Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, GATE-short-configured, and TS-short-configured, NCEM-enabled fill cells
An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one GATE-short-related failure mode, and one TS-short-related failure mode.
PDF Solutions, Inc.
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Andrzej Sherry Nobuharu Hans Hideki Vyacheslav Simone Markus Larg Jeremy Tomasz Jonathan Dennis Indranil Marcin Sheng-Che Marci Stephen Rakesh John Kelvin Christopher Kimon Timothy Carl Conor
Strojwas Lee Yokoyama Eisenmann Matsuhashi Rovner Comensoli Rauscher Weiland Cheng Brozek Haigh Ciplickas De Strojwas Lin Liao Lam Vallishayee Kibarian Doong Hess Michaels Fiscus Taylor O'Sullivan