Oliff PLC
Illumination optical assembly, exposure device, and device manufacturing method
An illumination optical system includes a first spatial light modulator having a plurality of optical elements into which the light from the light source comes, a polarizing member having a first polarizing element into which a first light of a light from the first spatial light modulator comes and a second polarizing element into which a second light of the light from the first spatial light modulator comes, so as to allow the first light traveled via the first polarizing element and the second light traveled via the second polarizing element to have polarizing states different from each other, the first and second lights traveling through positions relative to an optical axis of the illumination optical system different from each other, and a second spatial light modulator having a plurality of optical elements into which the first and second lights from the polarizing member come.
NIKON CORPORATION
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Norio Kinya
Miyake Kato