Jones Day
Projection optical system
A projection optical system comprises a plurality of lenses disposed along an optical axis of the projection optical system; wherein the plurality of lenses is dividable into four non-overlapping groups of lenses of positive and negative refractive powers, wherein the following relation is fulfilled:wherein:
Carl Zeiss SMT AG
G G
G03F G02B
inventional inventional
Aurelian Alexander Wilhelm Hans-Juergen
Dodoc Epple Ulrich Rostalski