Knobbe Martens Olson & Bear LLP
Etching processes used in MEMS production
The efficiency of an etching process may be increased in various ways, and the cost of an etching process may be decreased. Unused etchant may be isolated and recirculated during the etching process. Etching byproducts may be collected and removed from the etching system during the etching process. Components of the etchant may be isolated and used to general additional etchant. Either or both of the etchant or the layers being etched may also be optimized for a particular etching process.
QUALCOMM MEMS Technologies, Inc.
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B01D B01D B01D H01L H01L
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Teruo Chok Xiaoming Philip
Sasagawa Ho Yan Floyd