Haynes and Boone, LLP
Patterning process and photoresist with a photodegradable base
A resist material and methods using the resist material are disclosed herein. An exemplary method includes forming a resist layer over a substrate, wherein the resist layer includes a polymer, a photoacid generator, an electron acceptor, and a photodegradable base; performing an exposure process that exposes portions of the resist layer with radiation, wherein the photodegradable base is depleted in the exposed portions of the resist layer during the exposure process; and performing an developing process on the resist layer.
Taiwan Semiconductor Manufacturing Company, Ltd.
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Chien-Wei Ching-Yu Tsai-Sheng Burn Jeng
Wang Chang Gau Lin