Moser IP Law Group
Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor
A magnetic field generator which provides greater control over the magnetic field is provided. The magnetic field generator has a plurality of overlapping main magnetic coil sections for forming a magnetic field generally parallel to the top surface of the supporting member. In other embodiments, sub-magnetic coil sections are placed symmetrically around the main magnetic coil sections.
Applied Materials, Inc.
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inventional inventional inventional
Keiji Jingbao Roger Alan Bryan Y.
Horioka Liu Lindley Pu