Schwartz, Jeffery, Schwaab, Mack, Blumenthal & Koch
Pressure sensor
 A pressure sensor having a silicon diaphragm whose opposite surfaces are subjected to fluid pressures for measurement. The diaphragm includes a diffused resistor as a pressure-sensitive element on a silicon base, a protective layer composed of a silicon epitaxial layer opposite in conductive type to the resistor and formed on the diffused resistor in order to prevent the resistor from being exposed to a corresponding fluid pressure, and an electrically insulating layer formed on an outer surface of the protective layer. 
Nissan Motor Company, Limited
H G
H01L G01L
inventional inventional
Tamotsu Teruyoshi Masami Takeshi
Tominaga Mihara Takeuchi Oguro