Liu Qin