Tung & Associates
Apparatus and method for calibrating the position of a cassette indexer
An apparatus and a method for calibrating the position of a cassette indexer in a semiconductor process machine are described. The apparatus is constructed by a base plate, a top plate and at least two support members rigidly attaching the top plate to the base plate in a parallel relationship. On the bottom side of the top plate, is mounted at least two spaced-apart rows of distance sensors each having at least five sensors capable of sensing a distance in the cavity of the calibration apparatus. After a wafer blade is extended into the cavity of the apparatus, a sensor in the front row and a sensor in the back row can be used to sense a front-to-back tilt of the wafer blade, while two adjacent sensors in the same row can be used to sense a side-to-side tilt of the wafer blade. The signals from the distance sensors are then sent to a processor for calculating the front-to-back and side-to-side levelness of the wafer blade such that a levelness of the cassette indexer can be determined and adjusted, if necessary.
Taiwan Semiconductor Manufacturing Co., Ltd
H
H01L
inventional
Hsueh-Chin Chi-Wei Jeng-Ding
Lu Chang Tseng