IP Strategy Group, P.C.
Cluster tools for processing substrates using at least a key file
A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.
Lam Research Corporation
G Y
G05B Y02P
inventional additional
Chung-Ho Chin-Chuan Shih-Jeun
Huang Chang Fan