Scully Scott Murphy and Presser
β-Ga2O3 single-crystal substrate
A β-Ga2O3-based single-crystal substrate includes a β-Ga2O3-based single crystal, and a principal surface being a plane parallel to a b-axis of the β-Ga2O3-based single crystal. A maximum value of Δω on an arbitrary straight line on the principal surface that passes through a center of the principal surface is not more than 0.7264. The Δω is a difference between a maximum value and a minimum value of values obtained by subtracting ωa from ωs at each of measurement positions, where ωs represents an angle defined by an X-ray incident direction and the principal surface at a peak position of an X-ray rocking curve on the straight line and ωa represents an angle on an approximated straight line obtained by using least-squares method to linearly approximate a curve representing a relationship between the ωs and the measurement positions thereof.
TAMURA CORPORATION KOHA CO., LTD.
C C C C
C30B C01G C30B C01P
inventional inventional inventional additional
Shinya Takekazu Masaru Yu Kazuyuki Kimiyoshi
Watanabe Masui Takizawa Yamaoka Iizuka Koshi