Socal IP Law Group LLP
Surface acoustic wave devices using beryllium conductors
Acoustic wave devices and methods of fabricating acoustic wave devices. A device includes a piezoelectric substrate and a conductor pattern formed on a surface of the piezoelectric substrate. The conductor pattern includes an interdigitated transducer (IDT) of a surface acoustic wave (SAW) resonator. The conductor pattern includes a substantially beryllium layer proximate the surface of the piezoelectric substrate.
Resonant Inc.
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Julius Viktor
Koskela Plesski