Harness, Dickey & Pierce, P.L.C.
Micro-heaters and methods of manufacturing the same
A micro-heater according to example embodiments may include a metal line formed on a substrate. A deforming portion may be integrally formed as part of the metal line. A support may be positioned between the metal line and the substrate. The support may secure the metal line to the substrate while spacing the metal line apart from the substrate. When the metal line is expanded or compressed by the heating or cooling that occurs during the operation of the micro-heater, the deforming portion of the metal line may deform so as to help absorb the resulting tensile stress. As a result, the amount of tensile stress experienced by the metal line may be decreased. Accordingly, the possibility of breakage of the metal line may be reduced or prevented.
Samsung Electronics Co., Ltd.
H Y F
H05B Y10T F27D
additional additional inventional
Junhee
Choi