Volentine & Whitt, PLLC
Organic aluminum precursor and method of manufacturing a metal wiring using the same
In a method of manufacturing a metal wiring, an organic aluminum precursor that includes aluminum as a central metal is applied to a substrate. The organic aluminum precursor applied to the substrate is thermally decomposed to form aluminum. The aluminum is deposited on the substrate to form an aluminum wiring having a low resistance. The organic aluminum precursor includes a chemical structure in accordance with one of the chemical formulae:
Samsung Electronics Co., Ltd.
C C C
C07F C23C C07F
inventional inventional inventional
Youn-Joung Jung-Ho Jun-Hyun Kyoo-Chul Jung-Sik Mi-Ae Tae-Sung
Cho Lee Cho Cho Choi Kim Kim