Marshall, Gerstein & Borun LLP
Semiconductor device and method for fabricating the same
Semiconductor devices and methods of manufacture thereof are disclosed that are capable of preventing a short of lower electrodes caused by a leaning or lifting phenomenon while forming the lower electrodes and securing enough capacitance of a capacitor by widening an effective capacitor area. The inventive semiconductor device includes: a plurality of capacitor plugs disposed in an orderly separation distance; and a plurality of lower electrodes used for a capacitor and disposed in an orderly separation distance to be respectively connected with the capacitor plugs.
Hynix Semiconductor Inc.
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inventional additional additional
Dong-Woo Ho-Seok Byung-Jun Il-Young Dong-Sauk Jong-Min Hyung-Bok Hyeong-Soo Jin-Woong
Shin Lee Park Kwon Kim Lee Choi Kim Kim