Antonelli, Terry, Stout & Kraus, LLP.
Scanning transmission electron microscope and electron energy loss spectroscopy
The present invention provides a scanning transmission electron microscope which is capable of setting an acceptance angular range of an energy loss spectrometer independent of an acceptance angular range of a scattered electron detector, and makes it unnecessary to change a condition for the energy loss spectrometer with respect to a change in the acceptance angular range of the scattered electron detector. In such a scanning transmission electron microscope equipped with the energy loss spectrometer, a first rotationally symmetric type magnetic lens for setting an acceptance angle of an electron scattered by a specimen is disposed above the scattered electron detector for detecting the electron, a second rotationally symmetric type magnetic lens is disposed between the scattered electron detector and the energy loss spectrometer, the first rotationally symmetric type magnetic lens sets the acceptance angle of the scattered electron, and the second rotationally symmetric type magnetic lens sets an object point of the energy loss spectrometer.
Hitachi High-Technologies Corporation
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Kuniyasu Shunichi
Nakamura Watanabe