IPxLaw Group LLP
Capacitive sensing structure with embedded acoustic channels
A MEMS device includes a dual membrane, an electrode, and an interconnecting structure. The dual membrane has a top membrane and a bottom membrane. The bottom membrane is positioned between the top membrane and the electrode and the interconnecting structure defines a spacing between the top membrane and the bottom membrane.
INVENSENSE, INC.
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H04R B81B B81B H04R B81B B81B B81B H01L H01L H01L B81B B81C H04R B81C B81C H01L B81C
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Martin Mei-Lin Xiang
Lim Chan Li