JCIPRNET
Wafer inspection apparatus and method
Wafer inspection apparatuses and methods are described. The wafer inspection apparatus includes an optical module, at least one wafer holder for carrying a plurality of wafers, and a plurality of optical sensors. The optical module is configured to emit a plurality of light beams for simultaneously scanning the plurality of wafers carried by the at least one wafer holder. The plurality of optical sensors is configured to receive the light beams reflected by the plurality of wafers.
Taiwan Semiconductor Manufacturing Company, Ltd.
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G01N G01N G01B G01N G01N H01L G01N
inventional additional inventional additional inventional inventional additional
Chung-Pin
Chou